| Patents for C30B 31 - Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor (2,201) |
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| 03/29/1995 | EP0645072A1 High performance horizontal diffusion furnace system |
| 03/28/1995 | US5401686 Method of uniformly diffusing impurities into semiconductor wafers |
| 03/07/1995 | US5395452 Apparatus made of silica for semiconductor device fabrication |
| 03/07/1995 | US5394828 Apparatus for the solidification of a doped electricity conducting material and the continuous checking of its dopant content |
| 03/01/1995 | EP0386121B1 Improved zone melt recrystallization apparatus |
| 02/07/1995 | US5387557 Method for manufacturing semiconductor devices using heat-treatment vertical reactor with temperature zones |
| 02/07/1995 | US5387545 Deoxidizing, doping the surface natural silicon dioxide with hydrogen and impurities gas mixtures |
| 01/31/1995 | US5385762 Damaging the surface by doping a low concentration carbon ion at low temperature, then with dopant atoms, annealing rapidly to diffuse into lattice crystal structure |
| 01/26/1995 | WO1995002897A1 Chemical vapor deposition process for fabricating layered superlattice materials |
| 01/18/1995 | EP0633997A1 A rapid thermal processing apparatus for processing semiconductor wafers |
| 01/10/1995 | US5380595 Carbon cluster film having electrical conductivity and method of preparing the same |
| 12/20/1994 | US5374829 Vacuum chuck |
| 12/06/1994 | US5370371 Heat treatment apparatus |
| 11/08/1994 | US5363400 Physical vapor deposition method |
| 11/02/1994 | EP0622439A1 Quantum sized activator doped semiconductor particles |
| 10/25/1994 | US5359148 Heat-treating apparatus |
| 10/25/1994 | CA1332698C High purity diffusion furnace components |
| 10/04/1994 | US5352293 Tube apparatus for manufacturing semiconductor device |
| 09/27/1994 | US5350461 Semiconductors |
| 09/27/1994 | CA1332142C Implantation and electrical activation of dopants into monocrystalline silicon carbide |
| 09/21/1994 | EP0615954A1 Red diamond, pink diamond and method of producing the same |
| 09/15/1994 | WO1994020991A1 Method and apparatus for doping a solid material |
| 08/31/1994 | EP0612869A1 Waferbasket for silicon wafers |
| 08/04/1994 | WO1994017353A1 A rapid thermal processing apparatus for processing semiconductor wafers |
| 07/26/1994 | US5332442 Surface processing apparatus |
| 07/19/1994 | US5330352 Oxidation/diffusion processing apparatus |
| 07/12/1994 | US5329095 Thermal treatment apparatus utilizing heated lid |
| 06/29/1994 | EP0604096A1 Fused quartz diffusion tubes for semiconductor manufacture |
| 06/29/1994 | EP0603391A1 Vertical heat treatment apparatus and heat insulating material |
| 06/28/1994 | US5324920 Heat treatment apparatus |
| 06/28/1994 | US5324331 Transport system, in particular for transporting silicon monocrystals through the tank of a research reactor |
| 06/22/1994 | CA2110009A1 Fused quartz diffusion tubes for semiconductor manufacture |
| 06/21/1994 | US5323484 Heating apparatus with multilayer insulating structure |
| 06/15/1994 | CN1025070C Component for use in diffusion furnace |
| 06/01/1994 | DE4343606A1 Doping layer diffusion below semiconductor surface - inserting silicon@ crystals into closable container saturated by doping element for gas exchange |
| 05/31/1994 | US5317492 Rapid thermal heating apparatus and method |
| 05/18/1994 | EP0597053A1 Device for heat-treating a magazine for lead frames with electronic components. |
| 05/17/1994 | US5312245 Particulate trap for vertical furnace |
| 05/03/1994 | US5308955 Vertical heat treatment apparatus with vented heat insulation cover means |
| 04/26/1994 | US5306139 Suction adhesion-type holder |
| 03/31/1994 | WO1994004723A3 Furnace and control method therefor |
| 03/30/1994 | EP0423327B1 Apparatus and method for treating flat substrates under reduced pressure |
| 03/29/1994 | US5298106 Method of doping single crystal diamond for electronic devices |
| 03/29/1994 | US5297956 Method and apparatus for heat treating |
| 03/03/1994 | WO1994004723A2 Furnace and control method therefor |
| 03/03/1994 | CA2142829A1 Furnace and control method therefor |
| 02/01/1994 | US5283089 Non-porous diffusion furnace components |
| 01/18/1994 | US5279670 Vertical type diffusion apparatus |
| 01/11/1994 | US5278861 Method of treating metals by deposition of materials and furnace for implementing said method |
