| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 09/01/2004 | CN1525912A Transparent conductive stratiform coating of indium tin oxide |
| 09/01/2004 | CN1525519A Magnetron cathode and magnetron sputtering apparatus comprising the same |
| 09/01/2004 | CN1524977A Artificial organs surface treatment method using sputtering technology |
| 09/01/2004 | CN1524627A Shadowing material |
| 09/01/2004 | CN1164791C Insulating structure of plasma continuous polymerization treatment equipment |
| 09/01/2004 | CN1164790C Carbon nitride ultrahard film plated target material and preparation method thereof |
| 08/31/2004 | US6784608 Light-absorptive antireflection filter, with pigment containing light-absorptive film and electroconducting thin film, and device using same |
| 08/31/2004 | US6784445 Apparatus for monitoring intentional or unavoidable layer depositions and method |
| 08/31/2004 | US6784118 Method for vaporization of liquid organic feedstock and method for growth of insulation film |
| 08/31/2004 | US6784096 Methods and apparatus for forming barrier layers in high aspect ratio vias |
| 08/31/2004 | US6784085 MIIIN based materials and methods and apparatus for producing same |
| 08/31/2004 | US6783876 Layer stack for transparent substrates |
| 08/31/2004 | US6783863 Substrate with a surface spray coating of yttrium oxide (Y2O3); resistance to chemical corrosion and plasma erosion by halogen gas |
| 08/31/2004 | US6783861 Glazing panel |
| 08/31/2004 | US6783811 Uv light irradiation process on a metal oxide film in vacuum or in an atmosphere of reducing gas at a temperature maintained between 25 degrees c. and 300 degrees c to reduce resistance |
| 08/31/2004 | US6783800 Transporting particles of a water repellent material with a gas; discharging transported particles from a nozzle to the substrate to form the water repellent film on the surface of the substrate |
| 08/31/2004 | US6783704 Composition for forming hydrophobic coatings on optical substrates which have an metal fluoride layer as the outermost layer by thermal vapor deposition with polyfluorohydrocarbon |
| 08/31/2004 | US6783696 Porous getter devices with reduced particle loss and method for manufacturing same |
| 08/31/2004 | US6783644 Film deposition method |
| 08/31/2004 | US6783641 Vacuum treatment system and process for manufacturing workpieces |
| 08/31/2004 | US6783640 A reactive sputtering process employing a plasma emission monitor |
| 08/31/2004 | US6783639 Coils for generating a plasma and for sputtering |
| 08/31/2004 | US6783638 Flat magnetron |
| 08/31/2004 | US6783637 For depositing a multilayered material from a sputtering target; vacuum |
| 08/31/2004 | US6783636 Irradiating a target with an ion beam to dislodge particles from the target and deposit the magnesium oxide particles on the substrate |
| 08/31/2004 | US6783634 Manufacturing method and apparatus of phase shift mask blank |
| 08/26/2004 | WO2004073054A1 Cooling device for vacuum treatment device |
| 08/26/2004 | WO2004073026A2 Mixed-phase compressive tantalum thin films and method for forming same |
| 08/26/2004 | WO2004073009A2 Plasma processing installation, influenced by a magnetic field, for processing a continuous material or a workpiece |
| 08/26/2004 | WO2004072959A2 Disk coating system |
| 08/26/2004 | WO2004071981A2 Method of depositing dlc on substrate |
| 08/26/2004 | WO2004071338A2 Implantable device using diamond-like carbon coating |
| 08/26/2004 | WO2004061893A3 Machine for uniform treatment of sample surfaces by multicharged ion projection |
| 08/26/2004 | WO2004059027A3 Ionic plasma deposition of anti-microbial surfaces and the anti-microbial surfaces resulting therefrom |
| 08/26/2004 | WO2004050943A3 Method for the treatment of surfaces with plasma in a vacuum and unit for the same |
| 08/26/2004 | WO2004044261A3 High deposition rate sputtering |
| 08/26/2004 | WO2004041985B1 Device and method for the evaporative deposition of a high-temperature superconductor in a vacuum with continuous material introduction |
| 08/26/2004 | WO2004028340A3 High strength vacuum deposited nitionol alloy films, medical thin film graft materials and method of making same |
| 08/26/2004 | WO2003097890A3 Method for surface treatment of a doctor blade element |
| 08/26/2004 | WO2003080887A3 Methods and apparatus for annealing in physical vapor deposition systems |
| 08/26/2004 | US20040166693 Sputtering target compositions, and methods of inhibiting copper diffusion into a substrate |
| 08/26/2004 | US20040166664 Thin film-structure and a method for producing the same |
| 08/26/2004 | US20040166652 Mask and method of manufacturing the same, electro-luminescence device and method of manufacturing the same, and electronic instrument |
| 08/26/2004 | US20040166378 Scratch, corrosion amd heat resistant; colorfast; suitable for salty and acidic foods; alternating layers of chromium nitride alone and with titanium and aluminum |
| 08/26/2004 | US20040166377 Magnetic anisotropy of soft-underlayer induced by seedlayer |
| 08/26/2004 | US20040166355 comprises nickel/aluminum based intermetallics; for promoting heat transfer |
| 08/26/2004 | US20040166337 Biaxially oriented polypropylene high barrier metallized film for packaging |
| 08/26/2004 | US20040166330 Thin film-structure and a method for producing the same |
