| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 05/20/2004 | US20040094426 Method of manufacturing decorative plate |
| 05/20/2004 | US20040094412 Magnetron sputtering apparatus and magnetron sputtering method using the same |
| 05/20/2004 | US20040094411 Electrolytic cells; ionization source; supplying electricity; vapor deposition |
| 05/20/2004 | US20040094410 System for coating insulative substrates |
| 05/20/2004 | US20040094402 To sputter depositing a liner material such as tantalum or tantalum nitride, by combining long-throw sputtering, self-ionized plasma sputtering and capacitively-coupled plasma resputtering in one chamber |
| 05/20/2004 | US20040094283 Processes for producing a sputtering target from a silicon-based alloy, a sputtering target |
| 05/20/2004 | US20040094085 Process for preparing p-n junctions having a p-type ZnO film |
| 05/20/2004 | US20040093730 Decorative article having white coating and method for manufacture thereof |
| 05/19/2004 | EP1420085A2 Zinc oxide film, photovoltaic device, and zinc oxide film formation process |
| 05/19/2004 | EP1420083A2 Method for depositing a surface coating comprising at least one thin, homogeneous layer of metal and carbon and corresponding surface coating |
| 05/19/2004 | EP1420002A1 Silicon monoxide sintered product and method for production thereof |
| 05/19/2004 | EP1419542A2 Cesium dispensers and process for the use thereof |
| 05/19/2004 | EP1419286A1 Coatings with low permeation of gases and vapors |
| 05/19/2004 | EP1419285A1 Method and apparatus for producing uniform isotropic stresses in a sputtered film |
| 05/19/2004 | EP1419284A1 A sputter target |
| 05/19/2004 | EP1419283A1 A process for the manufacturing of a sputter target |
| 05/19/2004 | EP1419282A2 Method for producing a fluorescent material layer |
| 05/19/2004 | CN1498436A Method for manufacturing electrochemical element |
| 05/19/2004 | CN1498284A System and method for making thin-film structures using stepped profile mask |
| 05/19/2004 | CN1497686A Method for producing aluminium nitride chip |
| 05/19/2004 | CN1497655A Ion source, ion injection equipment, manufacturing method of semiconductor device |
| 05/19/2004 | CN1497628A Ceramic laminated body and its manufacturing method |
| 05/19/2004 | CN1497614A Preparation method of high-temp. superconducting layer |
| 05/19/2004 | CN1497315A Liquid crystal screen and manufacturing method |
| 05/19/2004 | CN1497067A Titanium product with improved corrosion resistant property |
| 05/19/2004 | CN1497060A 薄膜成膜装置和薄膜成膜方法 Thin film deposition apparatus and film deposition method |
| 05/19/2004 | CN1150345C Stabilized vapour-deposition materials based on titanium oxide |
| 05/19/2004 | CN1150074C Method for manufacturing In-Sn-oxide-moulded body |
| 05/18/2004 | US6737524 Activated polyethylene glycol compounds |
| 05/18/2004 | US6737224 Method of preparing thin supported films by vacuum deposition |
| 05/18/2004 | US6737178 Coated PCBN cutting tools |
| 05/18/2004 | US6737121 Multilayer article and method of making by arc plasma deposition |
| 05/18/2004 | US6736949 Filtered cathode arc source deposition apparatus |
| 05/18/2004 | US6736947 Sputtering target, A1 interconnection film, and electronic component |
| 05/18/2004 | US6736944 Apparatus and method for arc detection |
| 05/18/2004 | US6736943 Apparatus and method for vacuum coating deposition |
| 05/18/2004 | US6736942 Freestanding reactive multilayer foils |
| 05/13/2004 | WO2004040650A1 Soi wafer and method for manufacturing soi wafer |
| 05/13/2004 | WO2004015169A3 Method for coating the surface of metallic material, device for carrying out said method |
| 05/13/2004 | US20040092131 Method for depositing a fluorine-doped silica film |
| 05/13/2004 | US20040092130 Method of manufacturing semiconductor device having metal alloy interconnection that has excellent EM lifetime |
| 05/13/2004 | US20040092125 Method for forming quantum dots using metal thin film or metal powder |
| 05/13/2004 | US20040091750 Coating for a handle |
| 05/13/2004 | US20040091749 Method of making coated cemented carbide cutting tools |
| 05/13/2004 | US20040091745 Coercive force; suppressed inverse magnetic domain; die residual magnetic flux density |
| 05/13/2004 | US20040091650 Coating for a synthetic material substrate |
| 05/13/2004 | US20040091620 Obliquely depositing a metal from a metal source onto a surface of a support; metal is deposited onto first end of surface at first angle of incidence and metal is deposited onto second end of the surface at second angle of incidence |
| 05/13/2004 | US20040091618 For forming a photoresist film having a uniform thickness without damaging substrate and without a need for a without need for a large amount of photoresist and without need for removing an unnecessary photoresist from an edge of substrate |
| 05/13/2004 | US20040091251 Evaporation method and apparatus thereof |
| 05/13/2004 | US20040089854 Dielectric material compositions |
