| Patents for C23F 1 - Etching metallic material by chemical means (16,062) |
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| 09/22/2009 | US7591955 Method for forming an etched soft edge metal foil and the product thereof |
| 09/22/2009 | US7591908 Vapor deposition apparatus and vapor deposition method |
| 09/22/2009 | US7591907 Apparatus for hybrid chemical processing |
| 09/22/2009 | US7591232 Internal coil with segmented shield and inductively-coupled plasma source and processing system therewith |
| 09/17/2009 | US20090233450 Plasma etchimg method and plasma etching apparatus |
| 09/17/2009 | US20090233445 Method of making diamond nanopillars |
| 09/17/2009 | US20090232449 Erbium-Doped Silicon Nanocrystalline Embedded Silicon Oxide Waveguide |
| 09/17/2009 | US20090231827 Interposer and method for manufacturing interposer |
| 09/17/2009 | US20090230089 Electrical control of plasma uniformity using external circuit |
| 09/17/2009 | US20090229856 Master Electrode and Method of Forming the Master Electrode |
| 09/17/2009 | US20090229855 electrode and method of forming the master electrode |
| 09/17/2009 | US20090229757 Plasma processing apparatus |
| 09/17/2009 | US20090229756 Plasma processing apparatus |
| 09/17/2009 | US20090229755 Plasma processing apparatus |
| 09/17/2009 | US20090229754 Shower head and substrate processing apparatus |
| 09/17/2009 | DE102005012356B4 PAA-basiertes Ätzmittel und Verfahren, bei denen dieses Ätzmittel verwendet wird PAA-based etchant and procedures that are experiencing this etchant is used |
| 09/16/2009 | CN201309966Y Basket for installing silicon chip on 12 inch silicon chip corroding machine |
| 09/16/2009 | CN101535530A Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems |
| 09/16/2009 | CN101533787A Adhesion promotion |
| 09/16/2009 | CN101532180A Method for frequency corrosion of wafers and equipment thereof |
| 09/16/2009 | CN101532142A Novel surface processing technology of ordinary aluminum plate |
| 09/16/2009 | CN101532136A Electrolytic regeneration method of acidic etching waste solution |
| 09/16/2009 | CN101532135A Method for eliminating metal body surface reflection |
| 09/16/2009 | CN101532128A Composition for surface modification of a heat sink and method for surface treatment of the heat sink for printed circuit boards using the same |
| 09/16/2009 | CN101531366A Method for cleaning polycrystalline silicon material |
| 09/16/2009 | CN101530679A Solid phase micro-extraction stainless steel fiber and preparation method thereof |
| 09/16/2009 | CN100540745C Basic etching solution and producing method |
| 09/15/2009 | US7588693 Method of modifying an etched trench |
| 09/15/2009 | US7587989 Plasma processing method and apparatus |
| 09/15/2009 | US7587809 Method for forming a MR reader with reduced shield topography and low parasitic resistance |
| 09/11/2009 | WO2009111487A1 Process of making a microtube and microfluidic devices formed therewith |
| 09/10/2009 | US20090226665 Nickel structures and methods for manufacturing the same by removal of an underlying material |
| 09/10/2009 | US20090224216 Surface-Activation of Semiconductor Nanostructures for Biological Applications |
| 09/10/2009 | US20090223931 Dry etching method and apparatus |
| 09/10/2009 | US20090223930 Apparatus for etching substrate and method of etching substrate using the same |
| 09/10/2009 | US20090223929 Apparatus and method of removing coating of line-shaped body using plasma |
| 09/10/2009 | US20090223928 Inductively coupled plasma processing apparatus |
| 09/10/2009 | US20090223633 Apparatus And Method For Plasma Etching |
| 09/10/2009 | DE19734879B4 Verfahren zum Ätzen eines Siliciumwafers, Ätzvorrichtung und Ätzmittel A method of etching a silicon wafer, etching and the etchant |
| 09/09/2009 | CN101524829A A method and device for measuring film thickness by coupling eddy current sensors |
| 09/09/2009 | CN100537848C Metal scavenger composition and method for producing the same |
| 09/09/2009 | CN100537847C Etching solution composition for titanium and aluminium cascade metal films |
| 09/08/2009 | US7585540 Method for manufacturing wiring substrate |
| 09/08/2009 | US7585417 Method of fabricating a diaphragm of a capacitive microphone device |
| 09/08/2009 | US7585385 Plasma processing apparatus, control method thereof and program for performing same |
| 09/08/2009 | US7585383 Vacuum processing apparatus |
| 09/08/2009 | US7584714 Method and system for improving coupling between a surface wave plasma source and a plasma space |
| 09/03/2009 | US20090221151 Electrode for plasma processing apparatus, plasma processing apparatus, plasma processing method and storage medium |
| 09/03/2009 | US20090221150 Etch rate and critical dimension uniformity by selection of focus ring material |
| 09/03/2009 | US20090220865 Method and apparatus for source field shaping in a plasma etch reactor |
