| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 03/18/2004 | US20040050108 Mechanism to mold glass lenses using an implanted precision glass molding tool |
| 03/18/2004 | DE10242421A1 Coating for substrates used in the automobile industry comprises niobium nitride or niobium metal nitride |
| 03/18/2004 | DE10240160A1 Corrosion-protected component used as a connecting element, such as a rivet, bolt or screw, comprises a base body made from a steel or light metal and a corrosion-inhibiting surface layer made from aluminum, alloy or compound |
| 03/18/2004 | CA2670068A1 Metallic material for electronic components, method of working and process for producing thereof |
| 03/18/2004 | CA2669987A1 Metallic material for electronic components, method of working and process for producing thereof |
| 03/18/2004 | CA2488724A1 Vapor deposited catalysts and their use in fuel cells |
| 03/17/2004 | EP1398819A2 Matching box, vacuum apparatus using the same, and vacuum processing method |
| 03/17/2004 | EP1397534A2 A method of growing a semiconductor layer |
| 03/17/2004 | EP1397527A1 Grain oriented electric sheet of metal with an electrically insulating coating |
| 03/17/2004 | EP1397526A2 Modified diamond-like carbon (dlc) layer structure |
| 03/17/2004 | EP1397525A1 Device for vacuum metallising large surfaces by plasma activation |
| 03/17/2004 | EP1397260A1 Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition |
| 03/17/2004 | EP1397244A1 Transparent conductive stratiform coating of indium tin oxide |
| 03/17/2004 | EP1238120B1 Device and method for coating objects at a high temperature |
| 03/17/2004 | EP1084283B1 Vacuum strip coating installation |
| 03/17/2004 | CN1483300A Production method and device for organic el element |
| 03/17/2004 | CN1482653A Precursor containing a nitrogen compound bound to hfcl4 for hafnium oxide layer and method for forming hafnium oxide film using the precursor |
| 03/17/2004 | CN1482274A Aluminum nitride monocrystal film and method of preparing the same |
| 03/17/2004 | CN1481971A Pvd coated cutting tool |
| 03/17/2004 | CN1142561C Corrosion-resisting permanent magnet and method for producing same |
| 03/17/2004 | CN1142317C Process for preparing gas-sensitive allochroic WO3 film by vacuum evaporation |
| 03/17/2004 | CN1142316C Nb-doped barium titanate film material and its preparing process |
| 03/16/2004 | US6707610 Applying grey metal damage retardation layer to flexible substrate, applying optical coating of titanium nitride on side of metal layer opposite substrate, attaching to rigid substrate for solar control |
| 03/16/2004 | US6707097 Method for forming refractory metal-silicon-nitrogen capacitors and structures formed |
| 03/16/2004 | US6706448 Method and apparatus for lithiating alloys |
| 03/16/2004 | US6706412 Barrier film for limiting transmission of oxygen and moisture therethrough |
| 03/16/2004 | US6706407 Glass coated with heat reflecting colored film and process for its production |
| 03/16/2004 | US6706327 Method of making cemented carbide body |
| 03/16/2004 | US6706323 Vapor phase coating of airfoil flowpath surfaces and platform upper surfaces of several airfoils simultaneously while masking dovetail sections |
| 03/16/2004 | US6706226 Compacting moisture-sensitive organic materials in making an organic light-emitting device |
| 03/16/2004 | US6706156 Method of making an improved MR sensor |
| 03/16/2004 | US6706155 Sputtering apparatus and film manufacturing method |
| 03/12/2004 | CA2512478A1 Compound film, and method for fabrication the same |
| 03/12/2004 | CA2419099A1 Compound film, and method for fabricating the same |
| 03/11/2004 | WO2004020687A1 High throughput deposition apparatus |
| 03/11/2004 | WO2004020686A2 A hybrid beam deposition system and methods for fabricating zno films, p-type zno films, and zno-based ii-vi compound semiconductor devices |
| 03/11/2004 | WO2004020683A2 Silver selenide film stoichiometry and morphology control in sputter deposition |
| 03/11/2004 | WO2003079432A3 Automatically adjusting serial connections of thick and thin layers and method for the production thereof |
| 03/11/2004 | US20040049308 Assembly for processing substrates |
| 03/11/2004 | US20040048466 Method and apparatus for forming high surface area material films and membranes |
| 03/11/2004 | US20040048461 Methods and apparatus for forming barrier layers in high aspect ratio vias |
| 03/11/2004 | US20040048449 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 03/11/2004 | US20040048092 Preparing a structure including columnar members and an area surrounding each of columnar members; removing columnar members from structure to form a porous body; filling porous body with a functional material |
| 03/11/2004 | US20040048077 For containing high frequency electromagnetic radiation within a personal computer, cellular telephone, or other electronic instrument; lightweight, efficiency |
| 03/11/2004 | US20040048075 Surface plasmon-excitable granular thin film of noble metal |
| 03/11/2004 | US20040048074 Glass coated with heat reflecting colored film and process for its production |
| 03/11/2004 | US20040048037 Method of fabricating electronic devices |
| 03/11/2004 | US20040048000 Device and method for organic vapor jet deposition |
| 03/11/2004 | US20040047989 Process for producing metal oxide, target comprising the metal oxide for forming thin metal oxide film, process for producing the same, and process for producing thin metal oxide film |
| 03/11/2004 | US20040046969 System and method for monitoring thin film deposition on optical substrates |
