| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 09/30/2004 | US20040188240 connecting a remote plasma generator to a rapid thermal processing chamber and introducing nitrogen plasma into the chamber as the metal layer is converted into a nitridated metal salicide layer |
| 09/30/2004 | US20040188239 Ionized PVD with sequential deposition and etching |
| 09/30/2004 | US20040187979 Mechanical shaping; chemically softening; removal by burnishing of soft metal film; smoothening; roughening for tungsten disulfide impingement to fill surface pits; wear and friction resistance |
| 09/30/2004 | US20040187782 Method & apparatus for multilayer deposition utilizing a common ion beam source |
| 09/30/2004 | US20040187781 Vacuum chamber assembly |
| 09/30/2004 | US20040187338 Vacuum processing apparatus and operating method therefor |
| 09/30/2004 | US20040187337 Vacuum processing apparatus and operating method therefor |
| 09/30/2004 | DE10312658A1 Process for coating flexible substrates, e.g. polymer films, with aluminum comprises coating the substrate with a thin aluminum oxide layer before applying the aluminum |
| 09/29/2004 | EP1463045A2 Optical recording medium, method for manufacturing the same and target used for sputtering process |
| 09/29/2004 | EP1463044A2 Optical recording medium, method for manufacturing the same and target used for sputtering process |
| 09/29/2004 | EP1462543A1 Film-forming method for forming metal oxide on substrate surface |
| 09/29/2004 | EP1462538A1 Reactive mangnetron sputtering method |
| 09/29/2004 | EP1461286A1 Differential stress reduction in thin films |
| 09/29/2004 | EP1427573A4 Metallized cutlery and tableware |
| 09/29/2004 | EP1426119A9 Plasma surface treatment of silicone substrates |
| 09/29/2004 | EP1335995B1 Method for producing an evaporation source |
| 09/29/2004 | EP1325167B8 Sputtertarget |
| 09/29/2004 | EP1099004B1 Thin film stent |
| 09/29/2004 | EP1042788B1 Vacuum treatment installation |
| 09/29/2004 | EP1005440B1 Silicon oxynitride protective coatings |
| 09/29/2004 | CN2644433Y Deposition equipment and screening unit thereof |
| 09/29/2004 | CN1533446A ZnS-SiO2 sputtering target and optical recording medium having ZnS-SiO2 phase-change type optical disc protective film formed through use of that target |
| 09/29/2004 | CN1533445A Method and device for treating substrate |
| 09/29/2004 | CN1533347A Throughput enhan cement for single wafer reactor |
| 09/29/2004 | CN1532563A Optical anti-reflection film and its film coating method |
| 09/29/2004 | CN1532509A Heat exchanger surface processing device equiped with path valve for preventing pollution |
| 09/29/2004 | CN1532508A Surface treating device of heat exchanger capable of regulating supply voltage |
| 09/29/2004 | CN1532302A Novel supper hard composite alloy coating technology |
| 09/29/2004 | CN1169199C Method for forming barrier layer used for copper interconnection |
| 09/29/2004 | CN1168846C Process for preparing modified non-crystal carbon film by metal ion implantation |
| 09/29/2004 | CN1168845C Diboride coated pressing surfaces for abrasion resistant laminate and making pressing surfaces |
| 09/28/2004 | US6798553 Optical filter elements and methods of making and using same |
| 09/28/2004 | US6798499 Method of forming optical thin films on substrate at high accuracy and apparatus therefor |
| 09/28/2004 | US6797969 Multi-column FIB for nanofabrication applications |
| 09/28/2004 | US6797968 Ion beam processing method and apparatus therefor |
| 09/28/2004 | US6797874 Layers, coatings or films synthesized using precursor layer exerted pressure containment |
| 09/28/2004 | US6797649 Method for depositing a fluorine-doped silica film |
| 09/28/2004 | US6797642 Method to improve barrier layer adhesion |
| 09/28/2004 | US6797408 Low-sulfur article having a platinum-aluminide protective layer, and its preparation |
| 09/28/2004 | US6797362 Physical vapor deposition target constructions |
| 09/28/2004 | US6797341 Method for producing boride thin films |
| 09/28/2004 | US6797339 Irradiating the surface of a substrate with ions of a gas cluster to cause a reaction with the surface of a substrate and thereby form a thin film on the substrate surface |
| 09/28/2004 | US6797338 Metal and amino-carboxylic acid chelating agent complex is subjectedto a pvd process, thereby forming the thin metal oxide film |
| 09/28/2004 | US6797336 Multi-component substances and processes for preparation thereof |
| 09/28/2004 | US6797335 Method for deposition of wear-resistant coatings and for increasing the lifespan of parts |
| 09/28/2004 | US6797334 Method for forming gas cluster and method for forming thin film |
| 09/28/2004 | US6797314 Forming solid particles from powders; heating vapor deposition |
| 09/28/2004 | US6797137 Mechanically alloyed precious metal magnetic sputtering targets fabricated using rapidly solidfied alloy powders and elemental Pt metal |
| 09/28/2004 | US6797131 Reduces contamination from flaking or crumbling of sputtered particles |
| 09/28/2004 | US6797128 Harmonic analysis of electrical discharge parameters; controlling frequency output and/or reactive gas flow |
