| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 06/30/1998 | US5773841 Self aligning vacuum seal assembly |
| 06/30/1998 | US5773834 Method of forming carbon nanotubes on a carbonaceous body, composite material obtained thereby and electron beam source element using same |
| 06/30/1998 | US5773363 Semiconductor processing method of making electrical contact to a node |
| 06/30/1998 | US5773154 Article having a decorative metal layer, and method of producing the same |
| 06/30/1998 | US5773088 Thin film packaging |
| 06/30/1998 | US5773085 Method of manufacturing ternary compound thin films |
| 06/30/1998 | US5773078 Method for depositing zirconium oxide on a substrate |
| 06/30/1998 | US5772862 Sputtering target, silica and zirconia |
| 06/30/1998 | US5772861 System for evaluating thin film coatings |
| 06/30/1998 | US5772860 High purity titanium sputtering targets |
| 06/30/1998 | US5772858 Method and apparatus for cleaning a target in a sputtering source |
| 06/30/1998 | US5772760 Method for the preparation of nanocrystalline diamond thin films |
| 06/30/1998 | US5772758 Near real-time extraction of deposition and pre-deposition characteristics from rotating substrates and control of a deposition apparatus in near real-time |
| 06/30/1998 | US5772431 Thin-film solar cell manufacturing apparatus and manufacturing method |
| 06/25/1998 | WO1998027251A1 Apparatus for growing silicon carbide crystals |
| 06/25/1998 | WO1998027246A1 Sputter cathode for application of radioactive material |
| 06/25/1998 | DE19715501C1 Method for structuring thin metal layers. |
| 06/24/1998 | EP0849811A2 Apparatus for forming non-single-crystal semiconductor thin film, method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device |
| 06/24/1998 | EP0848762A1 Substrate fixture |
| 06/24/1998 | EP0848761A1 Device comprising a photoionic micro-head |
| 06/24/1998 | EP0848711A1 Method for the selective hydrogenation of vinyl oxirane to butylene oxide |
| 06/24/1998 | EP0543844B1 Cantilever mount for rotating cylindrical magnetrons |
| 06/24/1998 | CN1185761A Method and apparatus for circuit board treatment |
| 06/23/1998 | US5770988 Thin-film multilayered electrode and method of fabricating same |
| 06/23/1998 | US5770547 Heating, cooling, crystallization for obtaining the highest glass transition temperature |
| 06/23/1998 | US5770293 Method of forming recordable optical element using low absorption materials |
| 06/23/1998 | US5770270 Protective and/or reflectivity enhancement of noble metal |
| 06/23/1998 | US5770255 Biocompatible metal |
| 06/23/1998 | US5770026 Semiconductor fabrication apparatus having improved sputtering collimator and wiring method for a semiconductor device using such apparatus |
| 06/23/1998 | US5770025 Magnetron sputtering apparatus |
| 06/23/1998 | US5770023 Combined etching by inert gases and sputtering by reactive gases |
| 06/18/1998 | WO1998026110A1 Hot-gas exposable product fitted with a heat-insulating layer and a method for the production thereof |
| 06/18/1998 | WO1998026108A1 Process and device for forming a coating on a substrate by cathode sputtering |
| 06/18/1998 | WO1998026107A1 Diffusion bonded sputtering target assembly with precipitation hardened backing plate and method of making same |
| 06/18/1998 | WO1998026106A1 Low friction coating |
| 06/18/1998 | DE19714317C1 Surface treatment of steel tool, especially cold pilger rolling mandrel |
| 06/18/1998 | DE19652471A1 Damage-free compound semiconductor passivation |
| 06/18/1998 | DE19651811A1 Large area thin film deposition apparatus |
| 06/18/1998 | DE19651378A1 Insulating thin film sputter deposition apparatus |
| 06/17/1998 | EP0848421A2 Selective physical vapor deposition conductor fill in IC structures |
| 06/17/1998 | EP0848081A2 Method and apparatus for physical vapour deposition |
| 06/17/1998 | EP0848080A1 Diffusion-bonded sputtering target assembly and method of manufacturing the same |
| 06/17/1998 | EP0848077A1 Thermal barrier coating systems and materials |
| 06/17/1998 | CN1185183A Erosion/corrosion protective coating for high-temp. components |
| 06/17/1998 | CN1185089A Surface coating for insulative materials, method of obtaining it and its appcation to shlelding insulative cases |
| 06/17/1998 | CN1184863A Method and apparatus for orientation growth of lithium ferrous niobate by electric field induction |
| 06/17/1998 | CN1184859A Method for prepn. of multi-arc ion sputtering alloy coatings |
| 06/17/1998 | CN1038731C Hard alloy with binder phase enriched surface zone |
| 06/16/1998 | US5767522 Ion-implantation system using split ion beams |
| 06/16/1998 | US5767002 Method of manufacturing a multi-layer film each layer having single-layer area |
| 06/16/1998 | US5766783 Boron-aluminum nitride coating and method of producing same |
| 06/16/1998 | US5766747 Magnetron sputtered boron films |
