| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 07/07/2011 | WO2011079826A1 A tri wavelength diffraction modulator and a method for modulation |
| 07/07/2011 | DE102010064381A1 Drucksensor und Verfahren Pressure sensor and method |
| 07/07/2011 | DE102010052071A1 Gehäusesysteme von Mikrosystemtechnik-Mikrofonen Housing systems of Microsystems Engineering microphones |
| 07/07/2011 | DE102010000666A1 Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zu dessen Herstellung Component having a micromechanical microphone structure and process for its preparation |
| 07/06/2011 | EP2340172A1 Efficient inkjet nozzle assembly |
| 07/06/2011 | CN102119117A Micro-posts having improved uniformity and a method of manufacture thereof |
| 07/06/2011 | CN102117946A Radio frequency micro electro mechanical system switch with spring plate contact and manufacturing method thereof |
| 07/06/2011 | CN101349560B Horizontal attitude sensitive chip and manufacturing method thereof, horizontal attitude sensor |
| 07/06/2011 | CN101332971B Passing type microwave power detector based on microelectronic mechanical cantilever beam and manufacturing method |
| 07/06/2011 | CN101271164B Guiding type wind direction and wind velocity sensor |
| 07/05/2011 | CA2726409A1 Counter-balanced mems mirror with hidden hinge |
| 06/30/2011 | WO2011078015A1 Plate-like member swinging device |
| 06/30/2011 | WO2011077841A1 Optical scanner, image display device using optical scanner, and method for driving/controlling optical scanner |
| 06/30/2011 | WO2011076910A1 Microelectromechanical transducer and corresponding assembly process |
| 06/30/2011 | DE102010044157A1 Prüfkarte und Testvorrichtung Probe card and test device |
| 06/29/2011 | EP2339357A1 Method for fabricating a sensor |
| 06/29/2011 | CN102107846A Hermetic mems device and method for fabricating hermetic mems device and package structure of hermetic mems device |
| 06/29/2011 | CN102107845A Micron sensing element, and preparation method and application thereof |
| 06/29/2011 | CN101782594B Cantilever beam type accelerometer based on photonic crystal microcavity |
| 06/29/2011 | CN101726661B Device for detecting micro-electro mechanical microwave frequency response compensate-type microwave power |
| 06/29/2011 | CN101625242B MOEMS gyro cavity resonator and method for adjusting micro-mirror spatial state thereof |
| 06/29/2011 | CN101408595B Torsional pendulum type minitype magnetic sensor |
| 06/23/2011 | US20110150714 Modular System for Radiosynthesis with Multi-Run Capabilities and Reduced Risk of Radiation Exposure |
| 06/22/2011 | EP1855986B1 Methods and apparatus for spatial light modulation |
| 06/22/2011 | DE102008001005B4 Verfahren zur Herstellung eines Schichtverbundes mit epitaktisch gewachsenen Schichten aus einem magnetischen Formgedächtnis-Material und Schichtverbund mit epitaktischen Schichten aus einem magnetischen Formgedächtnis-Material sowie dessen Verwendung A method for producing a layered composite with epitaxially grown layers of a magnetic shape memory material and layer composite with epitaxial layers of a magnetic shape memory material and its use |
| 06/22/2011 | CN201876332U Surface friction shearing stress sensor |
| 06/22/2011 | CN102103058A Columnar electrode array structure capable of realizing stress release of sensitive biochemical films and preparation method thereof |
| 06/22/2011 | CN102101637A Micro inertial sensor with embedded transverse movable electrode |
| 06/22/2011 | CN102101636A Resonator and periodic structure |
| 06/22/2011 | CN102101635A Mass body applicable to micro-electromechanical sensor and three-axis micro-electromechanical sensor using same |
| 06/22/2011 | CN101308249B Oscillator device, optical deflector and driving signal generating method |
| 06/16/2011 | WO2011071685A2 Micro electromechanical systems (mems) having a gap stop and method therefor |
| 06/16/2011 | WO2011069740A1 Multi-module sensor |
| 06/16/2011 | DE102009047710A1 Multimodulsensor Multi sensor module |
| 06/15/2011 | EP2331453A2 Micromechanical component and method for the production thereof |
| 06/15/2011 | CN201864556U High-vacuum ceramic LCC (leadless chip carrier) packaging device |
| 06/15/2011 | CN102099281A Process for manufacturing a component, process for manufacturing a component arrangement, component and component arrangement |
| 06/15/2011 | CN102092670A Carbon nano-tube composite structure and preparation method thereof |
| 06/15/2011 | CN101534103B Manufacture method of radio frequency filter capable of single chip integration |
| 06/15/2011 | CN101481084B Micro-inertial sensor with variable pitch capacitor |
| 06/15/2011 | CN101329361B Minitype silicon accelerometer having functions of measuring pressure intensity and temperature variation and its machining method |
| 06/15/2011 | CN101177234B Electronic device and method for manufacturing thereof |
| 06/15/2011 | CN101168434B MEMS device |
| 06/09/2011 | DE19819456B4 Verfahren zur Herstellung eines mikromechanischen Bauelements A process for producing a micromechanical component |
| 06/09/2011 | DE102010062419A1 Bereichsunterteiltes Substrat und Halbleiterbauelement Range Divided substrate and semiconductor device |
| 06/09/2011 | DE102009047628A1 Micromechanical component i.e. capacitive microphone, has perforated membrane connected with sacrificial layer base by auxiliary layer, where auxiliary layer has same material characteristics as function layer |
| 06/09/2011 | DE102009047599A1 Elektromechanischer Mikroschalter zur Schaltung eines elektrischen Signals, mikroelektromechanisches System, integrierte Schaltung und Verfahren zur Herstellung einer integrierten Schaltung The micro electromechanical switch for switching an electrical signal, microelectromechanical system, integrated circuit and methods for making an integrated circuit |
| 06/08/2011 | CN1894156B Method to test the hermeticity of a sealed cavity of microelement and the microelement to implementing the method |
| 06/08/2011 | CN102089638A A mems stress concentrating structure for MEMS sensors |
| 06/08/2011 | CN102086017A Micro electronmechanical element and micro electronmechanical spring element |
| 06/08/2011 | CN101487747B Absolute pressure transducer chip based on surface micro-machining and its production method |
| 06/03/2011 | WO2010089261A3 Sensor module and method for producing sensor modules |
| 06/02/2011 | US20110129395 Microfluidic assembly |
| 06/02/2011 | US20110127222 Trapping magnetic cell sorting system |
| 06/02/2011 | CA2722635A1 Method and apparatus for switching electrical power |
| 06/01/2011 | DE10340619B4 Eichleitung Attenuator |
| 06/01/2011 | DE102010062149A1 MEMS-Mikrophonhäusung und MEMS-Mikrophonmodul MEMS and MEMS microphone module Mikrophonhäusung |
| 06/01/2011 | CN201852851U Framework type capacitance silicon micromechanical accelerometer |
| 06/01/2011 | CN102084480A Packaging device and base member for package |
| 06/01/2011 | CN102084467A Process for fabricating nanowire arrays |
| 06/01/2011 | CN102082105A Thermal wind sensor based on anodic bonding technology and preparation method thereof |
| 06/01/2011 | CN102081174A Condensing lens array device and manufacturing method thereof |
| 06/01/2011 | CN102079505A Ordered structure array of two-dimensional hollow balls and preparing method thereof |
| 06/01/2011 | CN102079502A MEMS (micro electro mechanical system) device and wafer-level vacuum packaging method thereof |
| 06/01/2011 | CN102079501A Optical detecting method, optical micro-electromechanical detector and manufacturing method thereof |
| 06/01/2011 | CN102079500A Micro electro mechanical system (MEMS) chip and preparing method thereof |
| 06/01/2011 | CN101561276B Suspension motor micro gyro operated by adopting electromagnetism and corona |
| 05/26/2011 | WO2011062557A1 Improved microfluidic device and method |
| 05/26/2011 | WO2011061771A1 Lid, fabricating method thereof, and mems package made thereby |
| 05/26/2011 | DE102009049445A1 Micro valve for use as switch in e.g. medical application areas, has actuator embedded in carrier material, where carrier material exhibits radiation permeability on one side and actuator adopts stable condition by radiation |
| 05/26/2011 | DE102009044645A1 Verfahren zur Herstellung wenigstens einer Kavität in einer mikroelektronischen und/oder mikromechanischen Struktur und Sensor oder Aktor mit einer solchen Kavität A process for producing at least one cavity in a microelectronic and / or micromechanical structure and with a sensor or actuator such cavity |
| 05/25/2011 | CN201842637U Large-sized micro-beam array used for optical readout thermal infrared radiation sensor |
| 05/25/2011 | CN102076601A Mems device with independent rotation in two axes of rotation |
| 05/25/2011 | CN102076600A Electromechanical actuators |
| 05/25/2011 | CN102072967A Gold-gold bonding process-based thermal type wind speed and direction sensor and preparation method thereof |
| 05/25/2011 | CN102072795A Piezoresistive high-frequency high-temperature dynamic pressure sensor |
| 05/25/2011 | CN102070118A Microheating plate for metal oxide semiconductor nano-film gas sensor |
| 05/25/2011 | CN101718587B Non-cooling type ultrared micrometering kampometer |
| 05/25/2011 | CN101581601B Detection method, micro-electromechanical component and micro-detection structure of micro-mechanical structure |
| 05/19/2011 | WO2011028595A3 Mems-based optical image scanning apparatus, methods, and systems |
| 05/19/2011 | WO2011028484A3 System with recessed sensing or processing elements |
| 05/19/2011 | DE102009046831A1 Strahlungserzeugungsvorrichtung zum Erzeugen einer elektromagnetischen Strahlung mit einer einstellbaren spektralen Zusammensetzung und Verfahren zur Herstellung derselben Radiation generating means for generating an electromagnetic radiation having an adjustable spectral composition and method of manufacturing the same |
| 05/19/2011 | DE102009046807A1 Verfahren zur der Empfindlichkeitsbestimmung eines Beschleunigungs- oder Magnetfeldsensors A method for determining the sensitivity of an acceleration or magnetic field sensor |
| 05/18/2011 | EP2322469A1 Getter with two activation temperatures and structure comprising said getter |
| 05/18/2011 | EP2321216A2 Method and device for encapsulating microstructures |
| 05/18/2011 | EP1346601B1 Miniature silicon condenser microphone and method for producing same |
| 05/18/2011 | CN201839566U 支撑载体和支撑系统 Support carrier and a support system |
| 05/18/2011 | CN102065362A MEMS microphone package and packaging method |
| 05/18/2011 | CN102064021A Comb tooth capacitor of micromachine |
| 05/18/2011 | CN102062662A Monolithic integrated SiC MEMS (Micro-Electro-Mechanical Systems) pressure sensor and production method thereof |
| 05/18/2011 | CN102062604A Capacitive micromachined tuning fork gyroscope |
| 05/18/2011 | CN102060259A Micro-optic-electromechanical sensor based on integration of silicon-based MEMS (Micro-electromechanical System) sensitive structure and optical detection technology and application method thereof |
| 05/18/2011 | CN102060258A Microelectronic mechanical device |
| 05/18/2011 | CN101261964B Functional device package |
| 05/18/2011 | CN101077766B Electromechanical element and electronic circuit device, and method for manufacturing the same |
| 05/17/2011 | US7942643 Device and method for pumping fluids employing the movement of gas bubbles in microscale |
| 05/12/2011 | WO2011028359A3 Mems device with stress isolation and method of fabrication |
| 05/12/2011 | WO2010140792A3 Method for manufacturing 3-dimensional structures using thin film with columnar nano pores and manufacture thereof |
| 05/12/2011 | DE102009052234A1 Auf Waferebene herstellbarer Chip für Flüssigchromatographie sowie Verfahren für seine Herstellung Producible at the wafer level chip for liquid chromatography, and methods for its preparation |
| 05/12/2011 | DE102009046506A1 Drehratensensor Rotation rate sensor |