| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 08/31/2005 | CN1662298A Method for carrying out homogeneous and heterogeneous chemical reactions using plasma |
| 08/31/2005 | CN1661763A Ion implantation method and apparatus |
| 08/31/2005 | CN1661251A Rolling sliding member and rolling apparatus |
| 08/31/2005 | CN1661129A Filming device and clamps |
| 08/31/2005 | CN1660526A Process of mfg. Mo alloyed targeting materials |
| 08/31/2005 | CN1660510A Method for manufacturing metallic products and production |
| 08/31/2005 | CN1217344C Transparent conductive iaminate, its manufacturing method, and display comprising transparent conductive laminate |
| 08/31/2005 | CN1217028C Sputtering target material |
| 08/31/2005 | CN1217027C Central multiple arc source type ion plating method |
| 08/30/2005 | US6936906 atomic layer deposition barrier chamber for depositing a barrier layer comprising tantalum nitride; |
| 08/30/2005 | US6936528 Method of forming cobalt silicide film and method of manufacturing semiconductor device having cobalt silicide film |
| 08/30/2005 | US6936482 Method of fabricating substrates and substrates obtained by this method |
| 08/30/2005 | US6936481 Method of depositing dielectric |
| 08/30/2005 | US6936311 Using a source of laser energy, a receiving substrate, and a target substrate |
| 08/30/2005 | US6936304 Comprises luminophores/phosphors; vapor phase deposition |
| 08/30/2005 | US6936299 Determined in situ during coating process using a sensor which has an electrical property which, as a result of the coating process, changes in a manner which is representative of the layer thickness |
| 08/30/2005 | US6936145 Coating method and apparatus |
| 08/30/2005 | US6936141 Decreasing the surface tension of the elastomer and photolithographically processing |
| 08/30/2005 | US6935014 inhibits creation of polymer debris through etching process for intermediate layer and deterioration of photoresist frame at formation of intermediate layer; usable for fabricating a writing magnetic pole portion of a thin film magnetic head |
| 08/25/2005 | WO2005079117A1 Cylindrical microwave chamber |
| 08/25/2005 | WO2005078812A1 METHOD FOR CONTROLLING CONDUCTIVITY OF Ga2O3 SINGLE CRYSTAL |
| 08/25/2005 | WO2005078780A1 Vapor-phase deposition method |
| 08/25/2005 | WO2005078739A1 Aluminum alloy wiring material having high resistance to heat and target material |
| 08/25/2005 | WO2005078153A1 Sputtering target, optical information recording medium and process for producing the same |
| 08/25/2005 | WO2005078152A1 Sputtering target, optical information recording medium and process for producing the same |
| 08/25/2005 | WO2005077677A1 Physical vapor deposition components, and methods of treating components |
| 08/25/2005 | WO2005077525A1 Crystalline thin film and method for producing same |
| 08/25/2005 | WO2005047202A3 Method for application of a thermal barrier coating and resultant structure thereof |
| 08/25/2005 | WO2005013337A3 Rapid generation of nanoparticles from bulk solids at room temperature |
| 08/25/2005 | US20050186767 Semiconductor device, apparatus and method for manufacturing the same |
| 08/25/2005 | US20050186688 Chemical vapor deposition methods and physical vapor deposition methods |
| 08/25/2005 | US20050186485 Forming layer of metal and silicon-containing compound film on transparent substrate by co-sputtering; photoresists; semiconductors; integrated circuits |
| 08/25/2005 | US20050186469 Chemical protection of a lithium surface |
| 08/25/2005 | US20050186448 Hard film for cutting tools, cutting tool coated with hard film, process for forming hard film and target used to form hard film |
| 08/25/2005 | US20050186424 Carbon film-coated article and method of producing the same |
| 08/25/2005 | US20050186412 Forming thin films on substrates using a porous carrier |
| 08/25/2005 | US20050186346 Method for operating an in-line coating installation |
| 08/25/2005 | US20050186344 Placing a pair of closely spaced electrodes, at least one of which is formed from a composite carbon material, producing a spark between the two electrodes, to cause the carbon to sublime and deposit; carbonization of polymer mixed with carbon powder |
| 08/25/2005 | US20050186343 Method of making a stick resistant multi-layer ceramic coating |
| 08/25/2005 | US20050186340 Device and method for vaporizing temperature sensitive materials |
| 08/25/2005 | US20050185518 Decorative article, method of manufacturing same, and timepiece |
| 08/25/2005 | US20050184669 Methods and Apparatus for Generating Strongly-Ionized Plasmas with Ionizational Instabilities |
| 08/25/2005 | US20050184395 Electronic device, method of manufacture of the same, and sputtering target |
| 08/25/2005 | US20050184254 Ion implantation method and apparatus |
| 08/25/2005 | US20050183959 Automatic process control; using facility for automatically selecting and refining electrical parameters for processing a microelectronic workpiece |
| 08/25/2005 | US20050183946 Mode size converter for a planar waveguide |
| 08/25/2005 | US20050183945 creating a magnetic field so that the film-forming surface portion is placed in the magnetic field with the magnetic field induced normal to the substrate surface portion; back-biasing the back portion of the substrate; sputtering alloyed thin film |
| 08/25/2005 | US20050183944 Reducing stress in coatings produced by physical vapour deposition |
