| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 05/11/2005 | CN1613920A Heat barrier coating materials |
| 05/11/2005 | CN1201416C Plate display and its protecting layer forming process |
| 05/11/2005 | CN1201397C Semiconductor storage having ruthenium pole and its mfg. method |
| 05/11/2005 | CN1201370C Apparatus for improving plasma distribution and performance in inductively coupled plasma |
| 05/11/2005 | CN1200693C Method for preparing coated drug particles and pharmaceutical formulations |
| 05/10/2005 | US6891269 Having barrier layer and metal growth promoting layer of titanium nitride containing oxygen at lower concentration than barrier layer jointly as ground layer; reduces incubation time for forming embedded copper interconnection layer |
| 05/10/2005 | US6891236 Semiconductor device and method of fabricating the same |
| 05/10/2005 | US6890862 Processes for vacuum treating workpieces, and corresponding process equipment |
| 05/10/2005 | US6890853 Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module |
| 05/10/2005 | US6890790 Co-sputter deposition of metal-doped chalcogenides |
| 05/10/2005 | US6890385 Multi-face forming mask device for vacuum deposition |
| 05/06/2005 | WO2005041324A2 In-line deposition processes for thin film battery fabrication |
| 05/06/2005 | WO2005041290A1 Nickel alloy sputtering target and nickel alloy thin film |
| 05/06/2005 | WO2005041172A1 System, method and collimator for oblique deposition |
| 05/06/2005 | WO2005040461A1 Method and system for selectively coating metal surfaces |
| 05/06/2005 | WO2005040452A1 Sluice system for a vacuum facility |
| 05/06/2005 | WO2005040451A1 Rectangular filtered vapor plasma source and method of controlling vapor plasma flow |
| 05/06/2005 | WO2005040450A2 Method and apparatus for making an organic thin film |
| 05/06/2005 | WO2005040449A1 System, method and aperture for oblique deposition |
| 05/06/2005 | WO2005040448A1 Coating of high wear resistance and high hardness excelling in resistance to high temperature oxidation and, provided therewith, tool or metal mold of gear cutting machine tool |
| 05/06/2005 | WO2005001156A3 Sputtering source for ionized physical vapor deposition of metals |
| 05/06/2005 | WO2004099461A3 Method of forming compressive alpha-tantalum on substrates and devices including same |
| 05/06/2005 | WO2004081251A3 Coated article including titanium oxycarbide and method of making same |
| 05/06/2005 | CA2541524A1 Method and apparatus for making an organic thin film |
| 05/05/2005 | US20050095809 Method of film-forming transparent electrode layer and device therefor |
| 05/05/2005 | US20050095479 Porous films and method of making the same |
| 05/05/2005 | US20050092608 Ion-implanted electroformed structural material and method of producing the structural material |
| 05/05/2005 | US20050092604 Method of manufacturing sputter targets with internal cooling channels |
| 05/05/2005 | US20050092603 Sputtering target transport box |
| 05/05/2005 | US20050092599 Producing high performance thin films using reactive sputter deposition; multilayer optical coatings |
| 05/05/2005 | US20050092598 Sputtering process with temperature control for salicide application |
| 05/05/2005 | US20050092597 Method of forming thin-film electrodes |
| 05/05/2005 | US20050092596 Producing metal vapor by magnetron sputtering using low electrical current then ionizing resulting gas using high electrical current |
| 05/05/2005 | US20050092455 Processes for producing a sputtering target from a silicon-based alloy, a sputtering target |
| 05/05/2005 | US20050092439 Low/high temperature substrate holder to reduce edge rolloff and backside damage |
| 05/05/2005 | US20050092254 PVD transfer robot short blade |
| 05/05/2005 | US20050092253 Tape-manufacturing system having extended operational capabilites |
| 05/05/2005 | US20050092251 Vacuum processing apparatus and method for producing an object to be processed |
| 05/05/2005 | US20050092239 Method and apparatus for measuring and monitoring coatings |
| 05/04/2005 | EP1528120A1 Hafnium silicide target and method for preparation thereof |
| 05/04/2005 | EP1528119A1 Aluminum-alloy sputtering target and reflective film |
| 05/04/2005 | EP1528118A2 Gas turbine component with a protective coating and process for its manufacture |
| 05/04/2005 | EP1527208A2 Method for coating the surface of metallic material, device for carrying out said method |
| 05/04/2005 | EP1527206A2 Method for the production of a ceramic fiber with a metal coating |
| 05/04/2005 | EP1527150A2 Method for vapor-depositing a substrate with a needle-shaped x-ray fluorescent material, and x-ray fluorescent material |
| 05/04/2005 | EP1415014B1 Method for making diamond-coated composite materials |
| 05/04/2005 | EP1404955B1 Internal combustion engine with catalytic coating |
| 05/04/2005 | CN1612243A Aluminum-alloy reflective film for optical information recording and target material and recording medium for its formation |
| 05/04/2005 | CN1611847A Erosion-proofing, device for air conditioner heat exchanger |
