Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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09/29/2005 | US20050211549 Method and system for target lifetime |
09/29/2005 | US20050211548 Selectable dual position magnetron |
09/29/2005 | US20050211547 Reactive sputter deposition plasma reactor and process using plural ion shower grids |
09/29/2005 | US20050211546 applying a radio frequency power source to generate plasma gases from deposition precursor species sputtered from semiconductor targets, creating a flux of ions and providing gases into chemcial reactors for combining with semiconductor atoms to form molecules that deposit on the workpiece surfaces |
09/29/2005 | US20050211545 Ionized physical vapor deposition (iPVD) process |
09/29/2005 | US20050211544 Electrical biasing of gas introduction means of plasma apparatus |
09/29/2005 | US20050211543 Generation of uniformly-distributed plasma |
09/29/2005 | US20050211273 Method for operating vacuum installations under pressure changes |
09/29/2005 | US20050211172 Elongated thermal physical vapor deposition source with plural apertures |
09/29/2005 | US20050211170 Chemical vapor deposition plasma reactor having plural ion shower grids |
09/29/2005 | US20050210684 Atomically sharp edged cutting blades and methods for making same |
09/29/2005 | DE102004011178A1 Verfahren zur Oberflächenbehandlung von Substraten A process for the surface treatment of substrates |
09/29/2005 | DE10056686B4 Verdampferzelle und ein Verfahren zur Herstellung von Aufdampfschichten The evaporator cell and a method for the preparation of vapor-deposition layers |
09/29/2005 | CA2558831A1 Coated piston pin |
09/28/2005 | EP1580789A2 Ion implantation method and apparatus |
09/28/2005 | EP1580446A1 Method of operating a vacuum system with varying pressure |
09/28/2005 | EP1580298A1 Process and apparatus for pulsed magnetron sputtering |
09/28/2005 | EP1580297A2 Sheet material, especially for security elements |
09/28/2005 | EP1580296A2 Reduced thermal conductivity TBC by EB-PVD process to incorporate porosity |
09/28/2005 | EP1580295A1 Apparatus for reactive sputtering |
09/28/2005 | EP1579908A1 The combinatorial synthesis of novel materials |
09/28/2005 | EP1579471A2 Vacuum sputtering cathode |
09/28/2005 | EP1579025A1 Coater having substrate cleaning device and coating deposition methods employing such coater |
09/28/2005 | EP1579024A1 Flexible frame for mounting a deposition mask |
09/28/2005 | EP1579019A2 High purity nickel/vanadium sputtering components; and methods of making sputtering components |
09/28/2005 | EP1360549B1 Liquid crystal device and manufacturing method |
09/28/2005 | CN2729091Y Vacuum reaction chamer of film coating machine |
09/28/2005 | CN2729090Y Vacuum film coating equipment of electric tube with coating film on inwall |
09/28/2005 | CN1675742A Transfer chamber for vacuum processing system |
09/28/2005 | CN1675732A Accessory member for dispensers of alkali metals |
09/28/2005 | CN1675400A Article coated with titanium compound film, process for producing the article and sputtering target for use in the film coating |
09/28/2005 | CN1675399A Sputtering target, sintered body, conductive film formed by using them, organic EL device, and substrate used for the organic el device |
09/28/2005 | CN1675059A Flexible electrically conductive film |
09/28/2005 | CN1675036A A cutting member having a superlattice coating |
09/28/2005 | CN1675015A Coated cutting tool member |
09/28/2005 | CN1674730A Mask, method of manufacturing the same, method of forming thin film pattern, method of manufacturing electro-optical device |
09/28/2005 | CN1674729A Method and apparatus for measuring thickness of deposited film and method and apparatus for forming material layer |
09/28/2005 | CN1674230A Silicon substrate nano-zinc oxide and producing method and application thereof |
09/28/2005 | CN1673409A Equipment for reacting sputtering |
09/28/2005 | CN1673408A Hard coating and its formation method, and hard-coated tool |
09/28/2005 | CN1673407A Technology for producing titanium nitride composite ceramic |
09/28/2005 | CN1673145A Vacuum treatment installation with a variable pump arrangement |
09/28/2005 | CN1672818A Method of operating a vacuum system with varying pressure |
09/28/2005 | CN1221012C 掩模 Mask |
09/27/2005 | US6949756 Shaped and low density focused ion beams |
09/27/2005 | US6949478 Oxide film forming method |
09/27/2005 | US6949301 Magnetic recording medium having a magnetic film on a non-magnetic substrate by intercalating an under layer, the proportion of functional groups/100 carbon atoms in a diamond like carbon protective coating composed of carbon exceeds 20% |
09/27/2005 | US6949173 Continuous coating system |
09/27/2005 | US6949170 Deposition methods and apparatus |
09/27/2005 | US6949143 Dual substrate loadlock process equipment |
09/27/2005 | US6948795 Ejection device, manufacturing device of color filter substrate, manufacturing device of electro-luminescent display device, manufacturing device of plasma display device, and ejection method |
09/27/2005 | CA2283222C Photocatalytically-activated self-cleaning article and method of making same |
09/22/2005 | WO2005089031A1 Plasma generator |
09/22/2005 | WO2005087978A1 Plasma coating system for non-planar substrates |
09/22/2005 | WO2005087973A1 Film-forming apparatus and firm-forming method thereof |
09/22/2005 | WO2005087972A1 Film forming apparatus |
09/22/2005 | WO2005087971A1 Method for gettering oxygen and water during vacuum deposition of sulfide films |
09/22/2005 | WO2005087970A1 Vacuum deposition apparatus |
