| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 01/28/1998 | EP0687190A4 A spatially distributed sma actuator film |
| 01/28/1998 | CN1171839A Antireflection coating for temp. sensitive substrate |
| 01/28/1998 | CN1171495A Compressor for refrigerator |
| 01/27/1998 | US5712193 Method of treating metal nitride films to reduce silicon migration therein |
| 01/27/1998 | US5711993 Radiation cured island coating system |
| 01/27/1998 | US5711860 Method and apparatus for producing a substrate with low secondary electron emissions |
| 01/27/1998 | US5711858 Process for depositing a conductive thin film upon an integrated circuit substrate |
| 01/27/1998 | US5711812 Apparatus for obtaining dose uniformity in plasma doping (PLAD) ion implantation processes |
| 01/27/1998 | US5711810 Apparatus for variable optical focusing for processing chambers |
| 01/27/1998 | US5711773 Abrasive material for precision surface treatment and a method for the manufacturing thereof |
| 01/23/1998 | CA2211149A1 Platinum aluminising single crystal superalloys |
| 01/22/1998 | WO1998002597A1 Sputtering device and liquid-cooled target assembly therefor |
| 01/22/1998 | WO1998002596A1 Vacuum coating system with a coating chamber and at least one source chamber |
| 01/22/1998 | DE19653999C1 Cathode sputtering apparatus |
| 01/21/1998 | EP0820088A2 Non-planar magnet tracking device for magnetron sputtering apparatus |
| 01/21/1998 | EP0820087A2 RF plasma reactor with hybrid conductor and multi-radius dome ceiling |
| 01/21/1998 | EP0819782A1 Process of forming a thin film by laser ablation |
| 01/21/1998 | CN1170957A Method for forming metal wiring of semiconductor devices |
| 01/21/1998 | CN1170774A Vacuum coating equipment for evaporating coating on optical base sheet |
| 01/21/1998 | CN1170773A Base sheet rack of vacuum coating equipment |
| 01/20/1998 | US5710486 Inductively and multi-capacitively coupled plasma reactor |
| 01/20/1998 | US5710384 Mechanical strength |
| 01/20/1998 | US5709957 Metallic body with vapor-deposited treatment layer(s) and adhesion-promoting layer |
| 01/20/1998 | US5709951 Composite deposited film and production process thereof |
| 01/20/1998 | US5709938 Improved sputter properties in reactive and inert atmospheres |
| 01/20/1998 | US5709930 Coated substrate |
| 01/20/1998 | US5709907 Method of making coated cutting tools |
| 01/20/1998 | US5709785 Metallizing machine |
| 01/20/1998 | US5709784 Process and apparatus for workpiece coating |
| 01/20/1998 | US5709783 Preparation of sputtering targets |
| 01/20/1998 | US5709519 Plasma processing apparatus |
| 01/15/1998 | WO1998001599A1 Microwave applicator for an electron cyclotron resonance plasma source |
| 01/15/1998 | WO1998001598A1 Aluminum or aluminum alloy sputtering target |
| 01/15/1998 | WO1998001596A1 Production of nanometer particles by directed vapor deposition of electron beam evaporant |
| 01/15/1998 | DE19727343A1 High current carrying capacity superconductive layer production |
| 01/15/1998 | DE19641400C1 Application of thin layer containing boron by vacuum coating |
| 01/15/1998 | DE19637450C1 Wear-resistant surface layer structure |
| 01/15/1998 | DE19628102A1 Vakuumbeschichtungsanlage mit einer Beschichtungskammer und zumindest einer Quellenkammer Vacuum coating system with a coating chamber and at least a source chamber |
| 01/15/1998 | DE19627533A1 Target for the sputter cathode of a vacuum coating installation |
| 01/14/1998 | EP0818832A2 Method for the production of a superconductive layer |
| 01/14/1998 | EP0818803A2 Electrically floating shield in a plasma reactor |
| 01/14/1998 | EP0818622A1 Using a coated fuel injector and method of making |
| 01/14/1998 | EP0818557A1 Method and apparatus for forming a coating on a substrate |
| 01/14/1998 | EP0818556A1 A method for providing full-face high density plasma deposition |
| 01/14/1998 | EP0818050A1 Boron nitride cold cathode |
| 01/14/1998 | EP0707663A4 Sputtering device |
| 01/14/1998 | CN1170441A In site getter pump system and method |
| 01/14/1998 | CN1037037C Barium ferrite thin film for recording |
| 01/13/1998 | US5707887 Method of manufacturing a non-volatile random accessible memory device |
| 01/13/1998 | US5707748 Coated tool with increased service life |
| 01/13/1998 | US5707706 Magnetic recording disk medium having a magnetic layer with uniform properties over the disk surface |
| 01/13/1998 | US5707500 Vacuum processing equipment, film coating equipment and deposition method |
| 01/13/1998 | US5707498 Avoiding contamination from induction coil in ionized sputtering |
