Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
04/2004
04/15/2004WO2004031435A2 High-power pulsed magnetron sputtering
04/15/2004WO2004031418A2 Method for manufacturing products by means of deformation at increased temperatures
04/15/2004WO2004030907A1 Laminate comprising silver layer and, formed thereon, layer for stabilizing the same
04/15/2004WO2004030564A1 Dental braces and methods for coating
04/15/2004WO2002016666B1 Sputtering targets
04/15/2004US20040072497 Apparatus for fabricating plasma display panel and method of fabricating the same
04/15/2004US20040072016 Halftone phase shift mask blank, and method of manufacture
04/15/2004US20040072009 Copper sputtering targets and methods of forming copper sputtering targets
04/15/2004US20040071979 Simulate thes appearance of chrome plated parts
04/15/2004US20040071946 Ceramic layered product and method for manufacturing the same
04/15/2004US20040071878 Surface preparation using plasma for ALD Films
04/15/2004US20040071863 Contacting the surface of the MEMS device with one or more precursor compounds of the formula SiXR3, wherein each R is independently an organic group, and X is selected from group of Cl and OR', wherein R' is independently an alkyl group
04/15/2004US20040070727 Metallic vapor deposition lens provided with a protection coat and a method of producing the same
04/15/2004US20040070348 Neutral particle beam processing apparatus
04/15/2004US20040069654 Method for chlorine plasma modification of silver electrodes
04/15/2004US20040069652 Method for producing high purity nickle, high purity nickle, sputtering target comprising high purity nickel, and thin film formed by using said spattering target
04/15/2004US20040069624 Continuous coating system
04/15/2004US20040069623 Sputtering targets and method for the preparation thereof
04/15/2004US20040069616 Heat treatable coated article with anti-migration barrier between dielectric and solar control layer portion, and methods of making same
04/15/2004US20040069615 Article coated with photocatalyst film, method for preparing the article and sputtering target for use in coating the film
04/15/2004US20040069614 Timing apparatus and method to selectively bias during sputtering
04/15/2004US20040069613 Creating a plasma by subliming a potassium fluoride source using a radio frequency antenna; crossed electric and magnetic fields drive the heavier potassium ions toward a collector while confining the lighter fluorine for evacuation
04/15/2004US20040069233 Apparatus for evaporation of materials for coating of objects
04/15/2004US20040069225 Tandem process chamber
04/15/2004DE10246181A1 Plasma coating, etching or treatment of concave surfaces in vacuum, directs electron beam from arc source along magnetic field lines into cavity of substrate
04/15/2004DE10240337A1 Unit separating undesirable particles from vacuum coating plasma, locates absorber electrode in plasma shadow and accelerates positive charge carriers towards substrate coated
04/14/2004EP1408569A2 Electrocatalyst for ethanol oxidation and direct ethanol fuel cell using the same
04/14/2004EP1408541A1 Hafnium silicide target for forming gate oxide film and method for preparation thereof
04/14/2004EP1408528A2 Polycrystalline MgO deposition material having adjusted Si concentration
04/14/2004EP1408137A1 Sputtering target and transparent conductive film
04/14/2004EP1408136A1 Rod target for arc evaporation source, manufacturing method therefor, and arc deposition device
04/14/2004EP1408135A1 Apparatus for physical vapour deposition
04/14/2004EP1407879A1 Heat-resistant resin film with metal layer and wiring board and method for manufacturing them
04/14/2004EP1407828A2 Installation for continuous coating
04/14/2004EP1407059A1 Method and device for producing an optically effective system of layers
04/14/2004EP1407058A2 Sputtering targets, sputter reactors, methods of forming cast ingots, and methods of forming metallic articles
04/14/2004EP1406847A1 Visible-light-responsive photoactive coating, coated article and method of making same
04/14/2004EP0980534B1 Transparent substrate provided with a stack of layers reflecting thermal radiation
04/14/2004CN2611391Y Dual-disk connection substrate device
04/14/2004CN1489779A Zirconia toughtened ceramic components and coatings in semiconductor processing equipment and method of manufacturing thereof
04/14/2004CN1489689A Automated control of metal thickness during film deposition
04/14/2004CN1489642A Method for producing high-purty nickel, high-purity nickel formed sputtering target and thin film formed by using said sputtering target
04/14/2004CN1489639A Method and system for icosaborane implatation
04/14/2004CN1489638A Film formation method and film forming device
04/14/2004CN1489610A Production method for copolymer film, copolymer film for med therefrom, and semiconductor device using said copolymer film
04/14/2004CN1489419A Method for manufacturing organic electroluminescent display device
04/14/2004CN1488776A Molybdenum-base sputtering high-volgage polar plate and manufacture method thereof
