Patents for C30B 25 - Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth (13,302)
12/2008
12/31/2008CN100448327C System and method for lamp split zone control
12/31/2008CN100447948C Growth method of nitride semiconductor epitaxial layers
12/30/2008US7470989 Technique for perfecting the active regions of wide bandgap semiconductor nitride devices
12/30/2008US7470970 Prepared by making use of orientation (plane) dependence of the oxygen doping to GaN; non-C-plane growth enables the growing GaN crystal to accept oxygen effectively; for producing light emitting diodes, laser diodes or other electronic devices of groups 3 and 5 nitride semiconductors
12/30/2008US7470611 In situ deposition of a low K dielectric layer, barrier layer, etch stop, and anti-reflective coating for damascene application
12/25/2008US20080318418 Process for Forming Continuous Copper Thin Films Via Vapor Deposition
12/25/2008US20080317954 Pulsed deposition process for tungsten nucleation
12/25/2008US20080314311 Hvpe showerhead design
12/24/2008WO2008155438A1 Microspheres of silicon and photonic sponges, method for production and uses thereof in the manufacture of photonic devices
12/24/2008EP2006887A2 III-V Nitride semiconductor layer-bonded substrate and semiconductor device
12/24/2008EP2004882A2 Growing large surface area gallium nitride crystals
12/24/2008EP1613789B1 Volatile copper(i) complexes for deposition of copper films by atomic layer deposition
12/24/2008CN101330016A Method for depositing atomic layer and semiconductor device formed by the same
12/24/2008CN101330015A Method for depositing atomic layer and semiconductor device formed by the same
12/24/2008CN101330014A Method for depositing atomic layer and semiconductor device formed by the same
12/24/2008CN101328609A Method for preparing tin doping zinc oxide nanowire by vapor deposition
12/23/2008US7468311 Deposition of silicon-containing films from hexachlorodisilane
12/23/2008US7468103 Method of manufacturing gallium nitride-based single crystal substrate
12/18/2008WO2008152126A1 Device for coating substrates disposed on a susceptor
12/18/2008US20080311393 Substrate for epitaxy and method of preparing the same
12/18/2008US20080311024 Diamond single crystal substrate manufacturing method and diamond single crystal substrate
12/18/2008US20080308909 Epitaxial wafers, method for manufacturing of epitaxial wafers, method of suppressing bowing of these epitaxial wafers and semiconductor multilayer structures using these epitaxial wafers
12/18/2008DE102006030268B4 Verfahren zum Ausbilden einer Halbleiterstruktur, insbesondere eines FETs A method of forming a semiconductor structure, in particular a FETs
12/17/2008EP2003696A1 GaN substrate, substrate with epitaxial layer, semiconductor device and method of manufacturing GaN substrate
12/17/2008EP2003230A2 GaN substrate, substrate with an epitaxial layer, semiconductor device, and GaN substrate manufacturing method
12/17/2008CN101323975A Method for preparing SnO2-ZnO alloplasm nanobranch
12/17/2008CN101323971A Method for preparing high quality ZnO film using cushioning layer
12/17/2008CN101323970A Tubular furnace and method for changing growth substrate or source material position using the same
12/17/2008CN100444323C Formation of lattice-tuning semiconductor substrates
12/16/2008US7465666 Method for forming tungsten materials during vapor deposition processes
12/16/2008US7465665 Method for depositing tungsten-containing layers by vapor deposition techniques
12/16/2008US7465499 Boron phosphide-based semiconductor device, production method thereof, light-emitting diode and boron phosphide-based semiconductor layer
12/16/2008US7465354 Patterned ferroelectric thin films for microwave devices
12/16/2008US7465353 Method for growing epitaxial crystal
12/11/2008WO2008148759A1 Device for the temperature control of the surface temperatures of substrates in a cvd reactor
12/11/2008US20080303118 Process for fabricating a structure for epitaxy without an exclusion zone
12/11/2008DE102007026348A1 Verfahren und Vorrichtung zur Temperatursteuerung der Oberflächentemperaturen von Substraten in einem CVD-Reaktor Method and apparatus for temperature control of the surface temperatures of substrates in a CVD reactor
12/10/2008EP2000566A2 Interlayer of orientational substrate and orientational substrate for forming epitaxial film
12/10/2008EP2000565A1 Growth method of a GaN crystal, and GaN crystal substrate
12/10/2008EP1370709B1 Method and Apparatus for Synthesizing Diamond by Chemical Vapor Deposition
12/10/2008EP1097251B1 System and method for reducing particles in epitaxial reactors
12/10/2008CN101319402A Growth method of a gan crystal, and gan crystal substrate
12/10/2008CN101319400A Method for Fe doped growing GaFeN dilution magnetic semiconductor and uses thereof
12/10/2008CN101319377A Nano SrAl2O4 material and method for producing the same
12/10/2008CN101319376A Rare earth doping nano SrAl2O4 material and method for producing the same
