Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
09/1998
09/22/1998US5811762 Apparatus for changing the temperature of a semiconductor wafer
09/22/1998US5811701 Device for measuring the thickness of metal film on the inner surface of a panel
09/22/1998US5811191 Multilayer antireflective coating with a graded base layer
09/22/1998US5811156 Positioning transferable colorant layer; patterning photoresist; leaving portion of transferable colorant layer over selected pixels
09/22/1998US5811050 Thermoforming sheet of polymeric material into desired shape by heating, drawing heated sheet, cooling, removing from the mold, applying electroconductive metal to the selected surface of thermoformed shape by vacuum deposition
09/22/1998US5810983 High purity cobalt sputtering targets
09/22/1998US5810982 Preferential sputtering of insulators from conductive targets
09/22/1998US5810947 Nitriding before coating with a chromium nitride film
09/22/1998CA2136580C Gallium oxide coatings for optoelectronic devices
09/22/1998CA2037432C Method of and apparatus for preparing oxide superconducting film
09/22/1998CA1340053C Method of plasma enhanced silicon oxide deposition
09/17/1998WO1998040532A1 A method and apparatus for magnetically enhanced sputtering
09/17/1998WO1998040531A1 Plastic containers with an external gas barrier coating
09/17/1998WO1998040530A1 Method for depositing texturized ysz layers through cathodic sputtering
09/17/1998WO1998040172A1 Method and apparatus for cryogenically cooling a deposition chamber
09/17/1998DE19754475A1 Layered material with textured buffer layer and oriented thin film
09/17/1998DE19727240A1 High temperature superconductor reactive vapour deposition
09/17/1998DE19710903A1 Sputtering target for optical storage layer deposition
09/17/1998CA2284181A1 A method and apparatus for magnetically enhanced sputtering
09/17/1998CA2283148A1 Plastic containers with an external gas barrier coating
09/16/1998EP0865229A2 Method for producing organic electroluminescent device
09/16/1998EP0865089A2 Production process for organic electroluminescent light emitting devices
09/16/1998EP0865077A1 Method for the formation of a thin metal silicide layer on a Si substrate, and use thereof in detector applications
09/16/1998EP0865070A1 Method and apparatus for sputter etch conditioning a ceramic body
09/16/1998EP0864827A1 Dispersion type multi-temperature control system and fluid temperature control device applicable to the system
09/16/1998EP0864537A1 Ferroelectric material, method of manufacturing the same, semiconductor memory, and method of manufacturing the same
09/16/1998EP0864003A2 METHODS OF MAKING Cr-Me SPUTTER TARGETS
09/16/1998EP0863889A1 Process for hydrogenating dihydrofuranes to tetrahydrofuranes
09/16/1998CN1039793C Mfg. method for razor blades and razor blades and parts thereof
09/15/1998US5809393 Sputtering target with ultra-fine, oriented grains and method of making same
09/15/1998US5807760 Method of despositing an aluminum-rich layer
09/15/1998US5807613 Method of producing reactive element modified-aluminide diffusion coatings
09/15/1998US5807470 Apparatus for coating substrates in a vacuum
09/15/1998US5807467 In situ preclean in a PVD chamber with a biased substrate configuration
09/15/1998US5807456 Method for producing metallic planar elements on substrates
09/15/1998US5807443 Sputtering titanium target assembly and producing method thereof
09/15/1998US5807428 Interior of high perssure, high temperature airfoil
09/15/1998US5806319 Method and apparatus for cryogenically cooling a deposition chamber
09/11/1998WO1998039262A1 Bendable mirrors and method of manufacture
09/09/1998EP0863226A1 Modular fixture for coating apparatus
09/09/1998EP0863225A1 Clampins system for positioning and contacting of evaporators in metallisation plants
09/09/1998EP0863224A1 Ceramic evaporator having tapered ends
09/09/1998CN2290608Y Rotary magnetic-controlled column arc source multi-arc ion film caoating machine
09/09/1998CN1192787A Electrically tunable coatings
09/09/1998CN1192575A Cathode mounting for ion source with indirectly heated cathode
09/09/1998CN1192483A Film growth method and film growth apparatus capable of forming magnesium oxide film with increased film growth speed
