| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 05/06/2004 | WO2004038842A2 FUEL CELL HAVING TiAlNO DEPOSITED AS A PROTECTIVE LAYER ON METALLIC SURFACES |
| 05/06/2004 | WO2004038702A1 Structured material, magnetic recording medium utilizing the same, and magnetic recording/reproducing apparatus |
| 05/06/2004 | WO2004038065A1 Stabilized aluminum laminate having aluminum and stabilizing layer laminated thereon |
| 05/06/2004 | WO2004038062A2 Method of forming a sputtering target assembly and assembly made therefrom |
| 05/06/2004 | WO2004038061A1 Substrate having multilayer film and method for manufacturing the same |
| 05/06/2004 | WO2004038059A2 Target designs and related methods for enhanced cooling and reduced deflection and deformation |
| 05/06/2004 | WO2004017356A3 Process and apparatus for pulsed dc magnetron reactive sputtering of thin film coatings on large substrates using smaller sputter cathodes |
| 05/06/2004 | WO2002031215A9 Method of forming indium tin oxide film |
| 05/06/2004 | US20040088052 Used for a prosthesis; diamon-like-coatings/ion implantation |
| 05/06/2004 | US20040086723 Coated article with silicon oxynitride adjacent glass |
| 05/06/2004 | US20040086717 Providing a flexible plastic substrate; depositing a multilayered conductive metallic film comprising two layers of alloy selected from indium cerium oxide and indium tin oxide surrounding a layer of an alloy of silver, palladium, copper |
| 05/06/2004 | US20040086662 Stability of ion beam generated alignment layers by surface modification |
| 05/06/2004 | US20040086639 Patterned thin-film deposition using collimating heated mask asembly |
| 05/06/2004 | US20040086630 Positioning a substrate in spaced relation to a port of a microeffusion cell; transporting substrate across port; effusing an emissive material from the port; adhering the emissive material effused from the port to form emissive strip |
| 05/06/2004 | US20040086629 Selective deposition of emissive layer in electroluminescent displays |
| 05/06/2004 | US20040086628 Selective deposition of emissive layer in electroluminescent displays |
| 05/06/2004 | US20040085023 Methods and apparatus for generating high-density plasma |
| 05/06/2004 | US20040084709 Capacitor having a cylindrical (or concave) structure to overcome a difficulty in etching a lower electrode as the height of a 3-dimensionally stacked capacitor increases |
| 05/06/2004 | US20040084422 Plasma source |
| 05/06/2004 | US20040084305 Sputtering system and manufacturing method of thin film |
| 05/06/2004 | US20040084299 High throughput dual ion beam deposition apparatus |
| 05/06/2004 | US20040084298 Sputtering magnetic, grain-confining, and nonmagnetic materials; annealing in controlled vacuum; quenching; transformation from soft to hard magnetic granular films; coercive force, high saturation magnetization |
| 05/06/2004 | US20040083976 Modified deposition ring to eliminate backside and wafer edge coating |
| 05/06/2004 | US20040083969 Film forming apparatus, substrate for forming oxide thin film, and production method thereof |
| 05/06/2004 | US20040083968 Apparatus for performing at least one process on a substrate |
| 05/06/2004 | US20040083955 Vacuum chamber load lock structure and article transport mechanism |
| 05/06/2004 | US20040083696 Ion implantation and wet bench systems utilizing exhaust gas recirculation |
| 05/06/2004 | EP1416541A2 Transparent oxide electrode film and manufacturing method thereof, transparent electroconductive base Material, solar cell and photo detection element |
| 05/06/2004 | EP1416064A2 Method of coating micro-electromechanical devices |
| 05/06/2004 | EP1415014A1 Method for making diamond-coated composite materials |
| 05/06/2004 | EP1415013A1 Rapid cycle chamber having a top vent with nitrogen purge |
| 05/06/2004 | EP1415012A1 Process and apparatus for producing crystalline thin film buffer layers and structures having biaxial texture |
| 05/06/2004 | EP1415011A1 A method for reactive sputtering deposition |
| 05/06/2004 | EP1414586A2 Composite layer and method for producing said composite layer |
| 05/06/2004 | EP1414568A2 Metal bistriflimide compounds, their synthesis and their uses |
| 05/06/2004 | EP1307604B1 Method for producing a tool which can be used to create surface structures in the sub-micrometer range |
| 05/06/2004 | EP1290239B1 Bearing with amorphous boron carbide coating |
| 05/06/2004 | EP1144131B1 Plasma enhanced chemical deposition of conjugated polymer |
| 05/06/2004 | DE10248962A1 Production of a high temperature superconductor layer on a substrate for use in high energy applications comprises depositing a superconducting layer with a low growth rate |
| 05/06/2004 | CA2448410A1 Anti-relfection spectacle lens and its production method |
| 05/05/2004 | CN1494603A Arc evaporator with powerful magnetic guide for targets having large surface area |
| 05/05/2004 | CN1494602A Assembly of physical vapor deposition target and method for producing same |
| 05/05/2004 | CN1494601A Physical vapor deposition target/backing plate assemblies, and methods of forming same |
| 05/05/2004 | CN1494600A Method for forming resin film and method for mfg. electronic parts |
| 05/05/2004 | CN1494388A Ornament having white coating film and mfg. method thereof |
