| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 11/20/1997 | WO1997035912A3 Process for producing an adhesive coating on polymethyl methacrylate (pmma) substrate surfaces |
| 11/20/1997 | DE4345403C2 Appts. for cathode sputtering |
| 11/20/1997 | DE19720652A1 Heating apparatus for use in e.g. manufacture of gas turbines |
| 11/20/1997 | DE19619287A1 NANO-structure on substrate formation method for microelectronics |
| 11/19/1997 | EP0807960A1 Deposition ring anti-rotation apparatus |
| 11/19/1997 | EP0807954A1 Coils for generating a plasma and for sputtering |
| 11/19/1997 | EP0807951A2 Magnetic neutral line discharged plasma type surface cleaning apparatus |
| 11/19/1997 | EP0807315A1 Multi-phase dc plasma processing system |
| 11/19/1997 | EP0616648B1 Method for preparing a target element for cathode sputtering |
| 11/19/1997 | EP0603407B1 Vapor deposition material and production method thereof |
| 11/19/1997 | CN1165500A Multilayer material, in particular transfer strip |
| 11/19/1997 | CN1165383A Method for preparing double-sided superconductivity film by adopting close range radiation heating |
| 11/18/1997 | US5689319 Electro optic display device with porous sub-layer and method |
| 11/18/1997 | US5688608 High refractive-index IR transparent window with hard, durable and antireflective coating |
| 11/18/1997 | US5688585 Matchable, heat treatable, durable, IR-reflecting sputter-coated glasses and method of making same |
| 11/18/1997 | US5688557 Synthetic diamond coating on substrates formed by vapor deposition |
| 11/18/1997 | US5688389 Method and apparatus for thin film coating an article |
| 11/18/1997 | US5688388 Apparatus for coating a substrate |
| 11/18/1997 | US5688382 Vacuum deposition with microwaves for targets, magnets on targets, ionizing material and sputtering |
| 11/18/1997 | US5688381 Magnetron atomization source and method of use thereof |
| 11/18/1997 | US5688380 Method of producing giant magnetoresistive material film and magnetic head |
| 11/18/1997 | US5688330 Self-cleaning, sputtering |
| 11/18/1997 | US5687679 Heat resistance, gas turbine |
| 11/18/1997 | US5687600 Metal sputtering target assembly |
| 11/13/1997 | WO1997042649A1 Magnet array |
| 11/13/1997 | WO1997042648A1 Recessed coil for generating a plasma |
| 11/13/1997 | WO1997032335A3 Control mechanisms for dosimetry control in ion implantation systems |
| 11/12/1997 | EP0806499A1 Method and apparatus for fabricating semiconductor |
| 11/12/1997 | EP0806494A1 Method and fixture for laser bar facet coating |
| 11/12/1997 | EP0806493A2 Vapor deposition apparatus for coating optical substrates |
| 11/12/1997 | EP0806492A1 Substrate holder for vacuum coating apparatus |
| 11/12/1997 | EP0806491A2 Vapor deposition method for coating optical substrates |
| 11/12/1997 | EP0805880A1 Rotatable magnetron with curved or segmented end magnets |
| 11/12/1997 | EP0521045B1 Magnetron sputter ion plating |
| 11/12/1997 | CN2267258Y Electromagnetic compatible equipment for co-sputtering with steady flow magnetic control target and radio-frequency target |
| 11/12/1997 | CN1164915A Apparatus and method for sputtering carbon |
| 11/11/1997 | US5686193 Silicon-aluminum-iron alloy, transducers, magnetic disks |
| 11/11/1997 | US5685969 Sensor arrangement |
| 11/11/1997 | US5685963 In situ getter pump system and method |
| 11/11/1997 | US5685961 Method for fabrication of metallized medical devices |
| 11/11/1997 | US5685960 Method for forming aluminum contacts |
| 11/11/1997 | US5685959 Cathode assembly having rotating magnetic-field shunt and method of making magnetic recording media |
| 11/11/1997 | US5685916 Dry cleaning of semiconductor processing chambers |
| 11/11/1997 | US5685363 Substrate holding device and manufacturing method therefor |
| 11/11/1997 | US5685088 Sealing apparatus for inlet/outlet of atmosphere facility |
| 11/06/1997 | WO1997041598A1 Apparatus and method for improved deposition of conformal liner films and plugs in high aspect ratio contacts |
| 11/06/1997 | WO1997041587A1 Sputtering installation with two longitudinally placed magnetrons |
| 11/06/1997 | WO1997041275A1 Surface alloyed high temperature alloys |
| 11/06/1997 | WO1997040914A1 Method of manufacturing thin metal membranes |
| 11/06/1997 | WO1997035678A3 Channel fabrication in metal objects |
| 11/06/1997 | DE19717565A1 CVD apparatus for efficient production of compound semiconductor thin film |
