Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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01/02/2004 | EP1375704A1 Diamond substrate having piezoelectric thin film, and method for manufacturing it |
01/02/2004 | EP1375703A1 Metallic very thin film, metallic very thin film multilayer body, and method for manufacturing the metallic very thin film or the metallic very thin film laminate |
01/02/2004 | EP1375701A1 Thermal barrier coating material |
01/02/2004 | EP1375698A1 Sputter device |
01/02/2004 | EP1375697A1 Laminated film and method of forming film |
01/02/2004 | EP1375693A1 Grain oriented electromagnetic steel sheet exhibiting extremely small watt loss and method for producing the same |
01/02/2004 | EP1375445A1 Process for manufacturing a glazing having a multilayered coating |
01/02/2004 | EP1375431A2 Method of manufacturing inorganic nanotube |
01/02/2004 | EP1374992A1 Supported mixed metal oxide catalyst obtained by physical or chemical vapour deposition |
01/02/2004 | EP1374286A2 Diffuser and rapid cycle chamber |
01/02/2004 | EP1373604A1 Tank for epitaxy installation and installation comprising one such tank |
01/02/2004 | EP1373594A1 Cylindrical magnetron target and apparatus for affixing the target to a rotatable spindle assembly |
01/02/2004 | EP1373388A1 Release films |
01/02/2004 | EP1373278A1 Metalloamide and aminosilane precursors for cvd formation of dielectric thin films |
01/02/2004 | EP1372897A2 Bipolar plasma source, plasma sheet source, and effusion cell utilizing a bipolar plasma source |
01/02/2004 | EP1372871A1 Coating for a handle |
01/02/2004 | EP1131473B1 Process for making metal flakes |
01/01/2004 | US20040001965 High-temperature articles and method for making |
01/01/2004 | US20040001959 Phosphate coating; cell proliferation; adhesion to bone tissue |
01/01/2004 | US20040001916 Cesium dispensers and process for the use thereof |
01/01/2004 | US20040000651 Ion source having replaceable and sputterable solid source material |
01/01/2004 | US20040000477 Apparatus and method for obtaining symmetrical junctions between a read sensor and hard bias layers |
01/01/2004 | US20040000379 Evaporation container and evaporation source |
12/31/2003 | WO2004001831A1 Magnetron plasma processing apparatus |
12/31/2003 | WO2004001817A1 Transfer chamber for vacuum processing system |
12/31/2003 | WO2004001804A2 Device for generation of reactive ions |
12/31/2003 | WO2004001738A1 Method of delivering substrate to film forming device for disk-like substrate, mechanism for delivering substrate used for the method, substrate holder, and method of manufacturing disk-like recording medium using the method |
12/31/2003 | WO2004001737A1 Method for delivery of substrate to film forming device for disk-like substrate, substrate delivery mechanism and substrate holder used for the method, and method of manufacturing disk-like recording medium using the method |
12/31/2003 | WO2004001495A2 Display cell, in particular liquid crystal, or photovoltaic cell comprising means for connection to an electronic control circuit |
12/31/2003 | WO2004001094A1 Sputter target monitoring system |
12/31/2003 | WO2004001093A1 Silver alloy sputtering target and process for producing the same |
12/31/2003 | WO2004001092A1 AlRu SPATTERING TARGET AND METHOD FOR PREPARATION THEREOF |
12/31/2003 | WO2004000987A1 Method of cleaning chamber of vacuum evaporation apparatus for production of organic el element |
12/31/2003 | WO2004000494A1 Coated cutting tool member |
12/31/2003 | WO2004000460A1 Method and apparatus for manufacturing a catalyst |
12/31/2003 | WO2003088347A3 Method for connecting substrates and composite element |
12/31/2003 | WO2003026796A3 A nano-supported sponge catalyst for nanotube growth |
12/31/2003 | WO2002093648A3 Semiconductor device interconnect |
12/31/2003 | CN1464991A Substrate with ito coating film and manufacture thereof |
12/31/2003 | CN1464917A Method and device for forming film |
12/31/2003 | CN1464916A Process for production of ultrathin protective overcoats |
12/31/2003 | CN1464914A Unidirectional silicon steel sheet of ultra low iron loss and method for production thereof |
12/31/2003 | CN1464862A Ceramic and method for preparation thereof, and dielectric capacitor, semiconductor and element |
12/31/2003 | CN1464861A Ceramics film and production method therefor, and ferroelectric capacitor, semiconductor device, other elements |
12/31/2003 | CN1464074A A solid electrolyte crystal material and process for preparing crystal film |
12/31/2003 | CN1132961C Process for preparing mask for organic vacuum coating |
12/30/2003 | US6671109 ND filter having composite PVD film of metal and its oxide |
12/30/2003 | US6670624 Ion implanter in-situ mass spectrometer |
12/30/2003 | US6670055 Magnetic recording medium and manufacturing method therefor |
12/30/2003 | US6669989 Method for producing by evaporation a functionally graded coating with an outer ceramic layer on a metal substrate |
12/30/2003 | US6669987 Depressurization of mechanical cells containing optical recording media, using pumps, then coating the disks |
12/30/2003 | US6669830 Sputtering target, transparent conductive oxide, and process for producing the sputtering target |
12/30/2003 | US6669829 Shutter disk and blade alignment sensor |