| 05/13/2004 | US20040089853 Dielectric material compositions with high dielectric constant and low dielectric loss |
| 05/13/2004 | US20040089543 Methods of treating non-sputtered regions of PVD target constructions to form particle traps, and PVD target constructions comprising projections along a non-sputtered region |
| 05/13/2004 | US20040089542 Design of hardware features to facilitate arc-spray coating applications and functions |
| 05/13/2004 | US20040089541 Sputtering device |
| 05/13/2004 | US20040089537 Method and apparatus for producing an optically effective system of layers on both sides of a substrate |
| 05/13/2004 | US20040089536 Moving from position concentric with support to position clear of support and detecting edge; |
| 05/13/2004 | US20040089535 Low pressure, optics; prevention of target poisoning |
| 05/13/2004 | US20040089534 Method for sputtering and a device for sputtering |
| 05/13/2004 | US20040089232 Organic film formation apparatus |
| 05/13/2004 | DE10333129A1 Verfahren zur Bildung einer Siliziumnitridschicht A method of forming a silicon nitride layer |
| 05/13/2004 | DE10249151A1 Evaporation station for producing complex layers made from different materials and/or mixtures in a single evaporation process comprises a continuous evaporation device, and storage and feeding devices |
| 05/12/2004 | EP1418466A2 Halftone phase shift mask blank, and method of manufacture |
| 05/12/2004 | EP1418252A2 Multiphase thermal barrier coatings for very high temperature applications |
| 05/12/2004 | EP1418250A2 Vacuum evaporator |
| 05/12/2004 | EP1418208A2 Color shifting carbon-containing interference pigments |
| 05/12/2004 | EP1418161A2 Method for the production of an aluminium nitride substrate |
| 05/12/2004 | EP1278706B1 Manufacturing process of christmas tree decorations and racks for their fixing during this process |
| 05/12/2004 | CN2615146Y Sputtering cathode target material structure for producing foam nickel metallization |
| 05/12/2004 | CN2615145Y Substrate small back plate of organic luminous membrane coating machine with automatic recognizing function |
| 05/12/2004 | CN1496577A Method of fabricating coated process chamber component |
| 05/12/2004 | CN1496419A Method and device for production of endless plastic hollow profiles |
| 05/12/2004 | CN1496343A Methods of roughening ceramic surface |
| 05/12/2004 | CN1495867A Bismuth titanium silicon oxide, bismuth titanium silicon oxide film and preparation method of said film |
| 05/12/2004 | CN1495858A Ion mixing device and porous electrode for ion mixing device |
| 05/12/2004 | CN1495848A Method for mfg. crystal semiconductor material and method for mfg. semiconductor |
| 05/12/2004 | CN1495683A Using viscous fluid to form deposition layer in QLED device |
| 05/12/2004 | CN1495290A Torghness-reinforcing wear-resistant coating |
| 05/12/2004 | CN1495285A Chemical vapour phase deposition coating coating equipment |
| 05/12/2004 | CN1495284A Heating crucible for organic film forming squipment |
| 05/12/2004 | CN1495283A Matching box, vacuum device using the same and vacuum processing method |
| 05/12/2004 | CN1495282A 真空电弧沉积设备 Vacuum arc deposition equipment |
| 05/12/2004 | CN1495129A Process for preparing indium-tin oxide powder |
| 05/12/2004 | CN1149644C Method for filling groove on workpiece surface using conducing material |
| 05/12/2004 | CN1149641C Sputtering apparatus and method for manufacturing semiconductor device |
| 05/12/2004 | CN1149623C Accelerator-decelerator electrostatic lens for variably focusing and mass resolving ion beam in ion implanter |
| 05/12/2004 | CN1149303C Ion plating apparatus |
| 05/11/2004 | US6735061 Read head sensor with a reactively sputtered pinning layer structure |
| 05/11/2004 | US6734558 Electronic devices with barium barrier film and process for making same |
| 05/11/2004 | US6734388 Dry surface cleaning apparatus |
| 05/11/2004 | US6734038 Method of manufacturing high-mobility organic thin films using organic vapor phase deposition |
| 05/11/2004 | US6733930 Photomask blank, photomask and method of manufacture |
| 05/11/2004 | US6733829 Reducing maintainence; forming cut out on interior circum-ferential edge to increase spacing from chuck |
| 05/11/2004 | US6733821 Method for forming an optical component |
| 05/11/2004 | US6733682 Method for the manufacturing of a matrix and a matrix manufactured according to the method |
| 05/11/2004 | US6733642 System for unbalanced magnetron sputtering with AC power |
| 05/11/2004 | US6733641 Mechanically joined sputtering target and adapter therefor |
| 05/11/2004 | US6733640 Shutter assembly having optimized shutter opening shape for thin film uniformity |
| 05/11/2004 | US6733590 Method and apparatus for multilayer deposition utilizing a common beam source |
| 05/11/2004 | US6732909 Backing plate and its manufacturing process |
| 05/06/2004 | WO2004038870A2 Selectable area laser assisted processing of substrates |