| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 09/24/1997 | EP0796354A1 Sputtering apparatus having an on board service module |
| 09/24/1997 | CN1160287A Method and apparatus for ion beam formation in ion implanter |
| 09/24/1997 | CN1035956C Coating method, workpiece with hard coating and use thereof |
| 09/23/1997 | US5671322 Lateral flash evaporator |
| 09/23/1997 | US5670827 Cytochrome and/or organella, such as mitochondria containing electroconductive protein electrode on hydroxy, chloro or fluoroapatite dielectric film deposited on a substrate; minimization of undesired electron transfer |
| 09/23/1997 | US5670785 Charge converter provided in an ion implantation apparatus |
| 09/23/1997 | US5670415 Method and apparatus for vacuum deposition of highly ionized media in an electromagnetic controlled environment |
| 09/23/1997 | US5670252 Alternating layers of boron/boron carbide and boron nitride/boron carbide by magnetic sputtering; tools, engines |
| 09/23/1997 | US5670248 Selective radiation converters in solar energy and power industry |
| 09/23/1997 | US5670218 Method for forming ferroelectric thin film and apparatus therefor |
| 09/23/1997 | US5670217 Method for capturing and removing contaminant particles from an interior region of an ion implanter |
| 09/23/1997 | US5670030 Magnetron sputtering process |
| 09/23/1997 | US5669652 Apparatus for gripping a flat substrate |
| 09/18/1997 | WO1997034332A1 Interconnector made from a metallic high-temperature material and with a lanthanum-containing surface |
| 09/18/1997 | WO1997034315A1 Method and apparatus for the coating of workpieces |
| 09/18/1997 | WO1997034024A1 Means for vacuum coating of bulk material |
| 09/18/1997 | WO1997034023A1 Hard material coating with yttrium and method for its deposition |
| 09/18/1997 | WO1997034022A1 Process for preparing endohedral fullerenes or fullerene derivatives |
| 09/18/1997 | DE19609647A1 Hartstoffschicht Hard material layer |
| 09/17/1997 | EP0795890A2 Substrate coating assembly using a sputtering device |
| 09/17/1997 | EP0795888A2 Scanning method for an ion implanter and apparatus therefor |
| 09/17/1997 | EP0795624A1 Substrate holder for evaporation apparatus |
| 09/17/1997 | EP0795623A1 Apparatus for depositing thin layers on a substrate |
| 09/17/1997 | EP0795622A1 Amorphous multi-layered structure and method of making the same |
| 09/17/1997 | EP0795190A1 Process of metallizing phosphor screens |
| 09/17/1997 | EP0795118A2 Highly sensitive optical fiber cavity coating removal detection |
| 09/17/1997 | EP0795106A1 Antireflection coating for a temperature sensitive substrate |
| 09/17/1997 | EP0795084A2 Getter pump module and system |
| 09/17/1997 | EP0795041A1 A PROCESS FOR IN-SITU DEPOSITION OF A Ti/TiN BARRIER METAL STACK |
| 09/17/1997 | EP0707665B1 Diamond coated body |
| 09/17/1997 | EP0686211A4 System for sputtering compositions onto a substrate |
| 09/17/1997 | CN1159553A Solar energy selective absorption surface coating |
| 09/17/1997 | CN1159367A Method for forming thin film of ultra-fine particles, and apparatus for the same |
| 09/16/1997 | US5668023 Epitaxial growth of polar semiconductors |
| 09/16/1997 | US5667853 Multilayered conductive film, and transparent electrode substrate and liquid crystal device using the same |
| 09/16/1997 | US5667851 Process for preparing a metallized polymide film containing a hydrocarbyl tin compound |
| 09/16/1997 | US5667665 Process of producing high purity cobalt |
| 09/16/1997 | US5667663 Method of applying a thermal barrier coating to a superalloy article and a thermal barrier coating |
| 09/16/1997 | US5667650 High flow gas manifold for high rate, off-axis sputter deposition |
| 09/16/1997 | US5667645 Method of sputter deposition |
| 09/16/1997 | US5667592 Process chamber sleeve with ring seals for isolating individual process modules in a common cluster |
| 09/16/1997 | US5667587 Apparatus for growing silicon carbide crystals |
| 09/16/1997 | CA2056307C Method of manufacturing a stamper |
| 09/12/1997 | WO1997033296A1 Transparent contacts for organic devices |
| 09/12/1997 | WO1997033011A1 Method for making sputtering targets from an aluminium alloy |
| 09/12/1997 | WO1997032718A1 Polymeric substrates having scratch- and wear-resistant coating |
| 09/12/1997 | WO1997025078A3 Tetracarbon |
| 09/10/1997 | EP0794568A2 Blanket-selective deposition of cvd aluminum and reflectivity improvement using a self-aligning ultra-thin layer |
| 09/10/1997 | EP0794554A2 Target for a physical vapor deposition system |
| 09/10/1997 | EP0794553A2 High density plasma CVD and etching reactor |
