| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 02/12/2004 | DE10235051A1 Vapor deposition of acicular x-ray phosphor layer, used e.g. as phosphor or storage phosphor in medicine or non-destructive testing of materials involves simultaneous vaporization of trivalent europium oxyhalide and alkali halide |
| 02/12/2004 | DE10234862A1 Process for magnetron sputtering for depositing thin layers for coating glass, plastic films, metals, electrical components and other substrates comprises initially impinging a magnetron source and/or partial target with a magnetic field |
| 02/12/2004 | DE10234859A1 Einrichtung und Verfahren zum Beschichten von Substraten Apparatus and method for coating substrates |
| 02/12/2004 | DE10234856A1 Coating device for depositing layers of alloys, mixtures or reaction products of different materials by magnetron sputtering has a target made from concentrically arranged partial targets each made from the material to be deposited |
| 02/12/2004 | DE10234855A1 Device for adjusting layer thickness distribution during vacuum deposition on moving substrates comprises adjustable opening delimited by partial screens, and vaporizing region running across moving direction |
| 02/12/2004 | DE10233567A1 Device for generating pulsed plasma in vacuum chamber with solid state target has at least one debris stop that rotates about axis between optical element or substrate and plasma in vacuum chamber |
| 02/12/2004 | DE10207078B4 Kolbenring mit einer PVD-Beschichtung Piston ring with a PVD coating |
| 02/11/2004 | EP1388885A2 Cathodic arc shielding |
| 02/11/2004 | EP1388592A1 Process and apparatus for isolating a surface area of a workpiece |
| 02/11/2004 | EP1388566A1 Metallized polyester composition |
| 02/11/2004 | EP1388159A1 Magnetic mirror plasma source |
| 02/11/2004 | EP1387897A1 Electrode arrangement for the plasma-supported magnetically-guided deposition of thin layers in vacuo |
| 02/11/2004 | CN1474881A Substrate with photocatalytic coating |
| 02/11/2004 | CN1474752A Polymer anti-reflective coatings deposited by plasma enhanced chemical vapor deposition |
| 02/11/2004 | CN1138020C Evaporation coating process with cathode arc for depositing diamond-like carbon film |
| 02/11/2004 | CN1138011C Aluminium alloy thin film and target and method for forming thin film using same |
| 02/10/2004 | US6690094 High aspect ratio metallization structures |
| 02/10/2004 | US6689685 Process for forming a diffusion barrier material nitride film |
| 02/10/2004 | US6689515 Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blank |
| 02/10/2004 | US6689487 Thermal barrier coating |
| 02/10/2004 | US6689486 Bimorphic, compositionally-graded, sputter-deposited, thin film shape memory device |
| 02/10/2004 | US6689477 Sintered products contain indium oxide, tin oxide and zinc oxide; formed into films through sputtering; displays |
| 02/10/2004 | US6689456 Magnetic recording medium, a manufacturing method thereof, and a magnetic recording unit using thereof |
| 02/10/2004 | US6689444 Reflection layer or semi-transparent reflection layer for use in optical information recording media, optical information recording media and sputtering target for use in the optical information recording media |
| 02/10/2004 | US6689255 Variations in thickness; rotation; positioning mask |
| 02/10/2004 | US6689254 Replaceable sputtering target with annular projecting rim having forward facing front edge forming vacuum tight seal with sputtering chamber, rearward facing rear edge having fluid sealing surface surrounding cooling fluid cavity |
| 02/10/2004 | US6689253 Facing target assembly and sputter deposition apparatus |
| 02/10/2004 | US6689221 Cooling gas delivery system for a rotatable semiconductor substrate support assembly |
| 02/10/2004 | US6689199 Apparatus and method for introducing small amounts of refractory elements into a vapor deposition coating |
| 02/10/2004 | US6688817 Drill for drilling, a method for making a drill for drilling, and a cutting tool |
| 02/10/2004 | US6688254 Vapor deposition temperature control apparatus and method |
| 02/05/2004 | WO2004012229A2 Reduced volume, high conductance process chamber |
| 02/05/2004 | WO2004012220A2 Methods and apparatus for monitoring plasma parameters in plasma doping systems |
| 02/05/2004 | WO2004011693A1 Atomic deposition layer methods |
| 02/05/2004 | WO2004011691A1 Copper sputtering targets and methods of forming copper sputtering targets |
| 02/05/2004 | WO2004011690A1 Sputtering target |
| 02/05/2004 | WO2004011688A2 Method and apparatus for dispersion strengthened bond coats for thermal barrier coatings |
| 02/05/2004 | WO2003087233A3 Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition |
| 02/05/2004 | WO2003083160A3 Evaluation of chamber components having textured coatings chamber components |
| 02/05/2004 | US20040023811 Depositing polycrystalline thin film on a polycrystalline substrate. The temperature of the polycrystalline substrate is set within a range from 150 degrees C. to 250 degrees C., the ion beam energy of the ion beam is adjusted within a |
| 02/05/2004 | US20040023445 Electronic circuit |
| 02/05/2004 | US20040023432 Semiconductor polysilicon component and method of manufacture thereof |
| 02/05/2004 | US20040023125 Method for producing a halftone phase shift mask blank, a halftone phase shift mask blank and halftone phase shift mask |
| 02/05/2004 | US20040023106 Apparatus and method for fracture absorption layer |
| 02/05/2004 | US20040023080 First layer comprises 50-100 wt. % alumina and 50-0 wt. % silica; second layer comprises 50-100 wt. % silica and 50-0 wt. % alumina; provides the coating stack with a higher emissivity |
