| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
|---|
| 07/15/2004 | US20040137731 Selectable area laser assisted processing of substrates |
| 07/15/2004 | US20040137725 Copper interconnects |
| 07/15/2004 | US20040137678 Method for forming capacitor of semiconductor device |
| 07/15/2004 | US20040137663 Method of reducing internal stress in materials |
| 07/15/2004 | US20040137645 Method of forming thin oxidation layer by cluster ion beam |
| 07/15/2004 | US20040137281 Arc-discharge ion-plating inorganic coatings contains elements selecting from aluminum, chromium, or silicon, and nitrogen, boron, carbon, or oxygen; crystal structure; adhesion, hardness, resist to heat, oxidation and wear, elastic recovery |
| 07/15/2004 | US20040137280 Excellent transmittance not only in the visible light region but also in the infrared light region, and low resistance; electrode film is an indium titanium mixed oxide of specified crystal structure |
| 07/15/2004 | US20040137258 Multilayer light emitter has improved of preventing moisture migration and dispersing heat; coverings containing polymeric film layer, transparent inorganic electroconductive metal oxide film, metallic layer, dielectric layer |
| 07/15/2004 | US20040137207 Magnetic disk comprising a first carbon overcoat having a high SP3 content and a second carbon overcoat having a low SP3 content |
| 07/15/2004 | US20040137158 Method for preparing a noble metal surface |
| 07/15/2004 | US20040135498 Organic electroluminescence panel and method for manufacturing the same |
| 07/15/2004 | US20040135183 Ferroelectric capacitor, process for production thereof and semiconductor device using the same |
| 07/15/2004 | US20040135160 OLED device |
| 07/15/2004 | US20040134972 Friction stir welding using a superabrasive tool |
| 07/15/2004 | US20040134776 Assemblies comprising molybdenum and aluminum; and methods of utilizing interlayers in forming target/backing plate assemblies |
| 07/15/2004 | US20040134771 Vacuum arc deposition apparatus |
| 07/15/2004 | US20040134770 for applying one or more thin film materials into or onto a substrate by selectively controlling the depositing plasma constituents that will reach a substrate from a cathode using cathodic arc deposition |
| 07/15/2004 | US20040134769 first step of sputter depositing copper into hole at first temperature of less than 100 degrees C. and filling bottom third of hole and second step of completely filling hole with copper |
| 07/15/2004 | US20040134768 Diffusion enhanced ion plating for copper fill |
| 07/15/2004 | US20040134430 Method and apparatus for efficient application of substrate coating |
| 07/15/2004 | US20040134428 Thin-film deposition device |
| 07/15/2004 | DE202004005216U1 Vacuum treatment unit for coating glass components has at least two adjacent chambers or chamber regions separated from each other by walls with an opening via a valve device |
| 07/15/2004 | DE10011918B4 Kolbenring mit Verschleissschutzschicht Piston ring wear-with |
| 07/15/2004 | CA2523882A1 Work piece with a layer of hard material that contains alcr and a method for producing this |
| 07/15/2004 | CA2511668A1 Polygonal barrel spattering device, polygonal barrel spattering method, coated particle formed by the device and method, microcapsule, and method of manufacturing the microcapsule |
| 07/14/2004 | EP1437926A1 Multi-face forming mask device for vacuum deposition |
| 07/14/2004 | EP1437609A1 Optical element and production method therefor, and band pass filter, near infrared cut filter and anti-reflection film |
| 07/14/2004 | EP1437424A2 Method and apparatus for smoothing surfaces on an atomic scale |
| 07/14/2004 | EP1436442A2 Amorphous hydrogenated carbon film |
| 07/14/2004 | EP1436441A2 Method and apparatus application of metallic alloy coatings |
| 07/14/2004 | EP1226030B1 Forming members for shaping a reactive metal and methods for their fabrication |
| 07/14/2004 | EP1146979A4 Method of producing a silicom/aluminum sputtering target |
| 07/14/2004 | CN1513039A Process for making platelets |
| 07/14/2004 | CN1512598A Defilming method for double layer antireflective titanium oxide/yttrium oxide coating |
| 07/14/2004 | CN1511972A Plasma treating device with protective tube |
| 07/14/2004 | CN1511690A Substrate support member for use in FPP manufacturing apparatus |
| 07/14/2004 | CN1511645A Covering material |
| 07/14/2004 | CN1157756C Plasma generator for ion beam radiator |
| 07/14/2004 | CN1157631C Black array and its preparing method |
| 07/14/2004 | CN1157499C Article with coated layer |
| 07/14/2004 | CN1157495C Computer control device for vacuum coating |
| 07/14/2004 | CN1157494C Magnetically controlled sputter target for preparing film with gradually variable components |
| 07/14/2004 | CN1157316C Device for introducing and/or eliminating container |
| 07/13/2004 | US6762554 Electroluminescent device with drying film and method for fabricating the same |
| 07/13/2004 | US6762000 Phase shift mask blank, photo mask blank and manufacturing apparatus and method of blanks |
| 07/13/2004 | US6761985 Conductivity, stability, and extended transmissivity into the infrared; film may be used as an optical coating for infrared sensors, actuators, light emitting diodes, transistors, solar cells, and flat panel displays |
| 07/13/2004 | US6761984 Article coated with photocatalyst film, method for preparing the article and sputtering target for use in coating with the film |
