Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
08/1998
08/25/1998US5798134 Heat-oxidizing a composite film of metallic nickel and carbon
08/25/1998US5798029 Allows good step coverage
08/25/1998US5798027 Process for depositing optical thin films on both planar and non-planar substrates
08/25/1998US5798005 Cold working at relatively low temperature to reduce formation of acicular particles
08/25/1998CA2130539C Transparent conductors comprising gallium-indium-oxide
08/25/1998CA2128590C Direct mombe and movpe growth of ii-vi materials on silicon
08/20/1998WO1998036105A1 Film deposition apparatus or artificial lattice multi-layered film
08/20/1998WO1998036104A1 Methods and apparatus for preparing low net stress multilayer thin film coatings
08/20/1998WO1998036103A1 A phosphorus effusion cell for producing molecular beams to be deposited on a substrate
08/20/1998DE19705884A1 Plasma ignition system
08/19/1998EP0859070A1 Coating of inside of vacuum chambers
08/19/1998EP0859069A1 Device and method for continuous vapor-deposition on film
08/19/1998EP0858963A2 Device for retaining a flat substrate
08/19/1998EP0858579A1 Modification of metal surfaces
08/19/1998EP0698129B1 Method for forming metallic films and use of the same
08/19/1998EP0641224B1 Anti-microbial coating for medical devices
08/19/1998CN1190914A 切削刀具 Cutting Tools
08/19/1998CN1190678A Sputtered selective absorption coating for solar energy vacuum tube
08/19/1998CN1039562C Semiconductor device and mfg. method thereof
08/18/1998US5796079 Rapid thermal processing method for ferroelectric, high dielectric, electrostrictive, semiconductive, or conductive ceramic thin film using microwaves
08/18/1998US5796074 Wafer heater assembly
08/18/1998US5796018 Process for coating iron particles with phosphorus and forming compacted articles
08/18/1998US5795672 Diamond-like carbon based electrocatalytic coating for fuel cell electrodes
08/18/1998US5795663 Magnetoresistive multilayer film and methods of producing the same
08/18/1998US5795631 Method of producing transparent and other electrically conductive materials
08/18/1998US5795628 Device for coating a substrate surface
08/18/1998US5795451 Sputtering apparatus with a rotating magnet array
08/18/1998US5795448 Magnetic device for rotating a substrate
08/18/1998US5795356 Microelectronic component fabrication facility, and process for making and using the facility
08/18/1998CA2127323C Process for preparing high crystallinity oxide thin film
08/13/1998WO1998035531A1 Model based temperature controller for semiconductor thermal processors
08/13/1998WO1998035070A1 Apparatus and method for sputtering a magnetron target
08/13/1998WO1998034957A1 STIMULATION OF AN IMMUNE RESPONSE WITH ANTIBODIES LABELED WITH THE α-GALACTOSYL EPITOPE
08/13/1998DE19711137C1 Verfahren zum Aufbringen texturierter YSZ-Schichten durch Sputter-Beschichten A method of applying textured YSZ layers by sputtering coating
08/12/1998EP0858095A2 Methods and apparatus for linear scan magnetron sputtering
08/12/1998EP0857518A1 Process and apparatus for protective coating of mirror layers
08/12/1998EP0857354A1 A process for fabricating semiconductor devices with shallowly doped regions using dopant compounds containing elements of high solid solubility
08/12/1998EP0826230A4 A method for fabricating electron multipliers
08/12/1998EP0591339B1 Razor blade and process for forming a razor blade
08/12/1998EP0567501B1 Ion vapour deposition apparatus and method
08/12/1998CN1190136A Preparation of reinforced ion beam-deposited hydroxyl apatite coating for medical implant
08/12/1998CN1039482C Safety document and process for producing the same
08/11/1998US5792550 Waterproofing, oxygen impervious food packaging
08/11/1998US5792522 High density plasma physical vapor deposition
08/11/1998US5792521 Method for forming a multilayer thermal barrier coating
08/11/1998US5792519 Method for the plasma assisted high vacuum physical vapor coating of parts with wear resistant coatings and equipment for carrying out the method
08/11/1998US5792327 Adhering metal to glass
08/11/1998US5792324 Sputtering with an inert gas, reactive etching to form a by-product and reactive sputtering; covering power; reduction of sputtering bias voltage; decreasing mechanical and electrostatic stresses on target
08/11/1998US5792270 Apparatus for forming a pattern of nucleation sites
08/11/1998US5791851 Apparatus for transfer of workpieces into and out of a coating chamber