| 09/10/1997 | EP0794268A1 Process for improving corrosion protection of aluminium coated surfaces |
| 09/10/1997 | EP0794267A2 A restrictor shield for a wafer processing apparatus |
| 09/10/1997 | EP0794266A1 Apparatus for coating a substrate surface |
| 09/10/1997 | EP0748395B1 Process for producing layers of cubic boron nitride |
| 09/10/1997 | EP0569467B1 Target for cathode sputtering |
| 09/10/1997 | CN1158911A Apparatus for manufacturing diamond film having large area and method thereof |
| 09/09/1997 | US5666247 No-field, low power FeMn deposition giving high exchange films |
| 09/09/1997 | US5665659 Method for forming metal layer of a semiconductor device |
| 09/09/1997 | US5665214 Automatic film deposition control method and system |
| 09/09/1997 | US5665210 Sputtering |
| 09/09/1997 | US5665209 Depositing a refractory metal film containing nitrogen on a substrate and heat treating film |
| 09/09/1997 | US5665167 Plasma treatment apparatus having a workpiece-side electrode grounding circuit |
| 09/09/1997 | US5665165 Seal and a chamber having a seal |
| 09/04/1997 | WO1997032335A2 Control mechanisms for dosimetry control in ion implantation systems |
| 09/04/1997 | WO1997032055A1 Sputter textured magnetic recording medium |
| 09/04/1997 | WO1997031739A1 Method for producing near net shape planar sputtering targets and an intermediate therefor |
| 09/04/1997 | DE19607803A1 Assembly to register target wear at a sputter cathode |
| 09/03/1997 | EP0792946A1 Evaporation crucibles for coating of substrates |
| 09/03/1997 | EP0792852A1 Stabilized evaporation material based on titanium oxide |
| 09/03/1997 | EP0792688A1 Nanoparticles of silicon oxide alloys |
| 09/03/1997 | EP0792572A1 An apparatus for generation of a linear arc discharge for plasma processing |
| 09/03/1997 | EP0792571A1 Method and device for measuring ion flow in a plasma |
| 09/03/1997 | EP0792382A1 Apparatus for the relative vacuum deposition of a material on bulk parts |
| 09/03/1997 | EP0792381A1 Process for coating substrates and a device for carrying out said process |
| 09/03/1997 | CN1158494A Method and apparatus for capturing and removing contaminant particles from interior region of ion implanter |
| 09/03/1997 | CN1158364A Material for and method of preparing water-repellent coatings on optical substrates |
| 09/03/1997 | CN1035780C Electronic beam evapouring metal ion source for material surface modification |
| 09/02/1997 | US5663001 Aluminum surfaces |
| 09/02/1997 | US5662965 Method of depositing crystalline carbon-based thin films |
| 09/02/1997 | US5662834 Alloys of Ti Ru Fe and O and use thereof for the manufacture of cathodes for the electrochemical synthesis of sodium chlorate |
| 09/02/1997 | US5662785 Method for masking a workpiece and a vacuum treatment facility |
| 09/02/1997 | US5662784 Apparatus for applying thin layers to a substrate |
| 09/02/1997 | US5662742 Equipment for manufacturing a semiconductor device using a solid source |
| 09/02/1997 | US5662741 Process for the ionization of thermally generated material vapors and a device for conducting the process |
| 09/02/1997 | US5661913 Vacuum processing apparatus and operating method therefor |
| 09/02/1997 | CA2170809A1 Blood collection tube assembly |
| 09/02/1997 | CA1339403C Thermal barrier coating for superalloy components |
| 08/28/1997 | WO1997030840A1 MAGNETIC RECORDING MEDIA HAVING CrTiX UNDERLAYERS TO REDUCE CIRCUMFERENTIAL/RADIAL ANISOTROPY AND METHODS FOR THEIR PRODUCTION |
| 08/28/1997 | WO1997023661A3 Process for producing organically mofified oxide, oxynitride or nitride layers by vacuum deposition |
| 08/28/1997 | WO1997023425A3 Process for producing heat-reflecting laminated systems on transparent substrates |
| 08/28/1997 | DE19707522A1 Soft magnetic alloy having high magnetic permeability |
| 08/28/1997 | DE19609248A1 Cathode sputtering apparatus - includes hollow cathode fixed to bottom of target on wall of vacuum chamber, uniform distribution diaphragm shielding bottom of target, and rotary substrate holding plate |
| 08/27/1997 | EP0791667A2 Device for gripping, holding and/or transporting substrates |
| 08/27/1997 | EP0791666A2 Device for gripping, holding and transporting substrates |
| 08/27/1997 | EP0791665A1 Exhaust apparatus in ion implantation system |
| 08/27/1997 | EP0791664A1 Metallisation of thermoplastics |
| 08/27/1997 | EP0791663A1 Titanium nitride barrier layers |
| 08/27/1997 | EP0791226A1 Device for coating substrates using a vapour phase material in a reduced pressure or vacuum environment |
| 08/27/1997 | EP0728223B1 Superplastic titanium by vapor deposition |
| 08/27/1997 | EP0660884B1 Melting method at vacuum evaporation |