Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
09/2004
09/22/2004CN1530459A Nanometer vacuum coating film furnaces
09/22/2004CN1168120C Process for preparing Ge crystal film on non-crystal material by magnetically controlled sputtering
09/22/2004CN1167829C Method for metallizing surface of solid polymer substrate and the product obtd.
09/22/2004CN1167825C Equipment for producing porous sponge metal
09/21/2004US6794683 Diamond substrate having piezoelectric thin film, and method for manufacturing it
09/21/2004US6794661 Ion implantation apparatus capable of increasing beam current
09/21/2004US6794339 Synthesis of YBa2CU3O7 using sub-atmospheric processing
09/21/2004US6794278 Method for producing organic thin-film device by use of facing-targets-type sputtering apparatus
09/21/2004US6794064 Hard coating coated parts
09/21/2004US6794052 Polymer arrays from the combinatorial synthesis of novel materials
09/21/2004US6793980 Method of forming photo-catalytic film made of titanium oxide on base material and laminated material thereof
09/21/2004US6793968 Method and device for coating a product
09/21/2004US6793785 Magnetic control oscillating-scanning sputter
09/21/2004US6793784 Tube target
09/21/2004US6793782 Stable display; flat panel display; indium gallium thioaluminate doped with rare earth oxide
09/21/2004US6793781 Cathode targets of silicon and transition metal
09/21/2004US6793124 Bonded with thick, stress relieving aluminum or aluminum alloy insert; warping or peeling resistance; magnetron sputtering ferromagnetic material
09/21/2004CA2145123C Multiple layer erosion resistant coating and a method for its production
09/16/2004WO2004080128A1 Sputtering target for forming thin phosphor film
09/16/2004WO2004079764A2 Coil constructions configured for utilization in physical vapor deposition chambers, and methods of forming coil constructions
09/16/2004WO2004079409A1 Visible light-reflecting member
09/16/2004WO2004079040A1 A method and special apparatus for modifying the internal surface of tubular workpiece
09/16/2004WO2004079039A1 Hafnium alloy target and process for producing the same
09/16/2004WO2004079038A1 Sputtering target, thin film for optical information recording medium and process for producing the same
09/16/2004WO2004079037A1 Sputtering target and process for producing the same, thin film for optical information recording medium and process for producing the same
09/16/2004WO2004079036A1 Sputtering target and process for producing the same
09/16/2004WO2004049397A3 A method of forming an oxide thin films using negative sputter ion beam source
09/16/2004US20040180543 Semiconductor device with epitaxial C49-titanium silicide (TiSi2) layer and method for fabricating the same
09/16/2004US20040180217 Sputtering target, transparent conductive film, and their manufacturing method
09/16/2004US20040180216 Coated article including titanium oxycarbide and method of making same
09/16/2004US20040180214 Methods of making coated articles by sputtering silver in oxygen inclusive atmosphere
09/16/2004US20040180144 depositing a complex metal oxide (CMO) memory material on an electrode, the CMO memory material having a structure of either amorphous or small grain polycrystalline; and annealing the CMO memory material using a laser
09/16/2004US20040179309 magnetoresistance at room temperature; spintronics device; very fast film growth speed in the electrodepositing method, and a thickness of a Bi thin film can be controlled easily in the sputtering method
09/16/2004US20040178439 Doped aluminum oxide dielectrics
09/16/2004US20040178057 active material layer of the electrode plate has a uniform concentration and strongly adheres to the substrate of the electrode plate
09/16/2004US20040178056 Sputtering magnetron arrangements with adjustable magnetic field strength
09/16/2004DE10308968A1 Verfahren zur Herstellung einer leitenden Barrierenschicht mit verbesserter Bedeckung innerhalb kritischer Öffnungen A method for producing a conductive barrier layer with an improved cover within critical openings
09/16/2004DE10308471A1 Coating installation for medium and small diameter optical components with curved surfaces, e.g. lenses, mirrors, etc. for photobjective lenses of consumer optics
09/16/2004DE102004002243A1 Elektrostatische Klemmhalterung für dünne Wafer in einer Vakuumkammer zur Plasmabearbeitung Electrostatic clamping holder for thin wafers in a vacuum chamber for plasma processing
09/16/2004DE10115287B4 Serielles Verfahren zur Herstellung von Schichten und damit hergestellter Reflektor Serial process for the production of layers produced therewith and reflector
09/15/2004EP1458006A1 Continuous deposition of insulating material using multiple anodes alternated between positive and negative voltages
09/15/2004EP1457582A1 Device and method for vacuum deposition, and organic electroluminescent element provided by the device and the method
09/15/2004EP1456432A1 Ionic plasma deposition apparatus
09/15/2004EP1150928B1 Glazing panel
09/15/2004EP1105328B1 Device for introducing and/or eliminating containers
09/15/2004EP1007756B1 Coatings with a silver layer
