Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
03/2004
03/25/2004WO2004024972A2 Systems and methods for a target and backing plate assembly
03/25/2004WO2004024626A1 Iron silicide powder and method for production thereof
03/25/2004WO2004024452A2 PROCESS FOR MAKING DENSE MIXED METAL Si3N4 TARGETS
03/25/2004WO2004009866A3 Monolithic sputtering target assembly
03/25/2004WO2003106729A3 Method of making automotive trim with chromium inclusive coating thereon, and corresponding automotive trim product
03/25/2004WO2003095383A3 Method of making coated articles having an oxygen barrier coating and coated articles made thereby
03/25/2004WO2003091788A3 Process for forming a patterned thin film conductive structure on a substrate
03/25/2004WO2003090248A3 Reducing particle generation during sputter deposition
03/25/2004WO2003088354A3 Method for producing a copy protection for an electronic circuit and corresponding component
03/25/2004WO2003085152A3 Coated bodies and a method for coating a body
03/25/2004WO2003083159A3 Security element and method for production thereof
03/25/2004WO2003074754A3 Coating method and apparatus
03/25/2004WO2003064721A3 Cesium vapor emitter and method of fabricating the same
03/25/2004US20040058542 Method of producing a sputtering target
03/25/2004US20040058529 Method of depositing a layer
03/25/2004US20040058514 Computer controlled de-clip-shadow mask removal machine
03/25/2004US20040058254 Phase shift mask blank, photo mask blank, and manufacturing apparatus and method of blanks
03/25/2004US20040058240 Anode compositions having an elastomeric binder and an adhesion promoter
03/25/2004US20040058237 Method for manufacturing electrochemical device
03/25/2004US20040058200 Method of forming a ceramic coating on a substrate by electron-beam physical vapor deposition
03/25/2004US20040058199 Hexagonal boron nitride film with low dielectric constant, layer dielectric film and method of production thereof, and plasma CVD apparatus
03/25/2004US20040058196 Magnetic material structures, devices and methods
03/25/2004US20040058190 Having integral incorporation of a platinum group metal or alloy thereof directly or indirectly attached to a minor surface portion of article
03/25/2004US20040058169 For use as insulating glass (IG) window units, architectural or residential monolithic window units, vehicle windows
03/25/2004US20040058089 Floor tile coating method and system
03/25/2004US20040058088 Preparing a substrate of a polymer material; surface-modifying the substrate; forming a seed layer on the substrate; and forming the thick film on the seed layer
03/25/2004US20040058068 Method for vapor-deposit and x-ray luminophore on a carrier
03/25/2004US20040057893 Carbon material for producing metal-including fullerene in high yield
03/25/2004US20040057864 Comprises thin film electrodes; improved corrosion-resistance; low electrical resistance, high conduction and high adhesion
03/25/2004US20040057090 Physical vapor deposition targets and methods of formation
03/25/2004US20040056425 Piston ring and method of producing the same
03/25/2004US20040056244 Device for depositing patterned layers in OLED displays
03/25/2004US20040056070 Method of manufacturing sputter targets with internal cooling channels
03/25/2004US20040055884 Rod target for arc evaporation source, manufacturing method therefor, and arc deposition device
03/25/2004US20040055882 Apparatus identifies an analyte by comparing a single pattern of alternating current electrical information of the analyte at various selected frequencies ranging from 10 KHz to 1 MHz with patterns of electrical information of known analytes; portable; fewer interference deficiency, enhanced sensitivity
03/25/2004US20040055880 Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith
03/25/2004US20040055871 Deflection of particle defects using ion beams ; lithography; cleaning integrated circuits
03/25/2004US20040055709 Electrostatic chuck having a low level of particle generation and method of fabricating same
03/25/2004US20040055538 Rectangular cathodic arc source and method of steering an arc spot
03/25/2004US20040055537 Transfer chamber for vacuum processing system
03/25/2004DE4418906B4 Verfahren zum Beschichten eines Substrates und Beschichtungsanlage zu seiner Durchführung A method for coating a substrate and coating plant for its implementation
03/25/2004CA2495774A1 Thin film phosphor for electroluminescent displays
03/25/2004CA2495771A1 Silicon oxynitride passivated rare earth activated thioaluminate phosphors for electroluminescent displays
03/25/2004CA2441680A1 Titanium article having improved corrosion resistance
03/24/2004EP1401249A2 Plasma source
03/24/2004EP1401036A2 Depositing layers in oled devices using viscous flow
03/24/2004EP1401013A1 Plasma processing device
03/24/2004EP1401008A1 Element for coupling electrical energy into a processing chamber and processing system comprising such an element