04/14/2004CN1488486A Injection molding device and member used thereof and surface treatment method
04/14/2004CN1488462A Nano particle surface physicochemical structure cutting and coating method
04/14/2004CN1488446A Continuous coating apparatus
04/14/2004CN1145715C Target assembly, target thereof and device for processing lining
04/14/2004CN1145551C Layered product and manufacture thereof
04/13/2004US6720654 Electronic devices with cesium barrier film and process for making same
04/13/2004US6720240 Silicon based nanospheres and nanowires
04/13/2004US6720239 Synthesis of layers, coatings or films using precursor layer exerted pressure containment
04/13/2004US6720236 Mask and method of manufacturing the same, electro-luminescence device and method of manufacturing the same, and electronic instrument
04/13/2004US6720097 Barrier film and method for production thereof
04/13/2004US6720052 Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same
04/13/2004US6720038 Method of forming a coating resistant to deposits and coating formed thereby
04/13/2004US6720026 Controlled vapor deposition of alkali metal halide fluorescent material on a substrate, so that the fluorescent layer is deposited on the substrate with a density reduced in comparision to the density of solid fluorescent material
04/13/2004US6719936 Method of making a solid compacted pellet of organic material for vacuum deposition of OLED displays
04/13/2004US6719909 Band gap plasma mass filter
04/13/2004US6719886 Method and apparatus for ionized physical vapor deposition
04/13/2004US6719883 Plasma deposition; sputtering; semiconductors
04/13/2004US6719034 Process for producing a tube-shaped cathode sputtering target
04/08/2004WO2004030416A1 Fabrication system, light-emitting device and fabricating method of organic compound-containing layer
04/08/2004WO2004029422A1 Automobile engine valve mechanism system shim and lifter, and combination of these and cam shaft
04/08/2004WO2004029324A1 A method for depositing multilayer coatings
04/08/2004WO2004029323A1 Composite material
04/08/2004WO2004029321A2 Composite bodies having an abrasion-reducing surface and method for the production thereof
04/08/2004WO2004028340A2 High strength vacuum deposited nitionol alloy films, medical thin film graft materials and method of making same
04/08/2004WO2004016822A3 Method for obtaining a thin, stabilized fluorine-doped silica layer, resulting thin layer and use thereof in ophthalmic optics
04/08/2004WO2004016560A3 Flexible electrically conductive film
04/08/2004WO2004015163A3 Method for the production of a ceramic fiber with a metal coating
04/08/2004WO2004013373A3 Apparatus and method to control bias during sputtering
04/08/2004WO2004012229A3 Reduced volume, high conductance process chamber
04/08/2004WO2004010494A3 Method for transferring an electrically active thin layer
04/08/2004WO2004009299A3 Loading and unloading device for a coating unit
04/08/2004WO2004006228A3 Reflective or semi-reflective metal alloy coatings
04/08/2004WO2004005593A3 Metal nano-objects, formed on semiconductor surfaces, and method for making said nano-objects
04/08/2004WO2003107385A3 Device for coating substrates by physical vapour deposition, using a hollow cathode discharge method
04/08/2004WO2003085276A3 Full complement antifriction bearing
04/08/2004WO2003008656B1 Sputtering targets, sputter reactors, methods of forming cast ingots, and methods of forming metallic articles
04/08/2004US20040067386 Laminated film and method forming film
04/08/2004US20040067351 Depositing layer of material having refractive index different from MgF2 without ionic assistance; good adherence and scratch resistance for ophthalmic lenses
04/08/2004US20040067341 Scratch-resistant metal films and metallized surfaces and methods of fabricating them
04/08/2004US20040066128 Ion source, ion implanting device, and manufacturing method of semiconductor devices
04/08/2004US20040065546 Method to recover spent components of a sputter target
04/08/2004US20040065545 Sputtering target producing very few particles, backing plate or apparatus within spruttering device and roughening method by electric discharge machining
04/08/2004US20040065262 Multiple axis tumbler coating apparatus
04/08/2004US20040065257 Self-aligning PVD mark shield
04/08/2004US20040064937 Sputtering lithium cobaltate onto magnetron cathode
04/08/2004DE3448599B4 Vacuum equipment esp. for IC prodn.
04/08/2004DE10244438A1 Verbundkörper mit einer verschleißmindernden Oberflächenschicht und Verfahren zu seiner Herstellung Composite body with a wear-reducing surface layer and process for its preparation
04/08/2004CA2499961A1 High strength vacuum deposited nitinol alloy films, medical thin film graft materials and method of making same
04/07/2004EP1405932A1 Hafnium silicide target for gate oxide film formation and its production method
04/07/2004EP1405719A1 Scratch-resistant metal films and metallized surfaces and methods of fabricating them
04/07/2004EP1405342A2 Semiconductor device interconnect
04/07/2004EP1404955A1 Internal combustion engine
04/07/2004EP1404889A1 Method and apparatus for plasma generation