Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
07/2005
07/21/2005US20050155677 Tantalum and other metals with (110) orientation
07/21/2005US20050155675 Grown as a non granular continuous film on a substrate at less than four hundred degrees centigrade; facing targets type sputtering process; argon gas pressure of five milli torr or less
07/21/2005US20050155632 Method for cleaning chamber of deposition apparatus for organic EL device production
07/21/2005US20050155456 Sputter targets and methods of manufacturing same to reduce particulate emission during sputtering
07/21/2005DE10360106A1 Handling a dielectric substrate and electrically conducting mask, comprises applying the mask to the substrate and holding it in place electrostatically or magnetically
07/21/2005DE10358684A1 Tool for the hot deformation of glass comprises a silicon substrate having a surface with a metallic coating made from a precious metal or a precious metal alloy and a substrate carrier with a bearing surface to support the substrate
07/21/2005DE10358275A1 Vorrichtung und Verfahren zum Reinigen wenigstens einer Prozesskammer zum Beschichten wenigstens eines Substrats Device and method for cleaning at least a process chamber for coating at least one substrate
07/21/2005DE10356679A1 Verfahren und Vorrichtung zur Beschichtung oder Wärmebehandlung von BLISK-Scheiben für Fluggasturbinen Method and apparatus for coating or heat treatment of the blisk discs for aircraft gas turbines
07/21/2005DE10311466B4 Verfahren zum reaktiven Magnetron-Sputtern A method for reactive magnetron sputtering
07/21/2005DE102004002222B3 Thin plates of dielectric and/or semiconductor material are formed by thermally vaporising the material and then condensing it on a liquid metal film
07/21/2005CA2537205A1 Wear-resistant coating and a component having a wear-resistant coating
07/20/2005EP1555853A2 Mask, method for manufacturing thereof, method for manufacturing organic electroluminescent device, and organic electroluminescent device
07/20/2005EP1555334A1 Vaporization equipment for material sublimation
07/20/2005EP1555333A2 Thermal barrier coating system
07/20/2005EP1555065A1 Photocatalyst material and process for producing the same
07/20/2005EP1554913A1 Thin film phosphor for electroluminescent displays
07/20/2005EP1328982B1 Device enclosures and devices with integrated battery
07/20/2005EP1314795B1 Sputtering target producing few particles
07/20/2005EP1229571B1 Hot plate
07/20/2005CN1643683A Thin films, structures having thin films, and methods of forming thin films
07/20/2005CN1643183A Nanolayered coated cutting tool and method for making the same
07/20/2005CN1643178A Low contamination components for semiconductor processing apparatus and methods for making components
07/20/2005CN1642728A Thin-film laminated body, thin-film cell, capacitor, and method and equipment for manufacturing thin-film laminated body
07/20/2005CN1642682A Surface-coated cutting tool member having coating layer exhibiting superior wear resistance during high speed cutting operation and method for forming hard coating layer on surface of cutting tool
07/20/2005CN1642374A Method of manufacturing a mask
07/20/2005CN1642370A Method for making film of organic electroluminescence element and film-forming apparatus
07/20/2005CN1641099A Regression reflective fabric and its production method
07/20/2005CN1641068A Method for determining optimum rotation rate for multi-station-type coating apparatus
07/20/2005CN1641067A Method for preparing film sample for transmission electron microscope
07/20/2005CN1641066A Vaporization equipment for material sublimation
07/20/2005CN1641065A Optical lens coating apparatus and method
07/20/2005CN1641064A 包装材料 Packaging Materials
07/20/2005CN1641063A Method for preparing silicon dioxide film material doped by zinc oxide
07/20/2005CN1640840A Coloured transparent glassware internal-wall metal-plating handicraft article and its preparing method
07/20/2005CN1211828C Apparatus and method for charging ions on target
07/20/2005CN1211498C Linear film forming method and reflector formed by it
07/20/2005CN1211287C Method for preparing suspension liquid and powders based on indium tin oxide and the use thereof
07/20/2005CN1211188C Pellet injecting appts.
