Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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08/25/1998 | US5798134 Heat-oxidizing a composite film of metallic nickel and carbon |
08/25/1998 | US5798029 Allows good step coverage |
08/25/1998 | US5798027 Process for depositing optical thin films on both planar and non-planar substrates |
08/25/1998 | US5798005 Cold working at relatively low temperature to reduce formation of acicular particles |
08/25/1998 | CA2130539C Transparent conductors comprising gallium-indium-oxide |
08/25/1998 | CA2128590C Direct mombe and movpe growth of ii-vi materials on silicon |
08/20/1998 | WO1998036105A1 Film deposition apparatus or artificial lattice multi-layered film |
08/20/1998 | WO1998036104A1 Methods and apparatus for preparing low net stress multilayer thin film coatings |
08/20/1998 | WO1998036103A1 A phosphorus effusion cell for producing molecular beams to be deposited on a substrate |
08/20/1998 | DE19705884A1 Plasma ignition system |
08/19/1998 | EP0859070A1 Coating of inside of vacuum chambers |
08/19/1998 | EP0859069A1 Device and method for continuous vapor-deposition on film |
08/19/1998 | EP0858963A2 Device for retaining a flat substrate |
08/19/1998 | EP0858579A1 Modification of metal surfaces |
08/19/1998 | EP0698129B1 Method for forming metallic films and use of the same |
08/19/1998 | EP0641224B1 Anti-microbial coating for medical devices |
08/19/1998 | CN1190914A 切削刀具 Cutting Tools |
08/19/1998 | CN1190678A Sputtered selective absorption coating for solar energy vacuum tube |
08/19/1998 | CN1039562C Semiconductor device and mfg. method thereof |
08/18/1998 | US5796079 Rapid thermal processing method for ferroelectric, high dielectric, electrostrictive, semiconductive, or conductive ceramic thin film using microwaves |
08/18/1998 | US5796074 Wafer heater assembly |
08/18/1998 | US5796018 Process for coating iron particles with phosphorus and forming compacted articles |
08/18/1998 | US5795672 Diamond-like carbon based electrocatalytic coating for fuel cell electrodes |
08/18/1998 | US5795663 Magnetoresistive multilayer film and methods of producing the same |
08/18/1998 | US5795631 Method of producing transparent and other electrically conductive materials |
08/18/1998 | US5795628 Device for coating a substrate surface |
08/18/1998 | US5795451 Sputtering apparatus with a rotating magnet array |
08/18/1998 | US5795448 Magnetic device for rotating a substrate |
08/18/1998 | US5795356 Microelectronic component fabrication facility, and process for making and using the facility |
08/18/1998 | CA2127323C Process for preparing high crystallinity oxide thin film |
08/13/1998 | WO1998035531A1 Model based temperature controller for semiconductor thermal processors |
08/13/1998 | WO1998035070A1 Apparatus and method for sputtering a magnetron target |
08/13/1998 | WO1998034957A1 STIMULATION OF AN IMMUNE RESPONSE WITH ANTIBODIES LABELED WITH THE α-GALACTOSYL EPITOPE |
08/13/1998 | DE19711137C1 Verfahren zum Aufbringen texturierter YSZ-Schichten durch Sputter-Beschichten A method of applying textured YSZ layers by sputtering coating |
08/12/1998 | EP0858095A2 Methods and apparatus for linear scan magnetron sputtering |
08/12/1998 | EP0857518A1 Process and apparatus for protective coating of mirror layers |
08/12/1998 | EP0857354A1 A process for fabricating semiconductor devices with shallowly doped regions using dopant compounds containing elements of high solid solubility |
08/12/1998 | EP0826230A4 A method for fabricating electron multipliers |
08/12/1998 | EP0591339B1 Razor blade and process for forming a razor blade |
08/12/1998 | EP0567501B1 Ion vapour deposition apparatus and method |
08/12/1998 | CN1190136A Preparation of reinforced ion beam-deposited hydroxyl apatite coating for medical implant |
08/12/1998 | CN1039482C Safety document and process for producing the same |
08/11/1998 | US5792550 Waterproofing, oxygen impervious food packaging |
08/11/1998 | US5792522 High density plasma physical vapor deposition |
08/11/1998 | US5792521 Method for forming a multilayer thermal barrier coating |
08/11/1998 | US5792519 Method for the plasma assisted high vacuum physical vapor coating of parts with wear resistant coatings and equipment for carrying out the method |
08/11/1998 | US5792327 Adhering metal to glass |
08/11/1998 | US5792324 Sputtering with an inert gas, reactive etching to form a by-product and reactive sputtering; covering power; reduction of sputtering bias voltage; decreasing mechanical and electrostatic stresses on target |
08/11/1998 | US5792270 Apparatus for forming a pattern of nucleation sites |