09/15/2004CN2641647Y Monitoring experiment instrument for in situ dynamic property of film growth process
09/15/2004CN1529789A Comnbination of air-valve parting slip and rod with camshaft, and said slip and rod thereof
09/15/2004CN1529766A 溅射靶和透明导电膜 Sputtering target and a transparent conductive film
09/15/2004CN1529101A Solar coated power-generating lens
09/15/2004CN1528946A Sputtering apparatus
09/15/2004CN1528945A High-density ITO targe material and preparing method thereof
09/15/2004CN1528856A Aluminic gadolinium-base luminescent film material chip and preparing method thereof
09/15/2004CN1166811C Sputter-ion pump
09/15/2004CN1166810C Method for forming film layer thereof
09/15/2004CN1166809C Synthetic resin molded article and process for prodcing same
09/14/2004US6792326 Material delivery system for miniature structure fabrication
09/14/2004US6791737 Electrochemical device
09/14/2004US6791258 Organic light emitting full color display panel
09/14/2004US6791188 Thin film aluminum alloy and sputtering target to form the same
09/14/2004US6790791 Lanthanide doped TiOx dielectric films
09/14/2004US6790774 Method of forming a wiring film by applying high temperature/high pressure
09/14/2004US6790675 Josephson device and fabrication process thereof
09/14/2004US6790543 Hard layer-coated tool
09/14/2004US6790524 Biaxially oriented polypropylene metallized film for packaging
09/14/2004US6790502 Optically functional element and production method and application therefor
09/14/2004US6790497 Tubular elongate polycrystalline diamond or cubic boron nitride with residual binder formed by electrical discharge machining
09/14/2004US6790486 Vapor deposition process
09/14/2004US6790482 Arrangement for orienting the magnetization direction of magnetic layers
09/14/2004US6790476 Method of adhesion between an oxide layer and a metal layer
09/14/2004US6790335 Covering selected areas of substrate with protective film, anodizing, removing the protective film to expose metallic surfaces, depositing chromium or chromium-containing layer
09/14/2004US6790326 Magnetron for a vault shaped sputtering target having two opposed sidewall magnets
09/14/2004US6790323 Magnetrons; low pressure plasma sputtering
09/14/2004US6790322 Production of material libraries using sputter methods
09/14/2004US6790298 Depositing a sacrificial layer on a cleaned substrate, sputtering an amorphous shape memory alloy and depositing sputtered alloy in a thin film onto the sacrificial layer, applying chemical etchant to remove sacrificial layer
09/14/2004US6789723 Welding process for Ti material and Cu material, and a backing plate for a sputtering target
09/14/2004US6789499 Apparatus to sputter silicon films
09/14/2004CA2352929C Method of forming chromium coated copper for printed circuit boards
09/14/2004CA2322363C Method of forming chromium coated copper for printed circuit boards
09/10/2004WO2004077581A1 Method for depositing a film of superconducting material
09/10/2004WO2004077519A2 Dielectric barrier layer films
09/10/2004WO2004076711A1 Coating film excellent in the resistance to corrosion with halogen-containing gases and plasmas, laminated structure coated therewith, and process for the production of both
09/10/2004WO2004076710A1 Amorphous carbon film, process for producing the same and amorphous carbon film-coated material
09/10/2004WO2004076706A2 A method of forming sputtering target assembly and assemblies made therefrom
09/10/2004WO2004076705A2 Reactive physical vapor deposition with sequential reactive gas injection
09/10/2004WO2004076704A2 Thermal barrier coating having low thermal conductivity
09/10/2004WO2004075624A2 System and methods for achieving signaling
09/10/2004WO2004055232A3 Method of synthesising and growing nanorods from a metal carbide on a substrate, substrates thus obtained and applications thereof
09/09/2004US20040176097 Allocation of sub channels of MIMO channels of a wireless network
09/09/2004US20040175860 Method for manufacturing zinc oxide semiconductors
09/09/2004US20040175633 Reflective mask blank having a programmed defect and method of producing the same, reflective mask having a programmed defect and method of producing the same, and substrate for use in producing the reflective mask blank or the reflective mask having a programmed defect
09/09/2004US20040175621 Capacity, charge/discharge efficiency, cycle performance; trilayer comprised of mostly carbon top layer, film allowing lithium component passage and lithium active material foil; fabrication method
09/09/2004US20040175597 Turbine components with thermal barrier coatings
09/09/2004US20040175584 Hybrid polymer film
09/09/2004US20040175511 Coater having substrate cleaning device and coating deposition methods employing such coater
09/09/2004US20040174587 Antireflection coating for ultraviolet light at large angels of incidence
09/09/2004US20040173929 Making and using compacted pellets for OLED displays
09/09/2004US20040173758 Ion source and ion beam device
09/09/2004US20040173455 Cylindrically vaulted sputtering target with sidewall and roof magnetrons
09/09/2004US20040173305 Rubbers with forming steps, sputtering, adhesion of film, vulcanization and lamination