Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
09/2004
09/09/2004US20040173162 Motorized chamber lid
09/09/2004US20040173160 Apparatus for thin film deposition, especially under reactive conditions
09/09/2004US20040173156 Process kit for improved power coupling through a workpiece in a semiconductor wafer processing system
09/09/2004US20040172827 Fan and compressor blade dovetail restoration process
09/09/2004US20040172826 Turbine element repair
09/09/2004US20040172825 Turbine element repair
09/09/2004DE10361829A1 Halbleiterbauelement mit epitaktischer C49-Titan-Silizid(TiSi2)-Schicht und Verfahren zur Herstellung desselben Of the same semiconductor device with an epitaxial C49-titanium silicide (TiSi2) layer and processes for preparing
09/09/2004DE10309019A1 Deformable medical implant, useful e.g. as vascular stent, is made of stainless steel coated with a mulitlayered covering with graded contents of iron, chromium and nickel
09/08/2004EP1455233A2 Processing method and system
09/08/2004EP1454999A1 Material or article having a metal coating
09/08/2004EP1454736A2 Making and using compacted pellets for oled displays
09/08/2004EP1454707A1 Fan and compressor blade dovetail restoration process
09/08/2004EP1453987A2 Process for making angstrom scale and high aspect functional platelets
09/08/2004EP1453759A2 Metal alloy elements in micromachined devices
09/08/2004EP0872579B1 Process for preparing polycrystalline thin film, process for preparing oxide superconductor, and apparatus therefor
09/08/2004EP0731183B1 Sealing device for inlet or outlet of atmosphere equipment
09/08/2004CN2639315Y Substrate base for film coating equipment
09/08/2004CN1527887A Recessed sputter target
09/08/2004CN1527647A Production and use of compact sheet element for organic light-emitting diode display
09/08/2004CN1527072A High reflectivity film system for reflector
09/08/2004CN1527071A Reflector with protective metal layer of strengthened adhesion and its making process
09/08/2004CN1526852A Method and special apparatus for modifying inner surface of tubular workpiece
09/08/2004CN1526851A Surface hardening treatment process for hand tool of Cr-V steel, 45# steel, 40Cr steel or carbon steel
09/08/2004CN1526850A Mask and producing process thereof, mask producing apparatus and film forming method for luminous material
09/08/2004CN1165991C Semi-conductor and its producing method
09/08/2004CN1165990C Metal material for electronic unit, electronic unit, electronic equipment and treating method for metal material
09/08/2004CN1165981C Method and apparatus for monitoring charge neutralization operation
09/08/2004CN1165951C Method for operation of high-power electron beam
09/08/2004CN1165637C Equipment for making semiconductor device using vacuum system
09/08/2004CN1165636C Cardiovascular system artificial organ surface modifying technology
09/08/2004CN1165366C Method for producing functional film, functional base plate and titanium oxide film
09/07/2004US6788499 Spin valve sensor with insulating and conductive seed layers
09/07/2004US6788373 Protective film for protecting a dielectric layer of a plasma display panel from discharge, method of forming the same, plasma display panel and method of manufacturing the same
09/07/2004US6787913 Ohmic contact plug having an improved crack free TiN barrier metal in a contact hole and method of forming the same
09/07/2004US6787478 Method of forming deposited film
09/07/2004US6787441 Method for pretreating a polymer substrate using an ion beam for subsequent deposition of indium oxide or indium tin oxide
09/07/2004US6787434 Method of fabricating polysilicon film by nickel/copper induced lateral crystallization
09/07/2004US6787371 Method of forming ferroelectric film, ferroelectric memory, method of manufacturing the same, semiconductor device, and method of manufacturing the same
09/07/2004US6787199 Photocatalyst decomposition; radiation transparent, colorless film; prevent surface reflection, interference; mixture of boron and titanium oxide
09/07/2004US6787012 Apparatus for the synthesis of layers, coatings or films
09/07/2004US6787011 Cylindrical target and its production method
09/07/2004US6787010 Non-thermionic sputter material transport device, methods of use, and materials produced thereby
09/07/2004US6787006 Operating a magnetron sputter reactor in two modes
09/07/2004US6787005 Methods of making coated articles by sputtering silver in oxygen inclusive atmosphere
09/07/2004US6787003 Sputtering target and methods of making and using same
09/07/2004CA2122061C Methods for alloy migration sintering
09/02/2004WO2004075219A1 A wound capacitor
09/02/2004WO2004075212A1 Pvd coating material
09/02/2004WO2004074932A2 Method and apparatus for cleaning of native oxides with hydroge-containing radicals
09/02/2004WO2004074542A1 High vacuum sputtering installation
09/02/2004WO2004074541A1 A method of manufacturing a sputter target
09/02/2004WO2004074540A1 Process and apparatus for the maufacture of a sputtering target
