| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 08/24/2004 | US6780290 Coating film material from evaporating source is applied on substrate surfaces while revolving substrates around evaporating source; improves film thickness distribution in direction of revolution of substrates |
| 08/24/2004 | US6780278 Plasma processing apparatus with reduced parasitic capacity and loss in RF power |
| 08/24/2004 | US6780075 Method of fabricating nano-tube, method of manufacturing field-emission type cold cathode, and method of manufacturing display device |
| 08/24/2004 | US6779704 Friction stir welding of metal matrix composites, ferrous alloys, non-ferrous alloys, and superalloys using a superabrasive tool |
| 08/24/2004 | CA2141536C Abrasion wear resistant coated substrate product |
| 08/24/2004 | CA2110250C Depositing different materials on a substrate |
| 08/19/2004 | WO2004070808A1 Plasma treating device, and plasma treating device electrode plate, and electrode plate producing method |
| 08/19/2004 | WO2004070787A2 Method for making multifunctional organic thin films |
| 08/19/2004 | WO2004070736A1 Ferroelectric film, semiconductor device, ferroelectric film manufacturing method, and ferroelectric film manufacturing apparatus |
| 08/19/2004 | WO2004070733A2 Conductive flakes by sputtering and vapor deposition |
| 08/19/2004 | WO2004070472A1 Photomask blank, photomask, and pattern transfer method using photomask |
| 08/19/2004 | WO2004070072A2 Heat treatable coated article with chromium nitride ir reflecting layer and method of making same |
| 08/19/2004 | US20040161630 Silver alloy; radiation resistance, corrosion resistance, chemical resistance |
| 08/19/2004 | US20040161613 Method of enhancing the stability of electroactive polymers and redox active materials |
| 08/19/2004 | US20040161609 Cubic boron nitride/diamond composite layers |
| 08/19/2004 | US20040160672 Color shifting carbon-containing interference pigments |
| 08/19/2004 | US20040159854 Thin film device and its fabrication method |
| 08/19/2004 | US20040159647 Melting and vaporizing apparatus and method |
| 08/19/2004 | US20040159545 Method of forming metal blanks for sputtering targets |
| 08/19/2004 | US20040159538 binary photo mask blank, a phase shifting photo mask blank or an extreme ultra violet photo mask blank having small structures; sputtering a target in a vacuum chamber by irradiating with a particle beam to deposit a first layer; high stability |
| 08/19/2004 | US20040159285 Gas gate for isolating regions of differing gaseous pressure |
| 08/19/2004 | US20040159283 Method for forming multilayer thin film and apparatus thereof |
| 08/19/2004 | DE10252529B3 Medical/dental hand instrument, for coating surfaces with a protective layer, has a ring jet for a flow of particles and a laser beam to deposit a molten flow on the surface |
| 08/18/2004 | EP1447458A2 process for producing a Si-based alloy sputtering target, sputtering target and its application |
| 08/18/2004 | EP1446811A1 Process for manufacturing multilayer systems |
| 08/18/2004 | CN2633899Y Electromagnetic field restraining inductive coupling plasma reinforced gas phase depositing film system |
| 08/18/2004 | CN1522435A Ultrathin protective overcoats for magnetic materials |
| 08/18/2004 | CN1522312A Method and apparatus for preparing thin resin film |
| 08/18/2004 | CN1522098A Mask vapor deposition method and apparatus, mask, process for manufacturing display panel, display panel and electronic device |
| 08/18/2004 | CN1521221A Protective coating |
| 08/18/2004 | CN1162893C Particle preventing method for pre-cleaning chamber |
| 08/18/2004 | CN1162741C Ion gun deposit and arrangement for liquid crystal device |
| 08/18/2004 | CN1162569C Deposition process for low-stress superthick nitrogen silicon compound film |
| 08/17/2004 | US6777091 Substrate with photocatalytic film and method for producing the same |
| 08/17/2004 | US6777028 Dental or bone prosthetic is coated with silica, a silane coupling agent, and a preserving protective layer, which is a polymethyl methacrylate, a bis gma, an epoxy resin or a phenolic resin; adhesive; sterility during long term storage |
| 08/17/2004 | US6776887 Method and apparatus for thin film center shielding |
| 08/17/2004 | US6776882 Multilayer coatings; radiation transparent layer and reflective layer on polycarbonate substrate; vacuum deposition |
| 08/17/2004 | US6776881 A target body with a mirror-symmetrical, concavely constructed atomization surface and a magnetic circuit arrangement operable to generate a magnetic field over the surface; stable plasma discharge |
| 08/17/2004 | US6776880 Processing chamber for oxidation, a chamber for solution application, a chamber for baking, and processing chambers for vapor-phase film formation,reliability |
| 08/17/2004 | US6776879 For forming a thin film having uniform thickness on substrate |
| 08/17/2004 | US6776848 Motorized chamber lid |
| 08/17/2004 | US6776847 Film formation apparatus and film formation method and cleaning method |
| 08/17/2004 | US6776170 Method and apparatus for plasma cleaning of workpieces |
