Patents for C30B 31 - Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor (2,201)
02/2015
02/04/2015CN104328502A 一种卧式扩散炉的自动送料装置 Automatic feeding device for horizontal diffusion furnace
02/04/2015CN102383112B 热处理装置 Heat treatment device
01/2015
01/28/2015CN104313697A 一种改进的区熔气掺单晶的掺杂气路 An improved gas-doped FZ monocrystalline doping gas line
01/21/2015CN204111929U 新型源瓶 The new source bottle
01/21/2015CN104294367A 一种新型的闭管扩散用尾气管 A new closed tube diffusion exhaust pipe
01/21/2015CN102810599B 一种多晶硅太阳能电池的磷扩散方法 Phosphorus diffusion method polycrystalline silicon solar cells
01/07/2015CN104264229A 一种单晶炉在线掺杂装置 Single crystal furnace line doper
12/2014
12/24/2014CN204039548U 一种减压扩散炉炉口密封装置 A diffusion furnace inlet pressure seal
12/24/2014CN104233472A 在扩散炉内设置碳化硅长托防止石英管变形的方法 In the process of diffusion furnace set carbide long care to prevent deformation of the quartz tube
12/17/2014CN204029781U 用于硅片扩散的石英舟 For silicon diffusion quartz boat
12/17/2014CN204023004U 一种分散式扩散炉进气装置及含有此进气装置的扩散炉 A decentralized diffusion furnace air intake means and the intake device comprising a diffusion furnace
12/17/2014CN104213197A 一种用于pvt法制备半导体单晶材料的原位掺杂方法 A method of in-situ doped monocrystalline semiconductor material pvt prepared for the
12/10/2014CN203999919U 石英炉管压力检测接口 Quartz tube furnace pressure detection interface
09/2014
09/16/2014US8837923 Pulsed processing semiconductor heating methods using combinations of heating sources
09/04/2014US20140246422 Heating Configuration for Use in Thermal Processing Chambers
09/03/2014EP2772565A2 Sapphire property modification through ion implantation
08/2014
08/26/2014US8815708 Method for improving the quality of a SiC crystal
08/21/2014WO2014126551A1 Multi-step ion implantation
08/19/2014US8808560 Method for producing single-crystal diamond movable structure
08/12/2014CA2765901C Diamond material
08/07/2014WO2014104945A3 Neutron doping method and device
07/2014
07/30/2014CN103952766A 一种利用离子注入制备磷酸钛氧钾薄膜的方法 An ion implantation for preparing potassium titanyl phosphate film Methods
07/29/2014CA2765804C Method for making fancy orange coloured single crystal cvd diamond and product obtained
07/23/2014CN103938273A 一种双扩散炉管系统 A dual diffusion furnace tube system
07/23/2014CN102163664B 处理碳化硅衬底改善外延沉积的方法与形成的结构和器件 Improved method for processing a silicon carbide substrate with an epitaxial deposition device forming the structure and
07/09/2014EP2752507A1 Ion implant indicia for cover glass or display component
07/09/2014CN103911152A 一种制备InAs<sub>0.2</sub>Sb<sub>0.8</sub>量子点的方法 A method for preparing InAs <sub> 0.2 </ sub> Sb <sub> 0.8 </ sub> quantum dot method
07/03/2014WO2014101990A1 Liquid doping media for the local doping of silicon wafers
07/03/2014WO2014101989A1 Doping media for the local doping of silicon wafers
07/03/2014WO2014101988A1 Oxide media for gettering impurities from silicon wafers
07/03/2014WO2014101987A1 Printable diffusion barriers for silicon wafers
07/03/2014DE102012224500A1 Diffusion chamber, useful for thermal treatment of substrate of copper indium gallium selenide thin film solar cell, comprises vacuum chamber, and two half-shells arranged within vacuum chamber
07/01/2014US8767789 Mid-IR microchip laser: ZnS:Cr2+ laser with saturable absorber material
06/2014
06/26/2014WO2014096690A1 Process for fabricating a thick crystalline layer
06/26/2014DE102012025429A1 Verfahren zur Dotierung von Halbleitersubstraten sowie dotiertes Halbleitersubstrat Method for doping semiconductor substrates and doped semiconductor substrate
06/25/2014CN103890244A 金刚石传感器、检测器和量子装置 Diamond sensors, detectors, and quantum devices
06/25/2014CN103882518A 一种硼元素均匀分布的多晶硅铸锭工艺 Polycrystalline silicon ingot process for uniform distribution of boron
06/18/2014CN103866394A Plasma immersion ion implantation system
06/18/2014CN103866393A Sealing device for reaction tube of decompressing diffusion furnace
06/18/2014CN102569501B Phosphorous diffusion method for polycrystalline silicon solar battery
06/18/2014CN102420111B Method for improving resistivity uniformity of epitaxial layer, epitaxial wafer and semiconductor device
06/18/2014CN101772597B Nanocrystalline alloys of the Fe3Al(Ru) type and use thereof optionally in nanocrystalline form for making electrodes for sodium chlorate synthesis
06/04/2014EP2737112A1 Diamond semiconductor system and method
05/2014
05/30/2014WO2014080565A1 Soi wafer manufacturing method
05/28/2014CN203613307U 扩散炉的新型气路 New gas line diffusion furnace
05/21/2014CN203602754U 扩散炉用自动泄压瓶 Diffusion furnace with an automatic pressure relief bottle
05/21/2014CN103806105A 一种可提高扩散性能的涂源扩散方法 A source diffusion coating method can improve the performance of diffusion
