| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 12/30/1997 | US5702533 Particulate free vacuum compatible pinch seal |
| 12/30/1997 | CA2065833C Process for forming metal film, on surface of synthetic resin substrate |
| 12/29/1997 | EP0814506A2 Sputtered titanium wiring pattern using a highly purified Ti-target |
| 12/29/1997 | EP0706425A4 Selective plasma deposition |
| 12/29/1997 | EP0555339B1 Magnetron sputter coating method and apparatus with rotating magnet cathode |
| 12/24/1997 | WO1997048835A1 Process for producing a titanium-ceramic adhesive composite system |
| 12/24/1997 | CN1168421A Preparation of insulating layer on the surface of non-corrosive steel and alloy |
| 12/24/1997 | CN1168419A Method for improving corrosion resistance of aluminium plated surface |
| 12/24/1997 | CA2258793A1 Process for producing a titanium-ceramic adhesive composite system |
| 12/23/1997 | US5700719 Semiconductor device and method for producing the same |
| 12/23/1997 | US5700551 Layered film made of ultrafine particles and a hard composite material for tools possessing the film |
| 12/23/1997 | US5700546 Having titanium nitride thin film formed on sliding surface |
| 12/23/1997 | US5700418 Method of manufacture of components made of sintered indium-tin-oxide solid-solution crystals |
| 12/23/1997 | US5700307 Base material, phosphorus alloy film; high strength, heat resistance |
| 12/23/1997 | CA2121423C Process for barrier coating of plastic objects |
| 12/18/1997 | WO1997047785A1 Cutting tool and manufacturing method therefor |
| 12/18/1997 | WO1997047784A1 Article with a protective coating system comprising an improved anchoring layer and its manufacture |
| 12/18/1997 | WO1997047782A1 Method and device for continuous coating of a moving substrate by means of a metallic vapour |
| 12/18/1997 | WO1997047781A1 Reactive magnetron sputtering apparatus and method |
| 12/18/1997 | DE19725150A1 Stepwise ion implantation to form semiconductor substrate junction |
| 12/18/1997 | CA2254354A1 Reactive magnetron sputtering apparatus and method |
| 12/17/1997 | EP0813226A2 Device and method for electron beam evaporation |
| 12/17/1997 | EP0813108A1 Vapor deposition method and apparatus |
| 12/17/1997 | EP0812931A1 Vapor deposition material |
| 12/17/1997 | EP0812930A1 Ceramic evaporation material |
| 12/17/1997 | EP0812779A2 A gas barrier film |
| 12/17/1997 | EP0812368A1 Reactive sputtering process |
| 12/17/1997 | EP0632848B1 Process for pretreating the surfaces of plastic components and plastic component pretreated by this process |
| 12/17/1997 | EP0549585B1 Binder enriched cvd and pvd coated cutting tool |
| 12/17/1997 | CN1167657A Method of producing on substrate of protective coatings with chemical composition and structure gradient across thickness and with top ceramic layer |
| 12/16/1997 | USRE35692 Method for making composite article comprising oriented microstructures |
| 12/16/1997 | US5698928 Thin film piezoelectric arrays with enhanced coupling and fabrication methods |
| 12/16/1997 | US5698328 Substrate is positioned between carbon cathode and anode, applying direct current between anode and cathode to form hydrogen plasma, adding dopant, transporting carbon from cathode to anode substrate, depositing doped diamond film |
| 12/16/1997 | US5698314 Used as cemented acrbide inserts |
| 12/16/1997 | US5698312 Magneto-optical recording medium and method for making the same |
| 12/16/1997 | US5698273 Electron beam physical vapor deposition method |
| 12/16/1997 | US5698168 Cylindrical bulb constructed of pyrolytic boron nitride, baffle, connector of refractory metal, non-boron nitride tube, radio frequency source |
| 12/16/1997 | US5698039 Process for cleaning a substrate using a barrier discharge |
| 12/16/1997 | US5697751 Wafer transfer apparatus and method |
| 12/16/1997 | CA2103770C Plasma-enhanced magnetron-sputtered deposition of materials |
| 12/11/1997 | WO1997046729A1 Coating device and process for coating a component with a heat insulating layer |
| 12/11/1997 | WO1997046728A1 Process and device for production of metallic coatings on semiconductor structures |
| 12/11/1997 | DE19622823A1 Verbundwerkstoff und Verfahren zu seiner Herstellung Composite material and process for its preparation |
| 12/11/1997 | DE19622606A1 Sputter cathode |
| 12/10/1997 | EP0812021A2 Dielectric thin film capacitor element and manufacturing method of the same |
| 12/10/1997 | EP0811771A2 Method for producing an actuator |
| 12/10/1997 | EP0811237A1 Deposition apparatus |
| 12/10/1997 | EP0811236A2 Filtered cathodic arc source |
| 12/10/1997 | EP0810889A1 Implant |
| 12/10/1997 | CN1167527A Highly sensitive optical fiber cavity coating removal detection |