09/22/2005 | WO2005087969A1 Alignment equipment and film forming equipment |
09/22/2005 | WO2005087968A1 Al COMPOSITE MATERIAL BEING CRUMBLED WITH WATER, Al FILM AND Al POWDER COMPRISING THE MATERIAL AND METHODS FOR PREPARATION THEREOF, CONSTITUTIONAL MEMBER FOR FILM-FORMING CHAMBER METHOD FOR RECOVERING FILM-FORMING MATERIAL |
09/22/2005 | WO2005087677A2 Coated article with zinc oxide over ir reflecting layer and corresponding method |
09/22/2005 | WO2005086645A2 Coated article with low-e coating including ir reflecting layer(s) and corresponding method |
09/22/2005 | WO2005003402A3 Hydrogen sulfide injection method for phosphor deposition |
09/22/2005 | US20050208767 Method of depositing a tantalum nitride / tantalum diffusion barrier layer system |
09/22/2005 | US20050208713 Liquid crystal display device and method for fabricating the same |
09/22/2005 | US20050208698 Monitoring the deposition properties of an oled |
09/22/2005 | US20050208337 Reduced thermal conductivity TBC by EB-PVD process to incorporate porosity |
09/22/2005 | US20050208325 Substrate having a surface of Ti and/or stainless steel, a first coating of titanium carbonitride, and an overcoating containing at least 90% Ti, Pt, Pd, or In; a superior aesthetic appearance can be maintained over a long period of time |
09/22/2005 | US20050208281 Method for production of a glazed piece provided with a multi-layer coating |
09/22/2005 | US20050208220 Directing a stream of metered fluidized powder onto a first member; heating the member to vaporize the powder; collecting the vapors in a manifold; and providing a second member an aperture(s) to direct the vapors onto the surface to form a film |
09/22/2005 | US20050208219 Composite oxide dielectric; sputtering using various pressure; overcoating semiconductor substrate |
09/22/2005 | US20050208218 Method for depositing boron-rich coatings |
09/22/2005 | US20050208216 Manifold; chamber for receiving organic material, an aperture plate for heating the organic material, emitting vaporized organics; coating an organic layer on a substrate of an OLED device; electrical insulator for concentrating heat in the unsupported region of the aperture plate |
09/22/2005 | US20050208211 Component comprising submicron hollow spaces |
09/22/2005 | US20050208205 For making organic light emitting full color display panel by angled evaporation; comprises ribs defining slots in which individual pixels are built, overcoating substrate; red, blue, green dopes; shadow masking |
09/22/2005 | US20050208204 Apparatus for consecutive deposition of high-temperature superconducting (HTS) buffer layers |
09/22/2005 | US20050207874 Device for coating hollow bodies, in particular plastic bottles, that has a high vaccum region and sluice |
09/22/2005 | US20050207831 Coated piston pin |
09/22/2005 | US20050207033 Optical lens holder |
09/22/2005 | US20050206271 Potassium niobate deposited body, method for manufacturing the same, piezoelectric thin film resonator, frequency filter, frequency oscillator, electronic circuit, and electronic apparatus |
09/22/2005 | US20050206018 gas driers, rotating coaters, vacuum treatment apparatus, heat treatment apparatus, charged particle flow irradiating apparatus, plasma treatment apparatus, electrostatic absorbers, interatomic force microscope, X-ray irradiating apparatus and cleaners |
09/22/2005 | US20050205998 Multilayer film-coated substrate and process for its production |
09/22/2005 | US20050205421 Sputtering apparatus |
09/22/2005 | US20050205417 Filling the sputtering chamber with argon, adjusting the radio frequency operating power, maintaining for 10 to 20 minutes, powering down and discharging the gas; complete removal of oxidative contaminants |
09/22/2005 | US20050205415 Multi-component deposition |
09/22/2005 | US20050205414 Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma |
09/22/2005 | US20050205413 Reactive sputtering method and device |
09/22/2005 | US20050205412 Deposition station with a cathode, two opposing targets defining the plasma field, permanent magnets or coils to generate a magnetic field, yokes to direct the magnetic field and two independent power supplies connected to each target; magnets can be repositioned without losing functionality |
09/22/2005 | US20050205411 An electromagnet magnetron positioned above and outside the reaction chamber reverses the magnetic dipoles in situ to improve uniformity and symmetry of deposited thim films on the walls of the opening; semiconductors |
09/22/2005 | US20050205209 Replacing chamber components in a vacuum environment |
09/22/2005 | US20050205205 Method and apparatus for separating disc-shaped substrates |
09/22/2005 | CA2554835A1 Coated article with zinc oxide over ir reflecting layer and corresponding method |
09/22/2005 | CA2554817A1 Method for gettering oxygen and water during vacuum deposition of sulfide films |
09/22/2005 | CA2554516A1 Coated article with low-e coating including ir reflecting layer(s) and corresponding method |
09/21/2005 | EP1577499A2 Turbine components with thermal barrier coatings |
09/21/2005 | EP1577419A1 System for coating hollow bodies such as plastic bottles with an high vacuum chamber and a lock |
09/21/2005 | EP1577418A1 Polygonal barrel spattering device, polygonal barrel spattering method, coated particle formed by the device and method, microcapsule, and method of manufacturing the microcapsule |
09/21/2005 | EP1577417A1 Multi-component deposition |
09/21/2005 | EP1577416A1 Decorative article and timepiece |
09/21/2005 | EP1576202A2 Methods for producing coated metal wire |