| 08/25/2005 | US20050183943 Energy and media connection for a coating installation comprising several chambers |
| 08/25/2005 | US20050183797 Melt alloys in a vacuum or under a low partial pressure of inert gas; thinned by deform between two flat dies; use molds having high melting point and high thermal conductivity can be used many time gives; fine and columnar grains; alloy sputtering targets have pass through flux of sixty five percent |
| 08/25/2005 | US20050183671 Fixing member for evaporation apparatus |
| 08/25/2005 | US20050183670 Patterned thin-film deposition using collimating heated masked assembly |
| 08/25/2005 | DE102004004844A1 Vorrichtung zum Beschichten eines Substrats mit einer Absorberanordnung Apparatus for coating a substrate with an absorber assembly |
| 08/25/2005 | CA2556824A1 Vapor phase growth method |
| 08/25/2005 | CA2555032A1 Cylindrical microwave chamber |
| 08/24/2005 | EP1566827A1 Magnetron sputtering apparatus |
| 08/24/2005 | EP1566463A1 Anti-abrasion coating for tools |
| 08/24/2005 | EP1565935A1 Method for producing a chalcogenide semi-conductive layer for controlling in situ an optical process and device for carrying out said method |
| 08/24/2005 | EP1565929A2 Method for the production of a substrate and unit for the same |
| 08/24/2005 | EP1565591A2 Method for vapor-depositing strip-shaped substrates with a transparent barrier layer made of aluminum oxide |
| 08/24/2005 | CN2720624Y Large-area double-side supercnoductive film base-piece clamp |
| 08/24/2005 | CN2719866Y large-size column hollow sputtering cathode |
| 08/24/2005 | CN1659936A Flexible printed circuit board and process for producing the same |
| 08/24/2005 | CN1659720A Hermetic encapsulation of organic electro-optical elements |
| 08/24/2005 | CN1659711A Semiconductor device and method for fabricating the same |
| 08/24/2005 | CN1659306A Fabrication of B/C/N/O/Si doped sputtering targets |
| 08/24/2005 | CN1659305A Tantalum sputtering target and method for preparation thereof |
| 08/24/2005 | CN1659304A Thin films and methods for forming thin films utilizing ECAE-targets |
| 08/24/2005 | CN1659303A Method for forming organic thin film |
| 08/24/2005 | CN1659302A High-tensile, plastically deformable moulded body consisting of titanium alloys |
| 08/24/2005 | CN1657647A Method for operating an in-line coating installation |
| 08/24/2005 | CN1657646A Sputter arrangement with a magnetron and a target |
| 08/24/2005 | CN1657645A Method for modifying surface of polymer microffow chip by sputtering TiO2 |
| 08/24/2005 | CN1657644A High-temp superconducting film two-sided evaporation wating technology and its device |
| 08/24/2005 | CN1216415C Method of depositing metal film and metal deposition cluster including supercritical drying/cleaning module |
| 08/24/2005 | CN1216404C Manufacturing method of semiconductor device |
| 08/24/2005 | CN1216180C Equipment for in-line exchange of substrate in vacuum chamber |
| 08/23/2005 | US6933460 Method and device for plasma treatment of moving metal substrates |
| 08/23/2005 | US6933065 Substrate overcoated with smooth oxide composite |
| 08/23/2005 | US6933060 Thermal barrier coating resistant to sintering |
| 08/23/2005 | US6933051 Flexible electrically conductive film |
| 08/23/2005 | US6933041 Method for producing high surface area foil electrodes |
| 08/23/2005 | US6933013 Vacuum deposition of dielectric coatings on volatile material |
| 08/23/2005 | US6933004 Control of stress in metal films by controlling the temperature during film deposition |
| 08/23/2005 | US6933001 Optical filter and method of manufacturing the same |
| 08/23/2005 | US6931701 Method for manufacturing a thin film |
| 08/18/2005 | WO2005075701A1 Thin film forming apparatus |
| 08/18/2005 | WO2005075371A1 Method for cleaning a substrate |
| 08/18/2005 | WO2005075212A1 Phase-change information recording medium and process for producing the same, sputtering target, method for using phase-change information recording medium and optical recorder |
| 08/18/2005 | WO2005075077A1 Method of producing a layer of material on a support |
| 08/18/2005 | WO2005074640A2 Physical vapor deposition target constructions |
| 08/18/2005 | WO2005074587A2 Treatment process for improving the mechanical , catalytic, chemical and biological activity of surfaces and articles treated therewith |
| 08/18/2005 | WO2005050750A3 Manufacture of flat panel light emitting devices |
| 08/18/2005 | WO2005044317A3 Method and device for supplying at least one machining station for a workpiece |
| 08/18/2005 | WO2005036601A3 Wafer characteristics via reflectomeytry and wafer processing apparatus and method |
| 08/18/2005 | WO2005031027A3 Container for evaporation of emtal and method for manufacture thereof |
| 08/18/2005 | WO2005026404A3 Thermography test method and apparatus for evaluating a bond interface of a sputtering target/backing plate assembly |
| 08/18/2005 | US20050181955 preventing oxidation of manganese during alloying by adding deoxidation stabilizers; low contents of impurity such as oxygen and carbon and a controlled crystal conformation; thin film having excellent antiferromagnetism; inhibite abnormal discharge or dust |
| 08/18/2005 | US20050181240 Magnetic disk, method of manufacturing the magnetic disk and method of evaluating the magnetic disk |
| 08/18/2005 | US20050181238 Dual-layer carbon-based protective overcoats for recording media by filtered cathodic ARC deposition |