Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
07/1998
07/28/1998US5785763 Electron-gun evaporation system having evaporation-source stream regulator
07/28/1998US5785518 Masking element fixture
07/28/1998US5784799 Vacuum processing apparatus for substate wafers
07/28/1998CA2111343C Improvements in or relating to razor blades
07/23/1998WO1998032128A1 Magnetic recording medium
07/23/1998WO1998031848A1 Processing system and method for processing discrete sheets
07/23/1998WO1998031847A1 Crystal holder
07/23/1998WO1998031845A1 Vapor deposition components and corresponding methods
07/23/1998DE3448572C2 Vacuum equipment esp. for IC prodn.
07/23/1998DE19701419A1 Substrate holding unit
07/22/1998EP0854494A2 Dose control for use in an ion implanter
07/22/1998EP0854205A1 Work surface treatment method and work surface treatment apparatus
07/22/1998EP0854203A1 Substrate coating apparatus
07/22/1998EP0854202A2 Organic substrate provided with a light absorptive antireflection film and process for its production
07/22/1998EP0854201A1 Three-dimensional masking method for control of optical coating thickness
07/22/1998EP0853685A2 Transparent heat protection foil and process for producing the same
07/22/1998EP0745148A4 Sputtering method and apparatus for depositing a coating onto substrate
07/22/1998EP0697110B1 Process of Production of a Suspended Gate Field Effect Transistor
07/22/1998EP0577667B1 Arc source macroparticle filter
07/22/1998EP0549584B1 Cvd and pvd coated cutting tools
07/22/1998CN1188516A Method of manufacturing substrate with thin film, and manufacturing apparatus
07/22/1998CN1039247C Crucible with titanium diboride coating and its manufacturing method
07/21/1998US5784201 Radiation transparent substrate, dielectric layers, second layer having diamond-like carbon film
07/21/1998US5783795 Bonding of sputtering target by variable polarity plasma arc welding
07/21/1998US5783716 Liquid solution of organoplatinum compound and solvent
07/21/1998US5783641 Process for modifying surfaces of polymers, and polymers having surfaces modified by such process
07/21/1998US5783295 Improved hardness of protective composite coating
07/21/1998US5783282 Resputtering to achieve better step coverage of contact holes
07/21/1998US5783262 Depositing by ion beam sputtering of metal oxide target in an inert gas atmosphere in the absence of oxygen
07/21/1998US5783261 Using injector having steel surfaces coated with ion implanted stabilized amorphous carbon-based coating to reduce wear
07/21/1998US5783055 Multi-chamber sputtering apparatus
07/21/1998US5783048 Thin film on substrate; using magnet
07/16/1998WO1998031041A1 Vapour deposition coating apparatus
07/16/1998WO1998030730A1 Vacuum coating system
07/16/1998WO1998030338A1 Modular coating fixture
07/16/1998DE19700408A1 Vakuum-Beschichtungsanlage Vacuum coating machine
07/16/1998DE19700407A1 Compact vacuum coating installation
07/16/1998DE19700406A1 Vacuum coating installation operating process
07/15/1998EP0853345A1 METHOD FOR FORMING CdTe FILM AND SOLAR BATTERY USING THE FILM
07/15/1998EP0853336A2 Method forming preferred orientation-controlled platinum films using nitrogen
07/15/1998EP0853331A2 Back sputtering shield
07/15/1998EP0853330A2 Ionized PVD source to produce uniform low-particle deposition
07/15/1998EP0853136A1 Aluminum or aluminum alloy sputtering target
07/15/1998EP0826131A4 Unibody crucible
07/15/1998EP0748260A4 Ion beam process for deposition of highly abrasion-resistant coatings
07/15/1998EP0684908B1 Safety document and process for producing the same
07/15/1998EP0579756B1 Coated cutting tool
07/15/1998CN2286188Y High-temperature verticle double-end ion film-plating machine
07/15/1998CN1187884A Optical multiplexing device and method
07/15/1998CN1187804A Mixed oxide high index optical coating material and method
07/14/1998US5781692 Quartz lamp heater assembly for thin film deposition apparatus
07/14/1998US5781376 Magnetic head with polycrystalline silicon layer on slide running surface
07/14/1998US5780874 Process for forming fluorinated resin or amorphous carbon layer and devices containing same
07/14/1998US5780863 Accelerator-decelerator electrostatic lens for variably focusing and mass resolving an ion beam in an ion implanter
