| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 06/12/2013 | CN103146305A Fluorine-based surface treating agent for vapor deposition and article finished with the surface treating agent by vapor deposition |
| 06/12/2013 | CN103144356A High-conductivity composite carbon fiber and preparation method thereof |
| 06/12/2013 | CN102628164B Method for controlling low electrical property and appearance defect of solar battery module |
| 06/12/2013 | CN102534558B Chemical vapor deposition furnace capable of realizing upper and lower air inlet switching and application thereof |
| 06/12/2013 | CN102304698B Device for growing silicon carbide crystal by high-temperature chemical vapor deposition (HTCVD) method |
| 06/12/2013 | CN102304697B Method for preparing diamond |
| 06/12/2013 | CN102244051B High-performance directional heat conduction copper-base diamond composite material and preparation method thereof |
| 06/12/2013 | CN102212796B Non-magnetic ions Zn<2+>, Mg<2+> and Al<3+> doped SnO2-based magnetic semiconductor film material and preparation method thereof |
| 06/12/2013 | CN102183509B Plasma monitoring method and plasma monitoring device |
| 06/12/2013 | CN102031495B Organometallic compounds |
| 06/12/2013 | CN101960044B Solid precursor sublimator |
| 06/12/2013 | CN101910475B Epitaxial barrel susceptor having improved thickness uniformity |
| 06/12/2013 | CN101724828B 材料气体浓度控制系统 Material gas concentration control system |
| 06/12/2013 | CN101396872B Solar cell slice continuous PECVD slide boat forming method |
| 06/11/2013 | US8461062 Substrate processing apparatus and method for manufacturing semiconductor device |
| 06/11/2013 | US8460989 Niobium and vanadium organometallic precursors for thin film deposition |
| 06/11/2013 | US8460857 Manufacturing method for wiring |
| 06/11/2013 | US8460765 Methods for forming selectively deposited thin films |
| 06/11/2013 | US8460753 Methods for depositing silicon dioxide or silicon oxide films using aminovinylsilanes |
| 06/11/2013 | US8460752 High-throughput CVD system |
| 06/11/2013 | US8460751 Method for the synthesis of metallic nanotubes and nanotubes synthesized by the method |
| 06/11/2013 | US8460746 Method of forming insulated conductive element having a substantially continuous barrier layer formed via relative motion during deposition |
| 06/11/2013 | US8460533 Indium compositions |
| 06/11/2013 | US8460508 Synchronous pulse plasma etching equipment and method of fabricating a semiconductor device |
| 06/11/2013 | US8460470 Vapor phase deposition apparatus and support table |
| 06/11/2013 | US8460469 Apparatus for etching substrate and method of etching substrate using the same |
| 06/11/2013 | US8460468 Device for doping, deposition or oxidation of semiconductor material at low pressure |
| 06/11/2013 | US8460467 Vacuum processing apparatus |
| 06/11/2013 | US8460466 Exhaust for CVD reactor |
| 06/11/2013 | US8459202 Substrate processing apparatus |
| 06/06/2013 | WO2013082409A1 Coated polymer films |
| 06/06/2013 | WO2013081335A1 Support pin for supporting substrate and substrate treatment apparatus using same |
| 06/06/2013 | WO2013081302A1 Thin metal film for synthesizinggraphene and graphene manufacturing method using the same |
| 06/06/2013 | WO2013081128A1 Oxide thin film for semiconductor layer of thin film transistor, thin film transistor, and display device |
| 06/06/2013 | WO2013081047A1 Coated tool |
| 06/06/2013 | WO2013080106A2 Device and method for treating wafer-shaped articles |
| 06/06/2013 | WO2013080032A1 Plasma chemical synthesis process and plasma chemical synthesis reactor for the implementation thereof |
| 06/06/2013 | WO2013079798A1 Surface treatment apparatus and method |
| 06/06/2013 | WO2013078612A1 Diamond-like carbon |
| 06/06/2013 | US20130143415 Multi-Component Film Deposition |
| 06/06/2013 | US20130143326 Ultrathin parylene-c semipermeable membranes for biomedical applications |
| 06/06/2013 | US20130143146 Hybrid porous materials and manufacturing methods and uses thereof |
| 06/06/2013 | US20130143067 Anti-oxidation coating using graphene |
| 06/06/2013 | US20130143018 Coated Polymer Films |
| 06/06/2013 | US20130143017 Coating structure and method for forming the same |
| 06/06/2013 | US20130142994 Coated articles including anti-fingerprint and/or smudge-reducing coatings, and/or methods of making the same |
| 06/06/2013 | US20130140776 Sliding element, in particular piston ring, having a coating and process for producing a sliding element |
| 06/06/2013 | US20130140646 Transistor with reduced depletion field width |
| 06/06/2013 | US20130139753 Apparatus for manufacturing substrate |
| 06/06/2013 | DE112011102327T5 Schichtbildungsvorrichtung Film forming apparatus |
| 06/06/2013 | DE102011087667A1 Surface treatment of diamond-like carbon layer on component for valve train, crank drive or gear of internal combustion engine, where carbon layer is radiated with hard material that comprises spherical surface and/or irregular surface |
