Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302)
06/2008
06/18/2008EP1933368A2 Rapid conductive cooling using a secondary process plane
06/18/2008EP1702357B1 Substrate with determinate thermal expansion coefficient
06/18/2008CN101203939A Diamond medical devices
06/18/2008CN101203633A Device for introducing reaction gases into a reaction chamber and epitaxial reactor which uses said device
06/18/2008CN100395379C Epitaxial growth process of high-crystallinity monocrystal indium nitride film
06/18/2008CN100395378C Preparation method for large-particle monocrystal diamond by DC plasma sedimentation
06/17/2008US7387835 Silicon carbide-coated carbonaceous material and carbonaceous material to be coated with silicon carbide
06/17/2008US7387687 Support system for a treatment apparatus
06/17/2008US7387679 Silicon carbide single crystal and method and apparatus for producing the same
06/17/2008US7387678 GaN substrate and method of fabricating the same, nitride semiconductor device and method of fabricating the same
06/17/2008US7387677 Substrate for epitaxy and method of preparing the same
06/17/2008CA2346308C Simulated diamond gemstones formed of aluminum nitride and aluminum nitride:silicon carbide alloys
06/12/2008WO2008067854A1 Method for manufacturing a single crystal of nitride by epitaxial growth on a substrate preventing growth on the edges of the substrate
06/12/2008US20080138518 Atomic Layer Epitaxy; feed reactants as vapor-phase pulses repeatedly and alternately from a separate source into reaction space; first reactant is zinc, zinc chloride,tetramethyl aluminum; second reactant is water, sulfur, hydrogen sulfide, ammonia; purge with inert gas between vapor depositions
06/12/2008US20080135875 RELAXED LOW-DEFECT SGOI FOR STRAINED Si CMOS APPLICATIONS
06/12/2008US20080135830 Semiconductor structures with structural homogeneity
06/12/2008US20080134976 Apparatus for Forming Thin Film
06/12/2008US20080134959 Diamond semiconductor element and process for producing the same
06/12/2008US20080134957 Powder metallurgy crucible for aluminum nitride crystal growth
06/11/2008EP1930485A1 METHOD FOR PRODUCTION OF GaxIn1-xN (0 x 1) CRYSTAL, GaxIn1-xN (0 x 1) CRYSTAL SUBSTRATE, METHOD FOR PRODUCTION OF GaN CRYSTAL, GaN CRYSTAL SUBSTRATE AND PRODUCT
06/11/2008EP1929064A1 Ultra smooth nanostructured diamond films and compositions and methods for producing same
06/11/2008CN201071403Y Upward-in and upward-out vertically spraying type MOCVD reactor
06/11/2008CN100394550C Coated semiconductor wafer, and process and device for producing the semiconductor wafer
06/11/2008CN100394549C Semiconductor layer
06/11/2008CN100393922C Method of fabricating an epitaxially grown layer
06/10/2008US7385267 Nanosensors
06/10/2008US7384668 CCVD method for producing tubular carbon nanofibers
06/10/2008US7384481 Method of forming a rare-earth dielectric layer
06/05/2008WO2008042590A3 Batch reaction chamber employing separate zones for radiant heating and resistive heating
06/05/2008US20080132044 Nitride Semiconductor Device Manufacturing Method
06/05/2008US20080132040 Deposition Technique for Producing High Quality Compound Semiconductor Materials
06/05/2008US20080128863 Fabrication method of semiconductor device and semiconductor device
06/05/2008US20080127894 Housing assembly for an induction heating device including liner or susceptor coating
06/04/2008CN101194053A Method for producing gaxin1-xn(0<=x<=1=1) crystal, gaxin1-xn(0<=x<=1=1) crystalline substrate, method for producing gan crystal, gan crystalline substrate, and product
06/04/2008CN101192520A Semiconductor device and manufacture method thereof
06/04/2008CN101191252A Method for removing natural oxidizing layer before silicon chip low-temperature epitaxy growth
06/04/2008CN101191251A Method for removing natural oxidizing layer before silicon chip low-temperature epitaxy growth
06/04/2008CN101191250A Method for detecting normal growth of epitaxy single-crystal
06/04/2008CN100392158C Method for preparing nano four-needle-shape zinc oxide crystal whisker
06/03/2008US7381267 Heteroatomic single-crystal layers
06/03/2008US7381266 Sapphire crystal growth method
05/2008
05/30/2008CA2612807A1 Semiconductor device and method of its manufacture
05/29/2008WO2008062269A1 Reactor for growing crystals
05/29/2008US20080124510 Large area, uniformly low dislocation density gan substrate and process for making the same
05/29/2008DE102006057064A1 Application process for epitactic Group III nitride layer involves depositing Group III nitride layer on reconstructed surface of semiconductor
05/29/2008DE102006055038A1 Epitaxierte Halbleiterscheibe sowie Vorrichtung und Verfahren zur Herstellung einer epitaxierten Halbleiterscheibe Epitaxially coated semiconductor wafer, as well as apparatus and method for producing an epitaxially coated semiconductor wafer,
05/28/2008EP1926134A1 Method for manufacturing silicon epitaxial wafers
