| Patents for C23F 1 - Etching metallic material by chemical means (16,062) |
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| 04/01/2009 | CN101399197A Chamber lining |
| 04/01/2009 | CN101399172A Apparatus for and method of processing substrate |
| 04/01/2009 | CN101398518A Method for making metal optical lens cone |
| 04/01/2009 | CN101397668A Etching technology of silicon shallow slot |
| 04/01/2009 | CN101397667A Wet etching apparatus and method |
| 04/01/2009 | CN100474521C Temperature controlled hot edge ring assembly, and device comprising the same and the use thereof |
| 03/31/2009 | US7510667 Plasma processing method and apparatus |
| 03/31/2009 | US7510666 Time continuous ion-ion plasma |
| 03/31/2009 | US7510664 Apparatus and method for atmospheric pressure reactive atom plasma processing for shaping of damage free surfaces |
| 03/31/2009 | US7510663 Method for manufacturing organic molecular device |
| 03/26/2009 | WO2009038224A1 Corrosion inhibitors or strippers containing substituted ketones or derivatives thereof and process for production of the same |
| 03/26/2009 | WO2009038063A1 Etching solution |
| 03/26/2009 | US20090081819 Method and apparatus for managing manufacturing equipment, method for manufacturing device thereby |
| 03/26/2009 | US20090081810 Substrate processing apparatus and substrate processing method |
| 03/26/2009 | US20090081596 Metal photoetching product and production method thereof |
| 03/26/2009 | US20090081522 Metal composite for fuel cell and fuel cell bipolar plate using same, and fabrication method for same |
| 03/26/2009 | US20090081433 Thin-film multilayer structure, component comprising said structure and its method of deposition |
| 03/26/2009 | US20090081414 Resin composition for laser engraving, resin printing plate precursor for laser engraving, relief printing plate and method for production of relief printing plate |
| 03/26/2009 | US20090078679 Etching solution and method for regenerating waste liquid thereof, and method for recovering valuable metals from waste liquid |
| 03/26/2009 | US20090078678 Plasma processing apparatus and plasma processing method |
| 03/26/2009 | US20090078677 Integrated steerability array arrangement for minimizing non-uniformity |
| 03/26/2009 | US20090078676 METHOD FOR DRY ETCHING Al2O3 FILM |
| 03/26/2009 | US20090078674 Reactive Ion Etching Process for Etching Metals |
| 03/26/2009 | US20090078375 Plasma Processing Apparatus And Method |
| 03/26/2009 | US20090078374 Apparatus and methods for transporting and processing substrates |
| 03/26/2009 | US20090078373 Apparatus for manufacturing flat-panel display |
| 03/26/2009 | US20090078372 Vacuum processing apparauts |
| 03/25/2009 | CN101395010A Methods for forming articles having apertures and articles having substantially reduced residual compressive stress |
| 03/25/2009 | CN101392376A Etching composite |
| 03/25/2009 | CN101392375A Etching agent combination for forming circuit in film transistor LCD |
| 03/25/2009 | CN101392374A Double temperature control hydrofluoric acid vapor etching device |
| 03/24/2009 | US7507350 For radiation transparent indium tin oxide films; aqueous solution of oxalic acid, acetylene-free ethylene oxide-propylene oxide copolymer, a sulfonate type anionic surfactant, and a lower alkanol; suppressed foaming and residue formation |
| 03/24/2009 | US7507313 Film removal method and apparatus |
| 03/24/2009 | US7507039 Dynamic pressure bearing manufacturing method, dynamic pressure bearing and dynamic pressure bearing manufacturing device |
| 03/24/2009 | US7506610 Plasma processing apparatus and method |
| 03/24/2009 | US7506609 System for generating a local electron-cyclotron microwave low-pressure plasma at a predetermined location within a processing chamber |
| 03/19/2009 | WO2009034845A1 Process for producing separator for fuel cell |
| 03/19/2009 | WO2009034764A1 Process for producing printed wiring board and printed wiring board produced by the production process |
| 03/19/2009 | WO2007131057A4 Vacuum processing chamber suitable for etching high aspect ratio features and components of same |
| 03/19/2009 | US20090075484 Method of Processing A Substrate, Spin Unit for Supplying Processing Materials to A Substrate, and Apparatus for Processing A Substrate Having the Same |
| 03/19/2009 | US20090075421 Wet etching of zinc tin oxide thin films |
| 03/19/2009 | US20090074650 Method for the production of silicon suitable for solar purposes |
| 03/19/2009 | US20090074646 Etching processes used in mems production |
| 03/19/2009 | US20090071940 Multi-speed substrate processing apparatus and substrate processing method |
| 03/19/2009 | US20090071939 Modification of polymer surface with shielded plasma |
| 03/19/2009 | US20090071938 Methods and apparatus for substrate processing |
| 03/19/2009 | US20090071933 Etching processes used in mems production |
| 03/19/2009 | US20090071932 Etching processes used in mems production |
| 03/19/2009 | US20090071605 Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor |
| 03/19/2009 | US20090071537 Index tuned antireflective coating using a nanostructured metamaterial |
