| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 04/27/2005 | CN1609269A Vacuum processing chamber for planar rectangular in particular square substrate |
| 04/27/2005 | CN1609268A Process for treating milling cutter used for printed circuit board by ion implantation technology |
| 04/27/2005 | CN1609267A Method for processing milling cutter used for printed circuit board by ion implantation technology |
| 04/27/2005 | CN1609266A Process for treating drilling bit used for printed circuit board by ion implantation technology |
| 04/27/2005 | CN1609265A Metal ion implantation machine |
| 04/27/2005 | CN1609264A Automatic changing-over device for correcting baffle plate in vacuum coating film machine |
| 04/27/2005 | CN1609263A Process for obtaining thermostable microlaminated materials |
| 04/27/2005 | CN1609262A Magnesium vapour-deposition material |
| 04/27/2005 | CN1609259A Cleaning and refurbishing chamber components having metal coatings |
| 04/27/2005 | CN1199301C Amorphous electrode compsns. |
| 04/27/2005 | CN1199287C Reduced diffusion of mobile specie from metal oxide ceramic |
| 04/27/2005 | CN1199236C Method and apparatus for thermally processing wafers |
| 04/27/2005 | CN1199223C System and method for cleaning ion source in course of using |
| 04/27/2005 | CN1198965C Article having coating thereon |
| 04/27/2005 | CN1198962C Coated article |
| 04/27/2005 | CN1198961C Article having decorative and protective multi-layer coating |
| 04/27/2005 | CN1198955C Connection base sheet for double discs and operation method |
| 04/27/2005 | CN1198954C Clamp of contactless fixture mode for cavity surface evaporating coating of semiconductor laser |
| 04/27/2005 | CN1198692C Multilayer metalized composite on polymer film product and producing process thereof |
| 04/26/2005 | US6884739 Lanthanide doped TiOx dielectric films by plasma oxidation |
| 04/26/2005 | US6884718 Semiconductor manufacturing process and apparatus for modifying in-film stress of thin films, and product formed thereby |
| 04/26/2005 | US6884699 Process and unit for production of polycrystalline silicon film |
| 04/26/2005 | US6884527 For subsequent deposition of high-temperature superconducting thick films with high Jc's and Ic's; a layer of metal phosphate on the substrate surface and a layer of an oriented cubic oxide having a rock-salt-like structure covering it |
| 04/26/2005 | US6884516 Internal member for plasma-treating vessel and method of producing the same |
| 04/26/2005 | US6884500 Component comprising submicron hollow spaces |
| 04/26/2005 | US6884499 Nanolayered coated cutting tool and method for making the same |
| 04/26/2005 | US6884497 PVD-coated cutting tool insert |
| 04/26/2005 | US6884496 Method for increasing compression stress or reducing internal tension stress of a CVD, PCVD or PVD layer and cutting insert for machining |
| 04/26/2005 | US6884476 Masking superalloy surface without obstructing internal passageways with a ceramic forming a noncracking, nonreactive, heat-resistant (>1400 degrees F.) protective coating; physical vapor deposition; gas turbine blades |
| 04/26/2005 | US6884475 Chemical vapor deposition method for depositing a high k dielectric film |
| 04/26/2005 | US6884465 Vapor depositing a dielectric film on a substrate by an atomic layer deposition comprising alternately providing a gaseous metal compound and an oxygen source other than water to the reaction chamber at a temperature <190 degrees C. |
| 04/26/2005 | US6884458 Controlling parylene deposition thickness, by measuring thermal response from the thermoconductive path between heater and thermometer |
| 04/26/2005 | US6884329 Plasma sputtering, two step processes performed at a low temperature, and a high temperature, electrodeposition, manufacturing semiconductor integrated circuits |
| 04/26/2005 | US6884327 Forming a tapered waveguide, comprising: depositing a core layer over a substrate with a shadow mask; and patterning the core layer |
| 04/26/2005 | US6884319 Susceptor of apparatus for manufacturing semiconductor device |
| 04/26/2005 | US6884299 Deposition apparatus for organic light-emitting devices |
| 04/26/2005 | US6884139 Organic EL display device and method for fabricating the same using shadow mask |
| 04/26/2005 | CA2130544C Cemented carbide with binder phase enriched surface zone |
| 04/21/2005 | WO2005036601A2 Wafer characteristics via reflectomeytry and wafer processing apparatus and method |
| 04/21/2005 | WO2005035834A2 Vacuum deposition of dielectric coatings on volatile material |
| 04/21/2005 | WO2005035822A1 Apparatus and process for high rate deposition of rutile titanium dioxide |
| 04/21/2005 | WO2005035821A1 Film deposition apparatus having hole-like rotary filter plate for capturing fine particles, and film deposition method |
| 04/21/2005 | WO2005035820A1 Vapour deposition method |
| 04/21/2005 | WO2005035809A1 HIGH-PURITY Ni-V ALLOY, TARGET THEREFROM, HIGH-PURITY Ni-V ALLOY THIN FILM AND PROCESS FOR PRODUCING HIGH-PURITY Ni-V ALLOY |
| 04/21/2005 | WO2004097064A3 Methods and devices for reduction of tension in thin layers |
| 04/21/2005 | US20050085152 Organic electroluminescence element and production method thereof |
| 04/21/2005 | US20050085095 Sintered object of silicon monoxide and method for producing the same |
