| Patents for C23F 1 - Etching metallic material by chemical means (16,062) |
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| 05/28/2009 | US20090136771 Composition for preparing a surface for coating and methods of making and using same |
| 05/28/2009 | US20090135521 Protective film forming method |
| 05/28/2009 | US20090134120 Plasma Processing Method and Plasma Processing Apparatus |
| 05/28/2009 | US20090134119 Film-forming material and method of forming pattern |
| 05/28/2009 | US20090133840 Inductively coupled plasma apparatus |
| 05/28/2009 | US20090133837 Apparatus for manufacturing flat-panel display |
| 05/28/2009 | US20090133836 Adjustable height pif probe |
| 05/28/2009 | US20090133835 Processing apparatus |
| 05/28/2009 | DE102007057125A1 Etching process and assembly for the manufacture of printed circuit boards has de-complexor ioniser |
| 05/27/2009 | CN101443480A Recyclable etching solution |
| 05/27/2009 | CN101440492A Grill metal member etching production process capable of reducing corrosion allowance |
| 05/27/2009 | CN101440491A Method for forming convex point structure formed by etching composition for convex point lower metal layer |
| 05/27/2009 | CN100491594C Removing agent for ruthenium containing metal, and its application method |
| 05/27/2009 | CN100491586C Plasma processing apparatus |
| 05/26/2009 | US7538927 MEMS mirror with short vertical comb teeth and long in-plane comb teeth |
| 05/26/2009 | US7537709 Method for isotropic etching of copper |
| 05/26/2009 | US7537671 Self-calibrating optical emission spectroscopy for plasma monitoring |
| 05/26/2009 | US7537662 Method and apparatus for depositing thin films on a surface |
| 05/26/2009 | CA2645532A1 Metallic bipolar plate for fuel cells and method for manufacturing the same |
| 05/22/2009 | WO2009064380A2 Fabrication of anchored carbon nanotube array devices for integrated light collection and energy conversion |
| 05/22/2009 | WO2009064371A1 Plasma immersion ion implantation reactor with extended cathode process ring |
| 05/22/2009 | WO2009063532A1 Aluminum etched plate for electrolytic capacitor |
| 05/22/2009 | WO2009062753A1 Method for connecting a precious metal surface to a polymer |
| 05/21/2009 | US20090131887 Method of manufacturing microneedle |
| 05/21/2009 | US20090130476 Method of Forming Polarization Reversal Area, Apparatus thereof and Device Using it |
| 05/21/2009 | US20090130380 Method for manufacturing pourous structure and method for forming pattern |
| 05/21/2009 | US20090130370 Fabrication of anchored carbon nanotube array devices for integrated light collection and energy conversion |
| 05/21/2009 | US20090128950 High aspect ratio motion limiter of a microactuator and method for fabrication |
| 05/21/2009 | US20090127234 Plasma processing chamber with guard ring for upper electrode assembly |
| 05/21/2009 | US20090127228 Structured method |
| 05/21/2009 | US20090127227 Plasma processing apparatus and plasma processing method |
| 05/21/2009 | US20090127225 Measurement of etching |
| 05/21/2009 | US20090127224 Method of producing a nano-structure and method of producing a magnetic recording medium |
| 05/21/2009 | US20090126871 Plasma processing apparatus |
| 05/20/2009 | CN201243008Y Sprinkling anti-pollution device |
| 05/20/2009 | CN101437981A In-situ chamber clean process to remove by-product deposits from chemical vapor etch chamber |
| 05/20/2009 | CN101437980A Applications and fabrication techniques for large scale wire grid polarizers |
| 05/20/2009 | CN100489158C Use of selective silicon nitrogen oxide etching liquid by wetting method |
| 05/19/2009 | US7534723 Methods of forming fine patterns, and methods of forming trench isolation layers using the same |
| 05/19/2009 | US7534364 Methods for a multilayer retaining ring |
| 05/19/2009 | US7534363 Method for providing uniform removal of organic material |
| 05/19/2009 | US7534362 Uniform etching system and process for large rectangular substrates |
| 05/19/2009 | US7534360 Method of making diamond product and diamond product |
| 05/19/2009 | US7534301 RF grounding of cathode in process chamber |
| 05/14/2009 | US20090124091 Etching solution composition for metal films |
| 05/14/2009 | US20090124087 Vertical plasma processing apparatus and method for using same |
| 05/14/2009 | US20090122588 Phase change memory cell including a thermal protect bottom electrode and manufacturing methods |
| 05/14/2009 | US20090121324 Etch with striation control |
| 05/14/2009 | US20090120904 Method and device for manufacturing structure having pattern, and method for manufacturing mold |
| 05/14/2009 | US20090120584 Counter-balanced substrate support |
| 05/14/2009 | US20090120583 Methods of making gas distribution members for plasma processing apparatuses |