09/02/2004WO2004074539A1 Vaporizing material for producing highly refractive optical layers
09/02/2004WO2004074538A2 Foodware with multilayer stick resistant ceramic coating and method of making
09/02/2004WO2004074532A2 Method of supplying sputtering targets to fabricators and other users
09/02/2004WO2004074530A2 Method of forming metal blanks for sputtering targets
09/02/2004WO2004074206A1 Evaporation material for the production of average refractive optical layers
09/02/2004WO2004074200A1 Vaporizing material for producing highly refractive optical layers
09/02/2004WO2004073974A1 Decorative foil
09/02/2004WO2004073971A1 A method of manufacturing a laminated structure
09/02/2004WO2004073893A2 Gas gate for isolating regions of differing gaseous pressure
09/02/2004WO2004073763A1 Antimicrobial and electrically conducting materials
09/02/2004US20040171895 Process catalysed by bis-triflimide compounds
09/02/2004US20040171270 Method and apparatus for micromachining using a magnetic field and plasma etching
09/02/2004US20040171182 Thin film forming device, method of forming a thin film, and self-light-emitting device
09/02/2004US20040170907 produces a phase shift of the transmitted light formed with an optically translucent film made of metal, silicon, nitrogen and oxygen, and an etch stop layer is added to improve the etch selectivity of the phase shifting layer
09/02/2004US20040170871 Depositing a conductive, ferromagnetic thin film layer on an article;depositing a buffer layer while applying a bias voltage; changing the bias voltage; depositing a thin film layer
09/02/2004US20040170552 Hafnium silicide target for forming gate oxide film and method for preparation thereof
09/02/2004US20040170521 improved corrosion resistance/mechanical properties
09/02/2004US20040169959 Structure and plating method of thin film magnetic head and magnetic storage apparatus
09/02/2004US20040168932 Refining, electrowinning; vapor deposition; alloy of titanium, tantalum
09/02/2004US20040168908 Method of forming a conductive barrier layer having improved coverage within critical openings
09/02/2004US20040168907 Sintered body and film forming method using the same
09/02/2004US20040168771 Layout of electromagnets positioning on edges of plasma enclosure; impacting particles; controlling distribution of current signals
09/02/2004US20040168637 Filtered cathodic arc deposition method and apparatus
09/02/2004US20040168636 Process and apparatus for producing cystalline thin film buffer layers and structures having biaxial texture
09/02/2004US20040168635 Device for vacuum metallising large surfaces by plasma activation
09/02/2004US20040168634 Apparatus and method for manufacturing an organic electroluminescence display
09/02/2004US20040168631 Plasma processing apparatus having protection members
09/02/2004DE4419167B4 Vorrichtung zum Beschichten eines Substrates An apparatus for coating a substrate
09/02/2004DE202004009256U1 Workpiece carrier device including a planetary element, a lunar element, and a rotary motion transfer device useful for holding workpieces, especially during surface treatment
09/02/2004DE10307117A1 Aufdampfmaterial zur Herstellung hochbrechender optischer Schichten Coating material for the production of high-refraction optical coatings
09/02/2004DE10307096A1 Aufdampfmaterial zur Herstellung mittelbrechender optischer Schichten Coating material for producing medium refractive optical layers
09/02/2004DE10307095A1 Aufdampfmaterial zur Herstellung hochbrechender optischer Schichten Coating material for the production of high-refraction optical coatings
09/02/2004DE10306925A1 PVD-Beschichtungsmaterial PVD coating material
09/02/2004DE10254622A1 Hochbelastbar, beständige, flexible Folie A heavy-duty, durable, flexible film
09/02/2004DE102004005934A1 Hartfilm, Herstellungsverfahren dafür und Target zur Hartfilmherstellung Hard movie, manufacturing method thereof, and target for hard film production
09/02/2004CA2513911A1 Foodware with multilayer stick resistant ceramic coating and method of making
09/01/2004EP1452622A2 Target and process for its production, and method for forming a film having a high refractive index
09/01/2004EP1452621A2 Composite structured wear resistant coating
09/01/2004EP1452620A1 Mask used for layer formation and process of making the mask
09/01/2004EP1452619A1 Thin metal oxide film and process for producing the same
09/01/2004EP1452490A1 Piezoelectric body, manufacturing method thereof, piezoelectric element having the piezoelectric body, inject head, and inject type recording device
09/01/2004EP1451817A1 Substrate-holder
09/01/2004EP1451384A2 Coating method and coating
09/01/2004EP1451120A1 Heat treatable coated article with anti-migration barrier between dielectric and solar control layer portion, and methods of making same
09/01/2004EP1451118A2 Buffing diamond-like carbon (dlc) to improve scratch resistance
09/01/2004EP1451009A1 Durable, low ohm, high transmission transparent conductor
09/01/2004EP1154963B1 Glazing panel
09/01/2004EP0983454A4 A sealing system