Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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07/28/1998 | US5785763 Electron-gun evaporation system having evaporation-source stream regulator |
07/28/1998 | US5785518 Masking element fixture |
07/28/1998 | US5784799 Vacuum processing apparatus for substate wafers |
07/28/1998 | CA2111343C Improvements in or relating to razor blades |
07/23/1998 | WO1998032128A1 Magnetic recording medium |
07/23/1998 | WO1998031848A1 Processing system and method for processing discrete sheets |
07/23/1998 | WO1998031847A1 Crystal holder |
07/23/1998 | WO1998031845A1 Vapor deposition components and corresponding methods |
07/23/1998 | DE3448572C2 Vacuum equipment esp. for IC prodn. |
07/23/1998 | DE19701419A1 Substrate holding unit |
07/22/1998 | EP0854494A2 Dose control for use in an ion implanter |
07/22/1998 | EP0854205A1 Work surface treatment method and work surface treatment apparatus |
07/22/1998 | EP0854203A1 Substrate coating apparatus |
07/22/1998 | EP0854202A2 Organic substrate provided with a light absorptive antireflection film and process for its production |
07/22/1998 | EP0854201A1 Three-dimensional masking method for control of optical coating thickness |
07/22/1998 | EP0853685A2 Transparent heat protection foil and process for producing the same |
07/22/1998 | EP0745148A4 Sputtering method and apparatus for depositing a coating onto substrate |
07/22/1998 | EP0697110B1 Process of Production of a Suspended Gate Field Effect Transistor |
07/22/1998 | EP0577667B1 Arc source macroparticle filter |
07/22/1998 | EP0549584B1 Cvd and pvd coated cutting tools |
07/22/1998 | CN1188516A Method of manufacturing substrate with thin film, and manufacturing apparatus |
07/22/1998 | CN1039247C Crucible with titanium diboride coating and its manufacturing method |
07/21/1998 | US5784201 Radiation transparent substrate, dielectric layers, second layer having diamond-like carbon film |
07/21/1998 | US5783795 Bonding of sputtering target by variable polarity plasma arc welding |
07/21/1998 | US5783716 Liquid solution of organoplatinum compound and solvent |
07/21/1998 | US5783641 Process for modifying surfaces of polymers, and polymers having surfaces modified by such process |
07/21/1998 | US5783295 Improved hardness of protective composite coating |
07/21/1998 | US5783282 Resputtering to achieve better step coverage of contact holes |
07/21/1998 | US5783262 Depositing by ion beam sputtering of metal oxide target in an inert gas atmosphere in the absence of oxygen |
07/21/1998 | US5783261 Using injector having steel surfaces coated with ion implanted stabilized amorphous carbon-based coating to reduce wear |
07/21/1998 | US5783055 Multi-chamber sputtering apparatus |
07/21/1998 | US5783048 Thin film on substrate; using magnet |
07/16/1998 | WO1998031041A1 Vapour deposition coating apparatus |
07/16/1998 | WO1998030730A1 Vacuum coating system |
07/16/1998 | WO1998030338A1 Modular coating fixture |
07/16/1998 | DE19700408A1 Vakuum-Beschichtungsanlage Vacuum coating machine |
07/16/1998 | DE19700407A1 Compact vacuum coating installation |
07/16/1998 | DE19700406A1 Vacuum coating installation operating process |
07/15/1998 | EP0853345A1 METHOD FOR FORMING CdTe FILM AND SOLAR BATTERY USING THE FILM |
07/15/1998 | EP0853336A2 Method forming preferred orientation-controlled platinum films using nitrogen |
07/15/1998 | EP0853331A2 Back sputtering shield |
07/15/1998 | EP0853330A2 Ionized PVD source to produce uniform low-particle deposition |
07/15/1998 | EP0853136A1 Aluminum or aluminum alloy sputtering target |
07/15/1998 | EP0826131A4 Unibody crucible |
07/15/1998 | EP0748260A4 Ion beam process for deposition of highly abrasion-resistant coatings |
07/15/1998 | EP0684908B1 Safety document and process for producing the same |
07/15/1998 | EP0579756B1 Coated cutting tool |
07/15/1998 | CN2286188Y High-temperature verticle double-end ion film-plating machine |
07/15/1998 | CN1187884A Optical multiplexing device and method |
07/15/1998 | CN1187804A Mixed oxide high index optical coating material and method |
07/14/1998 | US5781692 Quartz lamp heater assembly for thin film deposition apparatus |
07/14/1998 | US5781376 Magnetic head with polycrystalline silicon layer on slide running surface |
07/14/1998 | US5780874 Process for forming fluorinated resin or amorphous carbon layer and devices containing same |