09/08/1998US5805971 Method of producing three-dimensional forms
09/08/1998US5805380 Overcoat magnetic head slider having overcoat and magnetic disk device
09/08/1998US5804878 Electronic circuit
09/08/1998US5804258 Electrostatic charge from electron beam flows off via anode; prevention of pinholes and other defects in plastic film;
09/08/1998US5804255 Method of forming transparent and conductive ultrathin films
09/08/1998US5804251 Depositing wetting layer on sides and bottom of opening in substrate, multistep filling with aluminum or alloy
09/08/1998US5804137 Corrosion and wear resistant iron alloy
09/08/1998US5804046 Collimator comprising slitted particle getter metal sheets in lattice pattern
09/08/1998US5804042 Reduces or eliminates secondary plasma around backplane
09/08/1998US5804041 Method and apparatus for forming a magnetically oriented thin film
09/08/1998US5803977 Apparatus for full wafer deposition
09/08/1998US5803976 Vacuum web coating
09/08/1998US5803971 Modular coating fixture
09/08/1998US5803521 Apparatus for gripping a flat substrate
09/08/1998US5803342 Method of making high purity copper sputtering targets
09/03/1998WO1998038349A1 Antibacterial hardwares and method of production thereof
09/03/1998WO1998038254A1 Multilayer interference pigment with transparent central layer
09/03/1998WO1998038038A1 Zinc oxide stabilized zirconia
09/03/1998WO1998037958A1 Arrangement and method for improving vacuum in a very high vacuum system
09/03/1998DE19808762A1 Low anisotropy high temperature superconductor
09/03/1998DE19724996C1 Plasma-activated electron beam vapour deposition
09/03/1998DE19711986C1 Cooled effusion cell for wideband infra=red heating of substance(s)
09/03/1998DE19708344A1 Sputtering cathode
09/03/1998DE19708341A1 Treatment of workpieces
09/03/1998DE19707806A1 Multischicht-Interferenzpigment mit transparenter Mittelschicht Multi-layer interference pigment with transparent middle layer
09/03/1998CA2253716A1 Multilayer interference pigment with transparent central layer
09/02/1998EP0861921A1 Deposition of titanium nitride films
09/02/1998EP0861920A1 Method for depositing titanium nitride
09/02/1998EP0797687A4 Cross flow metalizing of compact discs
09/02/1998EP0419461B1 Wafer handling system with bernoulli pick-up
09/02/1998CN2289803Y Normal position monitoring device for conducting membrance making process
09/02/1998CN2289802Y Large current water-cooling electrode capable of axle symmetric rotating at 360 degree in vacuum system
09/02/1998CN1192023A Hydrogenated carbon thin films
09/02/1998CN1191902A Plating method for gloss coating of parts and plated parts using the same method
09/01/1998US5800934 Zinc oxide stabilized zirconia
09/01/1998US5800864 Optical disc
09/01/1998US5800753 Chemical vapor deposition method
09/01/1998US5800687 Device for masking or covering substrates
09/01/1998US5800684 Process for the improvement of the abrasion resistance features and of the chemical inertia of transparent thin coatings
09/01/1998US5800683 Use of calcium and strontium dopants to improve retention performance in a PZT ferroelectric film
09/01/1998US5800623 Semiconductor wafer support platform
09/01/1998US5800175 Method and apparatus for re-implanting teeth
09/01/1998US5799860 Preparation and bonding of workpieces to form sputtering targets and other assemblies
09/01/1998US5799549 Amorphous diamond coating of blades
08/1998
08/27/1998WO1998037257A1 Power supply unit for sputtering device
08/27/1998WO1998037255A1 Transparent conductive film, sputtering target and substrate equipped with the transparent conductive film
08/27/1998WO1998037254A2 Thin films
08/27/1998DE19708676A1 Vacuum vapour deposition of boron-containing layer on substrate
08/26/1998EP0860888A1 Method of forming robust metal, metal oxide, and metal alloy layers on ion-conductive polymer membranes
08/26/1998EP0860854A1 Plasma immersion ion implantation method and apparatus with pulsed anode
08/26/1998EP0860514A2 Reactive sputtering apparatus and process for forming thin film using same
08/26/1998EP0860513A2 Thin film forming apparatus and process for forming thin film using same
08/26/1998EP0860404A1 Press-moulding die, method for manufacturing the same and use thereof for press-moulding a glass article
08/25/1998US5798148 Porous metal composite body