05/20/2014US8728938 Method for substrate pretreatment to achieve high-quality III-nitride epitaxy
05/20/2014CA2783176C Mid-ir microchip laser: zns:cr2+ laser with saturable absorber material
05/15/2014WO2014071463A1 Template directed formation of metal nanoparticles and uses thereof
05/07/2014CN102544238B 一种多晶硅硅片多重扩散的制造方法 Method of manufacturing a polycrystalline silicon chip multi-proliferation
04/2014
04/30/2014CN103762175A Preparation method for polysilicon thin film with bridged crystal-grain structure
04/30/2014CN102392307B Thermostatic device for solar cell diffusion source phosphorous oxychloride
04/24/2014WO2014061196A1 Soi wafer manufacturing method
04/16/2014CN203546208U Evaporator of ion implanter
04/16/2014CN102487100B Diffusion method used for solar cell
04/09/2014CN203530506U Silicon chip diffusion furnace for solar battery
04/09/2014CN203530505U Diffusion tail gas treatment device for solar battery
04/09/2014CN203530504U Diffusion furnace tube
04/09/2014CN203530503U Silicon chip diffusion furnace for solar battery
04/09/2014CN203530502U Silicon chip diffusion furnace for solar battery
04/09/2014CN103717791A Diamond semiconductor system and method
04/09/2014CN103715116A Semiconductor diffusion machine
04/09/2014CN103710759A Graphical doping method of graphene
04/09/2014CN103710758A Pressure control system and control method for reaction chamber of negative pressure diffusion furnace
04/02/2014CN203513833U Diffusion equipment
04/02/2014CN103696020A Source flow control system for negative-pressure diffusion furnace
04/02/2014CN103696012A Preparation method of high-uniformity high-yield semi-insulation silicon carbide substrate
03/2014
03/12/2014EP2705179A1 Diamond sensors, detectors, and quantum devices
03/12/2014CN103633190A Boron diffusion device and method for crystalline silicon solar cells
03/11/2014US8669496 System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
03/05/2014CN203465015U Thermocouple lifting device
03/05/2014CN103618031A Diffusion technology improving appearance of etched silicon wafer
03/05/2014CN103618019A Crystalline silica solar cell chip diffusion method
02/2014
02/26/2014CN203451647U Flow equalizing plate for crystalline silicon diffusion and crystalline silicon diffusion process furnace thereof
02/26/2014CN103606596A Phosphorus doping silicon wafer, manufacturing method of phosphorus doping silicon wafer, solar cell and manufacturing method of solar cell
02/26/2014CN103603053A Method for preparing crystalline silicon solar cells
02/26/2014CN103603052A Novel gas circuit of diffusion furnace
02/26/2014CN103603051A Diffusion chamber and diffusion method used in process of producing semiconductor
02/19/2014CN103590110A Preparation method of iron doped ZnSe (zinc selenide) laser crystal
02/18/2014CA2461096C Mid-ir microchip laser: zns:cr2+ laser with saturable absorber material
02/05/2014EP2691338A1 Particulate porous carbon material and use thereof in lithium cells
02/05/2014CN103556229A Diffusion furnace tube
02/05/2014CN103556228A Silicon wafer diffusion furnace for solar cell
01/2014
01/29/2014CN103542947A Thermocouple lifting device
01/15/2014CN103510159A Diffusion furnace for solar cell silicon chips
01/03/2014WO2014000108A1 Fabrication and functionalization of a pure non-noble metal catalyst structure showing time stability for large scale applications
01/03/2014CA2877053A1 Fabrication and functionalization of a pure non-noble metal catalyst structure showing time stability for large scale applications
01/01/2014CN103489954A Quartz boat
12/2013
12/25/2013CN103474509A Crystalline silicon solar cell laser diffusion method
12/25/2013CN103469299A Preparation method of gallium oxide-doped membrane and gallium oxide-doped membrane
12/18/2013CN103459312A Particulate porous carbon material and use thereof in lithium cells
12/11/2013CN103436967A Method for optimizing air flow distribution of tubular diffusion furnace of solar cell piece
12/11/2013CN103436966A Method for bonding doped or pure yttrium aluminum garnet crystal and doped yttrium aluminum garnet crystal by molten salt method
12/11/2013CN102383197B Method for processing substrates with process gas
12/05/2013DE102012209278A1 Suszeptor Susceptor
12/04/2013CN103426747A Method for controlling thickness of wafer oxidation layer generated in furnace tube
12/04/2013CN103422164A Method for controlling N-type 4H-SiC homogenous epitaxial doping
11/2013
11/28/2013WO2013176037A1 Process for producing semiconductor device
11/27/2013CN103409803A Flow homogenizing plate used for crystalline silicon diffusion and crystalline silicon diffusion technology furnace comprising same
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