08/06/1998WO1998033949A1 Process and device supplying substrates for vacuum coating
08/06/1998WO1998033948A1 A coating comprising layers of diamond like carbon and diamond like nanocomposite compositions
08/05/1998EP0856875A2 Vacuum processing apparatus and operating method therefor
08/05/1998EP0856594A1 Apparatus for plasma treatment of substrates
08/05/1998EP0856593A1 A method and apparatus for enhancing sidewall coverage during sputtering in a chamber having an inductively coupled plasma
08/05/1998EP0856592A1 A coating comprising layers of diamond like carbon and diamond like nanocomposite compositions
08/05/1998EP0600070B1 Improved planar magnetron sputtering magnet assembly
08/05/1998CN2287157Y Metallic vapor vacuum arc ion source
08/04/1998US5790304 Self-healing UV-barrier coating for flexible polymer substrate
08/04/1998US5789867 Apparatus and method for igniting plasma in a process module
08/04/1998US5789330 Sintered body of zirconia containing a yttria stabilizer; heat and shock resistant
08/04/1998US5789086 Chromium oxide and iron oxide layers; ultrahigh vacuum, ultraclean reduced pressure semiconductors; corrosion resistance
08/04/1998US5789071 Yttria, zirconia
08/04/1998US5789069 Alloy of nickel, iron, and cobalt
08/04/1998US5789055 Optical recording medium and a method of fabricating the same
08/04/1998US5789041 Tilting substrate, exposing to ions and evaporated particles at perpendicular intersection
08/04/1998US5788882 Doped amorphous and crystalline alkaline earth gallates as electroluminescent materials
08/04/1998US5788825 Vacuum pumping system for a sputtering device
08/04/1998US5788776 Molecular beam epitaxy isolation tube system
08/04/1998US5788769 Evaporator boat for an apparatus for coating substrates
08/04/1998CA2136581C Gallium oxide thin films
07/1998
07/30/1998WO1998033359A1 Doped amorphous and crystalline alkaline earth gallates as electroluminescent materials
07/30/1998WO1998033200A1 Modulator for plasma-immersion ion implantation
07/30/1998WO1998033199A2 Ion accelerator for use in ion implanter
07/30/1998WO1998032893A2 Wafer support system
07/30/1998WO1998032891A1 Method and apparatus for coating a substrate
07/30/1998DE19702928A1 Electric-arc evaporator
07/30/1998DE19702323A1 Reflective coating especially for vehicle wheel or body part
07/30/1998DE19702294A1 Modulator für die Plasmaimmersions-Ionenimplantation Modulator for plasma immersion ion implantation
07/30/1998DE19701575A1 Magnetron sputtering for forming uniform thickness
07/30/1998CA2278545A1 Doped amorphous and crystalline alkaline earth gallates as electroluminescent materials
07/29/1998EP0855745A2 Method of making color filter arrays
07/29/1998EP0855738A2 Method of depositing a platinum film for capacitor electrode
07/29/1998EP0855453A1 Methods and apparatus for cleaning using a chlorine containing gas plasma
07/29/1998EP0855452A1 Process and apparatus for depositing titanium layers
07/29/1998EP0855451A1 Wiring film, sputter target for forming the wiring film and electronic component using the same
07/29/1998EP0792382B1 Apparatus for the relative vacuum deposition of a material on bulk parts
07/29/1998CN1189125A Adhesiveless flexible laminate and process for making adhesiveless flexible laminate
07/29/1998CN1188816A Magnetron sputtering method
07/29/1998CN1188815A Compound target body and making method thereof
07/29/1998CN1188814A Preparing method for inlaid dimension controllable nanometre grade silver particle on barium titanate film
07/29/1998CN1039354C Workpiece coated with solid solution layer and production method, equipment and application thereof
07/28/1998US5786915 Optical multiplexing device
07/28/1998US5786235 Process for depositing a surface-wide layer through a mask and optionally closing said mask
07/28/1998US5786102 Device for converting invisible and visible radiation to visible light and/or UV radiation
07/28/1998US5786098 Iron oxide coated low alloy steel substrate for improved boundary lubrication
07/28/1998US5786094 Transparent and conductive ultrathin film and method of producing same
07/28/1998US5786068 Electrically tunable coatings
07/28/1998US5785828 Comprising a compound or mixture including as constituent elements silver, indium, tellurium and antimony; records and erases information by utilizing phase changes in recording material
07/28/1998US5785796 Vacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatus