Patents
Sitemap › C23 - Coating metallic material; Coating material with metallic material; Chemical surface treatment; Diffusion treatment of metallic material; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general; Inhibiting corrosion of metallic material or incrustation in general › C23C - Coating metallic material; Coating material with metallic material; Surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general › C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
10/1998
10/21/1998EP0871843A2 Apparatus and method for temperature control of workpieces in vacuum
10/21/1998EP0871804A1 Rotatable susceptor with integrated ferromagnetic element
10/21/1998EP0871794A1 Sputtering targets and method for the preparation thereof
10/21/1998EP0871793A1 A process for manufacturing ito alloy articles
10/21/1998EP0871792A1 Process for coating a substrate with titanium dioxide
10/21/1998EP0871557A1 Method of producing metal quantum dots
10/21/1998CN1196759A Aluminum or aluminum alloy sputtering target
10/21/1998CN1196584A Method of forming metal, its oxide layers on ion-conductive polymer membranes
10/20/1998US5824426 Disks, tapes, cards
10/20/1998US5824423 Thermal barrier coating system and methods
10/20/1998US5824419 Thin film of potassium niobate, process for producing the thin film, and optical device using the thin film
10/20/1998US5824366 Forming an oxidation, corrosion resistant protective coatings, aluminizing on the interior surfaces of turbine panels or blades
10/20/1998US5824198 Process for barrier coating of plastic objects
10/20/1998US5824197 With concave, curved shape away from target spaced to reducenumber of magnetic fieild lines intersectimg the shield
10/20/1998US5822842 Method for masking a disk shaped substrate
10/15/1998WO1998045497A1 Method for producing a coating containing titanium boride
10/15/1998DE19754821A1 Verfahren und Vorrichtung für eine PVD-Beschichtung Method and apparatus for a PVD coating
10/15/1998DE19715151A1 Loading and unloading an evacuable treatment chamber
10/15/1998DE19714433A1 Verfahren zur Herstellung einer titanboridhaltigen Beschichtung A process for preparing a coating titanboridhaltigen
10/14/1998EP0871217A2 Nitrogen-treated titanium or silicon layer to prevent interaction of titanium or silicon and aluminum
10/14/1998EP0871159A2 Magnetic recording medium
10/14/1998EP0870850A1 Method and apparatus for loading and unloading an evacuable treatment chamber
10/14/1998EP0870458A1 Cooking appliance with food grade contact surface
10/14/1998EP0870071A1 Enhancement of optically variable images
10/14/1998EP0870070A2 Process for producing organically mofified oxide, oxynitride or nitride layers by vacuum deposition
10/14/1998EP0800453A4 Biaxially oriented multilayer heat sealable packaging film
10/14/1998EP0583473B1 Method and device for treatment of articles in gas-discharge plasma
10/14/1998CN1195712A Method of depositing film and sputtering apparatus
10/14/1998CN1040236C Cylindrical helix magnetic control sputtering source
10/14/1998CN1040235C Cylindrical helical magnetic control cathode arc evaporation source
10/14/1998CN1040234C Arc source with rotary magnetically controlled columnar cathode
10/13/1998US5822172 Apparatus and method for temperature control of workpieces in vacuum
10/13/1998US5821677 Ion source block filament with laybrinth conductive path
10/13/1998US5821171 Article comprising a gallium layer on a GaAs-based semiconductor, and method of making the article
10/13/1998US5821001 Coated articles
10/13/1998US5820994 Laminate and method for preparing same
10/13/1998US5820971 Security document and method of producing it
10/13/1998US5820948 Positioning targets; heating
10/13/1998US5820946 Method for fabricating ferroelectric thin film
10/13/1998US5820684 Substrate support for an evaporation installation
10/13/1998US5820682 Tilted target affixed to a rotatable target plate, substrate heater rotatable on its own axis, eximer laser in vacuum chamber; high temperature superconductive; high frequency filter for information communication technologies
10/13/1998US5820681 Unibody crucible and effusion cell employing such a crucible
10/13/1998US5820680 Vacuum evaporator
10/13/1998US5820679 Fabrication system and method having inter-apparatus transporter
10/13/1998US5820337 Double wall turbine parts
10/13/1998US5820131 Piston ring having wear coating consisting of Cr2 N or a mixture of Cr2 N and Cr
10/08/1998WO1998044767A1 Rfq accelerator and ion implanter
10/08/1998WO1998044556A1 A low-stress and low-resistivity metal film
10/08/1998WO1998044163A1 Multilayered coated cutting tool
10/07/1998EP0869543A2 Method and apparatus for reducing the first wafer effect
10/07/1998EP0869535A2 A method to generate ionized metal plasma using electron beams and magnetic field
10/07/1998EP0869479A1 Magnetic recording medium and production method thereof
10/07/1998EP0869199A1 Chamber design with isolation valve to preserve vacuum during maintenance
10/07/1998EP0868405A2 Process for producing heat-reflecting laminated systems on transparent substrates
10/07/1998CN1195379A Alloys of Ti, Ru, Fe and O and use thereof for manufacture of cathodes for electrochemical synthesis of sodium chlorate
10/07/1998CN1195378A Substrate fixture
10/07/1998CN1195342A Method for selective hydrogenation of vinyl oxirane to butylene oxide
10/07/1998CN1195261A End cap for indirectly heated cathode of ion source
10/07/1998CN1195035A Thin-film deposition apparatus using cathodic arc discharge
10/06/1998US5817429 Magnetic recording medium
10/06/1998US5817366 Method for manufacturing organic electroluminescent element and apparatus therefor
10/06/1998US5817326 Non-line-of-site ion beam implantation and/or rapid thermal processing
10/06/1998US5817219 Carbon target material for forming carbon thin film and process for production thereof
10/06/1998CA2090854C Cvd and pvd coated cutting tools
10/06/1998CA2047806C Alloying process
10/06/1998CA2022359C Process for preparing superconducting thin films
10/06/1998CA2022358C Process for preparing superconducting thin films
10/01/1998WO1998042890A1 Magnesium oxide sputtering apparatus
10/01/1998WO1998042474A1 Marking method and marking material
10/01/1998DE19812914A1 High purity chromium@ ingot for sputter target production
10/01/1998DE19811293A1 Oxide thin film production apparatus
10/01/1998DE19755159A1 Thin-film coating installation
09/1998
09/30/1998EP0867752A1 Electrochromic device
09/30/1998EP0867525A1 Titanium nitride films
09/30/1998EP0867036A1 Method and device for pre-treatment of substrates
09/29/1998US5815684 Configuration simulating method employing string model for simulating layer configuration of silicon wafer
09/29/1998US5815396 For processing of a substrate
09/29/1998US5814819 System and method for neutralizing an ion beam using water vapor
09/29/1998US5814583 Superconducting thin film and a method for preparing the same
09/29/1998US5814196 Apparatus and method for high throughput sputtering
09/29/1998US5814195 Sputtering system using cylindrical rotating magnetron electrically powered using alternating current
09/29/1998US5814152 Apparatus for coating a substrate
09/24/1998WO1998041669A1 Ni-plated target diffusion bonded to a backing plate and method of making same
09/24/1998WO1998041668A1 Method of forming internal passages within articles and articles formed by same
09/24/1998WO1998041667A1 Method and apparatus for manufacturing thin film, thin-film laminate, and electronic parts
09/24/1998WO1998041666A1 Method for forming a carbon film
09/24/1998WO1998041480A1 Photocatalytically-activated self-cleaning article and method of making same
09/24/1998DE19811873A1 Variation of substrate velocity during sputtering
09/24/1998CA2284015A1 Method of forming internal passages within articles and articles formed by same
09/23/1998EP0866146A1 Heated and cooled vacuum chamber shield
09/23/1998EP0865513A1 Sputtering of lithium
09/23/1998EP0865512A1 Metal-vaporizing methods and vaporizer boat therefor
09/23/1998EP0795106A4 Antireflection coating for a temperature sensitive substrate
09/23/1998CN2292095Y Column shaped plane type magnetic controlled sputter target
09/23/1998CN1193890A Synergistic fungicidal composition including strobilurine analogue compound
09/23/1998CN1193788A Perpendicular magnetic recording medium and magnetic recording device using the same
09/23/1998CN1193555A Pulsed plate plasma implantation system
09/22/1998US5812158 Coated nozzle plate for ink jet printing
09/22/1998US5811823 For treating a workpiece by directing an ion beam at a workpiece
09/22/1998US5811820 Apparatus for irradiating a substrate with ions
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