Patents
Sitemap › C23 - Coating metallic material; Coating material with metallic material; Chemical surface treatment; Diffusion treatment of metallic material; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general; Inhibiting corrosion of metallic material or incrustation in general › C23C - Coating metallic material; Coating material with metallic material; Surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general › C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
12/2003
12/02/2003US6656260 ZnS-series sintered material and method for producing the same, target using the ZnS-series sintered material, thin film, and optical recording medium using the thin film
12/02/2003US6656233 Having thin films of lithium and a sulfide-based inorganic solid electrolyte; produced without degradation by air
12/02/2003US6655044 Vacuum processing apparatus and operating method therefor
11/2003
11/27/2003WO2003097896A1 Sputter method or device for the production of natural voltage optimized coatings
11/27/2003WO2003097895A1 MATERIAL SUBJECTED TO VACUUM EVAPORATION, MgO MATERIAL SUBJECTED TO VACUUM EVAPORATION, PROCESS FOR PRODUCING THE SAME AND METHOD OF FORMING FILM
11/27/2003WO2003097894A2 Sputtering cathode adapter
11/27/2003WO2003097892A2 System and apparatus for control of sputter deposition process
11/27/2003WO2003097890A2 Method for surface treatment of a doctor blade element
11/27/2003WO2003097725A1 Polyimide film and method for production thereof, and polyimide/metal laminate using polyimide
11/27/2003WO2003097556A1 The manufacturing method of silicon carbide sinter with titanium ions thin film
11/27/2003WO2003069013A3 Plasma processing apparatus
11/27/2003WO2002091452A3 Methods of forming a nitridated surface on a metallic layer and products produced thereby
11/27/2003US20030219911 Ultrasonicator, adapted to sonicate a stream of a liquid dispersion of agglomerated primary particles such as toners
11/27/2003US20030219906 Formation of combinatorial arrays of materials using solution-based methodologies
11/27/2003US20030219633 Cutters comprising cemented carbide bodies, having nitride coatings formed by physical vapor deposition(PVD), used for high speed dry milling of hardened steel
11/27/2003US20030219622 Composite coating of molybdenum disulfide and a metal, preferably tin, for one or both of the contact surfaces of the electrical connector. The coating provides for a low coefficient of friction, low contact resistance, and good
11/27/2003US20030219605 Novel friction and wear-resistant coatings for tools, dies and microelectromechanical systems
11/27/2003US20030219547 CVD treatment device
11/27/2003US20030219541 Comprises vapor phase polymerization of 4-fluorostyrene, 2,3,4,5,6-pentafluorostyrene, and allylpentafluorobenzene; integrated circuits; microelectronics, optoelectronics
11/27/2003US20030218834 Magnetic recording media and magnetic storage apparatus using the same
11/27/2003US20030218754 Apparatus and method for depositing optical thin film
11/27/2003US20030218153 Transparent conductive thin film, process for producing the same, sintered target for producing the same, and transparent, electroconductive substrate for display panel, and organic electroluminescence device
11/27/2003US20030218054 Method for forming sputter target assemblies
11/27/2003US20030217917 Forming aluminum, chromium alloy; hardness, oxidation resistance
11/27/2003US20030217915 Stiff protective structure; forming cavity in encapsulating structure under vacuum; overcoating with titanium nitride coating
11/27/2003US20030217914 Radial sputtering profile; semiconductor, integrated circuits
11/27/2003US20030217913 Small planetary magnetron
11/26/2003EP1365458A1 Barrier layer for an article and method of making said barrier layer by expanding thermal plasma
11/26/2003EP1365043A1 CVD apparatus
11/26/2003EP1365040A1 Assembly for processing substrates
11/26/2003EP1365039A1 Process of masking colling holes of a gas turbine component
11/26/2003EP1364923A1 Matchable, heat treatable durable, IR-reflecting sputter-coated glasses and method of making same
11/26/2003EP1202702B1 Work piece and method for producing and utilizing said work piece
11/26/2003EP1021584B1 Tool with protective layer system
11/26/2003EP0765531B1 ELECTROCHEMICAL HYDROGEN STORAGE ALLOYS AND BATTERIES FABRICATED FROM Mg CONTAINING BASE ALLOYS
11/26/2003EP0643151B9 Apparatus and system for arc ion plating
11/26/2003CN2587884Y Multi-arc ion coating film machine for titanium-aluminium coating
11/26/2003CN2587883Y Deposition equipment for organic illumination assembly
11/26/2003CN1459036A Dielectric film having high refractive index and method for preparation thereof
11/26/2003CN1458986A 溅射靶材 Sputtering Targets
11/26/2003CN1458985A Vapour deposition
11/26/2003CN1458811A Evaporating method, evaporating device and method for producing light-emitting device
11/26/2003CN1458666A Producing device
11/26/2003CN1458297A Dynamic film thickness monitoring and controlling system and method
11/26/2003CN1128926C 活塞环 Piston
11/25/2003US6653643 Method and apparatus for improved ion acceleration in an ion implantation system
11/25/2003US6653211 Semiconductor substrate, SOI substrate and manufacturing method therefor
11/25/2003US6653185 Method of providing trench walls by using two-step etching processes