| 08/26/2004 | US20040166322 polymer material and a vapor deposition layer formed on the substrate and consisting essentially of a ceramic material |
| 08/26/2004 | US20040166239 Packing containers; oxygen barrier; substrates with vapor deposited overcoating; heating; annealing |
| 08/26/2004 | US20040165871 Wafer holder for semiconductor manufacturing device and semiconductor manufacturing device in which the holder is installed |
| 08/26/2004 | US20040165858 Oh and h resistant silicon material |
| 08/26/2004 | US20040165272 Color shifting carbon-containing interference pigments |
| 08/26/2004 | US20040164420 Sputtering target compositions, and methods of inhibiting copper diffusion into a substrate |
| 08/26/2004 | US20040164365 reliable gate dielectric having an equivalent oxide thickness thinner than attainable using SiO2; formed by ion assisted electron beam evaporation of TiO2 and electron beam evaporation of a lanthamide, particularly Nd, Tb, and Dy |
| 08/26/2004 | US20040164329 Semiconductor device and method of manufacturing the same |
| 08/26/2004 | US20040164281 consisting of indium oxide and containing titanium such that the atomic ratio Ti/In is 0.003 to 0.120, and the specific resistance is 1 k.cm or less; high transmittance in not only the visible light range but also the infrared light range |
| 08/26/2004 | US20040163951 Magnetron sputtering apparatus |
| 08/26/2004 | US20040163944 Magnetron with controlled DC power |
| 08/26/2004 | US20040163669 Cleaning chamber surfaces to recover metal-containing compounds |
| 08/26/2004 | US20040163600 Vapor deposition device |
| 08/26/2004 | US20040163592 Mask for vacuum deposition and organic EL display panel manufactured by using the same |
| 08/26/2004 | DE10305109A1 Highly electrically insulating coating obtained from an insulating material useful for deposition on building component substrates by a gas sputtering process |
| 08/26/2004 | DE102004004569A1 Sputtervorrichtung, ein Mischfilm, der mit der Sputtervorrichtung erzeugt wird, und ein Mehrschichtfilm, der den Mischfilm umfaßt Sputtering, a mixed film is formed with the sputtering apparatus, and a multi-layer film comprising the blend film |
| 08/26/2004 | CA2516210A1 Cooling device for vacuum treatment device |
| 08/26/2004 | CA2511908A1 Implantable device using diamond-like carbon coating |
| 08/25/2004 | EP1450008A1 Automobile engine valve mechanism system shim and lifter, a nd combination of these and cam shaft |
| 08/25/2004 | EP1449935A1 Sputtering target and production method therefor |
| 08/25/2004 | EP1449934A2 Vacuum arc vapor deposition apparatus |
| 08/25/2004 | EP1449930A1 Alloy, process for producing a coating of such an alloy and coated substrate |
| 08/25/2004 | EP1449583A1 Method and apparatus for producing photocatalyst element |
| 08/25/2004 | EP1449234A1 Magnetron sputtering device |
| 08/25/2004 | EP1448806A1 Method and apparatus for multi-target sputtering field of the invention |
| 08/25/2004 | EP1448805A2 Improved method for coating a support with a material |
| 08/25/2004 | EP1448804A1 METHOD OF SYNTHESIZING A COMPOUND OF THE FORMULA M sb n+1 /sb AX sb n /sb , FILM OF THE COMPOUND AND ITS USE |
| 08/25/2004 | EP1448386A1 Durable high barrier metallized polypropylene film |
| 08/25/2004 | EP1448366A1 Forming thin films on substrates using a porous carrier |
| 08/25/2004 | EP1339625A4 Throughput enhancement for single wafer reactor |
| 08/25/2004 | EP1049544A4 Method and apparatus for providing a conductive, amorphous non-stick coating |
| 08/25/2004 | EP0996765A4 Substrate processing apparatus having a substrate transport with a front end extension and an internal substrate buffer |
| 08/25/2004 | EP0987700B1 Device and method for manufacturing an optical recording medium |
| 08/25/2004 | EP0909342B1 Method for continuous coating of a moving substrate by means of a metallic vapour |
| 08/25/2004 | EP0632847B2 Process for coating a substrate with a material giving a polished effect |
| 08/25/2004 | CN2635678Y Multi-function rolling film-coating machine |
| 08/25/2004 | CN1524283A High performance magnetron for DC sputtering systems |
| 08/25/2004 | CN1524161A 内燃机 Internal combustion engine |
| 08/25/2004 | CN1523575A Magneto-resistance effect element, magnetic head and magnetic storage device |
| 08/25/2004 | CN1523444A Buttgereit Ute |
| 08/25/2004 | CN1523131A Improved evaporation method |
| 08/25/2004 | CN1523130A Process for preparing metal-organic complex electric bistable film |
| 08/25/2004 | CN1163683C Vacuum tight coupling for tube sections |
| 08/24/2004 | US6781812 Chuck equipment |
| 08/24/2004 | US6780794 Methods of bonding physical vapor deposition target materials to backing plate materials |
| 08/24/2004 | US6780787 Low contamination components for semiconductor processing apparatus and methods for making components |
| 08/24/2004 | US6780752 Metal thin film of semiconductor device and method for forming same |
| 08/24/2004 | US6780662 Selective deposition of emissive layer in electroluminescent displays |
| 08/24/2004 | US6780527 Decorative article having white film and production method therefor |
| 08/24/2004 | US6780295 Method for making Ni-Si magnetron sputtering targets and targets made thereby |
| 08/24/2004 | US6780294 Shield assembly for substrate processing chamber |
| 08/24/2004 | US6780291 Sputtering; controlling ratios of power and pressure |