| 01/04/1994 | US5275976 Process chamber purge module for semiconductor processing equipment |
| 12/28/1993 | US5273424 Vertical heat treatment apparatus |
| 12/28/1993 | CA1325582C Process for doping crystals of wide band gap semiconductors |
| 12/23/1993 | WO1993026137A1 High performance horizontal diffusion furnace system |
| 12/22/1993 | EP0574935A1 Apparatus made of silica for semiconductor device fabrication |
| 12/09/1993 | WO1993024801A1 Device for heat-treating a magazine for lead frames with electronic components |
| 12/08/1993 | EP0573312A2 Diamond doping |
| 12/01/1993 | EP0571948A1 Donor doped perovskites for thin film dielectrics |
| 11/25/1993 | WO1993023713A1 Vertical heat treatment apparatus and heat insulating material |
| 11/09/1993 | US5259917 Exposing semiconductor crystal to high energy ionizing radiation to produce within crystal energetic photo electrons yielding defect donors to cancel acceptors in crystal |
| 10/26/1993 | US5256060 Reducing gas recirculation in thermal processing furnace |
| 10/12/1993 | US5253324 Conical rapid thermal processing apparatus |
| 10/12/1993 | US5252807 Heated plate rapid thermal processor |
| 07/14/1993 | EP0550859A1 Tube apparatus for manufacturing semiconductor device |
| 07/06/1993 | US5225367 Doping boron nitride and exposure to laser beam in vacuum |
| 06/30/1993 | EP0549449A1 Apparatus for solidifying a doped electrically conducting material and for continuously monitoring its dopant concentration |
| 06/22/1993 | US5221201 Vertical heat treatment apparatus |
| 05/18/1993 | US5210959 Ambient-free processing system |
| 05/11/1993 | US5208961 Semiconductor processing furnace door alignment apparatus and method |
| 05/04/1993 | US5208185 From pytolytic boron nitride, less lattice defects |
| 05/04/1993 | US5207578 Heat processing apparatus of vertical type |
| 04/28/1993 | EP0538874A1 Method and apparatus for manufacturing semiconductor devices |
| 04/28/1993 | EP0538797A1 Carbon cluster film having electrical conductivity and method of preparing the same |
| 04/13/1993 | US5201653 Substrate heat-treating apparatus |
| 04/06/1993 | US5199994 Impurity doping apparatus |
| 02/24/1993 | EP0528405A2 Ambient-free processing system |
| 02/17/1993 | CN1069146A Lamellar ceramic aluminium diffusion sources |
| 02/16/1993 | US5187771 Heat processing apparatus utilizing a plurality of stacked heater holders |
| 01/26/1993 | US5182229 Selenium or sulfur |
| 01/19/1993 | US5180000 Workpiece carrier with suction slot for a disk-shaped workpiece |
| 01/12/1993 | US5179049 Heat treating apparatuses for semiconductors and high purity silicon carbide parts for the apparatuses and a method of making thereof |
| 01/12/1993 | US5178534 Controlled diffusion environment capsule and system |
| 01/12/1993 | US5177878 Apparatus and method for treating flat substrate under reduced pressure in the manufacture of electronic devices |
| 12/29/1992 | US5174825 Uniform gas distributor to a wafer |
| 12/29/1992 | US5174748 Chamber having a hot zone and a cold zone and at least one gas inlet tube |
| 12/29/1992 | US5174745 Impurity diffusing furnace |
| 12/15/1992 | US5171972 Heat treating furnace |
| 12/08/1992 | US5169799 Conversion of polycrystal; cutting into chip or wafer; heating to diffuse impurity |
| 12/08/1992 | US5169684 Wafer supporting jig and a decompressed gas phase growth method using such a jig |
| 12/08/1992 | US5169453 Wafer supporting jig and a decompressed gas phase growth method using such a jig |
| 11/19/1992 | EP0513191A1 Doped crystalline compositions and a method for preparation thereof. |
| 10/20/1992 | US5156820 Reaction chamber with controlled radiant energy heating and distributed reactant flow |
| 10/13/1992 | US5155336 Rapid thermal heating apparatus and method |
| 10/07/1992 | EP0506690A1 Transport system, in particular for transporting silicon monocrystals through the tank of a research reactor. |
| 09/30/1992 | EP0506052A1 Silicon carbide jig |
| 09/30/1992 | EP0506020A1 Czochralski-grown silicon single crystal for neutron transmutation doping |
| 09/23/1992 | EP0504857A2 Process of diffusing boron into semiconductor wafers |
| 09/08/1992 | US5146468 Gas doping of solids by crystal growth |
| 09/02/1992 | CN1018111B Method and apparatus for temp. treatment of semiconductor materials |
| 08/25/1992 | US5141894 Doping to form zone limiting spread of dislocations |
| 07/29/1992 | EP0496220A1 Process and apparatus for producing crystals or a crystal |