| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
|---|
| 08/10/2004 | CA2171535C Method of manufacturing a composite material with lamellar interphase between reinforcing fibres and matrix, and material obtained |
| 08/05/2004 | WO2004066376A1 Dielectric film forming method |
| 08/05/2004 | WO2004066360A2 Apparatus and methods for ionized deposition of a film or thin layer |
| 08/05/2004 | WO2004066339A1 Alkali metal generating agent, alkali metal generator, photoelectric surface, secondary electron emission surface, electron tube, method for manufacturing photoelectric surface, method for manufacturing secondary electron emission surface, and method for manufacturing electron tube |
| 08/05/2004 | WO2004066338A1 Alkali metal generating agent, alkali metal generator, photoelectric surface, secondary electron emission surface, electron tube, method for manufacturing photoelectric surface, method for manufacturing secondary electron emission surface, and method for manufacturing electron tube |
| 08/05/2004 | WO2004066337A1 Alkali metal generating agent, alkali metal generator, photoelectric surface, secondary electron emission surface, electron tube, method for manufacturing photoelectric surface, method for manufacturing secondary electron emission surface, and method for manufacturing electron tube |
| 08/05/2004 | WO2004066315A2 Benzoxazinone and quinazolinone derivatives |
| 08/05/2004 | WO2004065656A1 Ito thin film, film-forming method of same, transparent conductive film and touch panel |
| 08/05/2004 | WO2004065331A1 Surface hardened carbon material and process of manufacturing |
| 08/05/2004 | WO2004065046A2 Brittle material sputtering target assembly and method of making same |
| 08/05/2004 | WO2004057053A3 Methods for producing coated metal wire |
| 08/05/2004 | WO2004050937A3 Method for coating piston rings for internal combustion engines |
| 08/05/2004 | US20040151991 Photolithography mask repair |
| 08/05/2004 | US20040151949 Magnetic recording medium and method for manufacturing same |
| 08/05/2004 | US20040151942 Overcoating substrate by sputtering; using zirconium, zinc, indium alloy |
| 08/05/2004 | US20040151939 Reactive multilayer foil with conductive and nonconductive final products |
| 08/05/2004 | US20040151911 Ion gun deposition and alignment for liquid-crystal applications |
| 08/05/2004 | US20040150696 Pressurization; plasma sputtering |
| 08/05/2004 | US20040149959 Conductive flakes manufactured by combined sputtering and vapor deposition |
| 08/05/2004 | US20040149813 Method of making reactive multilayer foil |
| 08/05/2004 | US20040149576 High-power ion sputtering magnetron |
| 08/05/2004 | US20040149575 System for unbalanced magnetron sputtering with AC power |
| 08/05/2004 | US20040149574 Penning discharge plasma source |
| 08/05/2004 | US20040149567 Composite sputter target and phosphor deposition method |
| 08/05/2004 | US20040149566 Method for reactive sputtering deposition |
| 08/05/2004 | US20040149565 Method for manufacturing a workpiece using a magnetron sputter source |
| 08/05/2004 | US20040149373 Method of bonding a first body to a second body |
| 08/05/2004 | US20040149372 Method of connecting semiconductor or microelectronic device to a substrate |
| 08/05/2004 | US20040149273 Internal combustion engine |
| 08/05/2004 | US20040149208 Particle control device and particle control method for vacuum processing apparatus |
| 08/05/2004 | DE19833718B4 Verfahren zur Verringerung der Partikelabgabe und Partikelaufnahme einer Waferauflage A method for reducing the particle charge and particle absorption of a wafer support |
| 08/05/2004 | DE19801424B4 Wärmedämmstoff für hohe Temperaturen und seine Verwendung Heat insulation material for high temperature and its use |
| 08/05/2004 | DE19751785B4 Verfahren zum Behandeln eines Halbleiter-Wafers A method for treating a semiconductor wafer |