| 11/06/1997 | DE19707269A1 Sputtering apparatus |
| 11/06/1997 | DE19617057A1 Sputteranlage mit zwei längserstreckten Magnetrons Sputtering system with two elongated magnetron |
| 11/06/1997 | CA2225446A1 Apparatus and method for improved deposition of conformal liner films and plugs in high aspect ratio contacts |
| 11/05/1997 | EP0805490A1 Process for overcoming selectivity loss |
| 11/05/1997 | EP0805481A2 Vacuum processing apparatus and operating method therefor |
| 11/05/1997 | EP0804634A1 Wearing protection layer |
| 11/05/1997 | EP0804630A1 Diamond-like carbon coated transducers for magnetic recording media |
| 11/05/1997 | EP0804625A1 Method for improving oxidation and spalling resistance of diffusion aluminide coatings |
| 11/05/1997 | EP0755461B1 Process and device for ion-supported vacuum coating |
| 11/05/1997 | EP0619694B1 Method of monitoring atmospheric pressure glow discharge plasma |
| 11/04/1997 | US5684574 In-process film thickness monitoring system |
| 11/04/1997 | US5683825 Thermal barrier coating resistant to erosion and impact by particulate matter |
| 11/04/1997 | US5683761 Alpha alumina protective coatings for bond-coated substrates and their preparation |
| 11/04/1997 | US5683757 Doping substrates, oxidation and continuous processing and etching |
| 11/04/1997 | US5683756 Gold plating process for zinc substrates |
| 11/04/1997 | US5683601 Laser ablation forward metal deposition with electrostatic assisted bonding |
| 11/04/1997 | US5683561 Apparatus and method for high throughput sputtering |
| 11/04/1997 | US5683558 Anode structure for magnetron sputtering systems |
| 11/04/1997 | US5683072 Thin film forming equipment |
| 10/30/1997 | WO1997040206A1 Device and method for continuous vapor-deposition on film |
| 10/30/1997 | WO1997039897A1 Droplet deposition apparatus |
| 10/30/1997 | DE19708373A1 Production of reactable material moulds |
| 10/30/1997 | DE19654000C1 Apparatus for cathode sputtering |
| 10/30/1997 | DE19643098C1 Apparatus for cathode sputtering |
| 10/29/1997 | EP0803894A1 Combined ion beam and microwave irradiation means and method |
| 10/29/1997 | EP0803893A2 Vacuum evaporator |
| 10/29/1997 | EP0803590A2 Sliding parts and process for producing same |
| 10/29/1997 | EP0803587A1 Method and apparatus for sputter coating |
| 10/29/1997 | EP0803481A2 High transmittance, low emissivity coated articles |
| 10/29/1997 | EP0802988A1 Method of forming diamond-like carbon film (dlc), dlc film formed thereby, use of the same, field emitter array and field emitter cathodes |
| 10/29/1997 | EP0724775A4 RECRYSTALLIZATION METHOD TO SELENIZATION OF THIN-FILM Cu(In,Ga)Se2 FOR SEMICONDUCTOR DEVICE APPLICATIONS |
| 10/29/1997 | EP0694209A4 ENHANCED QUALITY THIN FILM Cu(In,Ga)Se 2 FOR SEMICONDUCTOR DEVICE APPLICATIONS BY VAPOR-PHASE RECRYSTALLIZATION |
| 10/29/1997 | CN2265986Y Single crystal silicon radiation type heater for preparing film |
| 10/29/1997 | CN2265985Y Gas activating device for vacuum film preparing apparatus |
| 10/29/1997 | CN1163581A Pulsed ion beam assisted deposition |
| 10/29/1997 | CN1163321A Structure material for forming transparent protective film and its producing method |
| 10/28/1997 | US5682590 Coated titanium-based carbonitride |
| 10/28/1997 | US5681616 Thick thermal barrier coating having grooves for enhanced strain tolerance |
| 10/28/1997 | US5681615 Dissolving a salt in a monomer solution, vacuum flash evaporating the solution, condensing evaporated solution as a liquid film, and depositing the composite material on to a substrate in vacuum atomosphere |
| 10/28/1997 | US5681575 Anti-microbial coating for medical devices |
| 10/23/1997 | WO1997039162A1 Sputtering device |
| 10/23/1997 | WO1997039161A1 Cathodic sputtering device |
| 10/23/1997 | WO1997039160A1 Method of producing a cathode-ray tube and apparatus therefor |
| 10/23/1997 | WO1997039159A1 Coated substrate |
| 10/23/1997 | WO1997038851A1 Adhesiveless flexible laminate and process for making adhesiveless flexible laminate |
| 10/23/1997 | WO1997038850A1 Highly durable and abrasion-resistant dielectric coatings for lenses |
| 10/23/1997 | DE19614927A1 Apparatus for applying a masking agent to a foil strip |
| 10/23/1997 | CA2251602A1 Cathodic sputtering device |
| 10/22/1997 | EP0801793A1 Sputtered thermally cycled texture layers formed of high melting point materials |