07/14/1998 | US5780863 Accelerator-decelerator electrostatic lens for variably focusing and mass resolving an ion beam in an ion implanter |
07/14/1998 | US5780820 Film-like heater made of high crystalline graphite film |
07/14/1998 | US5780803 Process for the stabilization of plasma generation by means of electron beam vaporizer |
07/14/1998 | US5780755 Comprising a body of aluminum which may be alloyed with atleast one metal selected from coppoer, silicon, zirconium, titanium, tungsten, rhenium, scandium, cobalt, molybdenum, platinum, gold, hafnium and alloys with specific grain size |
07/14/1998 | US5780357 Deposition process for coating or filling re-entry shaped contact holes |
07/14/1998 | US5780120 Method for preparing laser faces |
07/14/1998 | US5779802 Useful for deposition and oxidation of metal oxides, reduction of indium tin oxide using oxygen and nitrogen plasma |
07/14/1998 | US5778969 Apparatus for thermal treatment of thin wafers |
07/14/1998 | US5778682 Reactive PVD with NEG pump |
07/09/1998 | WO1998029901A1 Method and device for treating a semiconductor surface |
07/09/1998 | WO1998029704A1 Thermally conductive chuck for vacuum processor |
07/09/1998 | WO1998029578A1 Method for forming film by plasma polymerization and apparatus for forming film by plasma polymerization |
07/09/1998 | WO1998029213A1 Method of making high purity copper sputtering targets |
07/09/1998 | WO1998029211A1 Coated cutting insert or cutting insert blank and method for producing coated cutting inserts for chip-removal of metal |
07/08/1998 | EP0852266A1 Target, process for production thereof, and method of forming highly refractive film |
07/08/1998 | EP0707092B1 Slide member and method of its production |
07/07/1998 | US5778302 Methods of making Cr-Me sputter targets and targets produced thereby |
07/07/1998 | US5777838 Electrostatic chuck and method of attracting wafer |
07/07/1998 | US5777792 Optical film, an antireflection film, a reflection film, a method for forming the optical film, the antireflection film or the reflection film and an optical device |
07/07/1998 | US5777438 Apparatus for implanting metal ions in metals and ceramics |
07/07/1998 | US5777209 Leakage detection apparatus equipped with universal adapter head and method of testing |
07/07/1998 | US5776847 Stabilized vapour-deposition materials based on titanium oxide |
07/07/1998 | US5776790 C4 Pb/Sn evaporation process |
07/07/1998 | US5776615 Superhard composite materials including compounds of carbon and nitrogen deposited on metal and metal nitride, carbide and carbonitride |
07/07/1998 | US5776556 Vacuum deposition |
07/07/1998 | US5776359 Giant magnetoresistive cobalt oxide compounds |
07/07/1998 | US5776266 Oxidation protection method for titanium |
07/07/1998 | US5776256 Coating chamber planetary gear mirror rotating system |
07/07/1998 | US5775416 Temperature controlled chuck for vacuum processing |
07/07/1998 | CA2064169C Method of forming compound oxide superconducting thin film |
07/07/1998 | CA2023205C Method of depositing directly activated species onto a remotely located substrate |
07/07/1998 | CA2015807C Liquid transfer articles and method for producing them |
07/02/1998 | WO1998028779A1 Device for cathodic sputtering |
07/02/1998 | WO1998028778A1 Device for cathodic sputtering |
07/02/1998 | WO1998028777A1 Device and method for cathodic sputtering |
07/02/1998 | WO1998028461A1 Vacuum treatment equipment |
07/02/1998 | WO1998028460A1 Vacuum treatment equipment |
07/02/1998 | WO1998028459A1 Precision etching and coating system |
07/02/1998 | DE19703848A1 Beschichteter Schneideinsatz oder Schneideinsatzrohling und Verfahren zur Herstellung von beschichteten Schneideinsätzen zum Zerspanen Coated cutting insert or cutting insert blank and method for producing coated cutting inserts for machining |
07/02/1998 | DE19703338A1 Workpieces preheating for vacuum coating |
07/01/1998 | EP0851453A1 Endcap for indirectly heated cathode of ion source |
07/01/1998 | EP0851042A2 Crucible of pyrolytic boron nitride for molecular beam epitaxy |
07/01/1998 | EP0850140A1 Method of applying a coating selectively to parts of a transparent plate |
07/01/1998 | EP0740710A4 Magnetron sputtering apparatus for compound thin films |
07/01/1998 | CN1186126A Ion plating apparatus that prevents wasteful consumption of evaporation material |
07/01/1998 | CN1186125A Process for plating on calabash |
07/01/1998 | CN1186124A Growth of nitrogen-oxygen-silicon film |