| 05/14/2009 | US20090120581 Systems and methods for plasma processing of microfeature workpieces |
| 05/14/2009 | US20090120580 Disturbance-Free, Recipe-Controlled Plasma Processing System And Method |
| 05/13/2009 | EP2058417A1 Method for forming corrosion resistant plating layer and rotating machine |
| 05/13/2009 | EP1429185B1 Etching method and use of a composition for forming etching protective layer |
| 05/13/2009 | CN101432860A Method for forming self-aligned metal silicide contacts |
| 05/13/2009 | CN101432463A Etching solutions, method for regeneration of waste etching solutions and method for the recovery of valuable metals from waste etching solutions |
| 05/13/2009 | CN101432148A Processes for forming electronic devices and electronic devices formed by such processes |
| 05/13/2009 | CN101431124A Texture etching method for single crystalline silicon solar cell |
| 05/13/2009 | CN101431123A Texture etching method for single crystalline silicon solar cell |
| 05/13/2009 | CN100487871C Etching method |
| 05/13/2009 | CN100487857C In-situ dry clean chamber for front end of line fabrication |
| 05/12/2009 | US7531104 Micro-optic elements and method for making the same |
| 05/12/2009 | US7531103 Mask forming method, mask forming functional layer, dry etching method, and method of manufacturing an information recording medium |
| 05/12/2009 | US7531061 Gas temperature control for a plasma process |
| 05/12/2009 | US7531060 Integrated tool assemblies with intermediate processing modules for processing of microfeature workpieces |
| 05/12/2009 | US7531025 Method of creating a turbulent flow of fluid between a mold and a substrate |
| 05/12/2009 | US7530661 Substrate and method of forming substrate for fluid ejection device |
| 05/07/2009 | WO2007027907A3 A system and method for obtaining anisotropic etching of patterned substrates |
| 05/07/2009 | WO2006107573A3 High strip rate downstream chamber |
| 05/07/2009 | US20090117443 Bipolar Plate Hydrophilic Treatment for Stable Fuel Cell Stack Operation at Low Power |
| 05/07/2009 | US20090116149 Magnetic head slider manufacturing method |
| 05/07/2009 | US20090115047 Robust multi-layer wiring elements and assemblies with embedded microelectronic elements |
| 05/07/2009 | US20090114621 Method and device for the plasma treatment of materials |
| 05/07/2009 | US20090114619 Wet etching method and wet etching apparatus |
| 05/06/2009 | CN101426957A Substrate support system and method |
| 05/06/2009 | CN101425397A Low voltage anode foil corrosion device for electrolytic capacitor |
| 05/06/2009 | CN101425393A Cathode foil manufacturing method for aluminum electrolysis capacitor |
| 05/06/2009 | CN101425385A Producing process for electrolysis capacitor high temperature resistant alloy aluminum cathode foil |
| 05/06/2009 | CN101423946A Technique for preparing etched foil of medium-high voltage anode foil for energy-saving lamp |
| 05/06/2009 | CN101423942A Alkali etch solution and method for preparing monocrystalline silicon pile fabrics |
| 05/06/2009 | CN100485877C Method for improving unevenness of polishing and method for preparing embedded copper metal layer |
| 05/06/2009 | CN100485861C Film etching method |
| 05/06/2009 | CN100485859C Unit cleaning method and substrate treater for depressurizing chamber |
| 05/06/2009 | CN100485091C Separation method of nickel ion in iron trichloride solution by crystallization and extraction method |
| 05/06/2009 | CN100485024C Polymer film based miniature cell clamp and preparing process thereof |
| 05/05/2009 | US7527741 Microreactor including magnetic barrier |
| 05/05/2009 | US7527706 Plasma processing apparatus, process vessel for plasma processing apparatus and dielectric plate for plasma processing apparatus |
| 05/05/2009 | US7527694 Substrate gripping apparatus |
| 05/05/2009 | US7527016 Plasma processing apparatus |
| 04/30/2009 | WO2009055507A1 Methods and apparatus for sealing a slit valve door |
| 04/30/2009 | WO2009053154A1 Method for removing a metal layer by means of fic in an intermediate step |
| 04/30/2009 | WO2007030527A3 Photomask for the fabrication of a dual damascene structure and method for forming the same |
| 04/30/2009 | US20090111280 Method for removing oxides |
| 04/30/2009 | US20090107956 Thermal Gradient Control of High Aspect Ratio Etching and Deposition Processes |
| 04/30/2009 | US20090107955 Offset liner for chamber evacuation |
| 04/30/2009 | US20090107953 Methods for forming surface features using self-assembling masks |
| 04/29/2009 | EP2053145A1 Method for removing a metal layer using FIC in an intermediate stage |
| 04/29/2009 | CN201228284Y Gas drive circuit board etching machine |
| 04/29/2009 | CN101419930A Wafer spin chuck and an etcher using the same |