| 09/28/2004 | US6797079 Copper, silver alloy |
| 09/28/2004 | US6797069 Gas driven planetary rotation apparatus and methods for forming silicon carbide layers |
| 09/28/2004 | US6797067 Implanter tool process parameter auto pre-setup system |
| 09/28/2004 | US6796795 Method and apparatus for loading substrate in semiconductor manufacturing apparatus |
| 09/28/2004 | US6796268 Microwave plasma processing system |
| 09/23/2004 | WO2004081931A1 Method for manufacturing optical recording medium and its manufacturing apparatus |
| 09/23/2004 | WO2004081929A1 Silver alloy sputtering target for forming reflective layer of optical recording medium |
| 09/23/2004 | WO2004081251A2 Coated article including titanium oxycarbide and method of making same |
| 09/23/2004 | WO2004080640A1 Aluminium layered brazing product and method of its manufacture |
| 09/23/2004 | WO2004050951A3 Security film and method for the production thereof |
| 09/23/2004 | US20040186810 Method of supplying sputtering targets to fabricators and other users |
| 09/23/2004 | US20040185673 Film formation method and manufacturing method of semiconductor device |
| 09/23/2004 | US20040185667 Method of continuous processing of thin-film batteries and like devices |
| 09/23/2004 | US20040185654 Low-temperature growth high-quality ultra-thin praseodymium gate dielectrics |
| 09/23/2004 | US20040185310 Battery device with conductive layer, cathode, anode and electrolyte layer for electrical isolation |
| 09/23/2004 | US20040185182 Method for protecting articles, and related compositions |
| 09/23/2004 | US20040185174 placing substrate and removable mask (silicon wafer) in vacuum evaporator and forming antireflective optical thin film; photolithography/photoresist free |
| 09/23/2004 | US20040183435 Film formation mask, organic EL panel, and method of manufacturing the organic EL panel |
| 09/23/2004 | US20040183108 Low-temperature grown high-quality ultra-thin praseodymium gate dielectrics |
| 09/23/2004 | US20040183091 Magnetic tunneling junction element having thin composite oxide film |
| 09/23/2004 | US20040182701 For producing a thin dielectric film for an optical device |
| 09/23/2004 | US20040182700 Silicon monoxide sintered prroduct and method for production thereof |
| 09/23/2004 | US20040182698 Shutter disk and blade for physical vapor deposition chamber |
| 09/23/2004 | US20040182697 ARC detection approach |
| 09/23/2004 | US20040182216 Coating for a chainsaw chain |
| 09/23/2004 | DE19708373B4 Verfahren zur Modifizierung einer Oberfläche eines festen Materials A method for modifying a surface of a solid material |
| 09/23/2004 | DE10311466A1 Method for rapid deposition of chemical compound layers by magnetic sputtering on substrates useful for deposition of optical, decorative, hard, and wear decreasing coatings and other surface improving coatings on various substrates |
| 09/23/2004 | DE102004010354A1 Verfahren zum Formen von Wolfram oder Wolfram enthaltenden dünnen Schichten A method for forming tungsten or tungsten-containing thin layers |
| 09/22/2004 | EP1460697A2 Organic electroluminescene display panel and fabrication method thereof |
| 09/22/2004 | EP1460643A1 Manufacturing method of phosphor or scintillator sheets and panels suitable for use in a scanning apparatus. |
| 09/22/2004 | EP1460642A1 Manufacturing method of phosphor or scintillator sheets and panels suitable for use in a scanning apparatus |
| 09/22/2004 | EP1460150A1 Method for fabricating bismuth thin film and device using said film |
| 09/22/2004 | EP1459644A1 Decorative article having white coating and method for manufacture thereof |
| 09/22/2004 | EP1459361A2 Layered structures |
| 09/22/2004 | EP1459353A2 Self-ionized and inductively-coupled plasma for sputtering and resputtering |
| 09/22/2004 | EP1459352A1 Device for treating objects by plasma deposition |
| 09/22/2004 | EP1458901A2 Sputter deposition process for electroluminescent phosphors |
| 09/22/2004 | EP1458657A1 Methods of roughening a ceramic surface |
| 09/22/2004 | EP1458654A2 Method for the production of locally functional areas and objects obtained therewith |
| 09/22/2004 | EP1382711B1 Arc evaporator with a powerful magnetic guide for targets having a large surface area |
| 09/22/2004 | EP1381706B1 Method for production of endless plastic hollow profiles and corresponding profiles |
| 09/22/2004 | EP1303449A4 Dual degas/cool loadlock cluster tool |
| 09/22/2004 | EP1230429B1 Method for producing a component with layer |
| 09/22/2004 | EP1115899A4 Low temperature sputter target bonding method and target assemblies produced thereby |
| 09/22/2004 | EP0997552B1 Method and apparatus for forming thin functional film |
| 09/22/2004 | CN1531839A Cesium dispensers and process for use thereof |
| 09/22/2004 | CN1531741A Diffuser and rapid cycle chamber |
| 09/22/2004 | CN1531605A Hollow cathode target and methods of making same |
| 09/22/2004 | CN1531381A Organic electroluminescent displaying board and producing method thereof |
| 09/22/2004 | CN1531121A Producing method for polar plate of battery |