| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 05/06/1998 | EP0839925A2 Deposition of a thin film on a substrate using a multi-beam source |
| 05/06/1998 | EP0805880A4 Rotatable magnetron with curved or segmented end magnets |
| 05/06/1998 | EP0769210A4 Epitaxial thallium high temperature superconducting films formed via a nucleation layer |
| 05/06/1998 | CN2280717Y Flat magnetic-control sputter target board of transparent conductive film |
| 05/06/1998 | CN1181115A Mechanically joined sputtering target and adapter therefor |
| 05/06/1998 | CN1181055A The combinatorial Synthesis of novel materials |
| 05/06/1998 | CN1038262C Surface-treatment method for material by use of impulse high energy-density plasma |
| 05/05/1998 | US5747936 Ion implantation apparatus with improved post mass selection deceleration |
| 05/05/1998 | US5747935 Method and apparatus for stabilizing switch-mode powered RF plasma processing |
| 05/05/1998 | US5747818 Thermoelectric cooling in gas-assisted FIB system |
| 05/05/1998 | US5747120 Laser ablated hard coating for microtools |
| 05/05/1998 | US5747118 Plasma enhanced chemical transport process for forming diamond films |
| 05/05/1998 | US5747116 Method of forming an electrical contact to a silicon substrate |
| 05/05/1998 | US5747111 Vapor deposition |
| 05/05/1998 | US5747099 Replacing thallium oxide lost from thallium-barium-calcium-copper oxide tapes or wires; vapor deposition, thallination |
| 05/05/1998 | US5746897 High magnetic flux permanent magnet array apparatus and method for high productivity physical vapor deposition |
| 05/05/1998 | US5746562 Processing system and device manufacturing method using the same |
| 05/05/1998 | CA2101286C Oxide superconducting film manufacturing apparatus |
| 05/05/1998 | CA2089645C Method of enhancing the performance of a magnetron sputtering target |
| 04/30/1998 | WO1998017846A1 Process for preparing polycrystalline thin film, process for preparing oxide superconductor, and apparatus therefor |
| 04/30/1998 | WO1998017839A1 Method of making a pvd-coated hss drill |
| 04/30/1998 | WO1998017838A1 Coated material and method of manufacturing the same |
| 04/30/1998 | WO1998017376A1 Electrodialyzer membrane stack |
| 04/30/1998 | DE19644692A1 Beschichtung sowie ein Verfahren zu deren Herstellung Coating and a method for their preparation |
| 04/30/1998 | DE19644153A1 Multistage low pressure plasma cleaning process |
| 04/29/1998 | EP0838864A2 Method for producing thin-film solar cell and equipment for producing the same |
| 04/29/1998 | EP0838863A2 Thin-film solar cell comprising thin-film absorbing layer of chalcopyrite multi-element compound semiconductor |
| 04/29/1998 | EP0838840A2 Pulsed plate plasma implantation method and apparatus |
| 04/29/1998 | EP0838836A2 Thermoelectric cooling in gas-assisted focused ion beam (FIB) system |
| 04/29/1998 | EP0838831A2 Electron emissive film and method |
| 04/29/1998 | EP0838536A2 Method and apparatus for depositing highly oriented and reflective crystalline layers |
| 04/29/1998 | EP0838535A1 Interference layer system |
| 04/29/1998 | EP0837953A1 Laminated material |
| 04/28/1998 | US5745240 Method and device for in situ stress measurement within a thin film upon its deposition on a substrate |
| 04/28/1998 | US5744812 Faraday cup assembly for a semiconductor ion-implanting apparatus |
| 04/28/1998 | US5744405 Thin films; interface od silicone and silica |
| 04/28/1998 | US5744380 Gate oxide integrity |
| 04/28/1998 | US5744370 Fabricating method of a silicon thin film and method for manufacturing a solar cell using the fabricating method |
| 04/28/1998 | US5744253 Improved coercive characteristics, signal to noise ratio |
| 04/28/1998 | US5744214 Metal carbide |
| 04/28/1998 | US5744017 Vacuum arc deposition apparatus |
| 04/28/1998 | US5744016 Sputtering apparatus |
| 04/28/1998 | US5744011 Using electric field and magnetic field |
| 04/28/1998 | US5743957 On vapor-deposited platinum substrate |
| 04/28/1998 | US5743536 Piston ring |
| 04/23/1998 | WO1998016326A1 Suppression of voltage breakdown and field emission from surfaces |
| 04/22/1998 | EP0837502A2 Improvements in or relating to hydrogen gettering |
| 04/22/1998 | EP0837491A2 Composite sputtering cathode assembly and sputtering apparatus with such composite sputtering cathode assembly |
| 04/22/1998 | EP0837490A2 A method to eliminate coil sputtering in an inductively coupled plasma (ICP) source |
| 04/22/1998 | EP0837408A2 Simulation method of sputtering |
| 04/22/1998 | EP0837155A1 Forming TiN thin films using remote activated species generation |
| 04/22/1998 | EP0837154A1 Vaccum coating apparatus |