| 03/19/2009 | US20090071503 Method and device for treating substrates and nozzle unit therefor |
| 03/19/2009 | DE102007043563A1 Etching, galvanizing, cleaning and photoresist developing of a substrate with megasonic support, comprise carrying out megasonic excitation by standard megasonic-oscillation of cool bar- and atomizer application |
| 03/18/2009 | EP2035596A1 Plasma immersion ion processing for coating of hollow substrates |
| 03/18/2009 | CN101389788A Process tuning gas injection from the substrate edge |
| 03/17/2009 | US7504644 Method and devices for producing corpuscular radiation systems |
| 03/17/2009 | US7504643 Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
| 03/17/2009 | US7504041 Rotating at least the outer radio frequency source power applicator about a radial tilt axis to a position at which the spatial distribution of a plasma process parameter, such as etch rate, has at least a nearly minimal non-symmetry relative to the common axis of symmetry; semiconductor fabrication |
| 03/17/2009 | US7503996 Multiple frequency plasma chamber, switchable RF system, and processes using same |
| 03/12/2009 | US20090068844 Etching Process |
| 03/12/2009 | US20090065480 Plasma Processing Apparatus |
| 03/12/2009 | US20090065479 Dry etching method of high-k film |
| 03/12/2009 | US20090065477 Pulsed-continuous etching |
| 03/12/2009 | US20090065148 Methods and apparatus for igniting a low pressure plasma |
| 03/12/2009 | US20090065147 Plasma processing apparatus |
| 03/12/2009 | US20090065146 Plasma processing apparatus |
| 03/12/2009 | US20090065145 Plasma Processing Apparatus And Method Capable Of Adjusting Temperature Within Sample Table |
| 03/12/2009 | DE102007054484B3 Method for producing structures on multicrystalline silicon surfaces in semiconductor production comprises applying phosphoric acid solution to surface and heating to specified minimum temperature or above |
| 03/11/2009 | CN101381873A Etching solution and conductor pattern forming method |
| 03/11/2009 | CN101381872A Dry film pasting promotor and its use method |
| 03/11/2009 | CN101381870A Surface treating method for casing of electronic equipment |
| 03/11/2009 | CN100468640C Etching method and contact window forming method |
| 03/11/2009 | CN100468055C Preparation method of X-ray diffraction sample rack |
| 03/11/2009 | CN100467673C Removing process of residual copper on cathode foil surface for improved aluminium electrolyzing capacitor |
| 03/11/2009 | CN100467671C Method for recovering hydrochloric acid and copper sulfate from acidic etching liquid |
| 03/11/2009 | CN100467670C Acid corrosion solution for preparing multicrystal silicon pile surface and its using method |
| 03/10/2009 | US7501073 Methods for producing metallic implants having roughened surfaces |
| 03/10/2009 | US7501068 Method for manufacturing resonator |
| 03/05/2009 | WO2009028114A1 Etching system |
| 03/05/2009 | US20090061640 Alternate gas delivery and evacuation system for plasma processing apparatuses |
| 03/05/2009 | US20090061354 Lithographic Printing Plate Support, Method of Manufacturing the Same, and Presensitized Plate |
| 03/05/2009 | US20090057271 Manufacturing method of metal interconnection |
| 03/05/2009 | US20090057265 Method of manufacturing multilayer printed circuit board |
| 03/05/2009 | US20090056877 Plasma processing apparatus |
| 03/05/2009 | US20090056876 Work Processing System and Plasma Generating Apparatus |
| 03/05/2009 | US20090056875 Enhanced stripping of low-K films using downstream gas mixing |
| 03/05/2009 | US20090056874 Lower electrode assembly for processing substrates |
| 03/05/2009 | DE102008045306A1 Solution for etching copper during printed circuit board manufacture, includes copper ion source, acid, water, azole, aromatic compound and hydrogen peroxide |
| 03/04/2009 | EP1946358A4 Composition and method for recycling semiconductor wafers having low-k dielectric materials thereon |
| 03/04/2009 | CN201201968Y Circuit board miroetching manufacture process liquid medicine regenerating device |
| 03/04/2009 | CN101379220A Solution and process to treat surfaces of copper alloys in order to improve the adhesion between the metal surface and the bonded polymeric material |
| 03/04/2009 | CN101379219A Composition and method for improved adhesion of polymeric materials to copper or copper alloy surfaces |
| 03/04/2009 | CN101376979A Method for removing aluminum coating on back of aluminum oxide template using dilute acid |
| 03/04/2009 | CN100466404C Wet etching method for gallium arsenide/aluminum arsenide distributed Bragg reflector |
| 03/04/2009 | CN100466192C Liquid flow control system for wet processing tank, and wet processing system |
| 03/04/2009 | CN100465343C A method for constructing super-drainage structures on metal copper surfaces |
| 03/03/2009 | US7498236 Silicon wafer thinning end point method |
| 03/03/2009 | US7498074 Metal photoetching product and production method thereof |
| 03/03/2009 | US7497967 Compositions and methods for polishing copper |
| 03/03/2009 | US7497912 Substrate processing apparatus |
| 02/26/2009 | WO2009023988A1 Process and system for etching copper |