| 05/04/2005 | CN1611634A Treated matter conveying method for continuous surface treating apparatus |
| 05/04/2005 | CN1611633A Electrode stand structure for continuous surface treating apparatus |
| 05/04/2005 | CN1611632A Ion-implanted electroformed structural material and method of producing the structural material |
| 05/04/2005 | CN1611631A Spattering device |
| 05/04/2005 | CN1611630A Coal gas distributing structure for continuous surface treating apparatus |
| 05/04/2005 | CN1200134C Three-grid type ionic diffusion coating apparatus and process |
| 05/04/2005 | CN1200133C Device for forming vacuum coating |
| 05/04/2005 | CN1200132C Prepn of rich-rhenium high-smelting point alloy layer capable of stopping bidirectional diffusion of elements |
| 05/04/2005 | CN1199726C Nitrogen-containing titanium dioxide photocatalytic film and preparing method thereof |
| 05/03/2005 | US6887786 Method and apparatus for forming a barrier layer on a substrate |
| 05/03/2005 | US6887733 Method of fabricating electronic devices |
| 05/03/2005 | US6887595 Spallation resistance |
| 05/03/2005 | US6887589 A protective coatings for gas turbine engine components, inorganic coatings with dispersing ceramic particles, promoting heat resistance, high strength |
| 05/03/2005 | US6887588 Mixed rare earth oxide sindering inhibitor |
| 05/03/2005 | US6887587 A protective multilayer comprising a metallic alloy substrate coated with an inorganic coatings, which is embedded with a metallic layer, a yttria-zirconia thermal barrier layer; heat and oxidation resistance, use for turbine components |
| 05/03/2005 | US6887562 Surface coating of a carbide or a nitride |
| 05/03/2005 | US6887511 Pretreating a surface of a current collector by plasma or ion irradiation; depositing thin film of active material that is alloyable with lithium; forming a negative electrode from electrode; assembling negative electrode, a positive electrode |
| 05/03/2005 | US6887357 Sputtering system |
| 05/03/2005 | US6887356 Hollow cathode target and methods of making same |
| 05/03/2005 | US6886548 Internal combustion engine |
| 05/03/2005 | US6886521 Sliding structure for automotive engine |
| 05/03/2005 | US6886272 Vacuum processing apparatus and operating method therefor |
| 05/03/2005 | US6886244 Segmented pallet for disk-shaped substrate electrical biassing and apparatus comprising same |
| 04/28/2005 | WO2005038079A1 Pvd component and coil refurbishing methods |
| 04/28/2005 | WO2005038078A1 Sputtering target material |
| 04/28/2005 | WO2005038077A2 Modular device for coating surfaces |
| 04/28/2005 | WO2005038075A1 Layer with intra-crystalline inclusions |
| 04/28/2005 | WO2005038072A1 Method for coating a component and component |
| 04/28/2005 | WO2005037566A1 Phase transition type optical recording medium, process for producing the same, sputtering target, method of using optical recording medium and optical recording apparatus |
| 04/28/2005 | US20050089727 Nitride of titanium and yttrium formed from physical vapor deposition; durability, heat resistance, strength |
| 04/28/2005 | US20050089699 Cleaning and refurbishing chamber components having metal coatings |
| 04/28/2005 | US20050089439 Silver alloy for reflective film of optical recording medium |
| 04/28/2005 | US20050087141 Production method and production device for thin film |
| 04/28/2005 | US20050087131 Method and apparatus for depositing material |
| 04/28/2005 | US20050086946 Specimen cooling system of focused ion beam apparatus |
| 04/27/2005 | EP1526111A1 Nano-multilayered structures, components and associated methods of manufacture |
| 04/27/2005 | EP1525607A1 Method and device for alternating deposition of two materials by cathodic sputtering |
| 04/27/2005 | EP1525601A2 Methods and apparatus for monitoring plasma parameters in plasma doping systems |
| 04/27/2005 | EP1525335A1 Installation for the vacuum treatment of substrates |
| 04/27/2005 | EP1525334A1 Method and array for processing carrier materials by means of heavy ion radiation and subsequent etching |
| 04/27/2005 | EP1525333A2 Method and apparatus for plasma implantation without deposition of a layer of byproduct |
| 04/27/2005 | CN2695449Y Vacuum radiation type heater |
| 04/27/2005 | CN1611094A Electronic apparatus and audio-frequency signal output method for electronic apparatus |
| 04/27/2005 | CN1610984A Method for producing a plasma-polymerized polymer electrolyte membrane and a polyazol membrane coated by plasma-polymerization |
| 04/27/2005 | CN1610767A Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor |
| 04/27/2005 | CN1610766A Unitary removable shield assembly |
| 04/27/2005 | CN1610765A Improved method for coating a support with a material |
| 04/27/2005 | CN1610764A Permanent adherence of the back end of a wafer to an electrical component or sub-assembly |
| 04/27/2005 | CN1610729A Method for the production of plane-parallel platelets by using organic separating agents |
| 04/27/2005 | CN1610581A Method and apparatus for producing photocatalyst |
| 04/27/2005 | CN1609447A In situ getter pump system and method |