07/14/1998US5780820 Film-like heater made of high crystalline graphite film
07/14/1998US5780803 Process for the stabilization of plasma generation by means of electron beam vaporizer
07/14/1998US5780755 Comprising a body of aluminum which may be alloyed with atleast one metal selected from coppoer, silicon, zirconium, titanium, tungsten, rhenium, scandium, cobalt, molybdenum, platinum, gold, hafnium and alloys with specific grain size
07/14/1998US5780357 Deposition process for coating or filling re-entry shaped contact holes
07/14/1998US5780120 Method for preparing laser faces
07/14/1998US5779802 Useful for deposition and oxidation of metal oxides, reduction of indium tin oxide using oxygen and nitrogen plasma
07/14/1998US5778969 Apparatus for thermal treatment of thin wafers
07/14/1998US5778682 Reactive PVD with NEG pump
07/09/1998WO1998029901A1 Method and device for treating a semiconductor surface
07/09/1998WO1998029704A1 Thermally conductive chuck for vacuum processor
07/09/1998WO1998029578A1 Method for forming film by plasma polymerization and apparatus for forming film by plasma polymerization
07/09/1998WO1998029213A1 Method of making high purity copper sputtering targets
07/09/1998WO1998029211A1 Coated cutting insert or cutting insert blank and method for producing coated cutting inserts for chip-removal of metal
07/08/1998EP0852266A1 Target, process for production thereof, and method of forming highly refractive film
07/08/1998EP0707092B1 Slide member and method of its production
07/07/1998US5778302 Methods of making Cr-Me sputter targets and targets produced thereby
07/07/1998US5777838 Electrostatic chuck and method of attracting wafer
07/07/1998US5777792 Optical film, an antireflection film, a reflection film, a method for forming the optical film, the antireflection film or the reflection film and an optical device
07/07/1998US5777438 Apparatus for implanting metal ions in metals and ceramics
07/07/1998US5777209 Leakage detection apparatus equipped with universal adapter head and method of testing
07/07/1998US5776847 Stabilized vapour-deposition materials based on titanium oxide
07/07/1998US5776790 C4 Pb/Sn evaporation process
07/07/1998US5776615 Superhard composite materials including compounds of carbon and nitrogen deposited on metal and metal nitride, carbide and carbonitride
07/07/1998US5776556 Vacuum deposition
07/07/1998US5776359 Giant magnetoresistive cobalt oxide compounds
07/07/1998US5776266 Oxidation protection method for titanium
07/07/1998US5776256 Coating chamber planetary gear mirror rotating system
07/07/1998US5775416 Temperature controlled chuck for vacuum processing
07/07/1998CA2064169C Method of forming compound oxide superconducting thin film
07/07/1998CA2023205C Method of depositing directly activated species onto a remotely located substrate
07/07/1998CA2015807C Liquid transfer articles and method for producing them
07/02/1998WO1998028779A1 Device for cathodic sputtering
07/02/1998WO1998028778A1 Device for cathodic sputtering
07/02/1998WO1998028777A1 Device and method for cathodic sputtering
07/02/1998WO1998028461A1 Vacuum treatment equipment
07/02/1998WO1998028460A1 Vacuum treatment equipment
07/02/1998WO1998028459A1 Precision etching and coating system
07/02/1998DE19703848A1 Beschichteter Schneideinsatz oder Schneideinsatzrohling und Verfahren zur Herstellung von beschichteten Schneideinsätzen zum Zerspanen Coated cutting insert or cutting insert blank and method for producing coated cutting inserts for machining
07/02/1998DE19703338A1 Workpieces preheating for vacuum coating
07/01/1998EP0851453A1 Endcap for indirectly heated cathode of ion source
07/01/1998EP0851042A2 Crucible of pyrolytic boron nitride for molecular beam epitaxy
07/01/1998EP0850140A1 Method of applying a coating selectively to parts of a transparent plate
07/01/1998EP0740710A4 Magnetron sputtering apparatus for compound thin films
07/01/1998CN1186126A Ion plating apparatus that prevents wasteful consumption of evaporation material
07/01/1998CN1186125A Process for plating on calabash
07/01/1998CN1186124A Growth of nitrogen-oxygen-silicon film