| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 06/10/2004 | US20040108060 System for producing patterned deposition from compressed fluids |
| 06/10/2004 | US20040108028 High purity nickel/vanadium sputtering components; and methods of making sputtering components |
| 06/10/2004 | US20040107911 Substrate support member for use in FPD manufacturing apparatus |
| 06/10/2004 | US20040107904 Vacuum vaporization unit for the metal coating of a strip substrate and corresponding vaporization source |
| 06/10/2004 | US20040107897 Atomic layer deposition apparatus and method for preventing generation of solids in exhaust path |
| 06/09/2004 | EP1427262A1 Patterning method, film forming method, patterning device, film forming device, electro-optic device and production method therefor, electronic apparatus, and electronic device and production method therefor |
| 06/09/2004 | EP1427042A1 Solid electrolyte with incorporated nitrogen and battery employing the same |
| 06/09/2004 | EP1426977A1 Storage phosphor screen and preparation method |
| 06/09/2004 | EP1426462A2 Mask vapor deposition method and apparatus, mask, process for manufacturing display panel, display panel and electronic device |
| 06/09/2004 | EP1426461A1 Mask for coating by vacuum evaporation |
| 06/09/2004 | EP1426189A2 Laser thermal transfer donor including a separate dopant layer |
| 06/09/2004 | EP1426119A1 Plasma surface treatment of silicone substrates |
| 06/09/2004 | EP1426117A2 System for producing patterned deposition from compressed fluids |
| 06/09/2004 | EP1426115A1 Apparatus for producing a patterned coating by precipitation of a compressed fluid solution in a controlled deposition chamber |
| 06/09/2004 | EP1425431A2 Integrated circuit device and fabrication using metal-doped chalcogenide materials |
| 06/09/2004 | EP1092050A4 Contoured sputtering target |
| 06/09/2004 | EP0931174B1 Method to produce a heat insulating layer |
| 06/09/2004 | DE10256417A1 Lichtbogenverdampfungsvorrichtung Arc evaporation apparatus |
| 06/09/2004 | DE10235051B4 Verfahren zur Bedampfung eines Trägers mit einem Röntgenleuchtstoff A process for vapor deposition of a carrier with an X-ray phosphor |
| 06/09/2004 | DE102004002764A1 Verfahren zur Herstellung von Multilayern und Multilayer A process for the production of multilayers and multilayer |
| 06/09/2004 | CN2619948Y Automatic film-coating multi-arc ion film coating machine |
| 06/09/2004 | CN1503926A Ion-beam deposition process for manufacturing multilayered attenuated phase shift photomask blanks |
| 06/09/2004 | CN1503855A Manganese alloy sputtering target and mehtod for producing the same |
| 06/09/2004 | CN1503854A Pt-Co based sputtering targets |
| 06/09/2004 | CN1503769A Multilayer foil capable of independent reaction |
| 06/09/2004 | CN1503604A Transparent conductive film and mfg method, electroluminescence components |
| 06/09/2004 | CN1503395A Solid electrolyte and alkaloid cell using same |
| 06/09/2004 | CN1503344A Method for forming aluminium lead wire |
| 06/09/2004 | CN1153343C Method of holding wafer and electrostatic chucking device |
| 06/09/2004 | CN1152979C Coated body, its method of production and its use |
| 06/09/2004 | CN1152978C Arc control and switching element protection for pulsed DC power supply |
| 06/09/2004 | CN1152977C Sputter method and sputter equipment |
| 06/08/2004 | US6747357 Dielectric device having multi-layer oxide artificial lattice with lattice directional feature |
| 06/08/2004 | US6747353 Barrier layer for copper metallization in integrated circuit fabrication |
| 06/08/2004 | US6747317 Semiconductor device |
| 06/08/2004 | US6746783 High-temperature articles and method for making |
| 06/08/2004 | US6746776 Structure including silicon carbide coating layer formed on alloy substrate by sputtering, using sintered silicon carbide having volume resistivity of 100 omega *cm or less as target material; coating layer has light transmittance of 70% or more |
| 06/08/2004 | US6746749 For reading and writing a large volume of information at high speed and with high precision |
| 06/08/2004 | US6746727 Metal to ILD adhesion improvement by reactive sputtering |
| 06/08/2004 | US6746619 Ferroelectric vapor deposition targets |
| 06/08/2004 | US6746577 Method and apparatus for thickness control and reproducibility of dielectric film deposition |
| 06/08/2004 | US6746553 Process for producing sputtering target materials |
| 06/08/2004 | US6746540 Wafer support plate assembly having recessed upper pad and vacuum processing apparatus comprising the same |
| 06/08/2004 | CA2298257C Decorative corrosion and abrasion resistant coating |
| 06/03/2004 | WO2004046416A1 Apparatus for vacuum treating two dimensionally extended substrates and method for manufacturing such substrates |
| 06/03/2004 | WO2004046415A1 Copper alloy sputtering target and semiconductor element wiring |
| 06/03/2004 | WO2004022209A3 Vapor deposited catalysts and their use in fuel cells |
| 06/03/2004 | WO2004016417A3 Plasma treated metallized film |
| 06/03/2004 | WO2003095695A3 Sputter coating apparatus including ion beam source(s), and corresponding method |
| 06/03/2004 | US20040107020 Fabrication system and fabrication method |
| 06/03/2004 | US20040106994 Method for manufacturing endo-osseous implants or medical prosthesis by ionic implantation technique |
| 06/03/2004 | US20040106285 Method of manufacturing a semiconductor structure comprising clusters and/or nanocrystal of silicon and a semiconductor structure of this kind |
| 06/03/2004 | US20040106262 Method of making transistors |
