Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
01/2005
01/27/2005US20050016834 Method of forming film by sputtering, optical member, and sputtering apparatus
01/27/2005US20050016833 Metal target backing; sputtering
01/27/2005US20050016832 Deposits metals using magnetron sputtering; sponge-like morphology; controlling temperature, pressure
01/27/2005US20050016463 Evaporative deposition method, evaporative deposition head, method for forming pattern of deposition material, and evaporative deposition material disk
01/27/2005US20050016462 charging a lithium ion secondary battery uses a lithium ion secondary battery comprising a positive electrode including a mixed metal oxide containing at least Li, Mn, and Ni as metal components as a positive electrode active material, a negative electrode, and a nonaqueous electrolyte of lithium salt
01/27/2005US20050016461 Thermal physical vapor deposition source using pellets of organic material for making oled displays
01/27/2005US20050016454 Dual substrate loadlock process equipment
01/27/2005US20050016328 Method of manufacturing silver flake
01/27/2005DE10392223T5 Linien- oder Flächen-Verdampfer zum Steuern des Schichtdickenprofils Line or area evaporator for controlling the layer thickness profile
01/27/2005DE10331608A1 Verfahren zum Beschichten und/oder partiellen Umspritzen von flexiblem langgestrecktem Gut A method for coating and / or partial encapsulation of flexible elongate
01/27/2005DE10327336A1 Legierung und deren Verwendung Alloy and the use thereof
01/27/2005DE102004031161A1 Target arrangement for sputtering processes comprises a cylindrical support element and a hollow cylindrical target made from target material
01/27/2005CA2527870A1 Ion beam-assisted high-temperature superconductor (hts) deposition for thick film tape
01/26/2005EP1501131A1 Stacked photovoltaic element and production method thereof
01/26/2005EP1500717A1 High wear resistant hard film
01/26/2005EP1500716A2 Deposition mask, manufacturing method and use thereof
01/26/2005EP1499567A1 Methods of changing the visible light transmittance of coated articles and coated articles made thereby
01/26/2005CN1571166A Semiconductor device and method of manufacturing the same
01/26/2005CN1571124A Method for forming metal oxide on surface of substrate
01/26/2005CN1570201A UV waveband optic film plating method using baffle
01/26/2005CN1570200A Material surface modification method using ion infusion or infusion and deposition
01/26/2005CN1570199A Self glow plasma based ion infusion or infusion and deposition device
01/26/2005CN1570198A Magnetron sputtering target production method and mould used by the method
01/26/2005CN1570197A White gem poly arc ion cladding
01/26/2005CN1570196A Surface antibiotic, wearable stainless steel products and its production method
01/26/2005CN1569713A Double silver low-emissivity coated glass based on composite dielectric layer
01/26/2005CN1186772C Optical information recording media, reflective layer or semi-transparent reflective layer, and sputtering target therefor
01/26/2005CN1186476C Device and method for detecting and preventing arcing in RF plasma systems
01/26/2005CN1186276C Method of preventing darkening (blackening) of aluminium cover in water bath sterilization
01/25/2005US6846517 Coating device and method
01/25/2005US6846509 Room temperature luminescent Erbium Oxide thin films for photonics
01/20/2005WO2005006351A2 Apparatus for and method of continuous hts tape buffer layer deposition using large scale ion beam assisted deposition
01/20/2005WO2005006350A2 Apparatus for consecutive deposition of high-temperature superconducting (hts) buffer layers
01/20/2005WO2005005684A1 Work piece processing by pulsed electric discharges in solid-gas plasma
01/20/2005WO2005005683A1 Sputtering target and optical recording medium
01/20/2005WO2005005682A1 Rotating tubular sputter target assembly
01/20/2005WO2005005333A2 Heat treatable coated article with dual layer overcoat
01/20/2005WO2004101937A3 Coated article with niobium zirconium inclusive layer(s) and method of making same
01/20/2005WO2004095513A3 A method for plasma deposition of a substrate barrier layer
01/20/2005WO2004087985A3 Substrates coated with mixtures of titanium and aluminum materials, methods for making the substrates, and cathode targets of titanium and aluminum metal
01/20/2005WO2004070733A3 Conductive flakes by sputtering and vapor deposition
01/20/2005WO2004064114A3 Powder metallurgy sputtering targets and methods of producing same
01/20/2005WO2003101697A3 High-tensile, plastically deformable moulded body consisting of titanium alloys
01/20/2005WO2003100859A3 Method for producing a component comprising a conductor structure that is suitable for use at high frequencies and corresponding component
01/20/2005US20050014350 Method for producing patterned thin films
01/20/2005US20050012441 Channel spark source for generating a stable focussed electron beam
01/20/2005US20050011758 Magnetic control oscillation-scanning sputter
01/20/2005US20050011757 Sputtering apparatus
01/20/2005US20050011756 Sputtering system
01/20/2005US20050011749 bonding target backing plate via resistance heating/welding to bond assembly members (mating projections and grooves); fail-safe
01/20/2005US20050011748 Nanostructure; ceramic overcoating on substrate; pulsed plasma; matrix phase embedded with material
01/20/2005US20050011747 Apparatus for consecutive deposition of high-temperature superconducting (HTS) buffer layers
01/20/2005US20050011746 Target for sputtering and a method for manufacturing a magnetic recording medium using the target
01/20/2005US20050011593 Process for a beta-phase nickel aluminide overlay coating
01/20/2005US20050011446 Method and apparatus for removing external components from a process chamber without compromising process vacuum
01/20/2005US20050011443 Organic thin film manufacturing method and manufacturing apparatus
01/20/2005US20050011308 Fe-Co-B alloy target and its production method, and soft magnetic film produced by using such target, and magnetic recording medium and TMR device
01/19/2005EP1498910A2 Method for coating and/or partial overmoulding of flexible long products.
