Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
05/2005
05/19/2005WO2004108878A3 Biological laser printing via indirect photon-biomaterial interactions
05/19/2005WO2004106979A3 Ultra low residual reflection, low stress lens coating
05/19/2005WO2004042104A3 Thin films and methods for forming thin films utilizing ecae-targets
05/19/2005WO2004038059A3 Target designs and related methods for enhanced cooling and reduced deflection and deformation
05/19/2005WO2004017356A8 Process and apparatus for pulsed dc magnetron reactive sputtering of thin film coatings on large substrates using smaller sputter cathodes
05/19/2005WO2003057939A3 Cathode for vacuum arc evaporators
05/19/2005US20050106986 Continuous manufacture of flat panel light emitting devices
05/19/2005US20050106366 Biocompatibility protective coating; dielectrics; prevent current leakage
05/19/2005US20050106332 Oxidation and fatigue resistant metallic coating
05/19/2005US20050106322 Film formation apparatus and film formation method and cleaning method
05/19/2005US20050106319 Process and device for depositing thin layers on a substrate in a process chamber of adjustable height
05/19/2005US20050106315 Method for repairing components using environmental bond coatings and resultant repaired components
05/19/2005US20050106314 Bonding performance between the protective coating and the lubricating film is improved by adding a gas selected from carbon dioxide (CO2), nitrogen oxide (NO2), and/or nitrous oxide (N2O) when making the diamond-like carbon protective film by chemical vapor deposition or ion beam method; reliability
05/19/2005US20050104693 Self-healing liquid contact switch
05/19/2005US20050103623 Ionized physical vapor deposition apparatus using helical self-resonant coil
05/19/2005US20050103621 Silver selenide sputtered films and method and apparatus for controlling defect formation in silver selenide sputtered films
05/19/2005US20050103620 Plasma source with segmented magnetron cathode
05/19/2005US20050103619 Rotating sputtering magnetron
05/19/2005US20050103273 Vacuum evaporation crucible and phosphor sheet manufacturing apparatus using the same
05/19/2005DE10348639A1 Schleusensystem für eine Vakuumanlage Lock system for a vacuum system
05/19/2005DE10348281A1 Vakuum-Behandlungsanlage für ebene rechteckige bzw. quadratische Substrate Vacuum treatment installation for flat rectangular or square substrates
05/19/2005DE10217277B4 Verfahren zur metallischen Innenbeschichtung von Hohlkörpern, insbesondere von Strahlrohrelementen A process for internal coating of metallic hollow bodies, in particular jet pipe elements
05/18/2005EP1531490A1 Window type probe, plasma monitoring device, and plasma processing device
05/18/2005EP1531188A2 Mask , its uses and method for its manufacture
05/18/2005CN2700571Y Motorcycle engine with wearing parts hardened by plasma beam
05/18/2005CN2700342Y Vertical double chamber double-face plating magnetron sputtering winding film plating machine
05/18/2005CN2700341Y Multifunctional ion filming device equipped with screen electric arc
05/18/2005CN2700340Y Evaporation and ionization source with a plurality of annular arc speckles for flat target of arbitrary shape
05/18/2005CN2700339Y Tunnel type excessive vacuum coating machine
05/18/2005CN1618122A An oxide layer on a GAAS-based semiconductor structure and method of forming same
05/18/2005CN1617947A Vacuum module (variants thereof) and system of modules for applying coatings to a substrate
05/18/2005CN1617946A MgO vapor deposition material and production method therefor
05/18/2005CN1617945A Method of synthesizing a compound of the formula Mn*Axn, film of the compound and its use
05/18/2005CN1617301A Method for increasing CoSi2 film heat stability
05/18/2005CN1616707A Method for preparing nano multilayer film by pulse electric arc plasma evapouration of ionizing source
05/18/2005CN1616368A Protective layer for a body, and process and arrangement for producing protective layers
05/18/2005CN1202281C Aluminium nitride monocrystal film and method of preparing the same
05/18/2005CN1202280C Magnetism controlled wobbly sputter machine of sweep type
05/18/2005CN1202279C Heating device for electronic film material growth
05/18/2005CN1201887C Nano particle surface physicochemcial structure cutting and coating method
05/17/2005US6895342 Method and apparatus for non-destructive target cleanliness characterization by types of flaws sorted by size and location
05/17/2005US6893986 Method of reducing internal stress in materials
05/17/2005US6893962 Low via resistance system
05/17/2005US6893942 Method for separating a mask from the surface of a semiconductor wafer
05/17/2005US6893939 Thermal physical vapor deposition source with minimized internal condensation effects
05/17/2005US6893905 Method of forming substantially hillock-free aluminum-containing components
05/17/2005US6893802 Masking; peelable film; undercutting
05/17/2005US6893709 Metal mask structure and method for manufacturing thereof
05/17/2005US6893679 Process for preparing a composite material by vapor depositing a barrier layer on a substrate
