Patents
Sitemap › C23 - Coating metallic material; Coating material with metallic material; Chemical surface treatment; Diffusion treatment of metallic material; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general; Inhibiting corrosion of metallic material or incrustation in general › C23C - Coating metallic material; Coating material with metallic material; Surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general › C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
08/2005
08/11/2005CA2553693A1 Radiopaque coating for biomedical devices
08/10/2005EP1562224A1 Gas driven planetary rotation apparatus and methods of using the same
08/10/2005EP1561839A1 Process of manufacturing a layered structure comprising a columnar ceramic layer
08/10/2005EP1561838A1 Energy and medium supply for a coating device that consists of several chambers
08/10/2005EP1561837A1 Strip coating installation with a vacuum chamber and a coating cylinder
08/10/2005EP1561836A1 Method for making a target.
08/10/2005EP1561572A1 Multilayer sheet and packaging material for food, medicine, and tool for food, medicen, and tool
08/10/2005EP1560944A1 Apparatus for vacuum treating two dimensionally extended substrates and method for manufacturing such substrates
08/10/2005EP1560943A2 High deposition rate sputtering
08/10/2005EP1092050B1 Contoured sputtering target
08/10/2005EP0948663B1 Cathode pulverisation targets in aluminium alloy
08/10/2005CN2716283Y High efficiency type vacuum coating rotary support
08/10/2005CN2716282Y Magnetically controlled sputtering device for preparing low-radiation film glass
08/10/2005CN2716281Y Magnetically controlled sputtering device for preparing film glass with surge chamber
08/10/2005CN2716280Y Double-side once-film-forming vacuum ion sputtering machine
08/10/2005CN1653613A Interconnect for a semiconductor device
08/10/2005CN1653206A System and apparatus for control of sputter deposition process
08/10/2005CN1653115A Polyimide film and method for production thereof, and polyimide/metal laminate using polyimide
08/10/2005CN1652998A Method for the manufacture of a metal oxide or nitride powder or a semiconductor oxide or nitride powder, an oxide or nitride powder made thereby, and solids and uses thereof
08/10/2005CN1652650A Vapor deposition mask and organic el display device manufacturing method
08/10/2005CN1651938A Method for producing optical element with antireflection film
08/10/2005CN1651601A Strip coating installation with a vacuum chamber and a coating cylinder
08/10/2005CN1651600A Physical gaseous phase deposition technology and its equipment
08/10/2005CN1651599A Component for vacuum film deposition system, vacuum film deposition system using the same and target device
08/10/2005CN1651598A Method of vacuum depositing an EMI (electromagnetic interference) layer using a vacuum deposition jig for a mobile phone outer case and jig
08/10/2005CN1651597A Strengthening treatment method of cold forging mould surface hard covering film
08/10/2005CN1651596A Hard laminated film, method of manufacturing the same and film-forming device
08/10/2005CN1651267A Ornament, its mfg.method and timepiece
08/10/2005CN1651266A Plastics ornament, its mfg. method and timepiece
08/10/2005CN1214697C Mask and its mfg. method, electroluminance device and its mfg. method
08/10/2005CN1214472C Device and method for mfg. GaN base
08/10/2005CN1214450C Manufacturing method of semiconductor device
08/10/2005CN1214379C Metal alloy used for reflection or semi-reflection layer of optical memory media
08/10/2005CN1214131C Dual chamber ion beam sputter deposition system
08/10/2005CN1214130C Hydrogenating of antireflection coating
08/10/2005CN1214129C Parts for vacuum film-forming device and vacuum film-forming device using the same and board device thereof
08/09/2005US6927163 Method and apparatus for manufacturing a barrier layer of semiconductor device
08/09/2005US6927148 Ion implantation method and method for manufacturing SOI wafer
08/09/2005US6927003 Automatic maintenance of radiation transparent deformations on attenuated phase shifting masks(PSM), using computer programs for analysis, then plugging with carbon
08/09/2005US6926925 Corrosion resistance; protective coatings; vapor deposition, vapor diffusion; then separation
08/09/2005US6926840 Flexible frame for mounting a deposition mask
08/09/2005US6926811 Arc-coating process with rotating cathodes
08/09/2005US6926798 Apparatus for supercritical processing of a workpiece
08/09/2005US6926390 Method of forming mixed-phase compressive tantalum thin films using nitrogen residual gas, thin films and fluid ejection devices including same
08/09/2005CA2355417C Composite substrate preparing method, composite substrate, and el device
08/04/2005WO2005071135A2 Tantalum and other metals with (110) orientation
08/04/2005WO2005071134A1 Method and apparatus for monitoring optical characteristics of thin films in a deposition process
08/04/2005WO2005071133A2 Vacuum deposition method and sealed-type evaporation source apparatus for vacuum deposition
08/04/2005WO2005071132A1 Protective layer for an aluminium-containing alloy for using at high temperatures, and method for producing one such protective layer
08/04/2005WO2005071131A2 Transparent and conductive oxide layer, production and use thereof in a thin film solar cell
08/04/2005WO2005071130A1 Method and device for handling a dielectric substrate and a dielectric mask
08/04/2005WO2005070665A1 Gas barrier film and gas barrier laminate