08/11/1998 | US5791851 Apparatus for transfer of workpieces into and out of a coating chamber |
08/06/1998 | WO1998033949A1 Process and device supplying substrates for vacuum coating |
08/06/1998 | WO1998033948A1 A coating comprising layers of diamond like carbon and diamond like nanocomposite compositions |
08/05/1998 | EP0856875A2 Vacuum processing apparatus and operating method therefor |
08/05/1998 | EP0856594A1 Apparatus for plasma treatment of substrates |
08/05/1998 | EP0856593A1 A method and apparatus for enhancing sidewall coverage during sputtering in a chamber having an inductively coupled plasma |
08/05/1998 | EP0856592A1 A coating comprising layers of diamond like carbon and diamond like nanocomposite compositions |
08/05/1998 | EP0600070B1 Improved planar magnetron sputtering magnet assembly |
08/05/1998 | CN2287157Y Metallic vapor vacuum arc ion source |
08/04/1998 | US5790304 Self-healing UV-barrier coating for flexible polymer substrate |
08/04/1998 | US5789867 Apparatus and method for igniting plasma in a process module |
08/04/1998 | US5789330 Sintered body of zirconia containing a yttria stabilizer; heat and shock resistant |
08/04/1998 | US5789086 Chromium oxide and iron oxide layers; ultrahigh vacuum, ultraclean reduced pressure semiconductors; corrosion resistance |
08/04/1998 | US5789071 Yttria, zirconia |
08/04/1998 | US5789069 Alloy of nickel, iron, and cobalt |
08/04/1998 | US5789055 Optical recording medium and a method of fabricating the same |
08/04/1998 | US5789041 Tilting substrate, exposing to ions and evaporated particles at perpendicular intersection |
08/04/1998 | US5788882 Doped amorphous and crystalline alkaline earth gallates as electroluminescent materials |
08/04/1998 | US5788825 Vacuum pumping system for a sputtering device |
08/04/1998 | US5788776 Molecular beam epitaxy isolation tube system |
08/04/1998 | US5788769 Evaporator boat for an apparatus for coating substrates |
08/04/1998 | CA2136581C Gallium oxide thin films |
07/30/1998 | WO1998033359A1 Doped amorphous and crystalline alkaline earth gallates as electroluminescent materials |
07/30/1998 | WO1998033200A1 Modulator for plasma-immersion ion implantation |
07/30/1998 | WO1998033199A2 Ion accelerator for use in ion implanter |
07/30/1998 | WO1998032893A2 Wafer support system |
07/30/1998 | WO1998032891A1 Method and apparatus for coating a substrate |
07/30/1998 | DE19702928A1 Electric-arc evaporator |
07/30/1998 | DE19702323A1 Reflective coating especially for vehicle wheel or body part |
07/30/1998 | DE19702294A1 Modulator für die Plasmaimmersions-Ionenimplantation Modulator for plasma immersion ion implantation |
07/30/1998 | DE19701575A1 Magnetron sputtering for forming uniform thickness |
07/30/1998 | CA2278545A1 Doped amorphous and crystalline alkaline earth gallates as electroluminescent materials |
07/29/1998 | EP0855745A2 Method of making color filter arrays |
07/29/1998 | EP0855738A2 Method of depositing a platinum film for capacitor electrode |
07/29/1998 | EP0855453A1 Methods and apparatus for cleaning using a chlorine containing gas plasma |
07/29/1998 | EP0855452A1 Process and apparatus for depositing titanium layers |
07/29/1998 | EP0855451A1 Wiring film, sputter target for forming the wiring film and electronic component using the same |
07/29/1998 | EP0792382B1 Apparatus for the relative vacuum deposition of a material on bulk parts |
07/29/1998 | CN1189125A Adhesiveless flexible laminate and process for making adhesiveless flexible laminate |
07/29/1998 | CN1188816A Magnetron sputtering method |
07/29/1998 | CN1188815A Compound target body and making method thereof |
07/29/1998 | CN1188814A Preparing method for inlaid dimension controllable nanometre grade silver particle on barium titanate film |
07/29/1998 | CN1039354C Workpiece coated with solid solution layer and production method, equipment and application thereof |
07/28/1998 | US5786915 Optical multiplexing device |
07/28/1998 | US5786235 Process for depositing a surface-wide layer through a mask and optionally closing said mask |
07/28/1998 | US5786102 Device for converting invisible and visible radiation to visible light and/or UV radiation |
07/28/1998 | US5786098 Iron oxide coated low alloy steel substrate for improved boundary lubrication |
07/28/1998 | US5786094 Transparent and conductive ultrathin film and method of producing same |
07/28/1998 | US5786068 Electrically tunable coatings |
07/28/1998 | US5785828 Comprising a compound or mixture including as constituent elements silver, indium, tellurium and antimony; records and erases information by utilizing phase changes in recording material |
07/28/1998 | US5785796 Vacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatus |