Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
09/2005
09/13/2005US6942764 reducing contamination due to deposited particulate matter on a single wafer sputter-etchers by coating the full interior of the sputtering shield with a layer of an arc-sprayed material such as aluminum, the layer has a high degree of roughness
09/13/2005US6942763 Textured-metastable aluminum alloy sputter targets and method of manufacture
09/13/2005US6941973 Industrial vapor conveyance and deposition
09/09/2005WO2005084087A2 Methods and apparatus for generating high-density plasmas with ionizational instabilities
09/09/2005WO2005083722A1 Transparent conductive film and transparent conductive base material utilizing the same
09/09/2005WO2005083155A1 Layer system
09/09/2005WO2005083150A1 Sputtering target, optical information recording medium and process for producing the same
09/09/2005WO2005083149A1 Particle deposited substrate
09/09/2005WO2005083148A1 Sputtering target with few surface defects and method for processing surface thereof
09/09/2005WO2005083147A1 Process for producing film of liquid crystal polymer
09/09/2005WO2005083146A2 Vaporizing temperature sensitive materials for oled
09/09/2005WO2005083145A2 Vapor deposition source with minimized condensation effects
09/09/2005WO2005083144A1 Carbonaceous thin film, process for producing the same and member utilizing the thin film
09/09/2005WO2005083143A2 Thin-film deposition methods and apparatuses
09/09/2005WO2005083138A1 Ni-Pt ALLOY AND TARGET COMPRISING THE ALLOY
09/09/2005WO2005083136A1 HIGH-PURITY Ru POWDER, SPUTTERING TARGET OBTAINED BY SINTERING THE SAME, THIN FILM OBTAINED BY SPUTTERING THE TARGET AND PROCESS FOR PRODUCING HIGH-PURITY Ru POWDER
09/09/2005WO2005019493A3 Target/backing plate constructions, and methods of forming them
09/09/2005WO2004105095A3 Thin-film deposition evaporator
09/09/2005CA2556782A1 Carbon-based thin film, process for producing the same and member using the thin film
09/08/2005US20050197248 Titanium oxide photocatalyst thin film and production method of titanium oxide photocatalyst thin film
09/08/2005US20050196960 Method of forming metal silicide film and method of manufacturing semiconductor device having metal silicide film
09/08/2005US20050196688 Performing model-based optical proximity correction (OPC) on the repair solution; allowing repair decision for an attenuated phase shifing mask to be made at the same time that inspection is done
09/08/2005US20050196642 Magnetic recording medium and method for manufacturing the same
09/08/2005US20050196636 Decorative article, method of manufacturing same, and timepiece
09/08/2005US20050196632 oxidizable metal silicide or metal aluminide is used as one of the outer layers of an optical coating to provide a corrosion and scratch resistant barrier. This layer is initially deposited in an unoxidized or partially oxidized state.
09/08/2005US20050196548 Corrosion resistance effect of the surface layer achieved without the structure of the applied layer having to be subsequently densified by mechanical means; plasma-based vapor deposition that forms a dense, fine-grained, largely pore-free structure; coatings of aluminum and its alloys
09/08/2005US20050196547 Manufacturing method of colored diamond by ion implantation and heat treatment
09/08/2005US20050196546 Can process a magnetic film including a recording portion and a non-recording portion in accordance with a recording pattern; has at least one of Fe and Co and at least one of Pd and Pt
09/08/2005US20050194910 Magnetically enhanced capacitive plasma source for ionized physical vapor deposition
09/08/2005US20050194094 Window type probe, plasma monitoring device, and plasma processing device
09/08/2005DE102004008492A1 Sealing system for metal strand carried between zones of differing pressure, passes the strand continuously through non-metallic fluid occupying given vertical height
09/08/2005DE102004008425A1 Gas distribution system for vacuum coating plant with lengthy magnetron, includes structural component with depressed planar surface
09/08/2005DE102004007813A1 Sputtervorrichtung mit einem Magnetron und einem Target A magnetron sputtering apparatus and a target
09/08/2005DE102004006419A1 Energie- und Medienanschluss für eine aus mehreren Kammern bestehende Beschichtungsanlage Energy and media port for a multiple chambers coating plant
09/07/2005EP1571234A2 Method for using an in line coating apparatus
09/07/2005EP1570103A1 Method for the vapour deposition of (a) compound(s) on a support
09/07/2005EP1570102A2 Method for coating piston rings for internal combustion engines
09/07/2005EP1570101A2 Method of synthesising and growing nanorods from a metal carbide on a substrate, substrates thus obtained and applications thereof
09/07/2005CN2723185Y Polyvinyl vacuum aluminium plated film
09/07/2005CN1666365A Vapor deposited catalysts and their use in fuel cells
09/07/2005CN1666318A Active matrix backplane for controlling controlled elements and method of manufacture thereof
09/07/2005CN1665678A Silver alloy thin film reflector and transparent electrical conductor
09/07/2005CN1664989A Method for preparing beta-FeSi2 semiconductor film by femtosecond pulsed laser
09/07/2005CN1664683A 电子电路 Electronic circuit
09/07/2005CN1664163A Sputtering apparatus capable of changing distance between substrate and deposition preventing plate used for film formation
09/07/2005CN1664162A Manufacturing method of colored diamond by ion implantation and heat treatment
09/07/2005CN1664161A Hall ion source actuated magnetron sputtering enhancing type multi-arc ion plating film method
09/07/2005CN1218372C Method of depositing vapor phase organic matter and apparatus of depositing vapor phase organic matter using same
09/07/2005CN1218331C Thin film rare earth permanent magnet, and method for mfg. same
09/07/2005CN1218071C Method and apparatus for processing metals, and the metals so produced
09/07/2005CN1217773C Plate display producing apparatus
