Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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06/09/2005 | US20050124174 Lanthanide doped TiOx dielectric films by plasma oxidation |
06/09/2005 | US20050123747 Gas-barrier material |
06/09/2005 | US20050123686 Amorphous metal deposition and new aluminum-based amorphous metals |
06/09/2005 | US20050123676 Forming a film which adjusts a shape of the substrate above at least one of the front side and the back side of the substrate; anddrilling through-holes in the substrate |
06/09/2005 | US20050122775 Novolatile semiconductor memory device and manufacturing process of the same |
06/09/2005 | US20050121670 Organic electro-luminance device and method for fabricating the same |
06/09/2005 | US20050121622 Radiation image conversion panel and manufacturing method thereof |
06/09/2005 | US20050121423 Heating in a vacuum atmosphere in the presence of a plasma |
06/09/2005 | US20050121321 Ignition device |
06/09/2005 | US20050121320 Copper alloy sputtering target and method for manufacturing the target |
06/09/2005 | US20050121312 Vapor depositing a metallic or ceramic material onto the surface of an elastomeric seal, pre-cleaning the surface by ion beam bombardment to improve the adhesion of inorganic coatings; hardening the seals; used in drill bits |
06/09/2005 | US20050121311 Film thickness measuring instrument comprises a light emitter for radiating measuring light onto film, generating an electrical signal in response; control the sio2 film thickness with high precision and have excellent productivity; magnetron sputtering |
06/09/2005 | US20050121310 Method and substrate to control flow of underfill |
06/09/2005 | US20050121116 Substrate of a nickel-base superalloy and having a free sulfur content of <1 part per million having interdiffused layers of platinum and aluminum; ceramic overlayer of yttria-stabilized zirconia; protective coatings for turbine blades and vanes for jet engines; high heat and oxidation resistance |
06/09/2005 | US20050120959 Vacuum deposition device and pretreatment method for vacuum deposition |
06/09/2005 | US20050120956 Plasma processing apparatus |
06/09/2005 | DE10352627A1 Feinteilige harte Formkörper für abrasionsstabile Polymermatrizen Finely divided hard molded body for abrasion-resistant polymer matrices |
06/09/2005 | DE10350752A1 Verfahren zum Ausbilden eines Dielektrikums auf einer kupferhaltigen Metallisierung und Kondensatoranordnung A method for forming a dielectric on a copper-containing metallization and capacitor assembly |
06/08/2005 | EP1538636A2 Radiation image conversion panel and manufacturing method thereof |
06/08/2005 | EP1538236A2 Substrate support |
06/08/2005 | EP1537763A1 Silicon oxynitride passivated rare earth activated thioaluminate phosphors for electroluminescent displays |
06/08/2005 | EP1537597A1 Sputtering cathode, production method and corresponding cathode |
06/08/2005 | EP1537057A1 Method for producing layers and layer systems and coated substrate |
06/08/2005 | EP1537056A1 Protective layer, method and arrangement for the production of protective layers |
06/08/2005 | EP1537055A1 Coated object |
06/08/2005 | EP1135792A4 Method for manufacturing carbon nanotubes as functional elements of mems devices |
06/08/2005 | EP1135541B1 Sliding member and manufacturing method therefor |
06/08/2005 | EP0842306B2 Improvements in and relating to methods for improving the sputter desposition of metal-sulphur coatings, e.g. molybdenum disulphide coatings and to improved coatings |
06/08/2005 | CN1625921A Heating in a vacuum atmosphere in the presence of a plasma |
06/08/2005 | CN1625312A 淀积掩模及其制造方法 Depositing a mask and its manufacturing method |
06/08/2005 | CN1625311A Mask, method for manufacturing thereof, method for manufacturing organic electroluminescent device, and organic electroluminescent device |
06/08/2005 | CN1624193A Surface treatment device |
06/08/2005 | CN1624192A Surface treatment method |
06/08/2005 | CN1624191A Vacuum film plating machine having orientation and self-control function |
06/08/2005 | CN1624190A Multi particle jewel adhesive method and equipment |
06/08/2005 | CN1624176A Ag-base alloy distribution electrode film, Ag-base alloy sputtering target for panel display |
06/08/2005 | CN1623688A Cleaning method, cleaning apparatus and electro optical device |
06/08/2005 | CN1205458C Base material for strain gauge and making method thereof |
06/08/2005 | CN1205353C Method and device for vacuum arc vapour deposition |
06/08/2005 | CN1205352C Semiconductor metalization manufacturing process |
06/07/2005 | US6903511 For plasma processes such as those used in the semiconductor manufacturing industry, for example, plasma sputter etching, pure chemical etching, ion energy driven etching, and ion inhibitor etching; plasma generator |
06/07/2005 | US6902826 High moment films with sub-monolayer nanolaminations retaining magnetic anisotropy after hard axis annealing |
06/07/2005 | US6902773 For thin-film diamond-like carbon mechanical/corrosion protection layer formed by low energy magnetron sputtering |
06/07/2005 | US6902682 Method and apparatus for electrostatically maintaining substrate flatness |
06/07/2005 | US6902656 Fabrication of microstructures with vacuum-sealed cavity |
06/07/2005 | US6902628 Immersing ceramics or metals having coatings in acidic, then in basic solutions to remove deposits and optionally blasting for smoothness |
06/07/2005 | US6902627 Cleaning chamber surfaces to recover metal-containing compounds |
06/07/2005 | US6902625 Multiple pocket electron beam source |