08/04/2005WO2005070151A2 Electromagnetic energy distributions for electromagnetically induced mechanical cutting
08/04/2005WO2005070107A2 High throughput physical vapor deposition system for material combinatorial studies
08/04/2005WO2005061752A3 Method for patterning films
08/04/2005WO2005019495A3 Control system for a sputtering system
08/04/2005US20050170971 P-type zinc oxide semiconductor film and process for preparation thereof
08/04/2005US20050170736 OLED device
08/04/2005US20050170539 Substrate for semiconductor light-emitting element, semiconductor light-emitting element and semiconductor light-emitting element fabrication method
08/04/2005US20050170534 Ferroelectric capacitor, method of manufacturing same, and semiconductor memory device
08/04/2005US20050170263 Mask blank manufacturing method and sputtering target for manufacturing the same
08/04/2005US20050170219 Alternating multilayers of titanium nitirde and aluminum titanium nitride
08/04/2005US20050170198 Includes an intermediate layer that contains at least one element selected from Mo, Cr, Ni, Si, Fe, Al and an oxygen and water barrier film; can enhance the bonding strength between a conductive layer and a polyimide film at high temperatures
08/04/2005US20050170162 Hard laminated film, method of manufacturing the same and film-forming device
08/04/2005US20050170105 Method for forming compressive alpha-tantalum on substrates and devices including same
08/04/2005US20050170075 Mask with openings placed below a display substrate; a plane evaporation source placed below the mask; evaporating material cells aligned to openings of the mask; deposits thin films on predetermined regions; control, increase evaporation rate; avoid shadow effect;uniformity in thickness, distribution
08/04/2005US20050167281 Production method of suspension board with circuit
08/04/2005US20050167264 sputter coating system of a coating station and a monitoring station;a sputtering target with a detector positioned for measuring the beams reflected during thin film is deposition
08/04/2005US20050167262 Passive bipolar arc control system and method
08/04/2005US20050167261 Treatment process for improving the mechanical, catalytic, chemical, and biological activity of surfaces and articles treated therewith
08/04/2005US20050167015 Hollow cathode target and methods of making same
08/04/2005US20050166850 Combinatorial synthesis of material chips
08/04/2005US20050166846 Large area deposition in high vacuum with high thickness uniformity
08/04/2005US20050166842 Vapor deposition mask and organic EL display device manufacturing method
08/04/2005DE10337463B4 Verfahren zur Herstellung von verschleißresistenten Werkzeugen für die mechanische Behandlung von Zellstofffasern und dessen Verwendung A process for the production of wear-resistant tools for the treatment of mechanical pulp fibers and the use thereof
08/04/2005DE102004001644A1 Halbzeug aus Verbundwerkstoff und Verfahren zur Herstellung eines Halbzeugs aus Verbundwerkstoff Semi-finished products made of composite material and method for producing a semi-finished product made of composite material
08/04/2005DE102004001575A1 Verfahren zur Herstellung von Hohlschaufeln sowie eines Rotors mit Hohlschaufeln A method of manufacturing hollow blades and a rotor with hollow blades
08/04/2005DE102004001392A1 Verschleißschutzbeschichtung und Bauteil mit einer Verschleißschutzbeschichtung Wear-resistant coating and component with a wear-resistant coating
08/04/2005DE10006426B4 Gleitelement Slider
08/04/2005CA2553834A1 Gas-phase purification of biomolecules by ion mobility for patterning microarrays and protein crystal growth
08/04/2005CA2553125A1 Electromagnetic energy distributions for electromagnetically induced mechanical cutting
08/03/2005EP1560468A1 Source for thermal physical vapor deposition of organic electroluminescent layers
08/03/2005EP1560467A1 Source for thermal physical vapor deposition of organic electroluminescent layers
08/03/2005EP1560253A2 Apparatus for coating a substrate, the apparatus comprising a gettering device
08/03/2005EP1559811A1 Thermal barrier coatings with protective outer layer for improved impact and erosion resistance
08/03/2005EP1559809A2 Apparatus and method for coating substrate
08/03/2005EP1559128A1 Methods and apparatus for generating high-density plasma
08/03/2005EP1558791A2 Homogenous solid solution alloys for sputter-deposited thin films
08/03/2005EP1558782A2 Device and method for the evaporative deposition of a high-temperature superconductor in a vacuum with continuous material introduction
08/03/2005EP1370371B1 Vacuum deposition of cationic polymer systems
08/03/2005EP1177330B1 Thermal barrier coating
08/03/2005CN2714582Y Automation embedded type internal reflux apparatus
08/03/2005CN2714581Y External heating type high temperature electric heating furnace for high vacuum film sediment chamber
08/03/2005CN1650416A Substrate processing device and substrate processing method
08/03/2005CN1650409A Method of making transistors
08/03/2005CN1649794A Process for producing oxide superconductive thin-film
08/03/2005CN1649473A Production method of suspension board with circuit
08/03/2005CN1648286A TiN-TiAIN series hard nano structure multilayer coating layer
08/03/2005CN1648281A Arc coating deposition method and apparatus
08/03/2005CN1648280A Improved target having modified surface texture
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