| 09/03/2009 | US20090218317 Method to control uniformity using tri-zone showerhead |
| 09/03/2009 | US20090218316 Manufacturing method in plasma processing apparatus |
| 09/03/2009 | US20090218315 Method and system for controlling center-to-edge distribution of species within a plasma |
| 09/03/2009 | US20090218314 Advanced process sensing and control using near infrared spectral reflectometry |
| 09/03/2009 | US20090218122 Wiring substrate and method of manufacturing the same |
| 09/03/2009 | US20090218045 Plasma processing apparatus |
| 09/03/2009 | DE19882648B4 Verfahren und Einrichtung zum Beizen eines Metallbandes Method and device for pickling a metal strip |
| 09/02/2009 | CN101519016A Method for making patterns on metal surfaces |
| 09/01/2009 | US7582186 Method and apparatus for an improved focus ring in a plasma processing system |
| 09/01/2009 | US7582185 Plasma-processing apparatus |
| 09/01/2009 | US7582182 Method and apparatus for measuring electron density of plasma and plasma processing apparatus |
| 09/01/2009 | US7582167 Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support |
| 09/01/2009 | US7581511 Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes |
| 08/27/2009 | US20090215213 Microelectromechanical device having a common ground plane and method for making aspects thereof |
| 08/27/2009 | US20090215156 Method for Fabricating Nanogap and Nanogap Sensor |
| 08/27/2009 | US20090213188 method of manufacturing an actuator apparatus, a method of manufacturing a liquid jet head and a liquid jet apparatus |
| 08/27/2009 | US20090212664 Micro movable device and method of making the same using wet etching |
| 08/27/2009 | US20090212019 Single-sided high throughput wet etching and wet processing apparatus and method |
| 08/27/2009 | US20090212017 Plasma processing method and plasma processing apparatus |
| 08/27/2009 | US20090212015 Plasma-Assisted Processing in a Manufacturing Line |
| 08/27/2009 | US20090212014 Method and system for performing multiple treatments in a dual-chamber batch processing system |
| 08/27/2009 | US20090212010 Plasma etching carbonaceous layers with sulfur-based etchants |
| 08/27/2009 | US20090212009 Methods for Electrochemically Fabricating Structures Using Adhered Masks, Incorporating Dielectric Sheets, and/or Seed Layers That Are Partially Removed Via Planarization |
| 08/27/2009 | US20090212007 Surface treatment method |
| 08/27/2009 | US20090211706 Etching endpoint determination method |
| 08/26/2009 | EP1843903A4 Processes for forming electronic devices and electronic devices formed by such processes |
| 08/26/2009 | CN101514456A Etching liquid and cuprum wiring forming method by using the same |
| 08/26/2009 | CN100532648C Corrosion method of anode aluminum foil for middle-high voltage electrolytic capacitor |
| 08/26/2009 | CN100532644C Method for preparing nano titanium oxide film by medical nickel-titanium memory alloy surface in situ denickeling |
| 08/26/2009 | CN100532055C Capillary imprinting technique |
| 08/25/2009 | US7579308 Etching with organic ammonium compound and/or oxoammonium compound, water, and solvent |
| 08/25/2009 | US7578236 Apparatus and method for demetallizing a metallized film |
| 08/20/2009 | WO2009101948A1 Etching method |
| 08/20/2009 | US20090208880 Process sequence for formation of patterned hard mask film (rfp) without need for photoresist or dry etch |
| 08/20/2009 | US20090206494 Wiring over substrate, semiconductor device, and methods for manufacturing thereof |
| 08/20/2009 | US20090206348 Composite Substrate, and Method for the Production of a Composite Substrate |
| 08/20/2009 | US20090206057 Method To Improve Mask Critical Dimension Uniformity (CDU) |
| 08/20/2009 | US20090206056 Method and Apparatus for Plasma Process Performance Matching in Multiple Wafer Chambers |
| 08/20/2009 | US20090206053 Plasma etching method, plasma etching apparatus, control program and computer-readable storage medium |
| 08/19/2009 | EP2090675A1 Defect etching of germanium |
| 08/19/2009 | EP1508161A4 Methods of positions and/or orienting nanostructures |
| 08/19/2009 | CN101512040A Confinement ring drive |
| 08/19/2009 | CN101511713A Load port module |
| 08/19/2009 | CN101511607A Integrated chemical mechanical polishing composition and process for single platen processing |
| 08/19/2009 | CN100531526C Metal photo-etching product and production method therefor |
| 08/19/2009 | CN100530557C Etching method of single wafer |
| 08/19/2009 | CN100529186C Method for isotropic etching of copper |
| 08/19/2009 | CN100528571C Substrate for fluid jet device and method for forming substrate |
| 08/18/2009 | US7575777 Potassium niobate deposited body and method for manufacturing the same, piezoelectric thin film resonator, frequency filter, oscillator, electronic circuit, and electronic apparatus |
| 08/18/2009 | US7575694 Method of selectively stripping a metallic coating |