| Patents for C30B 31 - Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor (2,201) |
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| 07/29/2009 | EP1268884B1 Method and device for making substrates |
| 07/09/2009 | US20090176181 System and method of improved pressure control in horizontal diffusion furnace scavenger system for controlling silicon oxide growth |
| 07/01/2009 | CN100507073C Receptor system |
| 06/25/2009 | DE102007063017A1 Substrate holder for gas diffusion furnaces, comprises guiding devices such as cross beams for the positioning and guidance of the substrate holder in the interior of the gas diffusion furnace, and substrate recesses |
| 06/17/2009 | EP1668356B1 Method for controlling the treatment of a crystal by means of a liquid |
| 06/16/2009 | US7548571 Mid-IR microchip laser: ZnS:Cr2+ laser with saturable absorber material |
| 06/04/2009 | DE102007058053A1 Diffusion furnace with reaction chamber for treating substrates, comprises first unit for generating a gas flow, and second- and funnel-shaped third unit for influencing the flow, where first and second units are arranged in the chamber |
| 06/03/2009 | CN201250298Y Split-type quartz boat structure |
| 06/03/2009 | CN201250297Y Integral quartz boat structure |
| 05/14/2009 | CA2643861A1 Electrochemical composition having cocrystalline structure and process of preparing same |
| 05/13/2009 | EP2058419A1 Method for separating surface layer or growth layer of diamond |
| 05/13/2009 | EP1405018A4 Wafer boat with arcuate wafer support arms |
| 05/05/2009 | US7527755 Placing lithium tantalate in sealed container in an environment including zinc vapor and heating to a temperature below Curie temperature of lithium tantalate; allows bulk conductivity of ferroelectric material to be increased without substantially degrading its ferroelectric domain properties |
| 04/30/2009 | DE102008052571A1 Diffusion oven useful in semiconductor manufacture and for doping solar cells, comprises reactor enclosed by reaction pipe, outer casing, heating elements, means for locking the pipe, means for locking the casing and vacuum producing means |
| 04/29/2009 | CN100483626C P type doping method for cubic boron nitride thin film |
| 04/28/2009 | US7524745 Method and device for doping, diffusion and oxidation of silicon wafers under reduced pressure |
| 04/16/2009 | US20090098742 System and Process for Heating Semiconductor Wafers by Optimizing Absorption of Electromagnetic Energy |
| 04/15/2009 | EP2048267A1 Process for producing single-crystal substrate with off angle |
| 04/08/2009 | CN100476048C Device for doping metal catalyst for use in low-temperature crystallization of polysilicon and doping method therefor |
| 04/01/2009 | CN100474612C Methods for forming power semiconductor devices using boule-grown silicon carbide drift layers and power semiconductor devices formed thereby |
| 03/25/2009 | CN101392409A Pulsed processing semiconductor heating methods using combinations of heating sources |
| 03/11/2009 | CN201207384Y Block board preventing heat dissipation and diffusion furnace using the board |
| 03/11/2009 | CN100468632C Water-cooling plasma shower |
| 03/11/2009 | CN100468631C Susceptor |
| 03/11/2009 | CN100468606C One-dimensional mechanical scaning device of ion implantation apparatus |
| 03/11/2009 | CN100467988C System and method for controlling movement of a workpiece in a thermal processing system |
| 03/10/2009 | US7501370 Producing devices for semiconductor wafer fabrication; molding powder material, sintering, strong acid washing and oxidation treatment; reducing or eliminating iron, copper, nickel and chromium content |
| 03/05/2009 | WO2009028658A1 Silicon single crystal wafer for igbt, method for manufacturing silicon single crystal wafer for igbt and method for assuring resistivity of silicon single crystal wafer for igbt |
| 03/05/2009 | WO2009026765A1 Method and apparatus for thermal treatment of semiconductor workpieces |
| 03/05/2009 | WO2005080645A3 Diamond structure separation |
| 03/04/2009 | CN100466179C Method for transversely period doping of semiconductor material and the equipment thereof |
| 02/25/2009 | CN201198500Y Diffusion furnace hot top |
| 02/18/2009 | EP1570108B1 Susceptor system |
| 02/18/2009 | CN101368288A P type ZnO thin film production method |
| 02/12/2009 | US20090041648 Radiation detector crystal and method of formation thereof |
| 02/10/2009 | US7488922 Susceptor system |
| 01/28/2009 | CN101353820A Preparation of gallium ion doping zinc oxide crystal whisker with four bears |
| 01/21/2009 | CN101350294A System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy |
| 12/31/2008 | EP1281196A4 Method of doping silicon with phosphorus and growing oxide on silicon in the presence of steam |
| 12/31/2008 | CN101333686A Method for preparing metallic nano-zinc of polyspinal deformity on zinc oxide substrate |
| 12/31/2008 | CN100448327C System and method for lamp split zone control |
| 12/24/2008 | WO2008155438A1 Microspheres of silicon and photonic sponges, method for production and uses thereof in the manufacture of photonic devices |
| 12/24/2008 | CN201169652Y Silicon carbide boat special fixture |
| 12/18/2008 | CA2635245A1 Electrochemical composition and associated technology |
| 12/17/2008 | CN101323983A Novel preparation for synthetic gem chromic coloring |
| 12/17/2008 | CN100444334C Pulsed processing semiconductor heating methods using combinations of heating sources |
| 12/10/2008 | CN101319354A Purification process for single-wall nano-carbon tube film |