12/10/2008CN101319369A Method of preparing type p ZnO nano-wire
12/10/2008CN101319363A Method for preparing polysilicon
12/10/2008CN101319361A 单晶金刚石 Single crystal diamond
12/10/2008CN101319360A 单晶金刚石 Single crystal diamond
12/10/2008CN101319359A 单晶金刚石 Single crystal diamond
12/10/2008CN101319358A 单晶金刚石 Single crystal diamond
12/10/2008CN101319356A Preparation of nano-carbon tube with added Zn
12/10/2008CN101318654A Method for preparing high purity polysilicon particle with fluidized bed and bed fluidizing reactor
12/10/2008CN101318645A Method for preparing carbon nano-tube array with acetone as carbon source
12/10/2008CN100442442C Process for producing silicon epitaxial wafer
12/10/2008CN100442441C Method and apparatus for forming epitaxial layers
12/09/2008US7462893 Method of fabricating GaN
12/09/2008US7462239 Low temperature load and bake
12/09/2008US7462238 Crystal growth apparatus and method of producing a crystal
12/04/2008WO2008146780A1 Fluid control apparatus
12/04/2008WO2008146779A1 Fluid control apparatus and method for assembling the same
12/04/2008WO2008146699A1 Method for manufacturing gan-based nitride semiconductor self-supporting substrate
12/04/2008US20080299748 Group III-V Crystal
12/04/2008US20080295764 Substrate temperature accuracy and temperature control flexibility in a molecular beam epitaxy system
12/04/2008DE10045958B4 Vorrichtung zum Leiten eines gasförmigen Mediums in eine und/oder aus einer Prozeßkammer Means for conducting a gaseous medium into and / or out of a process chamber
12/03/2008EP1997125A2 Growth method using nanostructure compliant layers and hvpe for producing high quality compound semiconductor materials
12/03/2008EP1996751A2 Materials and methods for the manufacture of large crystal diamonds
12/03/2008CN101317247A Epitaxial growth of nitride compound semiconductors structures
12/03/2008CN101314867A Slit valve
12/03/2008CN100440557C Semiconductor light emitting device and device
12/03/2008CN100440556C Semiconductor light emitting device and device
12/03/2008CN100440436C Vapor-phase growth method
12/03/2008CN100440435C Semiconductor device and method for manufacturing the same
12/03/2008CN100440425C Structure for mounting loading table device, processing device, discharge prevention method between feeder lines
12/02/2008US7459026 Light irradiation apparatus, crystallization apparatus, crystallization method and device
12/02/2008US7459025 Methods for transferring a layer onto a substrate
12/02/2008US7459024 Method of forming an N-type doped single crystal diamond
12/02/2008US7459023 Method for producing semiconductor crystal
11/2008
11/27/2008WO2008143166A1 Method for manufacturing semiconductor crystal of nitride of element belonging to group-iii, semiconductor substrate formed of nitride of element belonging to group-iii, and semiconductor light emission device
11/27/2008WO2008142115A1 Device for coating a plurality of closest-packed substrates arranged on a susceptor
11/27/2008WO2008099422A3 Method and apparatus for producing single crystalline diamonds
11/26/2008EP1995796A2 Single crystal GaN substrate and laser diode produced thereon
11/26/2008EP1995786A1 GaN substrate, and epitaxial substrate and semiconductor light-emitting device employing the substrate
11/26/2008EP1995357A1 Gallium nitride material and method for producing same
11/26/2008CN101311660A Polycrystalline silicon reducing furnace water cooled electrode
11/26/2008CN101311657A Polycrystalline silicon reducing furnace water-cooling double glass viewing mirror
11/26/2008CN101311656A Quick-opening type water-cooling structure polycrystalline silicon reducing furnace
11/26/2008CN101311380A Method for manufacturing semiconductor of iii-v group compounds
11/26/2008CN101311379A Gallium nitride substrate and gallium nitride film deposition method
11/26/2008CN101311365A Method for preparing room-temperature ferromagnetic Fe doped ZnO nanometer wire
11/26/2008CN101311361A Chinese character í«zhi-shapedí» nano-belt of periodic SnO2 and method for preparing same
11/26/2008CN101311357A Method for preparing indium oxide single crystal epitaxial film
11/26/2008CN101311351A Polycrystalline silicon rod for floating zone method and a process for the production thereof
11/26/2008CN101311340A Method for preparing silicon inverse epitaxial wafer and special equipment thereof
11/26/2008CN101311339A Process for discriminating high growth rate chemical vapour deposition diamond single crystal
11/26/2008CN101311336A Film formation apparatus and method for using the same
11/26/2008CN100438088C Method for producing light-emitting device
11/26/2008CN100437905C Formation of lattice-tuning semiconductor substrates
11/26/2008CN100436315C Silicon production process
11/25/2008US7455730 Method for growth of silicon carbide single crystal, silicon carbide seed crystal, and silicon carbide single crystal
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