| 04/21/2005 | US20050084987 Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
| 04/21/2005 | US20050084799 Sputtering target containing zinc sulfide as major component, optical recording medium on which phase change optical disk protective film containing zinc sulfide as major component is formed by using the target, and method for manufacturing the sputtering target |
| 04/21/2005 | US20050084705 Protective layer for a body, and process and arrangement for producing protective layers |
| 04/21/2005 | US20050084672 Implantable electrical lead wire |
| 04/21/2005 | US20050084654 Component for vacuum apparatus, production method thereof and apparatus using the same |
| 04/21/2005 | US20050084626 Method of forming inorganic alignment film, inorganic alignment film, substrate for electronic device, liquid crystal panel and electronic apparatus |
| 04/21/2005 | US20050084624 Method for forming oriented film, oriented film, substrate for electronic device, liquid crystal panel, and electronic device |
| 04/21/2005 | US20050084611 coating a colloidal dispersion on substrates, then drying to form a layer of colloidal beads, forming films comprising metals and/or metal compounds on the surfaces of the beads and removing the beads to form cavities |
| 04/21/2005 | US20050084379 Compressor blade root for engine blades of aircraft engines |
| 04/21/2005 | US20050082982 MgO pellet for protective layer of plasma display panel, and plasma display panel using the same |
| 04/21/2005 | US20050082482 Process monitoring using infrared optical diagnostics |
| 04/21/2005 | US20050082343 Brazing; soldering; pressing bodies against foil; controlling pressure |
| 04/21/2005 | US20050082258 Methods of treating non-sputtered regions of PVD target constructions to form particle traps |
| 04/21/2005 | US20050082166 Cathode structure for vacuum sputtering machine |
| 04/21/2005 | US20050082162 Information recording medium, method of manufacturing the same, and sputtering target |
| 04/21/2005 | US20050082161 Rapid cycle time gas burster |
| 04/21/2005 | US20050081791 Vacuum treatment installation for flat rectangular or square substrates |
| 04/21/2005 | US20050081790 Film deposition device |
| 04/20/2005 | EP1524682A1 Component for vacuum apparatus, production method thereof and apparatus using the same |
| 04/20/2005 | EP1524330A1 Sputter target having modified surface texture |
| 04/20/2005 | EP1524329A1 Modular device for surface coating |
| 04/20/2005 | EP1524327A1 Layer comprising intracrystalline inclusions |
| 04/20/2005 | EP1524215A1 Vacuum processing chamber for planar rectangular in particular square substrate |
| 04/20/2005 | EP1523771A2 Method for transferring an electrically active thin layer |
| 04/20/2005 | EP1523761A1 Transfer chamber for vacuum processing system |
| 04/20/2005 | EP1523757A2 Cathode for vacuum sputtering treatment machine |
| 04/20/2005 | EP1523585A2 Loading and unloading device for a coating unit |
| 04/20/2005 | EP1523584A1 FABRICATION OF B/C/N/O/Si DOPED SPUTTERING TARGETS |
| 04/20/2005 | EP1060501B1 Method and apparatus for predicting plasma-process surface profiles |
| 04/20/2005 | CN2693788Y Magnetron sputtering target |
| 04/20/2005 | CN2693787Y Bias voltage energizing device |
| 04/20/2005 | CN1608306A Magnetron sputtering device |
| 04/20/2005 | CN1608141A Refurbishing spent sputtering targets |
| 04/20/2005 | CN1607875A Display device and method for manufacturing same |
| 04/20/2005 | CN1607868A Mask frame assembly for depositing a thin layer of an electroluminescent device and method for depositing a thin layer |
| 04/20/2005 | CN1607265A Process for preparation of high-temperature protecting coating by vacuum arc deposition |
| 04/20/2005 | CN1607264A Method for preparing aluminum-silicon-yttrium diffusion alloying coating |
| 04/20/2005 | CN1607054A High purity metal Mo coarse powder and sintered sputtering target produced by thereof |
| 04/20/2005 | CN1198483C Luminous element with hygroscopic film and process for preparing hygroscopic film |
| 04/20/2005 | CN1198153C Method for producing anti-reflective film-coated plastic, lens, and anti-reflective film-coated plastic lens |
| 04/20/2005 | CN1197998C Process for applying protective and decorative coating on article |
| 04/20/2005 | CN1197996C Article having coating |
| 04/20/2005 | CN1197995C Article having decorative and protective coating |
| 04/20/2005 | CN1197991C Pre-sputter method for raising rate of utilization of sputter target |
| 04/20/2005 | CN1197990C Alloy target material for conduction film and its preparation method |
| 04/20/2005 | CN1197989C Electrode for plasma polymerization treatment equipment |
| 04/20/2005 | CN1197900C Resin case hardening process, case hardened resin and productive equipment and resin substrate |
| 04/20/2005 | CN1197702C Aerogel substrate and method for preparing the same |
| 04/20/2005 | CA2485402A1 Implantable electrical lead wire |
| 04/19/2005 | US6881969 Electron beam treatment device |
| 04/19/2005 | US6881673 Integrated deposition process for copper metallization |
| 04/19/2005 | US6881534 Method of forming mask, method of forming patterned thin film, and method of fabricating micro device |
| 04/19/2005 | US6881504 Multilayer; magnetic layer with nonmagnetic interface |