Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
06/2005
06/09/2005US20050124174 Lanthanide doped TiOx dielectric films by plasma oxidation
06/09/2005US20050123747 Gas-barrier material
06/09/2005US20050123686 Amorphous metal deposition and new aluminum-based amorphous metals
06/09/2005US20050123676 Forming a film which adjusts a shape of the substrate above at least one of the front side and the back side of the substrate; anddrilling through-holes in the substrate
06/09/2005US20050122775 Novolatile semiconductor memory device and manufacturing process of the same
06/09/2005US20050121670 Organic electro-luminance device and method for fabricating the same
06/09/2005US20050121622 Radiation image conversion panel and manufacturing method thereof
06/09/2005US20050121423 Heating in a vacuum atmosphere in the presence of a plasma
06/09/2005US20050121321 Ignition device
06/09/2005US20050121320 Copper alloy sputtering target and method for manufacturing the target
06/09/2005US20050121312 Vapor depositing a metallic or ceramic material onto the surface of an elastomeric seal, pre-cleaning the surface by ion beam bombardment to improve the adhesion of inorganic coatings; hardening the seals; used in drill bits
06/09/2005US20050121311 Film thickness measuring instrument comprises a light emitter for radiating measuring light onto film, generating an electrical signal in response; control the sio2 film thickness with high precision and have excellent productivity; magnetron sputtering
06/09/2005US20050121310 Method and substrate to control flow of underfill
06/09/2005US20050121116 Substrate of a nickel-base superalloy and having a free sulfur content of <1 part per million having interdiffused layers of platinum and aluminum; ceramic overlayer of yttria-stabilized zirconia; protective coatings for turbine blades and vanes for jet engines; high heat and oxidation resistance
06/09/2005US20050120959 Vacuum deposition device and pretreatment method for vacuum deposition
06/09/2005US20050120956 Plasma processing apparatus
06/09/2005DE10352627A1 Feinteilige harte Formkörper für abrasionsstabile Polymermatrizen Finely divided hard molded body for abrasion-resistant polymer matrices
06/09/2005DE10350752A1 Verfahren zum Ausbilden eines Dielektrikums auf einer kupferhaltigen Metallisierung und Kondensatoranordnung A method for forming a dielectric on a copper-containing metallization and capacitor assembly
06/08/2005EP1538636A2 Radiation image conversion panel and manufacturing method thereof
06/08/2005EP1538236A2 Substrate support
06/08/2005EP1537763A1 Silicon oxynitride passivated rare earth activated thioaluminate phosphors for electroluminescent displays
06/08/2005EP1537597A1 Sputtering cathode, production method and corresponding cathode
06/08/2005EP1537057A1 Method for producing layers and layer systems and coated substrate
06/08/2005EP1537056A1 Protective layer, method and arrangement for the production of protective layers
06/08/2005EP1537055A1 Coated object
06/08/2005EP1135792A4 Method for manufacturing carbon nanotubes as functional elements of mems devices
06/08/2005EP1135541B1 Sliding member and manufacturing method therefor
06/08/2005EP0842306B2 Improvements in and relating to methods for improving the sputter desposition of metal-sulphur coatings, e.g. molybdenum disulphide coatings and to improved coatings
06/08/2005CN1625921A Heating in a vacuum atmosphere in the presence of a plasma
06/08/2005CN1625312A 淀积掩模及其制造方法 Depositing a mask and its manufacturing method
06/08/2005CN1625311A Mask, method for manufacturing thereof, method for manufacturing organic electroluminescent device, and organic electroluminescent device
06/08/2005CN1624193A Surface treatment device
06/08/2005CN1624192A Surface treatment method
06/08/2005CN1624191A Vacuum film plating machine having orientation and self-control function
06/08/2005CN1624190A Multi particle jewel adhesive method and equipment
06/08/2005CN1624176A Ag-base alloy distribution electrode film, Ag-base alloy sputtering target for panel display
06/08/2005CN1623688A Cleaning method, cleaning apparatus and electro optical device
06/08/2005CN1205458C Base material for strain gauge and making method thereof
06/08/2005CN1205353C Method and device for vacuum arc vapour deposition
06/08/2005CN1205352C Semiconductor metalization manufacturing process
06/07/2005US6903511 For plasma processes such as those used in the semiconductor manufacturing industry, for example, plasma sputter etching, pure chemical etching, ion energy driven etching, and ion inhibitor etching; plasma generator
06/07/2005US6902826 High moment films with sub-monolayer nanolaminations retaining magnetic anisotropy after hard axis annealing
06/07/2005US6902773 For thin-film diamond-like carbon mechanical/corrosion protection layer formed by low energy magnetron sputtering
06/07/2005US6902682 Method and apparatus for electrostatically maintaining substrate flatness
06/07/2005US6902656 Fabrication of microstructures with vacuum-sealed cavity
06/07/2005US6902628 Immersing ceramics or metals having coatings in acidic, then in basic solutions to remove deposits and optionally blasting for smoothness
06/07/2005US6902627 Cleaning chamber surfaces to recover metal-containing compounds
06/07/2005US6902625 Multiple pocket electron beam source
