| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 02/15/2005 | US6855994 Multiple-thickness gate oxide formed by oxygen implantation |
| 02/15/2005 | US6855974 Ferroelectric capacitor, process for production thereof and semiconductor device using the same |
| 02/15/2005 | US6855659 Manufacturing method of carbon nanotubes and laser irradiation target for the manufacture thereof |
| 02/15/2005 | US6855479 Phase-change optical recording media |
| 02/15/2005 | US6855413 Oxide coated cutting tool |
| 02/15/2005 | US6855405 Surface-coated carbide alloy tool |
| 02/15/2005 | US6855376 Overcoating metal layer; vapor deposition; low density, high strength, toughness, flexibility |
| 02/15/2005 | US6855369 Transparent laminate, method for producing the same, and plasma display panel |
| 02/15/2005 | US6855237 Pulsed carbon plasma apparatus |
| 02/15/2005 | US6855236 Components for vacuum deposition apparatus and vacuum deposition apparatus therewith, and target apparatus |
| 02/15/2005 | US6855232 Magnetic disk comprising a first carbon overcoat having a high SP3 content and a second carbon overcoat having a low SP3 content |
| 02/15/2005 | US6855212 Vapor depositing aluminum at a low temperature, forming titanium aluminide and alumina surface covering layer; protective inorganic coatings; aircraft heat exchanger |
| 02/10/2005 | WO2005013337A2 Rapid generation of nanoparticles from bulk solids at room temperature |
| 02/10/2005 | WO2005013290A1 Substrate with ito transparent conductive film and method for producing same |
| 02/10/2005 | WO2005012591A1 Sputtering target and method for production thereof |
| 02/10/2005 | US20050033418 Metallic implantable grafts and method of making same |
| 02/10/2005 | US20050031897 Multialyer; substrate overcoated with ceramic layer |
| 02/10/2005 | US20050031799 Heating, evaporation, vapor deposition a phosphors using an inert gas |
| 02/10/2005 | US20050031794 Ion implantation of turbine engine rotor component |
| 02/10/2005 | US20050031783 System for and method of manufacturing a large-area backplane by use of a small-area shadow mask |
| 02/10/2005 | US20050030882 Optical information recording medium and method of manufacturing thereof, manufacturing apparatus, recording/reproducing method, and recording/reproducing apparatus |
| 02/10/2005 | US20050030017 Superconducting magnetic field generation apparatus and sputter coating apparatus |
| 02/10/2005 | US20050029547 Lanthanide oxide / hafnium oxide dielectric layers |
| 02/10/2005 | US20050029513 Gas barrier substrate |
| 02/10/2005 | US20050029094 Tungsten sputtering target and method of manufacturing the target |
| 02/10/2005 | US20050029091 Apparatus and method for reactive sputtering deposition |
| 02/10/2005 | US20050029090 Vaporization; hot cathode system; injecting particles into substrate |
| 02/10/2005 | US20050029089 Method and apparatus for creating radial profiles on a substrate |
| 02/10/2005 | US20050029088 Sputter coating a substrate; channel for gas flow; generation plasma; forming metal oxide such as zinc oxide |
| 02/10/2005 | US20050028935 Device for fixing a gas showerhead or target plate to an electrode in plasma processing systems |
| 02/10/2005 | US20050028933 Device for treating objects by plasma deposition |
| 02/10/2005 | US20050028838 Cleaning tantalum-containing deposits from process chamber components |
| 02/10/2005 | DE202004016537U1 Flexible substrate support for vacuum deposition installations comprises individual paddles hanging via hanging devices |
| 02/10/2005 | DE19610012B4 Verfahren zur Stabilisierung eines Arbeitspunkts beim reaktiven Zerstäuben in einer Sauerstoff enthaltenden Atmosphäre A method of stabilizing an operating point during reactive sputtering in an atmosphere containing oxygen |
| 02/10/2005 | DE19600946B4 Verfahren zur Verbesserung der Qualität einer Titannitridschicht, die Kohlenstoff und Sauerstoff enthält Includes methods for improving the quality of a titanium nitride layer, the carbon and oxygen |
| 02/10/2005 | DE10329338A1 Sinterkörper aus ZnO Sintered body of ZnO |
| 02/10/2005 | DE10320384B3 Heating unit, for vacuum deposition assembly, has electrical heating wire embedded in non-conductive ceramic material with electrical contact through contact pins with shrouding for connection to a high tension supply |
| 02/10/2005 | DE102004031124A1 Reflektierender AG-Legierungsfilm für Reflektoren und Reflektor, der mit demselben versehen ist Reflective AG alloy film for reflectors and reflector, which is provided with the same |
| 02/10/2005 | CA2518349A1 Rapid generation of nanoparticles from bulk solids at room temperature |
| 02/09/2005 | EP1505690A1 Molded article located in the beam path of radar device, and method of manufacturing the same |
| 02/09/2005 | EP1505668A2 Method for manufacturing alkaline battery |
| 02/09/2005 | EP1505589A2 Optical information recording medium and method of manufacturing thereof, manufacturing apparatus, recording/reproducing method, and recording/reproducing apparatus |
| 02/09/2005 | EP1505322A1 Sliding member and production process thereof |
| 02/09/2005 | EP1505171A1 Ion implantation of turbine engine rotor component |
| 02/09/2005 | EP1505170A1 Box-shaped facing-targets sputtering apparatus and method for producing compound thin film |
| 02/09/2005 | EP1505169A1 Ion plating method |
| 02/09/2005 | EP1505168A2 Turbine element repair |
| 02/09/2005 | EP1505167A2 Evaporation source |
| 02/09/2005 | EP1504137A1 Method to make nanolaminate thermal barrier coatings |