07/19/2005US6919682 Magnesium barium thioaluminate and related phosphor materials
07/19/2005US6919597 Bismuth titanium silicon oxide, bismuth titanium silicon oxide thin film, and method for forming the thin film
07/19/2005US6919569 For compact dental tool inserted into oral cavity; solid-state imaging element comprising photoelectric conversion elements/ electrode pads/scintillator (phospor)
07/19/2005US6919536 Vehicle window with ice removal structure thereon
07/19/2005US6919288 A hard film for cutting tools is composed of a nitride of aluminum, titanium, chromium and silicon (TiAlCrSi)N; wear resistance
07/19/2005US6919138 Magnetic recording media
07/19/2005US6919133 Thin film coating having transparent base layer
07/19/2005US6919102 Forming a material layer of metal nitrides or silicides over the wafer, transferring the wafer to a front opening unified pod, repeating until all wafers have been treated and purging a gas into the pod
07/19/2005US6919042 Oxidation and fatigue resistant metallic coating
07/19/2005US6919001 Disk coating system
07/14/2005WO2005064714A1 Negative electrode material for secondary battery, negative electrode for secondary battery and secondary battery using same
07/14/2005WO2005064038A1 Coating plant with a charging lock and device therefor
07/14/2005WO2005064037A2 High integrity sputtering target material and method for producing bulk quantities of same
07/14/2005WO2005064036A1 Copper or copper alloy target/copper alloy backing plate assembly
07/14/2005WO2005064035A1 Production of small thin plates made of at least one dielectric material
07/14/2005WO2005063646A1 Graded photocatalytic coatings
07/14/2005WO2005063628A1 Indium oxide-tin oxide powder and sputtering target using the same
07/14/2005WO2005045091A3 Vacuum coating system for coating elongate substrates
07/14/2005US20050153472 Thin film formation method, thin film formation equipment, method of manufacturing organic electroluminescence device, organic electroluminescence device, and electronic apparatus
07/14/2005US20050153162 Ag-base interconnecting film for flat panel display, Ag-base sputtering target and flat panel display
07/14/2005US20050153160 Metallic substrate with ceramic coating consisting of a formula of NdxZr1-xOy with yttria and hafnia added and dissolved in; protective coatings for turbine components, (e.g. blades and vanes) to prevent the components from overheating during high temperature operation
07/14/2005US20050153159 Glass coated with heat reflecting colored film and process for its production
07/14/2005US20050153158 Durable thermal barrier coating having low thermal conductivity
07/14/2005US20050151263 Wiring structure forming method and semiconductor device
07/14/2005US20050151155 Method of fabricating substrates and substrates obtained by this method
07/14/2005US20050150975 Vaporizing arrangement for sublimating materials
07/14/2005US20050150760 High throughput physical vapor deposition system for material combinatorial studies
07/14/2005US20050150758 Processes and device for the deposition of films on substrates
07/14/2005US20050150757 Controlling temperature of liner; minimization of stress
07/14/2005US20050150463 Holder for sample materials used in high throughput physical vapor deposition material studies
07/14/2005US20050150461 Apparatus of depositing thin film with high uniformity
07/14/2005US20050150457 Plasma-Assisted Sputter Deposition System
07/14/2005US20050150454 Deposition chamber and method for depositing low dielectric constant films
07/14/2005DE10324928A1 Vakuumbeschichtungsanlage Vacuum coating system
07/14/2005CA2550331A1 Graded photocatalytic coatings
07/13/2005EP1553579A1 Method of delivering substrate to film forming device for disk-like substrate, mechanism for delivering substrate used for the method, substrate holder, and method of manufacturing disk-like recording medium using the method
07/13/2005EP1553578A1 Method for delivery of substrate to film forming device for disk-like substrate, substrate delivery mechanism and substrate holder used for the method, and method of manufacturing disk-like recording medium using the method
07/13/2005EP1553210A1 PROCESS FOR PRODUCING ALUMINA COATING COMPOSED MAINLY OF a-TY PE CRYSTAL STRUCTURE, ALUMINA COATING COMPOSED MAINLY OF a-TY PE CRYSTAL STRUCTURE, LAMINATE COATING INCLUDING THE ALUMINA COATING, MEMBER CLAD WITH THE ALUMINA COATING OR LAMINATE COATING, PROCESS FOR PRODUCING THE MEMBER, AND PHYS
07/13/2005EP1553207A2 Two dimensional magnetron scanning for planar sputtering
07/13/2005EP1553206A1 Reactive sputtering method and device
07/13/2005EP1553205A1 Sputter target for forming thin film interconnector and thin film interconnector line
07/13/2005EP1553203A1 Method for producing hollow airfoils, also to produce a rotor with hollow airfoils
07/13/2005EP1552551A2 Transparent oxide semiconductor thin film transistors
07/13/2005EP1552544A1 Method for the production of a substrate with a magnetron sputter coating and unit for the same
07/13/2005EP1552033A2 Methods of treating non-sputtered regions of pvd target constructions to form particle traps, and pvd target constructions comprising projections along a non-sputtered region
07/13/2005EP1552032A1 Copper sputtering targets and methods of forming copper sputtering targets
07/13/2005CN2709459Y Non-fastening suspension film coating device mounting mechanism
07/13/2005CN1639785A Disk-like substrate sputtering device, substrate chucking method in the device, method of producing disk-like recording medium using the device
07/13/2005CN1639382A Disk-like member holding device
07/13/2005CN1639381A Method and apparatus for multi-target sputtering field of the invention
07/13/2005CN1638953A Gas barrier material
07/13/2005CN1638900A Coated cutting tool member having hard coating layer and method for forming the hard coating layer on cutting tool
07/13/2005CN1638032A Thin film formation method and apparatus. method of manufacturing organic electroluminescence device,
07/13/2005CN1638014A Ion beam monitoring arrangement
07/13/2005CN1637512A Method of forming transparent conductive film and transparent conductive film formed by the method
07/13/2005CN1637164A Rare earth based permanent magnet
07/13/2005CN1211001C Flexible circuit base board and its manufacturing method
07/13/2005CN1210750C Magnetic filter for ion source
07/13/2005CN1210583C Process for preparing composition used for vapor-phase deposition, composition for vapor-phase deposition, and process for preparing optical element with anti-reflect film
07/13/2005CN1210436C Tungsten super fine particle and method for producing same
07/13/2005CN1210435C Evaporating and coating apparatus for making organic electroluminescent display
07/13/2005CN1210434C Tool with protective layer system