| 12/10/1997 | CN1167509A Evaporator having multiple coating |
| 12/10/1997 | CN1167508A High density flash evaporator |
| 12/09/1997 | US5695877 Doped ferrite film |
| 12/09/1997 | US5695832 Vacuum deposition; forming plasma |
| 12/09/1997 | US5695827 Exposing titanium aluminide specimen to ion beam to implant dose of elemental species, forming alloy near surface |
| 12/09/1997 | US5695808 Vapor depositing zinc sulfide on polymeric film, visual monitoring the deposition by observing the color while exposing to light |
| 12/09/1997 | US5695566 Apparatus and method for plasma-processing |
| 12/09/1997 | US5695564 Multichamber system wherein transfer units and desired number of process units each with separate inert gas supply and exhaust systems are connected via interconnection units |
| 12/04/1997 | WO1997045880A1 METHOD FOR FORMING CdTe FILM AND SOLAR BATTERY USING THE FILM |
| 12/04/1997 | WO1997045863A1 Radial multiple chamber microelectronics processing apparatus and process of making and using the apparatus |
| 12/04/1997 | WO1997045855A1 Highly tetrahedral amorphous carbon films and methods for their production |
| 12/04/1997 | WO1997045834A1 Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production |
| 12/04/1997 | WO1997045567A1 Flow-through ion beam source |
| 12/04/1997 | WO1997045209A2 Chambers for promoting surface adhesion under vacuum and methods of using same |
| 12/04/1997 | DE19621855A1 Verfahren und Vorrichtung zur Herstellung von Metallisierungen auf Halbleiterkörpern Method and apparatus for the production of metallizations on semi-conductor bodies |
| 12/04/1997 | CA2256418A1 Chambers for promoting surface adhesion under vacuum and methods of using same |
| 12/03/1997 | EP0810308A2 An ultrafine a1 particle and production method thereof |
| 12/03/1997 | EP0810300A1 Process for producing an aluminium film |
| 12/03/1997 | EP0809721A1 Method and apparatus for producing single crystal carbon films |
| 12/03/1997 | EP0809719A1 Apparatus and method for a reliable return current path for sputtering processes |
| 12/03/1997 | EP0809718A1 Mechanically joined sputtering target and adapter therefor |
| 12/03/1997 | EP0809717A1 Gas manifold for an off-axis sputter apparatus |
| 12/03/1997 | EP0809659A1 Plasma deposited film networks |
| 12/03/1997 | CN1166864A Method of forming diamond-like carbon film (DLC), DLC film formed thereby, use of the same, field emitter array and field emitter cathodes |
| 12/03/1997 | CN1166536A Aluminium-clad steel- and iron-base workpieces and their aluminium-cladding method |
| 12/03/1997 | CN1166535A 密封装置 Sealing device |
| 12/02/1997 | US5693939 MeV neutral beam ion implanter |
| 12/02/1997 | US5693417 Cutting, forming, shaping tool |
| 12/02/1997 | US5693376 Applying pulsed voltage differential to accelerate plasma generated in space between cylindrical electrode and cylindrical target inside it |
| 12/02/1997 | US5693238 Method for improving the rate of a plasma enhanced vacuum treatment |
| 12/02/1997 | US5693203 Sputtering target assembly having solid-phase bonded interface |
| 12/02/1997 | US5693199 Single chamber sputtering assembly |
| 12/02/1997 | US5693198 Method of producing a magnetic recording medium |
| 12/02/1997 | US5693197 DC magnetron sputtering method and apparatus |
| 12/02/1997 | US5693146 Optical apparatus for forming a nondiffusing thin film by laser evaporation in oxygen atmosphere |
| 12/02/1997 | US5692465 Valve operating apparatus |
| 11/27/1997 | WO1997044155A1 Method employing uv laser pulses of varied energy density to form blind vias in multilayered targets |
| 11/27/1997 | DE19620634A1 Forming coupling layers for coatings on surface of plastics with low surface energy |
| 11/26/1997 | EP0808921A1 Ornamental member |
| 11/26/1997 | EP0808918A2 Plasma processing apparatus and processing method |
| 11/26/1997 | EP0808915A2 Chemical vapor deposition and sputtering method and apparatus |
| 11/26/1997 | EP0808913A1 Method for repairing a thermal barrier coating |
| 11/26/1997 | EP0808667A2 Thin film, method and apparatus for forming the same, and electronic component incorporating the same |
| 11/25/1997 | US5691537 Method and apparatus for ion beam transport |
| 11/25/1997 | US5691062 Polyaniline bound to phosphonylated polyethylene |
| 11/25/1997 | US5690796 Method and apparatus for layer depositions |
| 11/25/1997 | US5690795 Screwless shield assembly for vacuum processing chambers |
| 11/25/1997 | CA2042385C Surface-coated hard material for cutting tools or wear resistance tools |
| 11/20/1997 | WO1997043461A1 Method for making a thin film of solid material, and uses thereof |
| 11/20/1997 | WO1997043042A1 Catalyst compositions of nanoparticulate metal on a refractory support |