| 05/05/2004 | CN1494359A Photomask and its mfg. method, electroluminescent apparatus and mfg. method thereof, and electronic machine |
| 05/05/2004 | CN1493539A Preparation method of photo catalytic activation self cleaning product |
| 05/05/2004 | CN1493372A Manufacturing method of medical high voltage static treatment membrane |
| 05/05/2004 | CN1148563C Method and apparatus for in-situ monitoring of plasma etch and deposition processes using pulsed broadband light source |
| 05/05/2004 | CN1148465C Method for preparing composite conductive material |
| 05/04/2004 | US6731849 Coating for optical fibers |
| 05/04/2004 | US6731386 Measurement technique for ultra-thin oxides |
| 05/04/2004 | US6730885 Batch type heat treatment system, method for controlling same, and heat treatment method |
| 05/04/2004 | US6730605 Redistribution of copper deposited films |
| 05/04/2004 | US6730547 Integrated circuit device and fabrication using metal-doped chalcogenide materials |
| 05/04/2004 | US6730445 Attenuated embedded phase shift photomask blanks |
| 05/04/2004 | US6730415 Comprises film comprising phosphorous, platinum and/or palladium glassy alloy; corrosion resistance; durability |
| 05/04/2004 | US6730413 Thermal barrier coating |
| 05/04/2004 | US6730365 Method of thin film deposition under reactive conditions with RF or pulsed DC plasma at the substrate holder |
| 05/04/2004 | US6730351 Porous metallic vapor deposited film with crystalline grown up in a dendrite structure, in a vacuum vapor deposition. |
| 05/04/2004 | US6730198 Container-shaped physical vapor deposition targets |
| 05/04/2004 | US6730197 Oblique deposition apparatus |
| 05/04/2004 | US6730196 Auxiliary electromagnets in a magnetron sputter reactor |
| 05/04/2004 | US6730194 Lock chamber, a sputtering source with an active surface, a transport chamber with one connection opening to the lock chamber and the sputtering source |
| 05/04/2004 | US6730174 Unitary removable shield assembly |
| 05/04/2004 | US6729927 Method and apparatus for making a shadow mask array |
| 04/29/2004 | WO2004036651A1 Semiconductor ferroelectric storage device and its manufacturing method |
| 04/29/2004 | WO2004036616A1 Method for the production of a substrate with a magnetron sputter coating and unit for the same |
| 04/29/2004 | WO2004035855A2 Method of producing a high density pattern of isolated clusters |
| 04/29/2004 | WO2004035854A2 Method and apparatus for processing substrates |
| 04/29/2004 | WO2004035307A1 Film multilayer body and flexible circuit board |
| 04/29/2004 | WO2004001804A3 Device for generation of reactive ions |
| 04/29/2004 | WO2003095698A3 Device and method for the electron beam attenuation of reactively formed layers on substrates |
| 04/29/2004 | US20040082200 Method for forming a silicon nitride layer |
| 04/29/2004 | US20040082099 Elimination of dendrite formation during metal/chalcogenide glass deposition |
| 04/29/2004 | US20040081880 Method for fabricating membrane-electrode assembly and fuel cell adopting the membrane-electrode assembly |
| 04/29/2004 | US20040081836 Sputtering target, sintered article, conductive film fabricated by utilizing the same, organic EL device, and substrate for use therein |
| 04/29/2004 | US20040081833 Process for depositing a tungsten-based and/or molybdenum-based layer on a rigid substrate, and substrate thus coated |
| 04/29/2004 | US20040081824 Oxide coated cutting tool |
| 04/29/2004 | US20040081767 Ceramic masking material and application method for protecting turbine airfoil component surfaces during vapor phase aluminiding |
| 04/29/2004 | US20040081763 By which a technically usable metal coating can be produced in accordance with thin-layer technology at high production speed |
| 04/29/2004 | US20040081750 Storage phosphor screen and preparation method |
| 04/29/2004 | US20040080830 Niobium oxide and silicon dioxide thin film filter for dense wavelength division multiplexing |
| 04/29/2004 | US20040079635 Sputtering target material |
| 04/29/2004 | US20040079634 Method of forming a sputtering target assembly and assembly made therefrom |
| 04/29/2004 | US20040079281 Scanned focus deposition system |
| 04/28/2004 | EP1413651A1 Method for producing high purity nickel, high purity nickel, sputtering target comprising the high purity nickel, and thin film formed by using said spattering target |
| 04/28/2004 | EP1413647A2 Wear resistant coating |
| 04/28/2004 | EP1413644A2 Thin-film deposition device |
| 04/28/2004 | EP1413643A2 Multiple axis tumbler coating apparatus |
| 04/28/2004 | EP1412964A1 Sputtering magnetron arrangements with adjustable magnetic field strength |
| 04/28/2004 | EP1412550A2 Support with getter-material for microelectronic, microoptoelectronic or micromechanical device |
| 04/28/2004 | EP1370371A4 Vacuum deposition of cationic polymer systems |
| 04/28/2004 | EP1165856B1 Method of making a multilayer article by arc plasma deposition |
| 04/28/2004 | EP1038306B1 Method and device for improving surfaces |
| 04/28/2004 | CN1492978A Piston ring and method for producing the same |
| 04/28/2004 | CN1492942A Tantalum and niobium billets and methods of producing the same |
| 04/28/2004 | CN1492941A Sputtering target, and production method therefor |
| 04/28/2004 | CN1492940A Laminated film and method of forming film |
| 04/28/2004 | CN1492071A Method and device for producing low reflectivity film |