| 08/12/2004 | WO2004068148A2 Method of and apparatus for measurement and control of a gas cluster ion beam |
| 08/12/2004 | WO2004067798A1 Ge-Cr ALLOY SPUTTERING TARGET AND PROCESS FOR PRODUCING THE SAME |
| 08/12/2004 | WO2004067797A1 Arrangement consisting of a zinc oxide film applied to a substrate, method for producing said arrangement, and use of the same |
| 08/12/2004 | WO2004067792A2 A coated article having a sealed layered edge to impede corrosion of a coating at the edge and method of making same |
| 08/12/2004 | WO2004067791A2 Transparent titanium oxide-aluminum and/or aluminum oxide coating with rutile structure |
| 08/12/2004 | WO2004067676A1 Controlled sulfur species deposition process |
| 08/12/2004 | WO2004066944A2 Products for treating and preventing chronic diseases: eliminating the autoimmune triggers that underly chronic disease |
| 08/12/2004 | WO2004050945A3 Method for vapor-depositing strip-shaped substrates with a transparent barrier layer made of aluminum oxide |
| 08/12/2004 | WO2004017388A3 Lithographic template and method of formation |
| 08/12/2004 | US20040157429 Process for forming a diffusion barrier material nitride film |
| 08/12/2004 | US20040157414 Silicon based nanospheres and nanowires |
| 08/12/2004 | US20040157138 Manufacturing method and apparatus of phase shift mask blank |
| 08/12/2004 | US20040157134 Simulation based PSM clear defect repair method and system |
| 08/12/2004 | US20040157090 Carbonitrides; containing titanium, aluminum, vanadium, silicon and boron with carbon, nitrogen; wear resistance |
| 08/12/2004 | US20040157081 Protective coatings; oxidation resistance |
| 08/12/2004 | US20040157058 Method of depositing DLC on substrate |
| 08/12/2004 | US20040155592 Magnetic mirror plasma source |
| 08/12/2004 | US20040155353 Semiconductor device and method of manufacturing semiconductor device |
| 08/12/2004 | US20040155278 Semiconductor device, apparatus and method for manufacturing the same |
| 08/12/2004 | US20040155263 Electrochemical device |
| 08/12/2004 | US20040155093 Friction stir welding of metal matrix composites, ferrous alloys, non-ferrous alloys, and superalloys using a superabrasive tool |
| 08/12/2004 | US20040154919 Electric arc evaporator |
| 08/12/2004 | US20040154914 Conductor; variations in thickness between center and edges ; scanning type; movable cathode magnet; liquid crystal display substrates |
| 08/12/2004 | US20040154748 Electrostatic clamping of thin wafers in plasma processing vacuum chamber |
| 08/12/2004 | US20040154704 Forming intermetallics, alloy, ceramic or composite |
| 08/12/2004 | US20040154570 Automotive engine valve mechanism system shim and lifter of these and cam shaft |
| 08/12/2004 | US20040154542 Film formation apparatus and film formation method |
| 08/12/2004 | US20040154539 Metal vapor coating |
| 08/12/2004 | CA2512395A1 Controlled sulfur species deposition process |
| 08/11/2004 | EP1445344A1 Physical vapor deposition apparatus and process |
| 08/11/2004 | EP1445036A1 Method of vapour depositing an organic film |
| 08/11/2004 | EP1444378A2 Textured-metastable aluminum alloy sputter targets |
| 08/11/2004 | EP1444377A1 Apparatus |
| 08/11/2004 | EP1444376A1 High-purity aluminum sputter targets |
| 08/11/2004 | EP1444165A2 Sintered polycrystalline gallium nitride |
| 08/11/2004 | EP0834596B1 Method of manufacturing substrate with thin film, and manufacturing apparatus |
| 08/11/2004 | CN2632980Y Vacuum evaporating heater for producing organic electroluminescent thin membrane |
| 08/11/2004 | CN2632095Y Plasma source enhanced depositing apparatus |
| 08/11/2004 | CN1520591A Method of forming film on optical disk |
| 08/11/2004 | CN1520533A Ion-beam deposition process for mfg. binary photomask blanks |
| 08/11/2004 | CN1520466A Assembles comprising molybdenum and aluminum and methods of utilizing interlayers in forming target/backing plate assemblies |
| 08/11/2004 | CN1520340A Masking article for use in vehicle structure |
| 08/11/2004 | CN1519881A Sintered body and film forming method using same |
| 08/11/2004 | CN1519391A Evaporation device |
| 08/11/2004 | CN1161827C Method for producing silicon oxide film, method for making semiconductor device, semiconductor device, display, and infrared irradiating device |
| 08/11/2004 | CN1161806C Metallized film prodn. method thereof capacitor using it |
| 08/11/2004 | CN1161495C Coated article |
| 08/11/2004 | CN1161492C Gas-phase deposition coating and vaccum heat-treatment on-line combined composite coating equipment |
| 08/10/2004 | US6774339 Hermetic sealing of target/backing plate assemblies using electron beam melted indium or tin |
| 08/10/2004 | US6774060 Methods and apparatus for thermally processing wafers |
| 08/10/2004 | US6774050 Doped aluminum oxide dielectrics |
| 08/10/2004 | US6774009 Silicon target assembly |
| 08/10/2004 | US6773745 Method of producing magnetic recording medium |
| 08/10/2004 | US6773636 Transparent electroconductive film and process for producing same |
| 08/10/2004 | US6773572 Overcoating porous resin; plating; semiconductor |
| 08/10/2004 | US6773562 Shadow frame for substrate processing |
| 08/10/2004 | US6773558 Fluorine generator |