05/28/2008EP1926133A2 A method for boron contamination reduction in IC fabrication
05/28/2008CN201065431Y Fast discharging cold trap for metal organic chemical gas phase deposition device vacuum system
05/28/2008CN101188195A A making method of multi-hole buffer layer for releasing stress
05/27/2008US7378684 Pendeoepitaxial gallium nitride semiconductor layers on silicon carbide substrates
05/27/2008US7377978 Method for producing silicon epitaxial wafer and silicon epitaxial wafer
05/27/2008US7377977 High-purity crystal growth
05/27/2008US7377976 Method for growing thin oxide films
05/22/2008WO2008059875A1 Process for producing group iii element nitride crystal
05/22/2008US20080118733 Nitride semiconductor ingot, nitride semiconductor substrate fabricated from the same and method for making nitride semiconductor ingot
05/22/2008US20080115719 Reduction of carbon inclusions in sublimation grown SiC single crystals
05/21/2008EP1483782A4 Production method of sic monitor wafer
05/21/2008EP1381718A4 Method and apparatus for growing submicron group iii nitride structures utilizing hvpe techniques
05/21/2008DE10261362B4 Substrat-Halter Substrate holder
05/21/2008CN201063334Y Tool for revising extension base position
05/21/2008CN101183643A Method for manufacturing thin film semiconductor device
05/21/2008CN100389481C Substrate for nitride semiconductor growth
05/21/2008CN100389233C Beta'-Sialon whisker gas phase reaction preparation method
05/20/2008US7375385 Semiconductor heterostructures having reduced dislocation pile-ups
05/20/2008US7374941 determining changes in a reactant supply system for repeated pulses of a vapor phase reactant; Atomic Layer Deposition
05/20/2008US7374617 Atomic layer deposition methods and chemical vapor deposition methods
05/15/2008WO2008057183A1 Method for continuous, in situ evaluation of entire wafers for macroscopic features during epitaxial growth
05/15/2008US20080113186 Method for Growing Si-Ge Semiconductor Materials and Devices on Substrates
05/14/2008EP1920080A2 High colour diamond
05/14/2008EP1551768A4 Process for manufacturing a gallium rich gallium nitride film
05/14/2008CN100387760C Method of producing self-supporting substrates comprising iii-nitrides by means of heteroepitaxy on a sacrificial layer
05/13/2008US7371282 Solid solution wide bandgap semiconductor materials
05/13/2008US7371281 Silicon carbide single crystal and method and apparatus for producing the same
05/08/2008WO2007092893B1 Materials and methods for the manufacture of large crystal diamonds
05/08/2008US20080107876 Zinc Oxide Microstructures and a Method of Preparing the Same
05/08/2008US20080105296 Nanostructures and methods for manufacturing the same
05/07/2008EP1918429A1 Aluminum nitride single crystal film, aluminum nitride single crystal laminated substrate and processes for production of both
05/07/2008EP1917101A2 Method for manufacture and coating of nanostructured components
05/07/2008EP1335044B1 Zinc oxide semiconductor material
05/07/2008CN201057265Y Hydraulic cylinder
05/07/2008CN100386847C Wafer holder
05/07/2008CN100386845C Nitride semiconductor thin film and method for growing the same
05/06/2008US7368308 Methods of fabricating semiconductor heterostructures
05/06/2008US7368018 Chemical vapor deposition apparatus
05/02/2008WO2008050476A1 Method for manufacturing epitaxial silicon wafer, and epitaxial silicon wafer
05/01/2008US20080102610 Method of controlling stress in gallium nitride films deposited on substrates
05/01/2008US20080102313 Atomic layer chemical vapor deposition of hybrid organic inorganic coatings comprised of such as aluminium benzene oxides; optical properties
05/01/2008US20080099768 Diamond Transistor And Method Of Manufacture Thereof
04/2008
04/30/2008EP1916321A1 Crystal producing apparatus, crystal producing method, substrate producing method, gallium nitride crystal, and gallium nitride substrate
04/30/2008EP1915888A2 Method and composition for adhering materials together
04/30/2008EP1563122A4 Method for forming carbon nanotubes
04/29/2008US7364805 Crystal film, crystal substrate, and semiconductor device
04/29/2008US7364714 3C-SIC nanowhisker and synthesizing method and 3C-SIC nanowhisker
04/24/2008WO2008047907A1 Sapphire substrate, nitride semiconductor luminescent element using the sapphire substrate, and method for manufacturing the nitride semiconductor luminescent element
04/24/2008WO2007130916A3 A method of ultra-shallow junction formation using si film alloyed with carbon
04/24/2008US20080092803 Patterned atomic layer epitaxy
04/24/2008DE102007049666A1 Production of p- doped epitaxial coated silicon semiconductor wafers dopes a single crystal with boron and hydrogen and a controlled nitrogen concentration
04/23/2008EP1190121A4 Truncated susceptor for vapor-phase deposition
04/23/2008CN201049963Y Chemical vapor deposition device
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