| 08/05/2004 | DE10303428A1 Plasma-activated layer deposition process by cathodic sputtering according to the magnetron principle for producing thin layers of metals and metal alloys comprises reducing the absolute value of the magnetic field strength |
| 08/05/2004 | DE10297024T5 Dünnschichtausbildungsverfahren und Dünnschichtausbildungseinrichtung Thin film forming method and thin film training institute |
| 08/05/2004 | DE10216711B4 Verfahren zur Herstellung eines als Blende dienenden dünnen Metallfilms mit einer durchgehenden Öffnung mit einem ultrakleinen Durchmesser und Verfahren zur Herstellung eines Metallfilms mit den sich darin befindenden Öffnungen A method for producing a diaphragm serving as the thin metal film with a continuous opening with an ultra-small diameter, and process for producing a metal film with the apertures located therein |
| 08/05/2004 | DE10154229B4 Einrichtung für die Regelung einer Plasmaimpedanz Means for controlling a plasma impedance |
| 08/05/2004 | DE10053733B4 Verfahren zur Kristallisation einer Dünnschicht aus Lithium-Übergangsmetall-Oxid A method for crystallization of a thin film of lithium transition metal oxide |
| 08/05/2004 | CA2511180A1 A process for the production of porous inorganic materials or a matrix material containing nanoparticles |
| 08/04/2004 | EP1443127A1 Method for coating large-area substrates |
| 08/04/2004 | EP1443126A1 Silicon monoxide vapor deposition material and method for preparation thereof |
| 08/04/2004 | EP1442793A1 Photocatalyst element, method and device for preparing the same |
| 08/04/2004 | EP1442788A2 Screening inorganic materials for catalysis |
| 08/04/2004 | EP1442154A1 Method for producing a continuous coating at the surface of a component |
| 08/04/2004 | EP1442153A1 Gcib processing to improve interconnection vias and improved interconnection via |
| 08/04/2004 | EP1336188B1 Extraction and deceleration of low energy beam with low beam divergence |
| 08/04/2004 | EP1325167B1 Sputtertarget |
| 08/04/2004 | EP0977907B1 Combination antiabrasion layer |
| 08/04/2004 | CN1518399A Precision mask for film forming and its manufacturing method, electroluminescence device and manufacturing method |
| 08/04/2004 | CN1518037A Anode and magnetron with the anode |
| 08/04/2004 | CN1160480C Apparatus for simultaneous deposition by physical vapor deposition and chemical vapor deposition and method therefor |
| 08/04/2004 | CN1160478C Vacuum film growth apparatus |
| 08/04/2004 | CN1160477C Hall type ion auxiliary evaporation source |
| 08/03/2004 | US6770889 Method of controlling electrostatic lens and ion implantation apparatus |
| 08/03/2004 | US6770562 Film formation apparatus and film formation method |
| 08/03/2004 | US6770358 Titanium or zirconium boride substrate; high strength, chemical resistance, electroconductivity |
| 08/03/2004 | US6770333 Electron beam vapor deposit an ingot of yttria-stabilized zirconia on first article, by heating, melting and evaporating, and heat transfer to deposit on the second article |
| 08/03/2004 | US6770178 Cathodic arc disposable sting shielding |
| 08/03/2004 | US6770176 Apparatus and method for fracture absorption layer |
| 08/03/2004 | US6770175 Apparatus for and method of forming electrode for lithium secondary cell |
| 08/03/2004 | US6770154 Sputter face has an atom transport direction for transporting tantalum atoms away from the sputter face for coating a substrate |
| 08/03/2004 | US6770117 Ion implantation and wet bench systems utilizing exhaust gas recirculation |
| 08/03/2004 | CA2289039C Packaging material |
| 07/29/2004 | WO2004064169A1 Structurally gradient material and functional element including the same |
| 07/29/2004 | WO2004064114A2 Powder metallurgy sputtering targets and methods of producing same |
| 07/29/2004 | WO2004063420A1 Nickel alloy sputtering target |
| 07/29/2004 | WO2004063419A1 Resistance-heated vaporizer boat |