| 06/16/1998 | US5766697 Method of making ferrolectric thin film composites |
| 06/16/1998 | US5766685 Treatment method and apparatus for printed circuit boards and the like |
| 06/16/1998 | US5766426 Sputter deposition using target which emits atoms when bombarded by gaseous ions |
| 06/16/1998 | US5766380 Method for fabricating randomly oriented aluminum alloy sputtering targets with fine grains and fine precipitates |
| 06/16/1998 | US5766379 Forming metal layer on face of microelectronic substrate, forming copper layer on the metal layer, annealing to form oxide of metal on copper layer by heating to diffuse some of metal layer through copper layer |
| 06/11/1998 | WO1998024945A1 Cathode pulverisation targets in aluminium alloy |
| 06/11/1998 | WO1998024944A1 Multilayered material, process and device for producing a multilayered material |
| 06/10/1998 | EP0847092A1 Oxide insulator film having a layered structure. |
| 06/10/1998 | EP0847073A1 Ion source block cathode with labyrinth conductive path |
| 06/10/1998 | EP0846786A2 Modified physoical vapor deposition chamber and method of depositing materials at low pressure |
| 06/10/1998 | EP0846785A2 A method of metalizing ceramic members |
| 06/10/1998 | EP0846784A2 Coated tool and method of manufacturing the same |
| 06/10/1998 | EP0846195A2 Improved uniformly plated microsphere catalyst |
| 06/10/1998 | EP0846190A1 Improved parallel ion optics and apparatus for high current low energy ion beams |
| 06/10/1998 | EP0804630A4 Diamond-like carbon coated transducers for magnetic recording media |
| 06/10/1998 | DE19650181A1 Protective layer exhibiting irreversible structural compaction on heating |
| 06/10/1998 | CN1184498A Method of photocatalytically making the surface of base material ultrahydrophilic, base material having ultrahydraphilic and photocatalytic surface, and process for producing said material |
| 06/10/1998 | CN1184324A Ion source block filament with labyrinth conductive path |
| 06/09/1998 | US5764601 Method of manufacturing a magneto-optical recording medium having a readout layer with varying composition and curie temperature |
| 06/09/1998 | US5763923 Compound PVD target material for semiconductor metallization |
| 06/09/1998 | US5763890 Cathode mounting for ion source with indirectly heated cathode |
| 06/09/1998 | US5763319 Process for fabricating semiconductor devices with shallowly doped regions using dopant compounds containing elements of high solid solubility |
| 06/09/1998 | US5763107 Thermal barrier coating for a superalloy article |
| 06/09/1998 | US5763087 Hardness, reduced intrinsic stress; tools, cutters |
| 06/09/1998 | US5763073 Ultra-thin low moisture content polyester film and its applications |
| 06/09/1998 | US5763063 Multiple layer thin films with improved corrosion resistance |
| 06/09/1998 | US5763033 Blood collection tube assembly |
| 06/09/1998 | US5763020 Process for evenly depositing ions using a tilting and rotating platform |
| 06/09/1998 | US5763017 Simultaneous chemical vapor deposition on surface and biasing of substrate in plasma of ionized gases to accelerate positive ions for implantation to desired depth, then heating for diffusion and more heating for expansion of gases |
| 06/09/1998 | US5762768 Target for cathodic sputtering and method for producing the target |
| 06/09/1998 | US5762766 Sputtering by magnetron on a substrate |
| 06/09/1998 | US5762750 Magnetic neutral line discharged plasma type surface cleaning apparatus |
| 06/09/1998 | US5762748 Lid and door for a vacuum chamber and pretreatment therefor |
| 06/09/1998 | US5762714 Plasma guard for chamber equipped with electrostatic chuck |
| 06/09/1998 | CA2121266C Surface preparation and deposition method for titanium nitride onto carbonaceous |
| 06/04/1998 | WO1998023790A1 Oxidation protective coating for refractory metals |
| 06/04/1998 | WO1998023786A1 Method for production of pvd and/or pecvd hard material coatings |
| 06/04/1998 | WO1998008997A3 A cylindrical carriage sputtering system |
| 06/03/1998 | EP0845802A2 Substrate support member for uniform heating of a substrate |
| 06/03/1998 | EP0845799A2 Semiconductor processing apparatus |
| 06/03/1998 | EP0845547A1 A thermal barrier coating for a superalloy article and a method of application thereof |
| 06/03/1998 | EP0845545A1 Coated deposition chamber equipment |
| 06/03/1998 | EP0845151A1 Recessed coil for generating a plasma |
| 06/03/1998 | EP0845052A1 Sputter target/backing plate assembly and method of making same |
| 06/03/1998 | EP0845051A1 Preparation of structural materials by physical vapour deposition process |
| 06/03/1998 | EP0845050A1 Product used to guide a hot oxidizing gas |
| 06/03/1998 | CN1183746A Flexible plastic substrate with anti-reflection coating having low reflective color and method |
| 06/03/1998 | CN1183483A Diboride coated pressing surfaces for abrasion resistant laminate and making pressing surfaces |