Patents
Sitemap › C23 - Coating metallic material; Coating material with metallic material; Chemical surface treatment; Diffusion treatment of metallic material; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general; Inhibiting corrosion of metallic material or incrustation in general › C23C - Coating metallic material; Coating material with metallic material; Surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general › C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
06/1998
06/03/1998CA2223362A1 Oxide insulator film having a layered structure
06/02/1998US5761593 Process for making a cemented carbide with binder phase enriched surface zone
06/02/1998US5760409 Dose control for use in an ion implanter
06/02/1998US5760366 Thin film forming apparatus using laser and magnetic field
06/02/1998US5760362 Apparatus for treating a material having a miniaturized photoionic head
06/02/1998US5759710 Magnetic recording medium with a magnetic layer having a specific oxygen signal strength profile in the thickness direction
06/02/1998US5759635 Method for depositing substituted fluorocarbon polymeric layers
06/02/1998US5759634 Vacuum depositing cadmium-selenium intermetallic; semiconductors; nonlinear optical response
06/02/1998US5759457 Method for manufacturing an optical element
06/02/1998US5759360 Wafer clean sputtering process
06/02/1998US5759287 Method of purging and passivating a semiconductor processing chamber
06/02/1998US5759282 Process for evenly depositing ions using a tilting and rotating platform
06/02/1998US5759268 System for providing a controlled deposition on wafers
06/02/1998US5759221 Method of press molding glass optical elements
06/02/1998US5759214 Nitrogen gas supply system
05/1998
05/28/1998WO1998022638A1 Method for adjusting semiconductor processing equipment
05/28/1998WO1998022636A1 Sputtering target and antiferromagnetic film and magneto-resistance effect element formed by using the same
05/28/1998WO1998022635A1 Method and apparatus for directional deposition of thin films using laser ablation
05/28/1998DE19751785A1 Filling recesses in a surface layer of a semiconductor wafer with conductive material
05/28/1998DE19751784A1 Verfahren zum Herstellen einer Barriereschicht A method for forming a barrier layer
05/28/1998DE19751708A1 Mechanical component with functional coating
05/28/1998DE19648390A1 Target for the sputter cathode of a vacuum coating plant
05/27/1998EP0844469A1 Coated high-performance structural elements or components, method of manufacturing such elements or components and device for carrying out this method
05/27/1998EP0844313A2 Method and apparatus for sputtering in a chamber having an inductively coupled plasma
05/27/1998EP0844090A2 Method of forming a multi-channel array printhead body of a drop-on-demand ink-jet printhead
05/27/1998EP0843901A1 Electrically erasable, directly overwritable, multibit single cell memory elements and arrays fabricated therefrom
05/27/1998EP0843890A1 Apparatus and method for improved deposition of conformal liner films and plugs in high aspect ratio contacts
05/27/1998EP0843599A1 Vacuum flash evaporated polymer composites
05/27/1998EP0749354B1 Regulation of pyrocarbon coating
05/27/1998EP0733271B1 High-temperature superconductors made by metal heterostructures at the atomic limit
05/27/1998CN1182805A Rotary target column type magnetic controlled sputtering device
05/27/1998CN1182804A Nickel base deforming alloy target material for sputtering glass plating
05/26/1998US5757494 System and method for improving data acquisition capability in spectroscopic ellipsometers
05/26/1998US5756250 Electrophotographic method using a cleaning blade to remove residual toner
05/26/1998US5755938 Single chamber for CVD and sputtering film manufacturing
05/26/1998US5755937 Apparatus for applying layers of metal onto a surface
05/26/1998US5755936 Temperature clamped anti-contamination and collimating devices for thin film processes
05/26/1998US5755888 Method and apparatus of forming thin films
05/26/1998US5755887 Metal working apparatus comprising aluminum or aluminum alloy
05/22/1998WO1998021380A1 Method for improving the osteointegration of osseous fixing implants
05/20/1998EP0843339A2 Processing apparatus
05/20/1998EP0842913A1 Pyrolytic boron nitride container and manufacture thereof
05/20/1998EP0842711A1 Thin-film forming material and method for forming thin-film
05/20/1998EP0842306A1 Methods for deposition of molybdenum sulphide