| 04/22/1998 | EP0836653A1 Adhering metal to glass |
| 04/22/1998 | CN2279366Y Rotary magnetic control column type arc source-plate arc source multi-arc ion film plating machine |
| 04/21/1998 | US5742458 Cobalt, nickel-iron alloy |
| 04/21/1998 | US5742126 High-pressure discharge lamp, method for manufacturing a discharge tube body for high-pressure discharge lamps and method for manufacturing a hollow tube body |
| 04/21/1998 | US5741604 Intermetallic layer on metal object |
| 04/21/1998 | US5741580 Crystalline thin film and producing method thereof, and acoustooptic deflection element |
| 04/21/1998 | US5741406 Forming a lanthanum strontium manganite substrate deposited with vitria-zirconia film |
| 04/21/1998 | US5741405 Sputtering metal onto printed circuit substrate in successive partial layers with intermittent cooling times between sputtering times |
| 04/21/1998 | US5741404 Multi-planar angulated sputtering target and method of use for filling openings |
| 04/21/1998 | US5741377 Preparing biaxially textured metal alloy article; superconductors |
| 04/16/1998 | WO1998015671A1 Composite body, production process and use |
| 04/16/1998 | WO1998015668A1 Production method of laminate body, and the laminate body |
| 04/16/1998 | DE19640241C1 Herstellverfahren für eine hoch-epsilon-dielektrische oder ferroelektrische Schicht und Verwendung des Verfahrens Production method for a high-epsilon dielectric or ferroelectric layer and using the method |
| 04/15/1998 | EP0836224A2 Method of manufacturing a high capacitance capacitor using sputtering |
| 04/15/1998 | EP0836219A2 Active shield for generating a plasma for sputtering |
| 04/15/1998 | EP0836218A2 Active shield for generating a plasma for sputtering |
| 04/15/1998 | EP0835465A1 Bendable mirrors and method of manufacture |
| 04/15/1998 | EP0255834B1 Formation of hard coatings on cutting edges |
| 04/15/1998 | CN2278698Y 等离子体源材料内表面离子注入装置 The plasma source ion implantation apparatus surface |
| 04/15/1998 | CN1179008A Semiconductor device, method for producing said semiconductor and sputtering device |
| 04/15/1998 | CN1179003A Ion beam neutralizing method and apparatus |
| 04/15/1998 | CN1178843A Sputter method and sputter equipment |
| 04/15/1998 | CN1178842A Paint for metal surface, paint used on tube and cable |
| 04/14/1998 | US5740515 Erosion/corrosion protective coating for high-temperature components |
| 04/14/1998 | US5739086 Structures having enhanced biaxial texture and method of fabricating same |
| 04/14/1998 | US5738951 Method of manufacturing a composite material with lamellar interphase between reinforcing fibers and matrix, and material obtained |
| 04/14/1998 | US5738947 Silver-magnesium alloy and magnesium oxide film |
| 04/14/1998 | US5738945 Isolation layer for reducing noise |
| 04/14/1998 | US5738770 Vacuum chamber comprising coupler bolts inserted through apertures |
| 04/14/1998 | US5738768 Process for reducing particle defects in arc vapor deposition coatings |
| 04/14/1998 | US5738767 Substrate handling and processing system for flat panel displays |
| 04/14/1998 | US5738765 Magneto-optic memory device |
| 04/14/1998 | US5738729 Coating chamber, accompanying substrate carrier, vacuum evaporation and coating method |
| 04/09/1998 | WO1998014993A1 PROCESS FOR THE MANUFACTURE OF A HIGHLY ε DIELECTRIC OR FERROELECTRIC COATING |
| 04/09/1998 | WO1998014991A1 Semiconductor device with a layer of precious metal and a process for production of same |
| 04/09/1998 | WO1998014632A1 Conveyor and delivery device |
| 04/09/1998 | WO1998014631A1 Methods and apparatus for sputtering with rotating magnet sputter sources |
| 04/09/1998 | DE19744348A1 Magnetic storage medium especially hard disk |
| 04/09/1998 | DE19639711A1 Coating system, in particular, for light-metal wheels or body components of motor vehicles |
| 04/08/1998 | EP0834907A2 High vacuum dual stage load lock and method for loading and unloading wafers using a high vacuum dual stage load lock |
| 04/08/1998 | EP0834600A1 Surface coating of insulant materials, process and application for making shielding for insulated cases |
| 04/08/1998 | EP0834596A1 Method of manufacturing substrate with thin film, and manufacturing apparatus |
| 04/08/1998 | EP0834595A1 Apparatus for coating screw heads |
| 04/08/1998 | EP0834594A1 Process for producing sputtering target |
| 04/08/1998 | EP0834593A2 Plasma thin-film forming apparatus and method |
| 04/08/1998 | EP0834482A1 Process for the production of heat reflecting coating systems |
| 04/08/1998 | EP0833959A1 Coatings for corrosion protection |
| 04/08/1998 | EP0833958A1 Diffusion barrier for protective coatings |