| 03/11/2004 | US20040046130 Apparatus and method for synthesizing films and coatings by focused particle beam deposition |
| 03/11/2004 | US20040045812 Magnetic coils for guiding a plasma produced by a vacuum arc evaporating source to the vicinity of a substrate in a film forming chamber by use of a deflection magnetic field. The vacuum arc vapor deposition apparatus further includes a coil |
| 03/11/2004 | US20040045811 A metal vapor deposition reactor includes a primary reactor chamber having a primary chamber enclosure comprising a ceiling chamber having a primary chamber enclosure comprising a ceiling and side wall. A wafer support pedestal within the |
| 03/11/2004 | US20040045810 Forming a thin film from negatively charged sputtered ions. More specifically, a sputter deposition apparatus for forming a thin film on a substrate includes at least one sputter target comprised of a material for the thin film, an ion gun |
| 03/11/2004 | US20040045809 Sputtering target and method for making composite soft magnetic films with a sintered target |
| 03/11/2004 | US20040045807 Process for preparing nanostructured materials of controlled surface chemistry |
| 03/11/2004 | US20040045507 Apparatus for plasma doping |
| 03/11/2004 | US20040045341 Method and apparatus for fabricating quantum dot functional structure, quantum dot functional structure, and optically functioning device |
| 03/11/2004 | US20040045320 Method for transporting glass panels through a coating installation and device for transporting said glass panels |
| 03/11/2004 | DE4126216B4 Vorrichtung für Dünnschichtverfahren zur Behandlung großflächiger Substrate Apparatus for thin-film processes for the treatment of large area substrates |
| 03/11/2004 | DE10341513A1 Technique, for controlling flow of reactive gas in plasma vacuum deposition process, involves using optical spectroscopy to measure the particle stream intensities in the coating material and the reactive gas |
| 03/11/2004 | DE10240221A1 Verfahren zum Herstellen dünner Präzisionsrohre A method for producing thin precision tubes |
| 03/11/2004 | DE10224990B3 Verfahren zur Abscheidung transparenter leitfähiger Schichten A process for the deposition of transparent conductive layers |
| 03/10/2004 | EP1396470A2 Fabrication of microstructures with vacuum-sealed cavity |
| 03/10/2004 | EP1395876A2 Ion-beam deposition process for manufacturing attenuated phase shift photomask blanks |
| 03/10/2004 | EP1395689A1 Pt-co based sputtering targets |
| 03/10/2004 | EP1395688A1 Ion beam sputter deposition process |
| 03/10/2004 | CN2606115Y Crucible vaporizer for organic electroluminascent film coater |
| 03/10/2004 | CN1481582A Processing method and processing appts |
| 03/10/2004 | CN1481449A Injector and method for prolonged introduction of reagents into plasma |
| 03/10/2004 | CN1480999A Sputter system capable of detecting position of semiconductor chip automatically |
| 03/10/2004 | CN1480984A Mfg. equipment |
| 03/10/2004 | CN1480744A Plastic optical device having antireflecting membrane and mechanism enabling evenness of such membrane |
| 03/10/2004 | CN1480557A Magnetism controlled wobbly sputter machine in sweep type |
| 03/10/2004 | CN1480555A Pre-sputter method for raising rate of utilization of sputter target |
| 03/10/2004 | CN1480554A Alloy target material for conduction film and its preparation method |
| 03/10/2004 | CN1480342A Laser thermal transfer donor contg separated adulterant coating |
| 03/10/2004 | CN1141734C Preparation of solar energy photovoltaic material-carbon film |
| 03/10/2004 | CN1141416C Indium source reagent compsns. |
| 03/10/2004 | CN1141415C Synthesis of carbon-base film |
| 03/10/2004 | CN1141187C Method and appts. for zone lubrication of magnetic media |
| 03/10/2004 | CN1141178C Titanium dioxide photocatalysis air-cleaning film and its preparation method |
| 03/09/2004 | US6704913 In situ wafer heat for reduced backside contamination |
| 03/09/2004 | US6703300 Method for making multilayer electronic devices |
| 03/09/2004 | US6703179 Transfer of organic material from a donor to form a layer in an OLED device |
| 03/09/2004 | US6703130 Substrate coated with transparent conductive film and manufacturing method thereof |
| 03/09/2004 | US6702934 Pulsed arc molecular beam deposition apparatus and methodology |
| 03/09/2004 | US6702931 Forming thick, uniform oxide layer; evaporation of single phase target in oxygen atmosphere |
| 03/09/2004 | US6702930 Method and means for enhancing utilization of sputtering targets |
| 03/04/2004 | WO2004018166A1 A cutting member having a superlattice coating |
| 03/04/2004 | WO2004001495A3 Display cell, in particular liquid crystal, or photovoltaic cell comprising means for connection to an electronic control circuit |
| 03/04/2004 | WO2003100121A3 Multistation coating device and method for plasma coating |
| 03/04/2004 | WO2003088445A3 Apparatus and method for arc detection |
| 03/04/2004 | WO2003051787A3 Method for the production of locally functional photocatalytic areas and objects obtained therewith |
| 03/04/2004 | WO2002023582A9 Faraday system for ion implanters |
| 03/04/2004 | US20040043628 Method of forming an oxide film |
| 03/04/2004 | US20040043553 Elimination of dendrite formation during metal/chalcogenide glass deposition |
| 03/04/2004 | US20040043525 Method of forming protection film for covering electronic component and electronic device having protection film |
| 03/04/2004 | US20040043260 Substrate with photocatalytic coating |
| 03/04/2004 | US20040043259 Optical multilayer film and optical semiconductor device including the same |