05/20/1998EP0842046A1 Hybrid polymer film
05/20/1998EP0842004A1 Cutting tool
05/20/1998EP0841853A1 Synergistic fungicidal composition including a strobilurine analogue compound
05/20/1998EP0822996A4 Sputtering system using cylindrical rotating magnetron electrically powered using alternating current
05/20/1998EP0751824B1 Porous metal composite body
05/20/1998DE19749690A1 Sputter electrode for magnetron sputter unit
05/20/1998CN1182471A Concave sliding element and production process therefor
05/20/1998CN1182459A Superalloy component with a protective coating system
05/20/1998CN1182203A Device for measuring thickness of metal film on inner surface of panel
05/19/1998US5754297 Method and apparatus for monitoring the deposition rate of films during physical vapor deposition
05/19/1998US5753923 Ion injection device and method therefor
05/19/1998US5753385 Hybrid deposition of thin film solid oxide fuel cells and electrolyzers
05/19/1998US5753319 Titanium dioxide
05/19/1998US5753251 Anti-microbial coating for medical device
05/19/1998US5753137 Dry cleaning of semiconductor processing chambers using non-metallic, carbon-comprising material
05/19/1998US5753092 Cylindrical carriage sputtering system
05/19/1998US5753091 Carrier palette for substrates of optical storage media
05/19/1998US5753090 Small size sputtering target and high vacuum sputtering apparatus using the same
05/19/1998US5753089 Sputter coating station
05/19/1998US5752395 Golden ornament and method for production thereof
05/14/1998WO1998020521A1 Device for producing oxidic thin films
05/14/1998WO1998020184A1 Sputter coating apparatus
05/14/1998WO1998020183A1 Method for fabricating sputtering targets
05/13/1998EP0841706A2 Transparent conductive film of thin-film solar cell and method for producing the transparent conductive film
05/13/1998EP0841703A2 Ultrafine particle structure and production method thereof
05/13/1998EP0841683A2 Active shield for generating a plasma for sputtering
05/13/1998EP0840676A1 Adhesiveless flexible laminate and process for making adhesiveless flexible laminate
05/13/1998EP0597103B1 Apparatus for neutralizing charged body
05/13/1998CN1181787A Modification of surfaces of polymers, metal or ceramic
05/13/1998CN1181575A Magnetic recording medium, method of fabricating magnetic recording medium, and magnetic storage
05/13/1998CN1181466A Rotary thrust bearing device and motor using the same
05/12/1998US5751607 Method of sputter deposition simulation by inverse trajectory calculation
05/12/1998US5751016 Device having a switch comprising a chromium layer
05/12/1998US5751003 Loadlock assembly for an ion implantation system
05/12/1998US5751002 Ion implantation apparatus
05/12/1998US5750274 Multilayer magnetooptic recording media
05/12/1998US5750228 Optical information storage medium
05/12/1998US5750210 Hydrogenated carbon composition
05/12/1998US5750209 Vapor deposition of magnetic layer and backing layer onto substrate in same apparatus whereby lubricant is introduced into the backing layer
05/12/1998US5750207 System and method for depositing coating of modulated composition
05/12/1998US5750188 Method for forming a thin film of a non-stoichiometric metal oxide
05/12/1998US5750185 Method for electron beam deposition of multicomponent evaporants
05/12/1998US5750013 Electrode membrane assembly and method for manufacturing the same
05/12/1998US5750012 Bombarding target with both low and high mass ions, packing target with both low and high mass implanted ions; high sputter rate
05/07/1998WO1998018977A1 Coating for components and process for producing the same
05/07/1998WO1998018852A1 Acrylate coating methods
05/07/1998WO1998018570A1 Process for making a parylene coating
05/07/1998DE19643843A1 Metal vaporising unit, especially for coating films e.g. with Zn
05/07/1998CA2269271A1 Acrylate coating methods
05/06/1998EP0840370A1 Low temperature aluminum reflow for multilevel metallization
05/06/1998EP0840356A2 Ion implantation system and method adapted for serial wafer processing
05/06/1998EP0840355A1 Apparatus and method for processing substrate
05/06/1998EP0840351A2 Method of reducing generation of particulate matter in a sputtering chamber
05/06/1998EP0840346A1 Cathode mounting for ion source with indirectly heated cathode
05/06/1998EP0840293A1 Magnetic recording medium, method of fabricating magnetic recording medium, and magnetic storage
05/06/1998EP0839926A1 Sputtering processes and apparatus
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