06/07/2005CA2118258C Packaging laminate possessing gas and light barrier properties, and a method of producing the same
06/02/2005WO2005050764A1 Solid electrolyte, in particular for a thin layer electrochemical cell and production method
06/02/2005WO2005050750A2 Manufacture of flat panel light emitting devices
06/02/2005WO2005050696A1 Method and apparatus for reactive solid-gas plasma deposition
06/02/2005WO2005049883A1 Take-up vacuum deposition method and take-up vacuum deposition apparatus
06/02/2005WO2005049882A1 High purity hafnium, target and thin film comprising said high purity hafnium, and method for producing high purity hafnium
06/02/2005WO2005049881A1 Metal vaporizing heating element and metal vaporizing method
06/02/2005WO2005049699A2 Applications of a coating material
06/02/2005WO2005049333A1 Optical recording medium and process for producing the same, spattering target, using process of optical recording medium, and optical recording apparatus
06/02/2005WO2005048708A1 Antimicrobial composite material
06/02/2005WO2005024612A3 Optical functional layers, particularly zinc oxide-sulfide layers having a variable dielectric response
06/02/2005WO2005016839A3 Coated article with silicon oxynitride adjacent glass
06/02/2005WO2003091472A8 Functional fiber sheet
06/02/2005US20050118811 Aluminum alloy film for wiring and sputter target material for forming the film
06/02/2005US20050118788 Mask, method for manufacturing thereof, method for manufacturing organic electroluminescent device, and organic electroluminescent device
06/02/2005US20050118533 Planarization of substrate pits and scratches
06/02/2005US20050118437 Ball limiting metallurgy, interconnection structure including the same, and method of forming an interconnection structure
06/02/2005US20050118349 Process of making a multilayer structure vapor deposition a layer of metal on substrate and detaching
06/02/2005US20050118339 Construction of a sputtering target by spraying
06/02/2005US20050116637 Organic electroluminescence display panel and fabrication method thereof
06/02/2005US20050116204 Growth of in-situ thin films by reactive evaporation
06/02/2005US20050116156 Electron flood apparatus and ion implantation system
06/02/2005US20050115830 Film forming apparatus
06/02/2005US20050115829 Sputtering target for phase-change memory, film for phase change memory formed by using the target, and method for producing the target
06/02/2005US20050115828 Non-stoichiometric niox ceramic target
06/02/2005US20050115827 Multi-cathode ionized physical vapor deposition system
06/02/2005US20050115823 Vacuum sputtering device; precisely controlled alloy stoichiometry during multilayer thin film deposition; reproducible production of magnetic memory devices; minimal latency
06/02/2005US20050115822 Sputtering cathode and device and method for coating a substrate with several layers
06/02/2005US20050115594 Cleaning method, cleaning apparatus and electro optical device
06/02/2005US20050115503 Deposition mask and manufacturing method thereof
06/02/2005US20050115045 Machining the surface to get gradient thickness, thinner center, uniformly distributing magnetic leakage flux across the sputter target; producing uniformly sputtered films on wafers; semiconductors
06/02/2005DE202004020371U1 Gegenstand mit einem Schichtenverbund An article comprising a layer composite
06/02/2005DE19952032B4 Verfahren und Vorrichtung zur Erzeugung planparalleler Plättchen Method and apparatus for generating a plane-parallel plate
06/02/2005DE10392702T5 Ultraniedrige Au-Beladungen für bipolare Platten aus rostfreiem Stahl Ultra Low Au loadings for bipolar plates of stainless steel
06/02/2005DE102004054092A1 Zündvorrichtung Primer
06/02/2005DE102004051374A1 Galvanogeformtes Ionenimplantations-Strukturmaterial und Verfahren zur Herstellung des Strukturmaterials Electroformed ion implantation structural material and process for manufacturing the structural material
06/02/2005CA2546230A1 Antimicrobial composite material
06/02/2005CA2544878A1 Large area, uniformly low dislocation density gan substrate and process for making the same
06/01/2005EP1536497A2 Method of manufacturing organic electroluminescent panel, manufacturing apparatus of organic electroluminescent panel, and organic electroluminescent panel
06/01/2005EP1536483A1 Nonvolatile semiconductor storage device and manufacturing method
06/01/2005EP1536456A1 Support structure
06/01/2005EP1536455A1 Vacuum air lock arrangement
06/01/2005EP1536454A1 Vacuum system
06/01/2005EP1536039A1 Thermal barrier coating
06/01/2005EP1536034A1 Sputtering target, sintered body, conductive film formed by using them, organic el device, and substrate used for the organic el device
06/01/2005EP1536025A1 Process and device for coating or heat treating of bladed disks for aircraft gas turbines
06/01/2005EP1535680A1 Coated cutting tool member
06/01/2005EP1535302A2 Accessory member for dispensers of alkali metals
06/01/2005EP1534873A2 Repairing defects on photomasks using a charged particle beam and topographical data from a scanning probe microscope
06/01/2005EP1154965B1 Glazing panel
06/01/2005CN1623008A Method for formation of titanium nitride film
06/01/2005CN1623007A Sputtering targets, sputter reactors, methods of forming cast ingots, and methods of forming metallic articles