01/19/2005EP1498889A1 Method of delivering substrates to a film forming device for disk-like substrates, substrate delivering mechanism and mask used in such method, and disk-like recording medium producing method using such method
01/19/2005EP1498509A1 Process for deposition of nickel aluminide
01/19/2005EP1497897A1 Photochromic resistant materials for optical devices in plasma environments
01/19/2005EP1497882A2 Method for producing a plasma-polymerized polymer electrolyte membrane and a polyazol membrane coated by plasma-polymerization
01/19/2005EP1497699A1 Attenuated embedded phase shift photomask blanks
01/19/2005EP1497692A2 Process for forming a patterned thin film conductive structure on a substrate
01/19/2005EP1497568A2 Full complement antifriction bearing
01/19/2005EP1497479A1 Methods and apparatus for deposition of thin films
01/19/2005EP1497478A2 Device for targeted application of deposition material to a substrate
01/19/2005EP1497477A1 Functional fiber sheet
01/19/2005EP1497476A1 Process of masking cooling holes of a gas turbine component
01/19/2005EP1497235A2 Method of making coated articles having an oxygen barrier coating and coated articles made thereby
01/19/2005EP1419282B1 Method for producing a fluorescent material layer
01/19/2005EP1153155B1 Planetary system workpiece support and method for surface treatment of workpieces
01/19/2005EP1036208B1 Carbon coatings, method and apparatus for applying them, and articles bearing such coatings
01/19/2005EP1010194B1 Vacuum sputtering apparatus
01/19/2005EP0995220B1 Target cathode assembly
01/19/2005CN2672081Y Plastic film aluminium platnig vacuum chamber
01/19/2005CN1568538A Capping layer for improved silicide formation in narrow semiconductor structures
01/19/2005CN1568378A Hafnium silicide target and manufacturing method for preparation thereof
01/19/2005CN1568377A Process and apparatus for organic vapor jet deposition
01/19/2005CN1568376A Method of depositing a material layer
01/19/2005CN1568107A Method for designing a thermo-physical vapor deposition system
01/19/2005CN1567546A Physical vapor deposition apparatus
01/19/2005CN1567527A A method for repairing film electric crystal circuit on display panel
01/19/2005CN1567450A Optical storage media and manufacturing method for reflecting layer of it
01/19/2005CN1566398A Continuous vacuum decoration method for plating articles
01/19/2005CN1566397A Process for preparing antibacterial stainless steel using ion-implantation method
01/19/2005CN1185529C Method for manufacturing indium-tin oxide film
01/19/2005CN1185364C Process for treating surface of hot die steel by rare-earth plasma
01/19/2005CN1185363C Metal ceramic film and method and apparatus for manufacturing the same
01/19/2005CN1185362C Method for producing decorative laminated sheet
01/18/2005US6844119 Alternately laminating, on a transparent substrate, thin layers made of tintanium nitride and thin layers made of silicon nitride to form multilayered semi-transmission film, heating the film at 300 degree C. or higher
01/18/2005US6844092 Optically functional element and production method and application therefor
01/18/2005US6844069 Tool with tool body and protective layer system
01/18/2005US6844031 Method & apparatus for multilayer deposition utilizing a common ion beam source
01/18/2005US6844023 Alumina insulation for coating implantable components and other microminiature devices
01/18/2005US6843975 Oxide sintered body and manufacturing method thereof
01/18/2005US6843898 High temperature superconducting composite conductors
01/18/2005US6843896 Electrolysis and ion exchange followed by melting to produce a pure metal
01/18/2005US6843892 Particular utility in automated manufacture of magnetic or magneto-optical recording media comprising a multilayer stack of thin film layers on insulative substrate, e.g., disk-shaped substrate, by means of vapor deposition, sputtering
01/18/2005US6843891 Apparatus for sputter deposition