12/30/2003 | US6669824 Uniform thin films |
12/30/2003 | US6669823 Process for preparing nanostructured materials of controlled surface chemistry |
12/30/2003 | US6669795 Methods of fabricating high transition temperature SMA, and SMA materials made by the methods |
12/30/2003 | US6669782 Method and apparatus to control the formation of layers useful in integrated circuits |
12/30/2003 | US6668618 Systems and methods of monitoring thin film deposition |
12/25/2003 | WO2003106731A1 Material evaporation chamber with differential vacuum pumping |
12/25/2003 | US20030236163 Providing a catalyst support; vapor depositing layers comprising molybdenum, vanadium and tellurium and layer comprising at least one other element; calcining |
12/25/2003 | US20030235720 Depositing coating material comprising zirconium oxide over substrate; depositing coating material comprising titanium oxide; wherein one of coating materials is deposited by pyrolytic deposition |
12/25/2003 | US20030235695 Glass substrates, including glass sheet and continuous float glass ribbon |
12/25/2003 | US20030235694 Method for the excitation of a plasma and a use of the method |
12/25/2003 | US20030235659 Electron generator for generating electrons by heating a tungsten filament, traveling at a high speed from high voltage power source to the foil support at low voltage, entering into processing zone; electrochemical mechining |
12/25/2003 | US20030234371 Device for generating reactive ions |
12/25/2003 | US20030234176 Vapor deposition of films using electric arcs having graphite electrodes |
12/25/2003 | US20030234175 Pre-sputtering method for improving utilization rate of sputter target |
12/25/2003 | US20030233980 Systems for making barrier coated plastic containers |
12/24/2003 | WO2003107428A1 Semiconductor device and method for fabricating the same |
12/24/2003 | WO2003107385A2 Device for coating substrates by physical vapour deposition, using a hollow cathode discharge method |
12/24/2003 | WO2003106733A1 Target and method of diffusion bonding target to backing plate |
12/24/2003 | WO2003106732A1 Article coated with titanium compound film, process for producing the article and sputtering target for use in the film coating |
12/24/2003 | WO2003106730A1 Thin film-forming apparatus |
12/24/2003 | WO2003106729A2 Method of making automotive trim with chromium inclusive coating thereon, and corresponding automotive trim product |
12/24/2003 | WO2003106363A2 Method for production of a glazed piece provided with a multi-layer coating |
12/24/2003 | WO2003106016A1 Process for preparing nanostructured materials of controlled surface chemistry |
12/24/2003 | WO2003071577A3 Channel spark source for generating a stable, focussed electron beam |
12/24/2003 | WO2003062491A3 Refractrory metal and alloy refining by laser forming and melting |
12/24/2003 | CN2594278Y Continuous magnetic controlled sputtering apparatus for producing high reflective mirror |
12/24/2003 | CN2594277Y Magnetic filtered metal vapor vacuum arc plasma depositing source |
12/24/2003 | CN1463450A Mfg. method of double-sided metallization film and metallization film capacitor using same |
12/24/2003 | CN1463367A Antireflection film and antireflection layer-affixed plastic substrate |
12/24/2003 | CN1463300A Sputtering target for forming phase change type optical disk protective film and optical recording medium with phase change type optical disk protective film formed thereon by using target |
12/24/2003 | CN1463225A Coated article with polymeric basecoat |
12/24/2003 | CN1462817A Metal plasma procedure in multistage ionization |
12/24/2003 | CN1132227C Ion beam neutralizing method and appts. |
12/24/2003 | CN1132219C Cathode arc source and graphite target |
12/24/2003 | CN1132218C Ion filling appts. ion source appts. and method for positioning ion source appts. |
12/23/2003 | USRE38358 Cold cathode ion beam deposition apparatus with segregated gas flow |
12/23/2003 | US6668207 Optical films for extreme ultraviolet lithography |
12/23/2003 | US6667839 Holding device for an optical element made of a crystalline material |
12/23/2003 | US6667493 Thin-film magnetic element capable of effectively orienting magnetization direction of magnetic layer and manufacturing method thereof |
12/23/2003 | US6667215 Method of making transistors |
12/23/2003 | US6667121 Heat treatable coated article with anti-migration barrier between dielectric and solar control layer portion, and methods of making same |
12/23/2003 | US6667075 Method for imparting hydrophilicity to substrate |
12/23/2003 | US6666982 Protection of dielectric window in inductively coupled plasma generation |
12/23/2003 | US6666958 Sputtering or vapor depostion of silicon carbide targets, while adjusting electricity and/or concentration of oxygen or nitrogen, to form coatings or thin films having variable thickness; optical filters |
12/23/2003 | US6666957 Magnetron sputtering system and photomask blank production method based on the same |
12/23/2003 | US6666901 Thermal shock resistant quasicrystalline alloy target |
12/23/2003 | US6666811 Coating microsphere with radioactive, diffusion barrier, and protective layers; solid, multilayered seamless elements are implanted; heating tumors |