Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
04/2005
04/07/2005US20050072361 Multi-layered radiant thermal evaporator and method of use
04/07/2005US20050072359 Mask frame assembly for depositing a thin layer of an organic electroluminescent device and method for depositing a thin layer using the same
04/07/2005US20050072356 Easily loaded and unloaded getter device for reducing evacuation time and contamination in a vacuum chamber and method for use of same
04/07/2005US20050072266 Planetary system workpiece support and method for surface treatment of workpieces
04/07/2005DE10341681A1 Optische Funktionsschichten, insbesondere Zinkoxid-Sulfid-Schichten mit variabler dielektrischer Response Optical functional layers, in particular zinc sulfide layers with variable dielectric response
04/07/2005DE102004043430A1 Dämpfender Phasenverschiebungsmaskenrohling und Photomaske Steaming phase shift mask blank and photomask
04/07/2005CA2542819A1 Metal thin film chip production method and metal thin film chip production device
04/07/2005CA2539550A1 Medical device with markers for magnetic resonance visibility
04/06/2005EP1521286A1 Alkali metal generating agent, alkali metal generator, photoelectric surface, secondary electron emission surface, electron tube, method for manufacturing photoelectric surface, method for manufacturing secondary electron emission surface, and method for manufacturing electron tube
04/06/2005EP1520914A1 Installation for coating work pieces using electron beam
04/06/2005EP1520913A1 Process for obtaining thermostable microlaminated materials
04/06/2005EP1520290A2 Device for coating substrates by physical vapour deposition, using a hollow cathode discharge method
04/06/2005EP1294640A4 Method and apparatus for production of high purity silicon
04/06/2005CN2690417Y Plane ion source increased deposit coating machine
04/06/2005CN1603948A Attenuating phase shift mask blank and photomask
04/06/2005CN1603461A Computer control device for plating clamp
04/06/2005CN1603460A Plasma injection method and apparatus for insulation material spare parts
04/06/2005CN1603459A Sputtering and depositing coating method for elongated tube inside surface
04/06/2005CN1603458A Magnetron sputtering vacuum plating silver process for soft-magnetic ferrite core
04/06/2005CN1603457A Method for preparing gamma-LiAlO2 single crystal film covered substrate by radio frequency magnetron sputtering method
04/06/2005CN1603456A Magnetron sputtering device
04/06/2005CN1603455A Thin-film deposition system
04/06/2005CN1603454A Method for preparing spin valve capable of improving giant magnetoresistance effect
04/06/2005CN1603453A Multiple arc plasma plating process
04/06/2005CN1603267A Coated glass with ultraviolet ray cutting-off function and preparation method thereof
04/06/2005CN1603231A Method for controlling growth density of carbon nanometer tube
04/06/2005CN1196169C Means for controlling target erosion and sputtering in magnetron
04/06/2005CN1195887C Modification of surfaces in order to increase surface tension
04/06/2005CN1195886C Sputtering target, transparent conductive oxide, and method for preparing sputtering target
04/06/2005CN1195885C Method for making zinc metallized film for film capacitors exhibiting improved adhesion and thereby having excellent anti-oxidation characteristics
04/05/2005US6876414 Semi-transmissible reflector, semi-transmission type polarizer and liquid-crystal display device using the sames
04/05/2005US6875542 Joining substrates by anode coupling; positioning marking; forming penetration aperture
04/05/2005US6875529 Stabilized zirconia ceramic coating; reduced heat conductivity
04/05/2005US6875488 Optical information recording medium
04/05/2005US6875478 Apparatus and process for film deposition
04/05/2005US6875326 Plasma processing apparatus with real-time particle filter
04/05/2005US6875325 Sputtering target producing few particles
04/05/2005US6875324 Sputtering target material
04/05/2005US6875321 Auxiliary magnet array in conjunction with magnetron sputtering
04/05/2005US6875319 Cathode pressurized spraying ; titanium oxide crystal structure; antireflectivity
04/05/2005US6875318 Method for leveling and coating a substrate and an article formed thereby
04/05/2005US6875306 Vacuum processing device
03/2005
03/31/2005WO2005029601A2 Multilayer coating package on flexible substrates for electro-optical devices
03/31/2005WO2005029585A1 Phase-change film for semiconductor non-volatile memory and sputtering target for forming such phase-change film
03/31/2005WO2005029512A1 Superconductor and process for producing the same
03/31/2005WO2005028700A1 Apparatus for low temperature semiconductor fabrication
03/31/2005WO2005028699A1 Apparatus for low temperature semiconductor fabrication
03/31/2005WO2005028698A1 Apparatus and method for emitting cesium vapor
03/31/2005WO2005028697A1 Magnetic mirror plasma source and method using same
03/31/2005WO2005028696A1 Production method for thin film and production method for thin film wire and pulse laser vapor deposition device
03/31/2005WO2005028695A1 A method and apparatus for the production of metal coated steel products