| 02/09/2005 | EP1504136A2 Large area deposition in high vacuum with high thickness uniformity |
| 02/09/2005 | EP1503966A1 Components having crystalline coatings of the aluminum oxide/silicon oxide system and method for the production thereof |
| 02/09/2005 | CN1578850A Sputtering target for forming optical recording medium protection film and optical recording medium with protection film produced by the same |
| 02/09/2005 | CN1578849A Sputtering target and production method therefor |
| 02/09/2005 | CN1578848A Integrated circuit device and fabrication using metal-doped chalcogenide materials |
| 02/09/2005 | CN1578847A Device and method for vacuum film formation |
| 02/09/2005 | CN1578725A Forming thin films on substrates using a porous carrier |
| 02/09/2005 | CN1578701A Photocatalyst element, method and device for preparing the same |
| 02/09/2005 | CN1578563A Deposition mask, manufacturing method thereof, display unit, manufacturing method thereof, and electronic apparatus including display unit |
| 02/09/2005 | CN1578549A Manufacturing apparatus |
| 02/09/2005 | CN1578548A Film forming device, film forming method , organic el elements and producing method thereof |
| 02/09/2005 | CN1578547A Mask for vapour-deposition use and producing method thereof |
| 02/09/2005 | CN1577637A Silver alloy material, circuit substrate, electronic device, and method for manufacturing circuit substrate |
| 02/09/2005 | CN1577550A Reflective Ag alloy film for reflectors and reflector provided with the same |
| 02/09/2005 | CN1577547A Phase-change optical recording medium |
| 02/09/2005 | CN1576892A Reflective Ag alloy film for reflectors and reflector provided with the same |
| 02/09/2005 | CN1576389A Box-shaped facing-targets sputtering apparatus and method for producing compound thin film |
| 02/09/2005 | CN1576388A Vacuum evaporator |
| 02/09/2005 | CN1576387A High wear resistant hard film |
| 02/09/2005 | CN1576386A Shutter disk and blade for physical vapor deposition chamber |
| 02/09/2005 | CN1576385A Process and apparatus for the localized deposition of release agents |
| 02/09/2005 | CN1188725C Method for raising resolution of far-field optical microscope |
| 02/09/2005 | CN1188543C Cobalt carbon film material which is prepares by PLD process and possesses positive large magnetic cesistance effect |
| 02/09/2005 | CN1188542C Film coating device for roughly flat sheet shaped substrate |
| 02/09/2005 | CN1188541C Electric arc evaporimeter, method for driving electric arc evaporimeter and ion electroplating equipment |
| 02/08/2005 | US6853953 Method for characterizing the performance of an electrostatic chuck |
| 02/08/2005 | US6853142 Methods and apparatus for generating high-density plasma |
| 02/08/2005 | US6852652 Method of making relaxed silicon-germanium on glass via layer transfer |
| 02/08/2005 | US6852623 Method for manufacturing zinc oxide semiconductors |
| 02/08/2005 | US6852365 Silicon penetration device with increased fracture toughness and method of fabrication |
| 02/08/2005 | US6852362 For forming a thin film on a long film comprising aromatic polyamide in vacuum; film is not thermally damaged or broken by avoiding effects of heat and electrification of the film accompanied by the heating for melting |
| 02/08/2005 | US6852357 Depositing on the support a prismatic europium activated cesium bromide phosphor crystal layer on support in a gas phase; heating the crystal layer in an inert gas atmosphere or an inert gas atmosphere containing oxygen or hydrogen |
| 02/08/2005 | US6852356 Evaporation; glass substrate with shadow mask |
| 02/08/2005 | US6852202 Radial sputtering profile; semiconductor, integrated circuits |
| 02/08/2005 | US6852201 Sputtering target being plate made of metal used for building up layer, with other metals being present in form of plugs inserted in holes in plate, shape of free surfaces of plugs being selected so that sputtering rate can be varied |
| 02/08/2005 | US6851939 For forming deposition film of high quality on which adhesion force between a substrate and a metal film |
| 02/08/2005 | CA2271412C Photovoltaic device and its method of preparation |
| 02/08/2005 | CA2148669C Combined primer/basecoat island coating system |
| 02/03/2005 | WO2005011080A2 Apparatus for and method of cooling and positioning a translating substrate tape for use with a continuous vapor deposition process |
| 02/03/2005 | WO2005010953A2 Boride thin films on silicon |
| 02/03/2005 | WO2005010919A1 Sliding anode for a magnetron sputtering source |
| 02/03/2005 | WO2005010230A1 Delivery systems for efficient vaporization of precursor source material |
| 02/03/2005 | WO2005010228A2 High peak power plasma pulsed supply with arc handling |
| 02/03/2005 | WO2005010225A1 Solar selective surface coatings, materials for use therein and a method of producing same |
| 02/03/2005 | WO2004074532A8 Method of supplying sputtering targets to fabricators and other users |
| 02/03/2005 | WO2004073009A3 Plasma processing installation, influenced by a magnetic field, for processing a continuous material or a workpiece |
| 02/03/2005 | US20050026770 Low conductivity and sintering-resistant thermal barrier coatings |
| 02/03/2005 | US20050026433 Integrated circuit device and fabrication using metal-doped chalcogenide materials |
| 02/03/2005 | US20050026002 Concentration-modulated coatings |
| 02/03/2005 | US20050026000 Decorative coating selected from scandium or scandium-alloy nitride, carbonitride, oxynitride, oxycarbide; abrasion, wear, chemical, and corrosion resistance |
| 02/03/2005 | US20050025982 Soil-resistant coating for glass surfaces |