| 02/05/2004 | US20040023048 Enhanced bonding layers on native oxide surfaces |
| 02/05/2004 | US20040023047 Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof |
| 02/05/2004 | US20040023038 Limits the transmission of oxygen-containing gases to materials over which it is deposited when subjected to conditioning comprising one or more of heating, bending, and tempering. |
| 02/05/2004 | US20040023020 Thermal barrier coating utilizing a dispersion strengthened metallic bond coat |
| 02/05/2004 | US20040022947 Method for creating microstructure patterns by contact transfer technique |
| 02/05/2004 | US20040022942 Vapour deposition |
| 02/05/2004 | US20040022664 High heat resistance and a low electrical resistance |
| 02/05/2004 | US20040022662 Method for protecting articles, and related compositions |
| 02/05/2004 | US20040021410 Method and apparatus for making a shadow mask array |
| 02/05/2004 | US20040020770 Auxiliary electromagnets in a magnetron sputter reactor |
| 02/05/2004 | US20040020769 High purity sputter targets with target end-of-life indication and method of manufacture |
| 02/05/2004 | US20040020768 Asymmetric rotating sidewall magnet ring for magnetron sputtering |
| 02/05/2004 | US20040020761 Sputter coating apparatus including ion beam source(s), and corresponding method |
| 02/05/2004 | US20040020760 Pulsed highly ionized magnetron sputtering |
| 02/05/2004 | US20040020759 Sputtering cathode adapter assembly and method |
| 02/05/2004 | US20040020435 Multi-face forming mask device for vacuum deposition |
| 02/05/2004 | DE10233137A1 Substrate coating unit, comprises a distributor for gaseous material, which sends out a coating material, and an electron beam generator |
| 02/05/2004 | DE10232731A1 Be- und Entladevorrichtung für eine Beschichtungseinrichtung Loading and unloading of a coating device |
| 02/05/2004 | DE10232179A1 PVD-Verfahren und PVD-Vorrichtung PVD method and PVD device |
| 02/05/2004 | DE10231203A1 Targetträgeranordnung Target support assembly |
| 02/05/2004 | DE10058767B4 Verfahren zum beschleunigten Erzeugen eines vorbestimmten Prozeßgasdruckes in einer Prozeßkammer A method of accelerated forming a predetermined process gas pressure in a process chamber |
| 02/04/2004 | EP1387602A1 A method of forming an electrically conductive coating on support sheets for printed circuit cards |
| 02/04/2004 | EP1386979A2 Method of producing polycrystalline thin film and method of producing an oxide superconducting element |
| 02/04/2004 | EP1386198A2 Ion-beam deposition process for manufacturing binary photomask blanks |
| 02/04/2004 | EP1386019A1 Apparatus and method for epitaxial sputter deposition of multi-compound magnetic epilayers with high deposition rate |
| 02/04/2004 | EP1385900A1 Barrier coated plastic containers |
| 02/04/2004 | EP1029105B1 PVD Al2O3 COATED CUTTING TOOL |
| 02/04/2004 | CN2602034Y Continuous deposition and sputter machine |
| 02/04/2004 | CN1473355A Electrode for P-type Sic |
| 02/04/2004 | CN1473329A Sputtering target and production method therefor and optical recording medium formed with phase-change type optical disk protection film |
| 02/04/2004 | CN1472774A Micro-powder remover |
| 02/04/2004 | CN1472598A Masks for vaporation, frame assembly therewith and manufacture of both |
| 02/04/2004 | CN1472360A Ion implanted composite coating film apparatus |
| 02/04/2004 | CN1472359A Heating temperature controller and method for preparing method |
| 02/04/2004 | CN1472135A Carbon nanometer for fuel battery, its preparing method and fuel battery therewith |
| 02/04/2004 | CN1472008A Mixed metallic oxide catalyst with physical weather salation load |
| 02/04/2004 | CN1137466C Exchange bonding film, magneto-resistant effect element, magnet head and magnet memory |
| 02/04/2004 | CN1137284C Process for modifying inner surface of tubular workpiece |
| 02/03/2004 | US6687015 Method and device for measuring the thickness of a layer |
| 02/03/2004 | US6686599 Ion production device for ion beam irradiation apparatus |
| 02/03/2004 | US6686290 Method of forming a fine pattern |
| 02/03/2004 | US6686236 Methods of preventing reduction of IrOx during PZT formation by metalorganic chemical vapor deposition or other processing |
| 02/03/2004 | US6686215 Method of producing an electroluminescence display device |
| 02/03/2004 | US6686205 Parallel synthesis and analysis |
| 02/03/2004 | US6686053 AL alloy member having excellent corrosion resistance |
| 02/03/2004 | US6686050 Heat treatable low-E coated articles and methods of making same |
| 02/03/2004 | US6685805 Method of manufacturing substrate having transparent conductive film, substrate having transparent conductive film manufactured using the method, and touch panel using the substrate |
| 02/03/2004 | US6685804 Depositing thin film of active material capable of alloying with lithium on current collector of metal incapable of such alloying, by supplying material from gas phase, forming mixed layer at interface via diffusion of current collector material |
| 02/03/2004 | CA2226335C Cutting tool |
| 01/29/2004 | WO2004010508A1 Nonvolatile semiconductor storage device and manufacturing method |
| 01/29/2004 | WO2004010494A2 Method for transferring an electrically active thin layer |
| 01/29/2004 | WO2004010475A2 Method of reducing internal stress in materials |
| 01/29/2004 | WO2004010455A2 Ion beam source with coated electrode |
| 01/29/2004 | WO2004010229A1 Method, article and composition for limiting particle aggregation in a mask deposited by a colloidal suspension |
| 01/29/2004 | WO2004009866A2 Monolithic sputtering target assembly |