06/07/2005 | CA2118258C Packaging laminate possessing gas and light barrier properties, and a method of producing the same |
06/02/2005 | WO2005050764A1 Solid electrolyte, in particular for a thin layer electrochemical cell and production method |
06/02/2005 | WO2005050750A2 Manufacture of flat panel light emitting devices |
06/02/2005 | WO2005050696A1 Method and apparatus for reactive solid-gas plasma deposition |
06/02/2005 | WO2005049883A1 Take-up vacuum deposition method and take-up vacuum deposition apparatus |
06/02/2005 | WO2005049882A1 High purity hafnium, target and thin film comprising said high purity hafnium, and method for producing high purity hafnium |
06/02/2005 | WO2005049881A1 Metal vaporizing heating element and metal vaporizing method |
06/02/2005 | WO2005049699A2 Applications of a coating material |
06/02/2005 | WO2005049333A1 Optical recording medium and process for producing the same, spattering target, using process of optical recording medium, and optical recording apparatus |
06/02/2005 | WO2005048708A1 Antimicrobial composite material |
06/02/2005 | WO2005024612A3 Optical functional layers, particularly zinc oxide-sulfide layers having a variable dielectric response |
06/02/2005 | WO2005016839A3 Coated article with silicon oxynitride adjacent glass |
06/02/2005 | WO2003091472A8 Functional fiber sheet |
06/02/2005 | US20050118811 Aluminum alloy film for wiring and sputter target material for forming the film |
06/02/2005 | US20050118788 Mask, method for manufacturing thereof, method for manufacturing organic electroluminescent device, and organic electroluminescent device |
06/02/2005 | US20050118533 Planarization of substrate pits and scratches |
06/02/2005 | US20050118437 Ball limiting metallurgy, interconnection structure including the same, and method of forming an interconnection structure |
06/02/2005 | US20050118349 Process of making a multilayer structure vapor deposition a layer of metal on substrate and detaching |
06/02/2005 | US20050118339 Construction of a sputtering target by spraying |
06/02/2005 | US20050116637 Organic electroluminescence display panel and fabrication method thereof |
06/02/2005 | US20050116204 Growth of in-situ thin films by reactive evaporation |
06/02/2005 | US20050116156 Electron flood apparatus and ion implantation system |
06/02/2005 | US20050115830 Film forming apparatus |
06/02/2005 | US20050115829 Sputtering target for phase-change memory, film for phase change memory formed by using the target, and method for producing the target |
06/02/2005 | US20050115828 Non-stoichiometric niox ceramic target |
06/02/2005 | US20050115827 Multi-cathode ionized physical vapor deposition system |
06/02/2005 | US20050115823 Vacuum sputtering device; precisely controlled alloy stoichiometry during multilayer thin film deposition; reproducible production of magnetic memory devices; minimal latency |
06/02/2005 | US20050115822 Sputtering cathode and device and method for coating a substrate with several layers |
06/02/2005 | US20050115594 Cleaning method, cleaning apparatus and electro optical device |
06/02/2005 | US20050115503 Deposition mask and manufacturing method thereof |
06/02/2005 | US20050115045 Machining the surface to get gradient thickness, thinner center, uniformly distributing magnetic leakage flux across the sputter target; producing uniformly sputtered films on wafers; semiconductors |
06/02/2005 | DE202004020371U1 Gegenstand mit einem Schichtenverbund An article comprising a layer composite |
06/02/2005 | DE19952032B4 Verfahren und Vorrichtung zur Erzeugung planparalleler Plättchen Method and apparatus for generating a plane-parallel plate |
06/02/2005 | DE10392702T5 Ultraniedrige Au-Beladungen für bipolare Platten aus rostfreiem Stahl Ultra Low Au loadings for bipolar plates of stainless steel |
06/02/2005 | DE102004054092A1 Zündvorrichtung Primer |
06/02/2005 | DE102004051374A1 Galvanogeformtes Ionenimplantations-Strukturmaterial und Verfahren zur Herstellung des Strukturmaterials Electroformed ion implantation structural material and process for manufacturing the structural material |
06/02/2005 | CA2546230A1 Antimicrobial composite material |
06/02/2005 | CA2544878A1 Large area, uniformly low dislocation density gan substrate and process for making the same |
06/01/2005 | EP1536497A2 Method of manufacturing organic electroluminescent panel, manufacturing apparatus of organic electroluminescent panel, and organic electroluminescent panel |
06/01/2005 | EP1536483A1 Nonvolatile semiconductor storage device and manufacturing method |
06/01/2005 | EP1536456A1 Support structure |
06/01/2005 | EP1536455A1 Vacuum air lock arrangement |
06/01/2005 | EP1536454A1 Vacuum system |
06/01/2005 | EP1536039A1 Thermal barrier coating |
06/01/2005 | EP1536034A1 Sputtering target, sintered body, conductive film formed by using them, organic el device, and substrate used for the organic el device |
06/01/2005 | EP1536025A1 Process and device for coating or heat treating of bladed disks for aircraft gas turbines |
06/01/2005 | EP1535680A1 Coated cutting tool member |
06/01/2005 | EP1535302A2 Accessory member for dispensers of alkali metals |
06/01/2005 | EP1534873A2 Repairing defects on photomasks using a charged particle beam and topographical data from a scanning probe microscope |
06/01/2005 | EP1154965B1 Glazing panel |
06/01/2005 | CN1623008A Method for formation of titanium nitride film |
06/01/2005 | CN1623007A Sputtering targets, sputter reactors, methods of forming cast ingots, and methods of forming metallic articles |