03/31/2005WO2005028390A1 Method for producing substrates comprising temperature-resistant protective coatings
03/31/2005WO2005028176A2 Process for forming a patterned thin film structure for in-mold decoration
03/31/2005WO2004099460A3 Method for producing galvanically enhanced moulded elements optionally lighted by transparency,made of thermoplastic,thermosetting plastic,elastomer or silicone, as well as moulded elements optionally lighted by transparency made of thermoplastic,thermosetting plastic,elastomer or silicone with galvanically enhanced surface
03/31/2005WO2004086844A3 Multilayer substrate implanted with a low dose
03/31/2005WO2004032189A3 Manufacturing apparatus and method for large-scale production of thin-film solar cells
03/31/2005US20050069650 Nickel aluminide coating and coating systems formed therewith
03/31/2005US20050067745 Method and apparatus for deposition & formation of metal silicides
03/31/2005US20050067469 Method for centering a sputter target onto a backing plate and the assembly thereof
03/31/2005US20050067389 Target manipulation for pulsed laser deposition
03/31/2005US20050067273 Chrome coating composition
03/31/2005US20050067272 System method and collimator for oblique deposition
03/31/2005US20050066901 Vacuum deposition method and vacuum deposition device
03/31/2005US20050066900 Apparatus for forming the thin film on an organic light-emitting doide component
03/31/2005US20050066899 Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor
03/31/2005US20050066897 System, method and aperture for oblique deposition
03/31/2005DE10359802B3 Piston ring for e.g. internal combustion engine, has vapor-deposited layer covering part of running surface, which leaves sharp edges after subsequent removal
03/31/2005DE10340703A1 Device for vacuum coating substrates used in the production of optoelectronic components comprises a falling and ejecting path for the substrates, and a unit for vacuum coating the substrates during falling and ejecting along the path
03/31/2005CA2510635A1 Superconductor and method of producing the same
03/30/2005EP1518941A1 A method and apparatus for the production of metal coated steel products
03/30/2005EP1518940A1 Thin film-forming apparatus
03/30/2005EP1518824A1 sp3 BOND BORON NITRIDE EMITTING LIGHT IN ULTRAVIOLET REGION, ITS PRODUCING METHOD, AND FUNCTIONAL MATERIAL USING SAME
03/30/2005EP1518599A2 Non-evaporable getter multilayer deposits obtained by cathodic deposition and process for their manufacturing
03/30/2005EP1518275A2 Method for producing a component comprising a conductor structure that is suitable for use at high frequencies and corresponding component
03/30/2005EP1518145A2 Display cell, in particular liquid crystal, or photovoltaic cell comprising means for connection to an electronic control circuit
03/30/2005EP1518006A1 Target support assembly
03/30/2005EP1518005A1 Material evaporation chamber with differential vacuum pumping
03/30/2005EP1517866A2 Method for production of a glazed piece provided with a multi-layer coating
03/30/2005EP1088115A4 Metal article with fine uniform structures and textures and process of making same
03/30/2005CN2688723Y Depositing ring and supporter therewith
03/30/2005CN2688722Y Scanning focusing magnetic controlling sputtering target
03/30/2005CN1601607A Method for depositing a thin film adhesion layer
03/30/2005CN1600896A Method for preparing zinc oxide film enhanced by ultraviolet emission
03/30/2005CN1600895A Method for preparing transparent conducting film made from multi-element oxides with antimony being doped into
03/30/2005CN1600894A Installation for coating work pieces using electron beam
03/30/2005CN1600893A Vacuum coating technique for plastic wheel hub of baby carriage
03/30/2005CN1195392C Method for manufacturing electric field luminous display device
03/30/2005CN1195098C Manufacturing method for producing target material with high resistance used in metal film resistor with high stability by using sputtering technique
03/30/2005CN1195097C Process for preparing vanadium oxide film
03/30/2005CN1195096C Nano composite film containing stibium and its preparation method
03/30/2005CN1195095C Method for manufacturing electric field luminous display device
03/29/2005US6872995 Ferroelectric capacitor, method of manufacturing same, and semiconductor memory device
03/29/2005US6872473 Panel display device and method for forming protective layer within the same
03/29/2005US6872452 Dielectric film having high refractive index and method for preparation thereof
03/29/2005US6872289 Forming plasma in space facing substrate surface; imposing pulse voltage of lower frequency than the oscillation frequency of plasma ions on substrate causing thin film to be produced on substrate
03/29/2005US6872285 System for depositing a film
03/29/2005US6872284 Target and method of optimizing target profile
03/29/2005US6872260 Deposited-film forming apparatus
03/29/2005CA2112191C Thermal barriers, materials and development process
03/24/2005WO2005026408A2 Methods of treating components of a deposition apparatus to form particle traps, and such components having particle traps thereon