09/06/2005US6940628 display element having juxtaposed electrochemical devices having a substrate, electroconductive layer, electrochemically active layer capable of reversibly inserting ions, and an electrolyte with overall constant oxidation
09/06/2005US6939660 Laser thermal transfer donor including a separate dopant layer
09/06/2005US6939482 magnesium, calcium, strontium, barium, zinc, rare earth elements, oxygen, sulfur; matrix material; high luminescence
09/06/2005US6939446 Soil-resistant coating for glass surfaces
09/06/2005US6939445 substrate and a coating including at least one layer of TiB2 having a fibrous microstructure by physical vapor deposition magnetron sputtering
09/06/2005US6938668 Manufacturing medical devices by vapor deposition
09/01/2005WO2005080627A1 Formation of photoconductive and photovoltaic films
09/01/2005WO2005080626A1 A method for coating a medical device using a matrix assisted pulsed-laser evaporation technique and associated system and medical device
09/01/2005WO2005080625A1 Laser-induced explosive vaporization coating method, associated system, and device made by the method
09/01/2005WO2005080254A1 Process for producing nanostructured manganese oxide having dendritic structure and oxygen reduction electrode containing nanostructured transition metal oxide having dendritic structure
09/01/2005WO2004042107A3 Coating for a plastic substrate
09/01/2005US20050191863 Semiconductor device contamination reduction in a fluorinated oxide deposition process
09/01/2005US20050191572 Aperture masks for circuit fabrication
09/01/2005US20050191522 Article coated with zirconium compound film, method for preparing the article and sputtering target for use in coating with the film
09/01/2005US20050191513 Thin film coating having transparent base layer
09/01/2005US20050191501 glass substrate support having multilayer coatings comprising a dielectric layer, a zinc oxide, an infrared reflecting layer comprising silver, a layer comprising an oxide of nickel and chromium, having improved heat and sheet resistance; insulating glass (IG) windows
09/01/2005US20050191422 Applying mask material to cooling holes so that holes are at partially filled with mask material in portion closest to external surface and up to the level of the external surface, thickening portion of mask material within cooling holes, coating, removing thickened mask material
09/01/2005US20050191421 Method for coating a component
09/01/2005US20050191409 Ion beam monitoring arrangement
09/01/2005US20050191202 producing a target material of a Mo alloy, which includes the steps of (a) preparing a green compact by compressing a raw material powder blend consisting of a Mo powder having an average particle size of not more than 20 mu m and a transition metal powder having an average particle size
09/01/2005US20050189401 Method of making sputtering target
09/01/2005US20050189218 Cathodic arc coating apparatus
09/01/2005US20050189217 Method and apparatus for forming a barrier layer on a substrate
09/01/2005US20050189012 Zinc oxide film, photovoltaic device making use of the same, and zinc oxide film formation process
09/01/2005US20050188942 Sliding structure for automotive engine
09/01/2005US20050188921 Matrix assisted pulsed-laser evaporation technique for coating a medical device and associated system and medical device
09/01/2005US20050188845 Hydrogen-permeable membrane and process for production thereof
09/01/2005DE102005004437A1 Dekorativer Artikel, Verfahren zur Herstellung eines dekorativen Artikels und Uhr Decorative articles, process for preparing a decorative article and clock
09/01/2005DE102004006849A1 Apparatus for coating turbine blades with ceramic has crucibles which can be rotated with respect to electron beam guns, bars of material to be vaporized being positioned with their upper ends in crucibles and exposed to beams
09/01/2005DE102004006530A1 Method for supplying gases to vacuum coating apparatus comprises gas inlet fitted with valve operated by control unit containing pulse width modulator transmitting commands to open and close valve with predetermined frequency
09/01/2005DE102004005663A1 Verfahren zum Herstellen einer Targetanordnung A method of producing a target assembly
09/01/2005DE102004005313A1 Verfahren zur Herstellung eines Ultrabarriere-Schichtsystems A process for producing an ultra barrier layer system
08/2005
08/31/2005EP1569215A1 Silver alloy for reflective film of optical recording medium
08/31/2005EP1568796A1 Manganese alloy sputtering target
08/31/2005EP1568751A1 Method of preparing storage phosphors from dedicated precursors
08/31/2005EP1568409A1 Hydrogen-permeable membrane and process for production thereof
08/31/2005EP1568069A2 Active matrix backplane for controlling controlled elements and method of manufacture thereof
08/31/2005EP1567688A2 Method and apparatus for processing substrates
08/31/2005EP1567687A1 Sensor for monitoring material deposition and method of monitoring material deposition
08/31/2005EP1381707B1 Method for producing a coating on a machining tool and a machining tool
08/31/2005EP1222318B1 Installation for coating a metal strip
08/31/2005EP1036863B1 Method for synthesizing n-type diamond having low resistance
08/31/2005CN1663029A Magnetron plasma processing apparatus
08/31/2005CN1662978A Method for delivery of substrate to film forming device for disk-like substrate, substrate delivery mechanism and substrate holder used for the method, and method of manufacturing disk-like recording
08/31/2005CN1662977A Method for delivery of substrate to film forming device for disk-like substrate, substrate delivery mechanism and substrate holder used for the method, and method of manufacturing disk-like recording
08/31/2005CN1662846A Display cell, in particular liquid crystal, or photovoltaic cell comprising means for connection to an electronic control circuit
08/31/2005CN1662673A Material evaporation chamber with differential vacuum pumping
08/31/2005CN1662672A Coating installation
08/31/2005CN1662637A Method for cleaning chamber of deposition apparatus for organic el device production