| 12/09/2008 | US7462239 Low temperature load and bake |
| 11/27/2008 | DE102007063363A1 Vorrichtung zur Dotierung und Beschichtung von Halbleitermaterial bei niedrigem Druck A device for doping and coating of semiconductor material at low pressure |
| 11/20/2008 | WO2008138148A1 Nanocrystalline alloys of the fe3al(ru) type and use thereof optionally in nanocrystalline form for making electrodes for sodium chlorate synthesis |
| 11/20/2008 | US20080282967 Crystal Growth Method and Apparatus |
| 11/18/2008 | US7453051 System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy |
| 11/18/2008 | US7452423 Diffusion system |
| 10/29/2008 | EP1986217A1 Method for manufacturing semiconductor substrate |
| 10/22/2008 | CN101290877A Preparing method of polycrystalline silicon thin film |
| 10/22/2008 | CN100428413C Ion injection simulation method |
| 10/09/2008 | WO2008121620A1 Method of forming ultra-shallow junctions for semiconductor devices |
| 10/08/2008 | EP1117968A4 Method and apparatus for thermal processing of semiconductor substrates |
| 10/08/2008 | CN101280461A Device for adding doping agent for germanium monocrystal |
| 10/07/2008 | CA2403236C Adhesive composite coating for diamond and diamond-containing materials and method for producing said coating |
| 10/01/2008 | CN101275284A Transition and diffusion method for aluminum impurity source |
| 10/01/2008 | CN101275283A Device for coating diffuse source in diffusion technology |
| 09/23/2008 | CA2419709C Semiconductive polycrystalline diamond |
| 09/18/2008 | DE10343522B4 Verfahren und Speichermedium zur Steuerung der Behandlung eines Kristalls mit einer Flüssigkeit A method and storage medium for controlling the treatment of a crystal with a liquid |
| 09/10/2008 | CN100418246C Doped organic semiconductor materials and process for their preparation |
| 09/03/2008 | CN100415933C System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy |
| 08/20/2008 | CN101248222A Doping of particulate semiconductor materials |
| 08/20/2008 | CN100412489C Wafer boat with arcuate wafer support arms |
| 08/06/2008 | EP1951935A2 Furnace and method for the manufacture of photo-voltaic solar cells using a diffusion process. |
| 08/06/2008 | CN100409402C System and method of fast ambient switching for rapid thermal processing |
| 07/23/2008 | CN101225549A Method for preparing p-type zinc oxide thin film by using n-type zinc oxide |
| 07/17/2008 | US20080171133 Method For the Production of C-Plane Oriented Gan Substrates or AlxGa1-xN Substrates |
| 07/16/2008 | CN101220518A Tail gas collecting device for high temperature diffusion system |
| 07/03/2008 | US20080156255 Apparatus And Process For Crystal Growth |
| 06/25/2008 | CN101208463A Apparatus and method for maintaining a near-atmospheric pressure inside a process chamber |
| 06/18/2008 | EP1933368A2 Rapid conductive cooling using a secondary process plane |
| 06/17/2008 | US7387687 Support system for a treatment apparatus |
| 06/04/2008 | EP1926843A1 Doping of particulate semiconductor materials |
| 05/20/2008 | US7374613 Single crystal material having high density dislocations arranged one-dimensionally in straight line form, functional device using said single crystal material, and method for their preparation |
| 05/14/2008 | CN100388425C Air supply system of shower in water cold plasma |
| 05/07/2008 | CN101174558A P type doping method for cubic boron nitride thin film |
| 05/07/2008 | CN100386847C Wafer holder |
| 05/06/2008 | US7368317 Method of producing an N-type diamond with high electrical conductivity |
| 05/02/2008 | WO2008051413A1 Reverse oxidation post-growth process for tailored gain profile in solid-state devices |
| 04/23/2008 | EP1912894A1 Separation of grown diamond from diamond seeds mosaic |
| 04/23/2008 | CN101165224A Germanium doping silicon wafer with internal purity absorbing function and preparation method thereof |
| 04/17/2008 | WO2008044333A1 Production method of diamond particles having colored cut faces, and production method of diamond particles having pattern-drawn cut faces |
| 04/17/2008 | US20080087984 Compound semiconductor modified surface by use of pulsed electron beam and ion implantation through a deposited metal layer |
| 03/27/2008 | US20080072823 Self aligning non contact shadow ring process kit |
| 03/21/2008 | CA2603693A1 Polycrystalline diamond composites |
| 03/20/2008 | US20080069550 Pulsed Processing Semiconductor Heating Methods using Combinations of Heating Sources |
| 03/20/2008 | DE102006041424A1 Verfahren zur simultanen Dotierung und Oxidation von Halbleitersubstraten und dessen Verwendung A process for the simultaneous doping and oxidation of semiconductor substrates and the use thereof |
| 03/19/2008 | EP1899509A1 Apparatus and method for maintaining a near-atmospheric pressure inside a process chamber |
| 03/11/2008 | US7341929 Method to fabricate patterned strain-relaxed SiGe epitaxial with threading dislocation density control |
| 03/11/2008 | US7341628 Method to reduce crystal defects particularly in group III-nitride layers and substrates |
| 03/05/2008 | CN201031265Y Two regions gas-phase transport synthesizing container |
| 03/05/2008 | CN101136324A Semiconductor manufacturing method and semiconductor laser device manufacturing method |
| 02/28/2008 | US20080050688 System and Process for Heating Semiconductor Wafers by Optimizing Absorption of Electromagnetic Energy |
| 02/27/2008 | CN100372067C Diffusion system |
| 02/20/2008 | EP1888822A1 Mixture for doping semiconductors |