| 07/13/2004 | US6761805 Cathode arc source with magnetic field generating means positioned above and below the cathode |
| 07/13/2004 | US6761804 Inverted magnetron |
| 07/13/2004 | US6761772 Workpiece support |
| 07/13/2004 | US6761750 Cemented carbide with binder phase enriched surface zone |
| 07/08/2004 | WO2004057378A1 Coated optical element for corrective action obtained by producing layer thickness variations or by refraction factor variations in said coating |
| 07/08/2004 | WO2004057053A2 Methods for producing coated metal wire |
| 07/08/2004 | WO2004057052A1 Resistance-heated boat and manufacturing method thereof |
| 07/08/2004 | WO2004056292A1 Biocompatible material |
| 07/08/2004 | WO2004035855A8 Method of producing a high density pattern of isolated clusters |
| 07/08/2004 | WO2004010455A3 Ion beam source with coated electrode |
| 07/08/2004 | WO2004006228B1 Reflective or semi-reflective metal alloy coatings |
| 07/08/2004 | WO2003106363A3 Method for production of a glazed piece provided with a multi-layer coating |
| 07/08/2004 | WO2003023880A8 Thin-film electrochemical devices on fibrous or ribbon-like substrates and method for their manufacture and design |
| 07/08/2004 | US20040132268 Method of forming cobalt silicide film and method of manufacturing semiconductor device having cobalt silicide film |
| 07/08/2004 | US20040132228 Method and system for fabricating an OLED |
| 07/08/2004 | US20040131936 Amorphous electrode compositions |
| 07/08/2004 | US20040131894 Wear properties under boundary lubricated sliding conditions |
| 07/08/2004 | US20040131884 For use in plasma display panel; discharge response is obtained in a wide temperature range |
| 07/08/2004 | US20040131878 Providing a copper layer over a substrate, copper layer having an exposed copper surface; forming a tantalum layer on copper layer by sputtering |
| 07/08/2004 | US20040131776 Method for the production of plane-parallel platelets by using organic separating agents |
| 07/08/2004 | US20040131767 Method for producing a fluorescent material layer |
| 07/08/2004 | US20040130267 Plasma display panel |
| 07/08/2004 | US20040130028 Semiconductor device and manufacturing method thereof |
| 07/08/2004 | US20040129675 Method and device for treating a substrate |
| 07/08/2004 | US20040129561 Cylindrical magnetron magnetic array mid span support |
| 07/08/2004 | US20040129560 Method of bonding sputtering target materials |
| 07/08/2004 | US20040129559 Diffusion bonded assemblies and fabrication methods |
| 07/08/2004 | US20040129558 Method of metal sputtering for integrated circuit metal routing |
| 07/08/2004 | US20040129557 introducing a work function reducing agent onto a surface of a sputter target; providing an inert gas and ionizing it to generate electrons; disintegrating negative ions from the target; and forming the film from the negatively charged ions |
| 07/08/2004 | US20040129223 Apparatus and method for manufacturing silicon nanodot film for light emission |
| 07/08/2004 | DE10258118A1 Device for measuring and determining charge carrier streams and parameters derived from them used in industrial coating devices comprises a sensor formed as a Faraday collector connected to an evaluation and control device |
| 07/08/2004 | DE10222964B4 Verfahren zur Gehäusebildung bei elektronischen Bauteilen sowie so hermetisch verkapselte elektronische Bauteile A method for encasing for electronic components and so hermetically encapsulated electronic components |
| 07/08/2004 | DE10196294T5 Verfahren zur Herstellung von ultradünnen Schutzbeschichtungen Process for the preparation of ultra-thin protective coatings |
| 07/07/2004 | EP1435400A1 Film deposition system and film deposition method using the same |
| 07/07/2004 | EP1435105A1 High performance magnetron for dc sputtering systems |
| 07/07/2004 | EP1435091A1 Magnetic material structures, devices and methods |
| 07/07/2004 | EP1434900A2 Hard material layer |
| 07/07/2004 | EP1434896A2 Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor |
| 07/07/2004 | CN2623697Y Rectangle plane multiple arc target |
| 07/07/2004 | CN1511199A Metallic very thin film, metallic very thin film multilayer body, and method for manufacturing metallic very thin film or metallic very thin film laminate |
| 07/07/2004 | CN1510971A Evaporation mask and method for manufacturing organic electroluminescent device thereby |
| 07/07/2004 | CN1510726A Formation of cobalt silicide film and manufacture of semiconductor device therewith |
| 07/07/2004 | CN1510696A Method for controlling electrostatic lens and ion implantation device |
| 07/07/2004 | CN1510161A Method and apparatus for producing large thin film by hot vaporization depositing |
| 07/07/2004 | CN1510160A Method and apparatus for preparing thin film by noncontact heating covaporization process |
| 07/07/2004 | CN1510159A Method and apparatus for preparing large-area thin membrane with thermal evaporation |
| 07/07/2004 | CN1156602C Heating method for preparing metal substrate film |
| 07/07/2004 | CN1156601C Process for mfg. MgO film |
| 07/07/2004 | CN1156600C Method of mfg. functional MgO film |
| 07/07/2004 | CN1156599C Process for fast growth of magnesium oxide film |
| 07/06/2004 | US6759261 Thin film-structure and a method for producing the same |
| 07/06/2004 | US6759250 Deposition method for lead germanate ferroelectric structure with multi-layered electrode |
| 07/06/2004 | US6759143 Capable of enduring high power sputtering |