| 06/03/2004 | US20040106049 coating substrates with chromium, molybdenum, tungsten, or tantalum oxynitrtides, oxycarbides, nitrides, carbides or oxides, by bombarding with plasma gases; lithography; miniaturization; integrated circuits |
| 06/03/2004 | US20040106045 high energy density power sources having electroconductive mixtures comprising lithium phosphorus oxynitride, nitrides and transition metals; charging; discharging |
| 06/03/2004 | US20040106017 Method of making coated articles and coated articles made thereby |
| 06/03/2004 | US20040106002 low-density and/or high thermal-resilience structural materials coated with doped semiconductor oxides |
| 06/03/2004 | US20040105992 Sparkling laminate film and sparkling shaped article |
| 06/03/2004 | US20040105981 A hybrid film of a polymer film with a plasma-treated surface over which is layered a crosslinked functionalized acrylate polymer; superior thermal/mechanical properties; food packaging; metallized thin films; foil capacitors; one-step |
| 06/03/2004 | US20040105974 Cutting tool insert coated with a metal carbide, nitride and/or boride of MAX-phase defined as Mn+1AXn where n is 1, 2 or 3, M is one of the elements Ti, Zr, Hf, V, Nb, Ta, Cr or Mo, A is Al, Si or S, and X is C, N and/or B |
| 06/03/2004 | US20040105796 Tank for epitaxy installation and installation comprising such a tank |
| 06/03/2004 | US20040104472 One atom in thickness; forms two-dimensionally continuous film; catalysts |
| 06/03/2004 | US20040104197 Evaporation mask, method of fabricating organic electroluminescent device using the same, and organic electroluminescent device |
| 06/03/2004 | US20040104110 For physical vapor deposition (PVD) |
| 06/03/2004 | US20040103845 Filtered cathodic arc deposition method and apparatus |
| 06/03/2004 | US20040103750 Manganese alloy sputtering target and method for producing the same |
| 06/03/2004 | DE29825046U1 System and method for measuring layer thickness on substrates utilize the motion of the substrates relative to a measuring head during their transport along a given track |
| 06/03/2004 | DE10122329B4 Wärmetauscher-Vorrichtung mit einer oberflächenbeschichteten Wand, die Medium 1 von Medium 2 trennt Separating heat exchanger apparatus having a surface-coated wall, the medium 1 of medium 2 |
| 06/02/2004 | EP1424735A1 METHOD FOR FORMING LIGHT−ABSORBING LAYER |
| 06/02/2004 | EP1424725A1 ELECTRODE FOR p-TYPE SiC |
| 06/02/2004 | EP1424404A2 Evaporation device |
| 06/02/2004 | EP1423553A1 Metal vapor coating |
| 06/02/2004 | EP1423552A1 Process and apparatus for organic vapor jet deposition |
| 06/02/2004 | EP1423551A2 Method for producing a nanostructured functional coating and a coating that can be produced according to said method |
| 06/02/2004 | EP0975435A4 Modular coating fixture |
| 06/02/2004 | CN2619451Y Evaporation plating device for producing organic electroluminescent display |
| 06/02/2004 | CN2618925Y Steam plating device for making organic electroluminescence display device |
| 06/02/2004 | CN1501895A Photo-induced hydrophilic article and method of making same |
| 06/02/2004 | CN1501844A Contaminant collector trap for ion implanter |
| 06/02/2004 | CN1501445A Semiconductor device manufacturing apparatus employing vacuum system |
| 06/02/2004 | CN1501435A Gas injection apparatus for semiconductor processing system |
| 06/02/2004 | CN1501098A Anti-relfection spectacle lens and its production method |
| 06/02/2004 | CN1500908A Magnetron sputtering apparatus and magnetron sputtering method using the same |
| 06/02/2004 | CN1500907A Processes for producing a sputtering target from a silicon-based alloy, a sputtering target |
| 06/02/2004 | CN1500906A Design of hardware features to facilitate arc-spray coating applications and functions |
| 06/02/2004 | CN1500905A Method for protecting articles, and related compositions |
| 06/02/2004 | CN1500904A Vacuum evaporator and method for manufacturing organic el display panel using the same |
| 06/02/2004 | CN1500903A Inner surface swiveling device for depositing thin film at high temperature |
| 06/02/2004 | CN1500902A Cryogenic technique for preparing cube phase, wide forbidden band MgZnO crystal thin film |
| 06/02/2004 | CN1500628A Scratch-resistant metal films and metallized surfaces and methods of fabricating them |
| 06/02/2004 | CN1152153C Material and method for preparing waterproof coating on optical substrates |
| 06/01/2004 | US6745096 Maintenance method and system for plasma processing apparatus etching and apparatus |
| 06/01/2004 | US6745092 Product management system, and host computer and recorded medium used in the system |
| 06/01/2004 | US6744559 Color shifting carbon-containing interference pigments and foils |
| 06/01/2004 | US6744211 Plasma density information measuring method, probe used for measuring plasma density information, and plasma density information measuring apparatus |
| 06/01/2004 | US6743714 Low temperature integrated metallization process and apparatus |
| 06/01/2004 | US6743532 Multi-layer coating, nickel basecoat layer, and a layers of carbon- rich refractory metal or refractory metal alloy carbonitride alternating with layers of nitrogen-rich refractory metal or refractory metal alloy carbonitride. |
| 06/01/2004 | US6743503 Ultra-thin seed layer for multilayer superlattice magnetic recording media |
| 06/01/2004 | US6743488 Transparent conductive stratiform coating of indium tin oxide |
| 06/01/2004 | US6743485 Sputtering to simultaneously dry clean and amorphize the silicon substrate surface, then sputtering to deposit a titanium film; performed in the same chamber, improving wafer throughput |