C23F 1 - Etching metallic material by chemical means

Patents for C23F 1 - Etching metallic material by chemical means (16,062)
12/2009
12/03/2009	US20090297863 Method for producing a hydrophobic coating, device for implementing said method and support provided with a hydrophobic coating
12/03/2009	US20090297092 Thermo-optic phase shifter and method for manufacturing same
12/03/2009	US20090294405 Methods of producing oscillator and apparatuses for producing oscillator
12/03/2009	US20090294403 Method of forming mask pattern, method of forming thin film pattern and method of forming magnetoresistive element
12/03/2009	US20090294065 Ceiling electrode with process gas dispersers housing plural inductive rf power applicators extending into the plasma
12/03/2009	US20090294063 Plasma processing apparatus
12/03/2009	US20090294062 Plasma reactor with plasma load impedance tuning for engineered transients by synchronized modulation of a source power or bias power rf generator
12/03/2009	US20090294061 Plasma reactor with plasma load impedance tuning for engineered transients by synchronized modulation of an unmatched low power rf generator
12/02/2009	EP2128307A1 Method for removing a protective coating from a turbine blade airfoil in a repair process
12/02/2009	EP2127865A1 Aluminum alloy composite and method of bonding therefor
12/02/2009	CN101592777A Method for manufacturing full spectrum wide-angle condenser based on nanometer structure
12/02/2009	CN101592469A Method and device for measuring damaged layer thickness and minority carrier lifetime of solar cell silicon chip
12/02/2009	CN101591782A Restoration method for eliminating heat treatment deformation of metal internal teeth
12/02/2009	CN101590997A Method for manufacturing integrated piezoresistance SiO2 cantilever by wet etching
12/02/2009	CN101590528A Method for preparing nanometer porous copper
12/02/2009	CN101590527A Method for preparing nanometer porous silver
12/02/2009	CN101590477A Method for reducing Al corrosion in Al pad etching technology and corresponding Al pad etching method
12/02/2009	CN100564601C Titanium oxide nano wire film on metallic titanium surface and manufacture method thereof
12/01/2009	US7625603 oxidation of a silicon precursor gas in an oxygen-rich environment followed by annealing; use in microelectromechanical systems (MEMS)
12/01/2009	US7625460 Multifrequency plasma reactor
12/01/2009	US7625262 A fibrous substrate and a phosphoric acid-modified polymer having a hydroxyl value or 40mg KOH/g toadsorb a colloidal metal; inoexchanging for forming a metal chelate; cleaning/demetallization without changing the pH value; circulation'reuse of slurry; industrial scale
11/2009
11/26/2009	US20090291313 Microelectronics grade metal substrate, related metal-embedded devices and methods for fabricating same
11/26/2009	US20090289034 Operating a Plasma Process
11/26/2009	US20090288855 Positive-type radiation-sensitive resin composition for producing a metal-plating formed material, transcription film and production method of a metal-plating formed material
11/26/2009	US20090288773 Multiple-electrode plasma processing systems with confined process chambers and interior-bussed electrical connections with the electrodes
11/26/2009	US20090288684 Vacuum processing apparatus and vacuum processing method
11/26/2009	DE102008014166B3 Verfahren zur Herstellung einer Siliziumoberfläche mit pyramidaler Textur A process for producing a silicon surface with pyramidal texture
11/25/2009	EP2123421A1 Metal/resin composite and process for producing the composite
11/25/2009	CN101589175A Processing chamber with heated chamber liner
11/25/2009	CN101589172A High strip rate downstream chamber
11/25/2009	CN101588896A Process for surface preparation of parts to be coated
11/25/2009	CN101586239A Additive for preparing polysilicon etching chemical suede
11/25/2009	CN100562605C Steel ring repairing technique
11/24/2009	US7622017 Processing apparatus and gas discharge suppressing member
11/24/2009	US7622008 Gate valve and vacuum container for semiconductor processing system
11/24/2009	US7622006 Processed body carrying device, and processing system with carrying device
11/19/2009	US20090286403 Method of forming thin film pattern for semiconductor device and apparatus for the same
11/19/2009	US20090286186 Method of manufacturing a coordinate detector
11/19/2009	US20090285494 Data verification method and charged particle beam writing apparatus
11/19/2009	US20090284342 Chip resistor and method for manufacturing the same
11/19/2009	US20090283884 Lead frame, semiconductor package including the same, and method of manufacturing the lead frame and the semiconductor package
11/19/2009	US20090283499 Fabrication of semiconductor interconnect structure
11/19/2009	US20090283310 Multi cap layer and manufacturing method thereof
11/19/2009	US20090283216 Method of and apparatus for manufacturing semiconductor device
11/19/2009	US20090283215 System and method for nano-pantography
11/19/2009	DE10154884C5 Vorrichtung zum Transport von flexiblem Flachmaterial, insbesondere Leiterplatten Device for the transport of flexible flat material, especially printed circuit boards
11/18/2009	CN100562209C Power supply unit for generating plasma and plasma apparatus including the same