| 01/13/1998 | US5707452 Coaxial microwave applicator for an electron cyclotron resonance plasma source |
| 01/13/1998 | US5707409 Abrasive article having a diamond-like coating layer and method for making same |
| 01/08/1998 | WO1998000572A1 Magnetic disk substrates formed of ceramic-metal matrix composites with or without metal cladding |
| 01/08/1998 | WO1998000432A1 Platinum source compositions for chemical vapor deposition of platinum |
| 01/08/1998 | DE19641584C1 Vacuum coating device for application of substrate thin-film layers |
| 01/08/1998 | DE19635735C1 Holder clamp for coating small components |
| 01/08/1998 | DE19626732A1 Sputtering target production and recycling |
| 01/08/1998 | DE19626440C1 Verfahren zur Herstellung eines Titan-Keramik-Haftverbundes für Zahnersatz und ein daraus hergestellter Titan-Keramik-Haftverbund A process for producing a titanium-ceramic adhesive bond for dentures and of derived titanium-ceramic adhesive composite |
| 01/08/1998 | DE19625329A1 Stoffverbund und Verfahren zu dessen Herstellung Composite material and process for its preparation |
| 01/08/1998 | CA2259483A1 Magnetic disk substrates formed of ceramic-metal matrix composites with or without metal cladding |
| 01/07/1998 | EP0817238A1 Aluminium cast part and method for its fabrication |
| 01/07/1998 | EP0816529A1 Vacuum treatment apparatus for coating of substrates |
| 01/07/1998 | EP0816528A1 A method for depositing zirconium oxide on a substrate |
| 01/07/1998 | EP0816466A1 Method of photocatalytically making the surface of base material ultrahydrophilic, base material having ultrahydrophilic and photocatalytic surface, and process for producing said material |
| 01/07/1998 | EP0816123A2 Member for fishing or sport tool |
| 01/07/1998 | EP0815953A2 Method for depositing substituted fluorocarbon polymeric layers |
| 01/07/1998 | EP0815501A2 Apparatus and method for controlling high throughput sputtering |
| 01/07/1998 | EP0815283A1 Plasma chamber |
| 01/07/1998 | EP0815282A2 Industrial vapor conveyance and separation |
| 01/07/1998 | EP0815281A1 Photoionic microhead device |
| 01/07/1998 | EP0814853A1 Novel biocompatible prosthetic material, prostheses or prosthetic systems consisting of said material, and method for preparing same by dual calcium and phosphorus ion implantation |
| 01/07/1998 | EP0741909A4 Methods for improving semiconductor processing |
| 01/07/1998 | EP0662025B1 Coated grinding tools and methods for their preparation |
| 01/07/1998 | EP0580837B1 Process for producing thin films by means of reactive cathode sputtering and device for implementing it |
| 01/07/1998 | CN1169757A Method for depositing hard protective coating |
| 01/07/1998 | CN1169756A Synthetic resin molded article and process for producing same |
| 01/07/1998 | CN1169477A Method for evapourating coating-film on optical base-substrate |
| 01/06/1998 | US5705277 Pane with transmission properties that vary with the angle of incidence |
| 01/06/1998 | US5705267 Protective layer of silicon oxide |
| 01/06/1998 | US5705234 Method for manufacturing magnetic hard disk |
| 01/06/1998 | US5705226 Formation of magnesium vapor with high evaporation speed |
| 01/06/1998 | US5705044 Modular sputtering machine having batch processing and serial thin film sputtering |
| 01/06/1998 | US5705042 Sputter coating |
| 01/06/1998 | US5705041 Method of minimizing surface effects in thin ferroelectrics |
| 01/06/1998 | US5704980 Partially oxidized aluminum layer |
| 01/02/1998 | DE19725404A1 Low-energy electron diffraction system for measurements on a sample prepared by physical vapour deposition |
| 01/02/1998 | DE19624609A1 Vacuum processing installation for application of thin layers to substrates |
| 12/31/1997 | WO1997050108A1 Aluminium cast part, and process for the production thereof |
| 12/31/1997 | WO1997049840A1 Composite material and method of manufacturing it |
| 12/31/1997 | CN1169094A Plasma source |
| 12/30/1997 | US5703436 Transparent contacts for organic devices |
| 12/30/1997 | US5703375 Method and apparatus for ion beam neutralization |
| 12/30/1997 | US5703372 For use in an ion implanter |
| 12/30/1997 | US5702829 Multilayer material, anti-erosion and anti-abrasion coating incorporating said multilayer material |
| 12/30/1997 | US5702770 Applying a barrier film to interior wall of plastic substrate |
| 12/30/1997 | US5702764 Method for the preparation of pyrolytic boron nitride-clad double-coated article |
| 12/30/1997 | US5702573 Method and apparatus for improved low pressure collimated magnetron sputter deposition of metal films |