05/17/2005US6893601 Surface hardened carbon material and process of manufacturing
05/17/2005US6893575 Mask and method of manufacturing the same, electro-luminescence device and method of manufacturing the same, and electronic instrument
05/17/2005US6893544 Apparatus and method for depositing thin films on a glass substrate
05/17/2005US6893543 Information carrier and method for producing the same
05/17/2005US6893542 Sputtered multilayer magnetic recording media with ultra-high coercivity
05/17/2005US6893541 Multi-step process for depositing copper seed layer in a via
05/17/2005US6893513 For producing components of sputtering targets, capacitor cans, resistive film layers, wire
05/17/2005US6893500 Method of constructing optical filters by atomic layer control for next generation dense wavelength division multiplexer
05/12/2005WO2005043965A2 Method for production of a transponder
05/12/2005WO2005043641A1 Increasing the lateral resolution of organic vapor jet deposition by using a confining guard flow
05/12/2005WO2005043623A2 Method for forming a dielectric on a metallic layer and capacitor assembly
05/12/2005WO2005043613A1 Substrate holder
05/12/2005WO2005043012A2 Ion-beam assisted deposition of inorganic coatings for elastomeric seal wear resistance improvement
05/12/2005WO2005042797A1 A stainless steel strip coated with a metallic layer
05/12/2005WO2005042796A1 Method of vacuum depositing emi layer and jig therefor
05/12/2005WO2005042669A1 Electroluminescent material and electroluminescent element using the same
05/12/2005WO2005042435A1 Anticorrosive, ceramic material for evaporating metals, especially aluminum, method for the production of such a material, and evaporator made of such a material
05/12/2005WO2005020277A3 Electron beam enhanced large area deposition system
05/12/2005WO2005007920A3 Sputtering target assembly having low conductivity backing plate and method of making same
05/12/2005WO2005002020A3 Apparatus for high-throughput ion beam assisted deposition (ibad)
05/12/2005US20050100764 Use of oxygen-containing gases in fabrication of granular perpendicular magnetic recording media
05/12/2005US20050100748 Ultra-hard low friction coating based on AlMgB14 for reduced wear of MEMS and other tribological components and system
05/12/2005US20050100701 Hard carbon coating on substrate; multilayer; lubrication
05/12/2005US20050100665 Method for applying an optical coating to a surface of an article
05/12/2005US20050098430 Vacuum plasma generator
05/12/2005US20050098428 Silver selenide film stoichiometry and morphology control in sputter deposition
05/12/2005US20050098427 deposition chamber having coils comprised of metals and having opposite terminals, used for sputtering thin films on substrates
05/12/2005US20050098426 forming a magnetic recording layer on substrates, then heating to oxidize the exposed surfaces and forming a protective overcoat layers; high recording density disk drives
05/12/2005US20050098134 Valve lifter for internal combustion engine
05/12/2005US20050098119 Method and device for vacuum-coating a substrate
05/12/2005US20050098118 Apparatus for deposition of diamond like carbon
05/12/2005US20050098110 Mask for vacuum deposition and organic EL display panel manufactured by using the same
05/12/2005DE3825399C5 PVD- oder Plasma- CVD-Beschichtung PVD or Plasma CVD
05/12/2005DE10130308B4 Kornorientiertes Elektroblech mit einer elektrisch isolierenden Beschichtung A grain-oriented electrical steel sheet with an electrically insulating coating
05/12/2005CA2543666A1 Plasma immersion ion implantation using conductive mesh
05/11/2005EP1529124A2 Method for obtaining a thin, stabilized fluorine-doped silica layer, resulting thin layer and use thereof in ophthalmic optics
05/11/2005EP1528956A1 Method and apparatus for manufacturing a catalyst
05/11/2005EP0946966B1 Device for cathodic sputtering
05/11/2005CN1615374A Target of high-purity nickel or nickel alloy and its producing method
05/11/2005CN1615184A Method to rough size coated components for easy assembly
05/11/2005CN1614104A Preparation for single-crystal thin film covering layer substrate with r-LiALO2
05/11/2005CN1614091A Preparation for amorphous carbon thin-film hydrophobic material with rear surface fluorating process
05/11/2005CN1614082A Film coating method for improving optical thin-film laser injure threshold
05/11/2005CN1614081A Composite thin film preparation and preparing apparatus
05/11/2005CN1614080A Vacuum ionic film coater with gas ionic source arrangement
05/11/2005CN1614079A Method for preparing CoSi2 thin film by alloy target material magnetic sputtering method
05/11/2005CN1614078A Planar magnetic sputtering-multi-station film coating apparatus
05/11/2005CN1614077A Method for improving thin-membrane uniformity of thickness based on rotating-speed modulation
05/11/2005CN1614076A Electrode template for DC sputtering and microfigure method
05/11/2005CN1614075A Method for machining pattern painting on metal surface
05/11/2005CN1614059A Metal resistor material, sputtering target material, resistor film and their manufactures