| 06/05/2013 | EP2600394A1 Epitaxial substrate for semiconductor element, semiconductor element, pn junction diode, and production method for epitaxial substrate for semiconductor element |
| 06/05/2013 | EP2599108A2 Substrate processing apparatuses and systems |
| 06/05/2013 | EP2598669A1 Method for synthesizing a material, in particular diamonds, by chemical vapor deposition, as well as device for applying the method |
| 06/05/2013 | EP2598584A1 Optical article including an antireflecting coating having antifog properties and process for making same |
| 06/05/2013 | EP2598453A1 Device and method for substrate processing |
| 06/05/2013 | CN202977387U Silicon chip plated film bearing device |
| 06/05/2013 | CN202968692U Device for forming aluminum-doped zinc oxide (AZO) film on substrate |
| 06/05/2013 | CN202968691U PECVD (Plasma Enhanced Chemical Vapor Deposition) coating device and connecting device of radio frequency power supply and vacuum cavity of PECVD coating device |
| 06/05/2013 | CN202968690U Novel main pipe back tail gas pipeline structure of MOCVD (metal organic chemical vapor deposition) equipment |
| 06/05/2013 | CN202968689U Quartz ampoule inner-wall carbon film preparation device for single crystal growth |
| 06/05/2013 | CN202968688U Square-box type film coater for solar heat-absorbing films |
| 06/05/2013 | CN202968687U Sheet assembling and disassembling mechanism for rotary type continuous film-coating device |
| 06/05/2013 | CN202968686U Rotary continuous coating device |
| 06/05/2013 | CN202968685U Rotary vacuum coating device |
| 06/05/2013 | CN103140922A Plasma processing apparatus and plasma processing method |
| 06/05/2013 | CN103140602A Exhaust for cvd reactor |
| 06/05/2013 | CN103140439A Method for producing graphene at a low temperature, method for direct transfer of graphene using same, and graphene sheet |
| 06/05/2013 | CN103137905A Mask assembly and organic light emitting diode display |
| 06/05/2013 | CN103137859A Forming method and forming device of magnetic material layers |
| 06/05/2013 | CN103137858A Forming method and forming device of magnetic material layers |
| 06/05/2013 | CN103137525A Vaporized material supply apparatus, substrate processing apparatus and vaporized material supply method |
| 06/05/2013 | CN103137521A Air inlet device |
| 06/05/2013 | CN103137416A Device for applying electromagnetic microwave radiation in a plasma inside a hollow glass substrate tube, and method for manufacturing an optical preform |
| 06/05/2013 | CN103135162A Diamond optical fiber and manufacturing method thereof |
| 06/05/2013 | CN103132055A Substrate material loading assembly, substrate loading and unloading device and plasma enhanced chemical vapor deposition (PECVD) device |
| 06/05/2013 | CN103132054A Plasma processing device |
| 06/05/2013 | CN103132053A Gas preheating system for chemical vapor deposition |
| 06/05/2013 | CN103132052A Pick-place device for reaction source bottles |
| 06/05/2013 | CN103132051A Chemical vapor deposition reactor or epitaxial layer growth reactor and support device thereof |
| 06/05/2013 | CN103132050A Tellurium (te) precursors for making phase change memory materials |
| 06/05/2013 | CN103132049A Forming method of silicon thin film and forming device |
| 06/05/2013 | CN103132048A A polycrystalline diamond grinding material and preparation method for chemical vapor deposition (CVD) |
| 06/05/2013 | CN103132047A Method of laser-assisted lossless transfer of chemical vapor deposition (CVD) graphene |
| 06/05/2013 | CN103132046A Tungsten film forming method |
| 06/05/2013 | CN103132045A Preparation method for coatings of medical supplies and products thereof |
| 06/05/2013 | CN103132042A Adjustable fixture |
| 06/05/2013 | CN103132016A Membrane edge adjusting device |
| 06/05/2013 | CN103132015A Mask for deposition and manufacturing method of the same |
| 06/05/2013 | CN103130245A Blue light light-emitting diode (LED) gallium nitride epitaxy process tail gas recovery method |
| 06/05/2013 | CN103128327A Surface-coated cutting tool in which hard coating layer demonstrates excellent chipping resistance |
| 06/05/2013 | CN103128326A Surface-coated cutting tool in which hard coating layer demonstrates excellent chipping resistance |
| 06/05/2013 | CN103128325A Surface-coated cutting tool in which hard coating layer demonstrates excellent chipping resistance |
| 06/05/2013 | CN102766854B Novel system for metal-organic chemical vapor deposition (MOCVD) |
| 06/05/2013 | CN102400110B Diversion dustproof gas control tray for vapor deposition and clean production method in vapor deposition furnace |
| 06/05/2013 | CN102339872B Multilayer silicon nitride antireflection film of crystalline silicon solar cell and preparation method of multilayer silicon nitride antireflection film |
| 06/05/2013 | CN102191502B Gas shower structure and substrate processing apparatus |
| 06/05/2013 | CN102136411B UV curing system |
| 06/05/2013 | CN102084027B Surface treatment method for treating surface of substrate to be highly hydrophobic |
| 06/05/2013 | CN102080214B Coating device |