| 07/29/2004 | WO2004063399A1 Suface hardened stainless steel with improved wear resistance and low static friction properties |
| 07/29/2004 | WO2004062907A1 Si LAMINATED BODY HAVING Si LAYER FORMED ON SUBSTRATE SHEET |
| 07/29/2004 | US20040147736 Activated polyethylene glycol compounds |
| 07/29/2004 | US20040146748 Differentially resputtering with nonuniform voltage bias to modulate platinum content of magnetic film |
| 07/29/2004 | US20040146721 Multilayer; interior dielectrics, infrared reflecting layers, silver layers, another dielectrics; controlling crystallization during tempering |
| 07/29/2004 | US20040146645 Mutlialyer automobile laminate; glazing unit; pair of glass sheets; sputter coating; silver film and dielectric |
| 07/29/2004 | US20040146642 Process for making angstrom scale and high aspect functional platelets |
| 07/29/2004 | US20040146639 Preparation of radiation image storage panel |
| 07/29/2004 | US20040144643 Sputtering targets, sputter reactors, methods of forming cast ingots, and methods of forming metallic articles |
| 07/29/2004 | US20040144639 Nitriding silicon surface of wafer with nitrogen plasma; overcoating with nickel; annealing |
| 07/29/2004 | US20040144638 Device for measuring the profile of a metal film sputter deposition target, and system and method employing same |
| 07/29/2004 | US20040144321 Method of designing a thermal physical vapor deposition system |
| 07/29/2004 | US20040144320 Method for cleaning reaction container and film deposition system |
| 07/29/2004 | US20040144318 Device for ceramic-type coating of a substrate |
| 07/29/2004 | US20040144317 Mask used for layer formation and process of making the mask |
| 07/29/2004 | US20040144316 Apparatus for processing a substrate |
| 07/29/2004 | US20040144204 Airu spattering target and method for preparation thereof |
| 07/29/2004 | DE19832299B4 Verfahren zur Verbesserung des Korrosionsschutzes von Seltenerddauermagneten A process for improving the corrosion protection of Seltenerddauermagneten |
| 07/29/2004 | DE10392142T5 Sputtertarget aus einer Silberlegierung und Verfahren zur Herstellung desselben A sputtering target made of a silver alloy and method of manufacturing the same |
| 07/29/2004 | DE10303971A1 Production of a luminescent layer on a substrate in a vaporizing device with rotating substrate holder used for vaporization of needle image for mammography plates comprises using a substrate eccentrically arranged on the substrate holder |
| 07/29/2004 | DE10256909B3 Verfahren zur Herstellung einer Chalkogenid-Halbleiterschicht mit optischer in-situ-Prozesskontrolle und Vorrichtung zur Verfahrensdurchführung A process for producing a chalcogenide semiconductor layer with optical in-situ process control and device for process operation |
| 07/28/2004 | EP1441572A1 Precision mask for deposition and a method for manufacturing the same, an electroluminescence display and a method for manufacturing the same, and electronic equipment |
| 07/28/2004 | EP1441378A2 Anode and magnetron therewith |
| 07/28/2004 | EP1441239A1 Transparent laminate, method for producing the same, and plasma display panel |
| 07/28/2004 | EP1441038A1 Sintered body and film forming method using the same |
| 07/28/2004 | EP1440775A1 Amorphous diamond coating of blades |
| 07/28/2004 | EP1440178A1 Apparatus for vacuum deposition, specifically for metallizing plastic film |
| 07/28/2004 | EP1366203A4 Refractory metal plates with uniform texture and methods of making the same |
| 07/28/2004 | EP1362132A4 Rejuvenation of refractory metal products |
| 07/28/2004 | CN1516895A Barrier enhancement process for copper interconnects |
| 07/28/2004 | CN1516888A Magnetron atomisation source |
| 07/28/2004 | CN1516826A Ion-beam deposition process for mfg. attenuated phase shift photomask blanks |
| 07/28/2004 | CN1516282A 电子电路 Electronic circuit |