11/25/2003US6653027 Attenuated embedded phase shift photomask blanks
11/25/2003US6652998 Evaporation; injecting determination concentration of oxygen gas
11/25/2003US6652988 Polymeric basecoat layer containing epoxy urethane resin or reaction product of polyamine and epoxy urethane resin, vapor deposited layer of chromium, chromium compound, refractory metal compound
11/25/2003US6652987 Reflective coatings to reduce radiation heat transfer
11/25/2003US6652974 Sputtering silicon from targets in cells containing nitrogen and hydrocarbon gases to form radiation transparent, wear resistant, amorphous, washable thin films on glass substrates
11/25/2003US6652913 Method of forming a coated body having a nanocrystalline CVD coating of Ti(C,N,O)
11/25/2003US6652806 For fabricating a recording layer of an optical recording medium
11/25/2003US6652718 Electrostatic chuck modulation without use of collimator or shutter; obtaining superior step coverage, grain size and orientation, roughness and uniformity; forming void free filling of high aspect ratio opening
11/25/2003US6652717 Time averaging radio frequency voltage distributions
11/25/2003US6652716 Apparatus and method for self-aligning a cover ring in a sputter chamber
11/25/2003US6652668 High-purity ferromagnetic sputter targets and method of manufacture
11/25/2003US6651582 Method and device for irradiating an ion beam, and related method and device thereof
11/25/2003US6651488 Thin film deposition sensor includes an acoustical resonator
11/25/2003US6651381 Synthetic resin molded material and method for its production
11/25/2003CA2119852C Process and apparatus for continuously coating a moving metallic material with a composition gradient polymer deposit, and product obtained by said process
11/20/2003WO2003096080A2 Silver alloy thin film reflector and transparent electrical conductor
11/20/2003WO2003095700A1 Method for high purity purification of high functional material and method for deposition of high functional material by mass separation method
11/20/2003WO2003095698A2 Device and method for the electron beam attenuation of reactively formed layers on substrates
11/20/2003WO2003095695A2 Sputter coating apparatus including ion beam source(s), and corresponding method
11/20/2003WO2003095385A1 Methods of changing the visible light transmittance of coated articles and coated articles made thereby
11/20/2003WO2003095383A2 Method of making coated articles having an oxygen barrier coating and coated articles made thereby
11/20/2003WO2003095360A1 Method for the production of a metal oxide powder or a semiconductor oxide powder, oxide powder, solid body, and the use thereof
11/20/2003WO2003056603A3 Self-ionized and inductively-coupled plasma for sputtering and resputtering
11/20/2003WO2003032371A3 High-throughput thin-film fabrication vacuum flange
11/20/2003WO2002043466A9 Non-thermionic sputter material transport device, methods of use, and materials produced thereby
11/20/2003WO2002041363A9 System and methods for laser assisted deposition
11/20/2003US20030216037 Method and apparatus for sputter deposition
11/20/2003US20030216035 Method and apparatus for sputter deposition
11/20/2003US20030216014 Monatomic boron ion source and method
11/20/2003US20030215622 Glass substrates coated with a stack of thin layers having reflective properties in the infra-red and/or solar ranges
11/20/2003US20030213985 Ferroelectric capacitor, method of manufacturing same, and semiconductor memory device
11/20/2003US20030213967 Multicolor light emitting device; vertically stacked layers of double heterostructure devices with longest wavelength on top
11/20/2003US20030213929 Rotary barrel gate valve
11/20/2003US20030213560 Tandem wafer processing system and process
11/20/2003US20030213432 Gravity-fed in-line continuous processing system and method
11/19/2003EP1363317A2 Ferroelectric capacitor, method of manufacturing same, and semiconductor memory device
11/19/2003EP1362931A1 Method and apparatus for fabrication of a DLC layer system
11/19/2003EP1362132A2 Rejuvenation of refractory metal products
11/19/2003EP1165854B1 Method and device for coating a product
11/19/2003CN2586703Y High precision automatic shift and moving aligning device
11/19/2003CN1456704A Method for on-the-spot determining membrane thickness
11/19/2003CN1128443C Light information recording medium and mfg. method thereof
11/19/2003CN1128234C Process for preparing high-melting-point photocrystal material
11/18/2003US6650816 Planar waveguide amplifier
11/18/2003US6650023 Apparatus for depositing thin film
11/18/2003US6649861 Method and apparatus for fabrication of miniature structures
11/18/2003US6649732 Aliphatic polyester film and gas barrier film
11/18/2003US6649559 For separation of hydrogen from reformate gas for supplying fuel cells with fuel gas
11/18/2003US6649521 Method for determining the relevant ion and particle flows in i-PVD processes
11/18/2003US6649449 PVD target comprising one or more of Ta, Co, CoTaZr, CoPt, Pt, FeTa, TiZr, CoNb, Mo, CoCrPt, Al, AlCuFe, FeMn or FeAl; bonding layer forming a strong diffusion bond to the target
11/18/2003US6649436 Using organic materials in making an organic light-emitting device
11/18/2003US6649433 Self-healing flexible photonic composites for light sources
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