11/18/2009	CN100561678C Processing method for silicon sheet surface
11/18/2009	CN100560800C Bright acid etching technology for aluminium alloy
11/17/2009	US7618525 Method for electrochemical fabrication
11/17/2009	US7618516 Method and apparatus to confine plasma and to enhance flow conductance
11/17/2009	US7618515 Focus ring, plasma etching apparatus and plasma etching method
11/17/2009	US7618514 Photo-etched EDM electrode
11/12/2009	US20090280650 Flowable dielectric equipment and processes
11/12/2009	US20090280597 Surface cleaning and texturing process for crystalline solar cells
11/12/2009	US20090280304 Method for defining regions of differing porosity of a nitrocellulose film on a substrate
11/12/2009	US20090280276 Method and Device for Plasma-Assisted Chemical Vapour Deposition on the Inner Wall of a Hollow Body
11/12/2009	US20090280253 Process and composition for treating metal surfaces using trivalent chromium compounds
11/12/2009	US20090279838 Optical Waveguides And Methods Of Making The Same
11/12/2009	US20090279218 Thermal isolation of electronic devices in submount used for leds lighting applications
11/12/2009	US20090277874 Method and apparatus for removing polymer from a substrate
11/12/2009	US20090277872 Plasma etching method capable of detecting end point and plasma etching device therefor
11/12/2009	US20090277871 Plasma mediated ashing processes that include formation of a protective layer before and/or during the plasma mediated ashing process
11/12/2009	US20090277866 Method of enabling solder deposition on a substrate and electronic package formed thereby
11/12/2009	US20090277586 Gas Introducing Apparatus, Manufacturing Method for the Gas Introducing Apparatus and Processing Apparatus
11/12/2009	US20090277585 Plasma processing appratus and method and apparatus for measuring dc potential
11/12/2009	US20090277584 Apparatus for determining the endpoint of a cleaning or conditioning process in a plasma processing system
11/11/2009	EP2115187A1 Method of plasma etching transition metal oxides
11/11/2009	CN101578170A Metal/resin composition and process for producing the composition
11/11/2009	CN101577151A Method for preventing ice from covering surface of power transmission bare conductor
11/11/2009	CN101576454A Amorphous alloy metallic phase corrosive agent and metallic phase display method
11/11/2009	CN101575706A Method for forming pattern on surface of metal workpiece
11/11/2009	CN100559553C Chemico-mechanical polishing end-point detection method for integrated circuit device
11/11/2009	CN100558472C Processing method of aluminum and aluminum alloy super hydrophobic surface
11/10/2009	USRE40951 Via alcohol and photomask; tunneling magnetoresistive device; magnetic random access memory
11/10/2009	US7615259 Method and apparatus for processing workpiece
11/10/2009	US7615133 Electrostatic chuck module and cooling system
11/10/2009	US7615132 Plasma processing apparatus having high frequency power source with sag compensation function and plasma processing method
11/10/2009	US7615131 Plasma etching chamber and plasma etching system using same
11/10/2009	US7615120 Pulsed mass flow delivery system and method
11/05/2009	WO2009132758A1 Method for delaminating work pieces and delaminating solution
11/05/2009	US20090275208 Compositions of Matter, and Methods of Removing Silicon Dioxide
11/05/2009	US20090275202 Silicon structure having an opening which has a high aspect ratio, method for manufacturing the same, system for manufacturing the same, and program for manufacturing the same, and method for manufacturing etching mask for the silicon structure
11/05/2009	US20090272719 System and method for pedestal adjustment
11/05/2009	US20090272717 Method and apparatus of a substrate etching system and process
11/05/2009	US20090272318 Device for supporting a substrate, as well as a method for manufacturing such a device
11/05/2009	DE102005005229B4 Nasschemisches Ätzverfahren für MOS-Schichtstrukturen mit praseodymoxidhaltigen Dielektrikum Wet chemical etching method for MOS-layer structures with dielectric praseodymoxidhaltigen
11/05/2009	CA2723136A1 Process for the stripping of workpieces and stripping solution
11/04/2009	EP1668967B1 Improved method for micro-roughening treatment of copper and mixed-metal circuitry
11/03/2009	US7611640 Minimizing arcing in a plasma processing chamber
11/03/2009	US7611610 Method and apparatus for controlling topographical variation on a milled cross-section of a structure
11/03/2009	US7611603 Plasma processing apparatus having impedance varying electrodes
11/03/2009	US7611585 Plasma reaction chamber with a built-in magnetic core
11/03/2009	US7611322 Processing thin wafers
11/03/2009	US7610874 Poled plasma deposition
10/2009
10/29/2009	US20090269861 Device and method for manufacturing a semiconductor wafer
10/29/2009	US20090267198 Semiconductor device, method for manufacturing semiconductor device and apparatus for manufacturing semiconductor
10/29/2009	US20090267029 Indium-oxide-based transparent conductive film and method for producing the film
10/29/2009	US20090266587 Flexible printed circuit board and method of forming fine pitch therein
10/29/2009	US20090266488 Plasma Processing Apparatus

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