03/24/2004EP1400990A1 Method of manufacturing double surface metallized film, and metallized film capacitor using the method
03/24/2004EP1400609A1 Precipitation hardened wear resistant coating
03/24/2004EP1400608A1 Film forming method, multilayer film reflector manufacturing method, and film forming device
03/24/2004EP1400607A1 Thermal barrier coating with improved strength and fracture toughness
03/24/2004EP1400330A1 Method and apparatus for forming high surface area material films and membranes
03/24/2004EP1400293A2 PVD coated cutting tool
03/24/2004EP1399967A1 Method of making full color display panels
03/24/2004EP1399945A1 Magnetron atomisation source
03/24/2004EP1399602A1 Method of making a nickel-coated copper substrate and thin film composite containing the same
03/24/2004CN1484711A Sprttering target
03/24/2004CN1484330A Multi-layer reflection film and preparation process thereof
03/24/2004CN1484275A 一种灯丝及其制备方法 One kind of filament and its preparation method
03/24/2004CN1483852A Ag base alloy thin film and sputtering target for forming Ag base alloy film
03/24/2004CN1483851A Method for preparing self-assenbling monomolecular film in vapor phase and vapor phase assembiling instrument
03/24/2004CN1483769A Metallic coating with oxidation resistance and fatigue resistance
03/24/2004CN1143276C Perpendicular magnetic recording medium and magnetic recording device using the same
03/23/2004US6709958 Integrated circuit device and fabrication using metal-doped chalcogenide materials
03/23/2004US6709774 Differentially resputtering the target elements by applying varying electric potentials at a plurality of points on a conductive surface of a substrate to modulate the surface in a variety of patterns; adjusting the radial coercivity
03/23/2004US6709773 Magnetic anisotrophy of soft-underlayer induced by seedlayer
03/23/2004US6709720 Using laser beams
03/23/2004US6709701 Avoiding interruption by replacing at intermediate position on handler
03/23/2004US6709558 Gas sensor
03/23/2004US6709557 Sputter apparatus for producing multi-component metal alloy films and method for making the same
03/23/2004US6709556 Plasma processing apparatus
03/23/2004US6709553 Multiple-step sputter deposition
03/23/2004US6709524 Vapor deposition method and vapor deposition apparatus for forming organic thin films
03/23/2004US6709522 Material handling system and methods for a multichamber plasma treatment system
03/23/2004US6708870 Method for forming sputter target assemblies
03/23/2004US6708645 Arc resistant high voltage feedthru fitting for a vacuum deposition chamber
03/18/2004WO2004023515A1 Sputtering cathode, production method and corresponding cathode
03/18/2004WO2004023508A2 Accessory member for dispensers of alkali metals
03/18/2004WO2004022813A1 Sputtering target and optical recording medium
03/18/2004WO2004022812A1 Sputtering target and optical recording medium
03/18/2004WO2004022809A1 Ultra-low carbon stainless steel
03/18/2004WO2004022499A1 Heat treatable low-e coated articles and methods of making same by sputtering ag in oxygen inclusive atmosphere
03/18/2004WO2004022209A2 Vapor deposited catalysts and their use in fuel cells
03/18/2004WO2003100846A3 Glass material for use at high frequencies
03/18/2004WO2003093529A3 Large area deposition in high vacuum with high thickness uniformity
03/18/2004WO2003072846A9 A method of depositing a barrier layer
03/18/2004US20040053081 For flat panel displays (FPD) comprising polycrystalline body, sintered body, or single crystal having surface covered with fluoride layer
03/18/2004US20040053080 Compound film, and method for fabricating the same
03/18/2004US20040053026 Attenuated embedded phase shift photomask blanks
03/18/2004US20040052996 Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same
03/18/2004US20040052995 Multilayer polymeric/zero valent material structure for enhanced gas or vapor barrier and UV barrier and method for making same
03/18/2004US20040052975 Silicon oxide or oxynitride layers on substrates formed by sputtering, for use as weatherproof, heat and chemical resistant protective sheets used for packaging foods, drugs or electronics
03/18/2004US20040052946 Method for producing a tool which can be used to create surface structures in the sub-mum range
03/18/2004US20040052942 Method for coating substrates and mask holder
03/18/2004US20040051432 Light filament formed from carbon nanotubes and method for making same
03/18/2004US20040051102 Electronic circuit
03/18/2004US20040050689 Method for high frequency sputtering dielectric target in a vacuum chamber with high frequency gas discharge; for coating optical storage disks
03/18/2004US20040050688 Magnetic recording medium and production process thereof
03/18/2004US20040050687 Bias sputtering film forming process and bias sputtering film forming apparatus